JPH0643099A - Solid-state emission spectroscopic analyzer - Google Patents
Solid-state emission spectroscopic analyzerInfo
- Publication number
- JPH0643099A JPH0643099A JP4218299A JP21829992A JPH0643099A JP H0643099 A JPH0643099 A JP H0643099A JP 4218299 A JP4218299 A JP 4218299A JP 21829992 A JP21829992 A JP 21829992A JP H0643099 A JPH0643099 A JP H0643099A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- solid
- fixing device
- preload
- state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、金属等の固体試料の組
成分析を行う固体発光分光分析装置に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state emission spectroscopic analyzer for analyzing the composition of a solid sample such as metal.
【０００２】[0002]
【従来の技術】雰囲気ガスが充填される発光室と、その
発光室に連通する開口穴を有し且つ水平面に対して所定
角度傾斜させられた試料台と、試料を上記開口穴を密閉
した状態でその試料台上に固定する試料固定装置と、上
記発光室内の電極と試料との間の放電により発せられる
光線を分光する分光器とを備え、その分光器により分光
された輝線スペクトルに基づいて試料の組成を分析する
固体発光分光分析装置が知られている。このような固体
発光分光分析装置により、例えば鉄鋼材料片や各種固体
金属材料片の含有元素の定量分析が行われる。上記試料
台は、通常、水平に設けられた分光器に試料からの発光
光線を入射させるのに適当なように水平面に対して所定
角度傾斜して設置されているため、試料台上の試料は試
料固定装置により前記開口穴を密閉した状態で安定的に
固定されることが望まれる。2. Description of the Related Art A light emitting chamber filled with an atmosphere gas, a sample stage having an opening communicating with the light emitting chamber and inclined at a predetermined angle with respect to a horizontal plane, and a state in which the sample is sealed in the opening. A sample fixing device to be fixed on the sample table, and a spectroscope that disperses a light beam emitted by the discharge between the electrode and the sample in the light emitting chamber, based on the emission line spectrum dispersed by the spectroscope. A solid-state emission spectroscopic analyzer that analyzes the composition of a sample is known. With such a solid-state emission spectroscopic analyzer, for example, quantitative analysis of elements contained in steel material pieces and various solid metal material pieces is performed. The sample table is usually installed at a predetermined angle with respect to the horizontal plane so that the emitted light beam from the sample can be incident on a horizontally provided spectroscope. It is desired that the sample be fixed stably by the sample fixing device while the opening hole is closed.
【０００３】図４に、試料固定装置の従来例を示す。１
０は、試料の発光光線を安定的に得るために不活性雰囲
気ガスが充填された発光室、１２は、発光室１０に連通
する開口穴１４を有する試料台、１６は発光室１０内に
配設された電極である。試料固定装置１７は、試料台１
２に立設された支柱１８と、支柱１８の径より若干大き
い径の穴２０を有して支柱１８がその穴２０内に嵌め入
れられたアーム２２と、支柱１８と平行な軸まわりの回
動可能にアーム２２に片持状に支持された板状ばね２４
と、板状ばね２４の先端部に固設されてその板状ばね２
４の弾性変形に応じた押圧力で試料２６を押圧する押圧
部材２８とから構成されている。このような試料固定装
置１７では、板状ばね２４が弾性変形させられて試料２
６が試料台１２上に開口穴１４を密閉する状態で固定さ
れる。図４はこの状態を示している。この時、アーム２
２は、板状ばね２４の弾性復帰力により案内穴２０の内
周面と支柱１８の外周面との間に生じる摩擦力によって
支柱１８の任意の高さ位置に固定される。FIG. 4 shows a conventional example of a sample fixing device. 1
Reference numeral 0 denotes a luminescