JPH0658314B2 - Particle size distribution measuring device using laser light diffraction - Google Patents
Particle size distribution measuring device using laser light diffractionInfo
- Publication number
- JPH0658314B2 JPH0658314B2 JP60242064A JP24206485A JPH0658314B2 JP H0658314 B2 JPH0658314 B2 JP H0658314B2 JP 60242064 A JP60242064 A JP 60242064A JP 24206485 A JP24206485 A JP 24206485A JP H0658314 B2 JPH0658314 B2 JP H0658314B2
- Authority
- JP
- Japan
- Prior art keywords
- detector
- light
- lens
- size distribution
- particle size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 title claims description 32
- 238000012360 testing method Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 13
- 239000000725 suspension Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
- 238000010790 dilution Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 238000007865 diluting Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
- G01N15/0211—Investigating a scatter or diffraction pattern
Description
【発明の詳細な説明】 ＜産業上の利用分野＞ 本発明は、フラウンホーファ回折を利用した粒度分布測
定装置に関する。The present invention relates to a particle size distribution measuring apparatus using Fraunhofer diffraction.
＜従来の技術＞ コヒーレントな光がスリット，円形開口，あるいはディ
スク等を通過したときに生ずる回折現象、すなわちフラ
ウンホーファ回折を利用して、粒子群の粒度分布を測定
する方法は既に知られている。実際には、飛しょう状態
の粒子群にレーザ光を照射し、各粒子の大きさに応じて
回折される光をレンズで受け、そのレンズの焦点面上に
回折像を結ばせる。そしてこの回折像の光強度分布の実
測値から、粒子群の粒度分布を算出する。<Prior Art> A method for measuring the particle size distribution of a particle group using a diffraction phenomenon that occurs when coherent light passes through a slit, a circular aperture, a disk, or the like, that is, Fraunhofer diffraction is already known. In practice, a particle group in a flying state is irradiated with laser light, light diffracted according to the size of each particle is received by a lens, and a diffraction image is formed on the focal plane of the lens. Then, the particle size distribution of the particle group is calculated from the measured value of the light intensity distribution of this diffraction image.
従来、上述の光強度分布を測定する方法の一つとして、
第３図に示す如く、ホトダイオード等の受光素子を複数
個リング状に組み合わせたリングデテクタを用いる方法
がある。この方法による利点は、回折光には若干のゆ
らぎが存在し、測定に際しては強度信号を平均化する必
要があるが、この平均化が、それぞれの素子について時
間的に平行して行えるので、測定時間が短縮できる。
可動部がない。回折角度の大きい部分は光強度が弱く
なるが、リングデテクタの場合、回折角度が大きくなる
程受光受面積が大きくなるので、測定精度が向上する、
等がある。Conventionally, as one of the methods for measuring the above-mentioned light intensity distribution,
As shown in FIG. 3, there is a method of using a ring detector in which a plurality of light receiving elements such as photodiodes are combined in a ring shape. The advantage of this method is that there are some fluctuations in the diffracted light and it is necessary to average the intensity signals during measurement, but this averaging can be performed in parallel in time for each element. Time can be shortened.
There are no moving parts. Although the light intensity becomes weaker in the portion where the diffraction angle is large, in the case of a ring detector, the larger the diffraction angle, the larger the light receiving and receiving area, and therefore the measurement accuracy improves.
Etc.
＜発明が解決しようとする問題点＞ リングデテクタを用いる方法の欠点としては、透過光
はデテクタの中心に集光するが、この光強度は極めて大
きく、デテクタ面上で熱エネルギとなって中心部の受光
素子に熱影響を与える結果、素子の温度特性による測定
誤差が生ずる虞れがある。デテクタの最中心部の受光
部は、その半径が１mm以下であり、デテクタが集光用の
レンズの光軸と少しでもずれると大きな誤差を生じる
為、その位置合わせが重要となるが、その作業が困難で
ある、等があった。<Problems to be Solved by the Invention> As a drawback of the method using the ring detector, the transmitted light is condensed at the center of the detector, but the intensity of this light is extremely large and becomes heat energy on the surface of the detector to form a central portion. As a result of the thermal effect on the light receiving element, the measurement error may occur due to the temperature characteristic of the element. The light receiving part at the center of the detector has a radius of 1 mm or less, and if the detector slightly deviates from the optical axis of the lens for condensing, a large error will occur, so alignment is important. Was difficult, and so on.
＜問題点を解決するための手段＞ 本発明は上述の欠点を解消すべくなされたもので、その
構成を実施例図面である第１図，第２図を参照しつつ説
明すると、本発明は、分散飛しょう状態の供試粒子群Ｗ
にレーザ光を照射し、粒子の大きさに応じて回折される
レーザ光を、供試粒子群Ｗの後方に置かれたレンズ１に
より、そのレンズ１の焦点面に配設された複数個の受光
素子からなるデテクタ（例えばリングデテクタ）２上に
集光し、そのデテクタの半径方向の受光強度分布から供
試粒子群Ｗの粒度分布を求める装置において、上記デテ
クタ２の中心部に貫通小孔２ａが穿設する。また、その
貫通小孔２ａの後方所定距離の位置には、この小孔２ａ
を通過したレーザ光を受光する為の受光手段（透過光強
度測定用デテクタ）３を設けた構成とする。<Means for Solving Problems> The present invention has been made to solve the above-mentioned drawbacks, and the configuration thereof will be described with reference to FIGS. 1 and 2 which are embodiment drawings. , Test particle group W in dispersed flight state
The lens 1 placed on the rear side of the sample particle group W causes a plurality of laser beams, which are diffracted according to the size of the particles, to be radiated onto the focal plane of the lens 1. In a device that collects light on a detector (for example, a ring detector) 2 formed of a light receiving element and obtains the particle size distribution of the sample particle group W from the received light intensity distribution in the radial direction of the detector, a small through hole is formed in the center of the detector 2. 2a is drilled. Further, at the position of a predetermined distance behind the through small hole 2a, the small hole 2a is formed.
The light receiving means (detector for measuring the transmitted light intensity) 3 for receiving the laser light passing through is provided.
＜作用＞ レンズ１の焦点面に配設されたデテクタ２の表面中心部
に集光すべき透過レーザ光は、貫通小孔２ａを通過し
て、その後方所定距離の位置の受光手段３に入射される
ことになる。貫通小孔２ａを通過したレーザ光を全てこ
の受光手段３で受光しても、この受光手段３の受光面上
においては再び拡散されているので、単位面積当りのエ
ネルギが弱くなっており、熱的影響を受けにくく、測定
誤差が生じない。また、レンズ１とデテクタ２の位置合
わせについて、受光手段３の受光量が最大となるようレ
ンズ１の位置を調節することにより、レンズ１の光軸と
デテクタ２の中心が合致し、かつ、レンズ１の焦点面と
デテクタ２の受光面が一致したことになって、その調節
作業が容易となる。<Operation> The transmitted laser light to be focused on the center of the surface of the detector 2 arranged on the focal plane of the lens 1 passes through the small through hole 2a and is incident on the light receiving means 3 at a predetermined distance behind it. Will be done. Even if all the laser light that has passed through the small through hole 2a is received by this light receiving means 3, it is diffused again on the light receiving surface of this light receiving means 3, so the energy per unit area is weakened and the heat It is less susceptible to physical influences and does not cause measurement errors. Further, regarding the alignment of the lens 1 and the detector 2, by adjusting the position of the lens 1 so that the amount of light received by the light receiving means 3 is maximized, the optical axis of the lens 1 and the center of the detector 2 coincide with each other, and the lens Since the focal plane of No. 1 and the light receiving plane of the detector 2 coincide with each other, the adjustment work becomes easy.
＜実施例＞ 本発明の実施例を、以下、図面に基づいて説明する。<Examples> Examples of the present invention will be described below with reference to the drawings.
第１図は本発明実施例の構成図で、第２図はそのリング
デテクタ２の中心部近傍の拡大図である。FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is an enlarged view of the vicinity of the center of the ring detector 2.
レーザ光源４からのレーザ光はコリメータレンズ５ａ，
５ｂによって拡大され、フローセル６に照射される。フ
ローセル６内には、後述するように、供試粒子群Ｗが希
釈液の中に分散してなる懸濁液が循環しており、照射さ
れたレーザ光はこの分散粒子によって、各粒子径に応じ
た角度で回折する。その回折光は次段の集光用のレンズ
１によって、レンズ１の焦点面に置かれたリングデテク
タ２上に回折像を結ぶ。このレンズ１には、リングデテ
クタ２との位置関係を調節する為の位置調節機構１７が
付設されている。The laser light from the laser light source 4 is collimator lens 5a,
It is enlarged by 5b and is irradiated on the flow cell 6. As will be described later, in the flow cell 6, a suspension in which the sample particle group W is dispersed in the diluting liquid is circulated, and the irradiated laser light is dispersed by the dispersed particles into various particle sizes. Diffract at an angle. The diffracted light is focused by the condensing lens 1 at the next stage to form a diffracted image on the ring detector 2 placed on the focal plane of the lens 1. The lens 1 is provided with a position adjusting mechanism 17 for adjusting the positional relationship with the ring detector 2.
リングデテクタ２は、ホトダイオードを複数個リング状
に組み合わせて構成されており、そのリングの中心にあ
たる位置には、所定径，例えば１mm以下の貫通小孔２ａ
が穿たれている。そして、その貫通小孔２ａの後方、距
離ｌの位置には、同様にホトダイオードから構成され、
貫通小孔２ａを通過したレーザ光を受光するための、透
過光強度測定用デテクタ３が配設されている。The ring detector 2 is configured by combining a plurality of photodiodes in a ring shape, and at a position corresponding to the center of the ring, a small through hole 2a having a predetermined diameter, for example, 1 mm or less.
Is being worn. Then, behind the penetrating small hole 2a, at a position of a distance l, a photodiode is similarly formed,
A transmitted light intensity measuring detector 3 is provided for receiving the laser beam that has passed through the small through hole 2a.
リングデテクタ２上に集光されたレーザ光の半径方向へ
の強度分布は、フローセル６内の分散粒子の各粒子の大
きさに基づく回折角度の分布に対応している。すなわ
ち、回折角度の小さい光は内側の素子に、回折角度の大
きい光は外側の素子に集光される。また、回折を受けな
い光、すなわち透過光は、リングデテクタ２の中心の貫
通小孔２ａを通過して、透過光強度測定用デテクタ３に
入射される。The intensity distribution in the radial direction of the laser light focused on the ring detector 2 corresponds to the distribution of diffraction angles based on the size of each dispersed particle in the flow cell 6. That is, light having a small diffraction angle is focused on the inner element and light having a large diffraction angle is focused on the outer element. The light that is not diffracted, that is, the transmitted light passes through the small through hole 2a at the center of the ring detector 2 and is incident on the transmitted light intensity measuring detector 3.
リングデテクタ２の各半径位置にある素子への光量は、
各素子によって電気信号に変換され、マルチプレクサ
７，アンプ８およびＡ−Ｄ変換器９によって量子化され
た後、ＣＰＵ１０を介してＲＡＭ１１内に格納される。
また、透過光強度測定用デテクタ３への光量、すなわ
ち、透過光量も、同様にアンプ８およびＡ−Ｄ変換器９
で量子化された後、ＲＡＭ１１内に格納される。The amount of light to the elements at each radial position of the ring detector 2 is
It is converted into an electric signal by each element, quantized by the multiplexer 7, the amplifier 8 and the AD converter 9, and then stored in the RAM 11 via the CPU 10.
Similarly, the amount of light to the transmitted light intensity measuring detector 3, that is, the amount of transmitted light, is similarly determined by the amplifier 8 and the AD converter 9.
After being quantized by, it is stored in the RAM 11.
ＣＰＵ１０は、ＲＯＭ１２に書き込まれたプログラムに
基づいて、公知の算法により、ＲＡＭ１１内に格納され
ているリングデテクタ２の受光強度分布、および透過光
強度測定用デテクタ３への入射光強度、すなわち透過光
強度のデータから、供試粒子群Ｗの粒度分布を算出する
ことができる。Based on the program written in the ROM 12, the CPU 10 uses a known method to calculate the received light intensity distribution of the ring detector 2 stored in the RAM 11 and the incident light intensity to the transmitted light intensity measuring detector 3, that is, the transmitted light. From the strength data, the particle size distribution of the sample particle group W can be calculated.
ＣＰＵ１０には、指令を与えるためのキーボード１３，
粒度分布算出結果等を表示するためのＣＲＴ１４，およ
び入出力ポート１５が接続されており、この入出力ポー
ト１５には、フローセル６内に懸濁液を循環させ、ある
いは、ＣＰＵ１０からの指令によって、希釈液を追加注
入する為の希釈・循環装置１６が接続されている。そし
て、ＲＯＭ１２には、前述した粒度分布算出プログラム
のほかに、透過光強度測定用デテクタ３の出力の監視に
よる濃度制御用プログラムが書き込まれている。このプ
ログラムは測定に先立って実行され、フローセル６内の
懸濁液濃度が自動的に規定濃度になるよう、希釈・循環
装置１６が制御される。A keyboard 13 for giving commands to the CPU 10,
A CRT 14 for displaying a particle size distribution calculation result and an input / output port 15 are connected to the input / output port 15. The suspension is circulated in the flow cell 6 or a command from the CPU 10 is used. A dilution / circulation device 16 for additionally injecting the diluent is connected. Then, in the ROM 12, in addition to the above-mentioned particle size distribution calculation program, a density control program by monitoring the output of the transmitted light intensity measuring detector 3 is written. This program is executed prior to the measurement, and the dilution / circulation device 16 is controlled so that the suspension concentration in the flow cell 6 automatically becomes the specified concentration.
すなわち、透過光強度測定用デテクタ３の出力は前述し
た通り、懸濁液を透過した光量を示すもので、この出力
から透過度を求めることができる。透過度は吸光度に容
易に変換することができ、吸光度は懸濁液の面積濃度に
比例する。従って、透過光強度測定用デテクタ３の出力
を監視して、その値がＲＯＭ１２にあらかじめ記憶され
ている所定の値になるまで希釈液を追加してゆくことに
より、懸濁液濃度を規定濃度とすることができる。That is, the output of the transmitted light intensity measuring detector 3 indicates the amount of light transmitted through the suspension as described above, and the transmittance can be obtained from this output. Transmittance can be easily converted to absorbance, which is proportional to the areal concentration of the suspension. Therefore, by monitoring the output of the transmitted light intensity measuring detector 3 and adding a diluting solution until the value reaches a predetermined value stored in advance in the ROM 12, the suspension concentration becomes the specified concentration. can do.
以上の本発明実施例を使用するとき、まず、レンズ１と
リングデテクタ２の位置合わせを行う。この位置合わせ
は、レンズ１の焦点面に正しくリングデテクタ２の受光
面が位置し、かつ、レンズ１の光軸が正しくリングデテ
クタ２の中心と一致するよう調整するもので、通常、レ
ンズ１は複数枚の焦点距離の異なるレンズが用意されて
おり、測定範囲に応じて交換自在となっている。このレ
ンズ１の交換時においては、その光軸とリングデテクタ
２のセンタがずれる可能性があって、センタがずれると
大きな測定誤差が発生するから、この位置合わせは重要
である。本発明実施例によると、透過光強度測定用デテ
クタ３に入射する光量が最大となるように位置調節機構
１７を操作すれば、透過光が全て貫通小孔２ａを通過し
て透過孔強度測定用デテクタ３に入射される状態になっ
たということであって、上述した条件を満たす位置にレ
ンズ１が位置決めされたことになり、その作業は容易で
ある。When using the embodiment of the present invention described above, first, the lens 1 and the ring detector 2 are aligned. This alignment is performed such that the light receiving surface of the ring detector 2 is correctly positioned on the focal plane of the lens 1 and the optical axis of the lens 1 is correctly aligned with the center of the ring detector 2. Several lenses with different focal lengths are available, and they can be replaced according to the measurement range. When the lens 1 is replaced, the optical axis and the center of the ring detector 2 may be deviated from each other, and if the center is deviated, a large measurement error will occur. Therefore, this alignment is important. According to the embodiment of the present invention, if the position adjusting mechanism 17 is operated so that the amount of light incident on the detector 3 for measuring the intensity of transmitted light is maximized, all the transmitted light passes through the small through hole 2a to measure the intensity of the transmitted hole. This means that the lens 3 is incident on the detector 3, which means that the lens 1 is positioned at a position that satisfies the above-mentioned condition, and the work is easy.
次に、濃度制御用プログラムが実行される。このプログ
ラムの実行により、前述したように、フローセル３内の
懸濁液濃度が規定濃度に制御される。懸濁液濃度は、低
い場合は回折孔強度が全体的に弱くなって測定が不正確
となる。また高い場合は回折光が再び回折されるという
二重回折現象が発生し、この場合も測定が不正確とな
り、従ってこの濃度は適宜値に設定する必要がある。本
発明実施例によると、透過光強度測定用デテクタ３の出
力により、自動的に懸濁液濃度が適宜値に制御される。Next, the density control program is executed. By executing this program, as described above, the suspension concentration in the flow cell 3 is controlled to the specified concentration. When the suspension concentration is low, the diffraction hole strength is weak overall and the measurement becomes inaccurate. If it is too high, a double diffraction phenomenon occurs in which the diffracted light is diffracted again, and the measurement becomes inaccurate in this case as well. According to the embodiment of the present invention, the suspension concentration is automatically controlled to an appropriate value by the output of the transmitted light intensity measuring detector 3.
その後、実際の測定動作が実行されるが、このとき、粒
子により回折されずにレンズ１の光軸に平行に入射され
る光、すなわち透過光は、全てリングデテクタ２の受光
面中心部に集光され、極めて大きなエネルギを持ってい
るが、透過光強度測定用デテクタ３はレンズ１の焦点面
から距離ｌだけ後方に配設されているので、透過光は拡
散され、このデテクタ３の受光面上では単位面積当りの
エネルギは弱くなる。After that, the actual measurement operation is performed, but at this time, all the light that is not diffracted by the particles and is incident parallel to the optical axis of the lens 1, that is, the transmitted light, is collected at the center of the light receiving surface of the ring detector 2. The detector 3 for measuring the intensity of the transmitted light is disposed behind the focal plane of the lens 1 by a distance 1 although it receives light and has an extremely large energy. Therefore, the transmitted light is diffused and the light receiving surface of the detector 3 is diffused. Above, the energy per unit area becomes weak.
なお、以上の実施例では、液体中に供試粒子群を分散さ
せた場合の測定例を示したが、ガス中に供試粒子群を分
散させてもよいことは勿論である。また、リングデテク
タ２としては、第３図に示したようなリング一周に全て
素子を配列したものに限られることなく、半円形，扇形
に配列したもの、あるいは、直線的に素子を配列した、
ホトダイオードアレイを用いたものであっても、本発明
を適用することができる。In addition, in the above examples, the measurement example in which the sample particle group is dispersed in the liquid has been shown, but it goes without saying that the sample particle group may be dispersed in the gas. Further, the ring detector 2 is not limited to one in which all the elements are arranged around the circumference of the ring as shown in FIG. 3, but may be arranged in a semicircular shape, a fan shape, or the elements are arranged linearly.
The present invention can be applied even to the one using a photodiode array.
＜効果＞ 以上説明したように、本発明によれば、フランホーファ
回折を利用した粒度分布測定装置において、回折光集光
用のレンズ１の焦点面に置かれるリングデテクタ２の中
心部に貫通小孔２ａを穿ち、透過光をその貫通小孔２ａ
を通過させて、焦点面から所定距離後方の透過光強度測
定用デテクタ３によってその強度を測定するよう構成し
たから、従来のような透過光の集光による受光素子の熱
的影響に起因する測定誤差が生じない。また、透過光が
全て貫通小孔２ａを通過して透過光強度測定用デテクタ
３に入射されるようレンズ１とリングデテクタ２の位置
関係を調節することにより、すなわち、透過光強度測定
用デテクタ３への入射光が最大となるよう上述の位置関
係を調節するだけで、レンズ１とリングデテクタ２の位
置が正しく位置決めされたことになり、その調節作業が
容易となる。<Effect> As described above, according to the present invention, in the particle size distribution measuring apparatus using the Franhofer diffraction, the through small hole is formed in the central portion of the ring detector 2 placed on the focal plane of the lens 1 for collecting diffracted light. 2a is penetrated and the transmitted light passes through the small hole 2a.
Since the intensity of the transmitted light is measured by the detector 3 for measuring the intensity of transmitted light that is behind the focal plane by a predetermined distance, the measurement caused by the thermal influence of the light receiving element due to the collection of the transmitted light as in the conventional case. There is no error. Further, the positional relationship between the lens 1 and the ring detector 2 is adjusted so that all the transmitted light passes through the small through hole 2a and is incident on the transmitted light intensity measuring detector 3, that is, the transmitted light intensity measuring detector 3 The positions of the lens 1 and the ring detector 2 are correctly positioned only by adjusting the above-mentioned positional relationship so that the incident light on the lens is maximized, and the adjustment work is facilitated.
更に、透過光強度測定用デテクタ３の出力を監視するこ
とにより、供試粒子分散系の濃度を自動的に制御するこ
とも可能となる。Furthermore, by monitoring the output of the transmitted light intensity measuring detector 3, the concentration of the sample particle dispersion system can be automatically controlled.
第１図は本発明実施例の構成図、第２図はそのリングデ
テクタ２の中心部近傍の拡大図、第３図はリングデテク
タの構成例を示す説明図である。 １……レンズ、２……リングデテクタ ２ａ……貫通小孔 ３……透過光強度測定用デテクタ ４……レーザ光源 ５ａ，５ｂ……コリメータレンズ ６……フローセル、９……Ａ−Ｄ変換器 １０……ＣＰＵ、１１……ＲＡＭ １２……ＲＯＭ、１６……希釈・循環装置FIG. 1 is a configuration diagram of an embodiment of the present invention, FIG. 2 is an enlarged view of the vicinity of the central portion of the ring detector 2, and FIG. 3 is an explanatory diagram showing a configuration example of the ring detector. 1 ... Lens, 2 ... Ring detector 2a ... Through hole 3 ... Transmitted light intensity measurement detector 4 ... Laser light source 5a, 5b ... Collimator lens 6 ... Flow cell, 9 ... AD converter 10 ... CPU, 11 ... RAM 12 ... ROM, 16 ... Dilution / circulation device
Claims (1)
を照射し、粒子の大きさに応じて回折されるレーザ光
を、供試粒子群の後方に置かれたレンズにより、そのレ
ンズの焦点面に配設された複数個の受光素子からなるデ
テクタ上に集光し、そのデテクタの半径方向の受光強度
分布から供試粒子群の粒度分布を求める装置において、
上記デテクタの中心部に貫通小孔が穿設され、その貫通
小孔の後方所定距離の位置には、当該小孔を通過したレ
ーザ光を受光する為の受光手段が設けられていることを
特徴とする、レーザ光回折を利用した粒度分布測定装
置。1. A test particle group in a dispersed flying state is irradiated with a laser beam, and a laser beam diffracted according to the size of the particle is generated by a lens placed behind the test particle group. In a device that collects light on a detector consisting of a plurality of light receiving elements arranged on the focal plane of, and obtains the particle size distribution of the test particle group from the received light intensity distribution in the radial direction of the detector,
A through hole is formed in the center of the detector, and a light receiving means for receiving the laser light passing through the hole is provided at a position a predetermined distance behind the through hole. A particle size distribution measuring device using laser light diffraction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60242064A JPH0658314B2 (en) | 1985-10-28 | 1985-10-28 | Particle size distribution measuring device using laser light diffraction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60242064A JPH0658314B2 (en) | 1985-10-28 | 1985-10-28 | Particle size distribution measuring device using laser light diffraction |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62100637A JPS62100637A (en) | 1987-05-11 |
| JPH0658314B2 true JPH0658314B2 (en) | 1994-08-03 |
Family
ID=17083740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60242064A Expired - Lifetime JPH0658314B2 (en) | 1985-10-28 | 1985-10-28 | Particle size distribution measuring device using laser light diffraction |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0658314B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02179444A (en) * | 1988-12-29 | 1990-07-12 | Shimadzu Corp | Measuring apparatus of particle size distribution |
| JP2687539B2 (en) * | 1989-01-21 | 1997-12-08 | 株式会社島津製作所 | Particle size distribution analyzer |
| CA2084152A1 (en) * | 1992-11-30 | 1994-05-31 | Her Majesty The Queen, In Right Of Canada, As Represented By The Ministe R Of National Defence | Optical apparatus |
| JP4593144B2 (en) * | 2004-03-26 | 2010-12-08 | 浜松ホトニクス株式会社 | Method and apparatus for determining atomization conditions, and method and apparatus for producing fine particles |
| JP2008249724A (en) * | 2008-06-06 | 2008-10-16 | Horiba Ltd | Device for measuring particle size distribution |
| ES2581934T3 (en) | 2009-12-10 | 2016-09-08 | The Procter & Gamble Company | Method for measuring the dirt removal capacity of a cleaning product |
-
1985
- 1985-10-28 JP JP60242064A patent/JPH0658314B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62100637A (en) | 1987-05-11 |
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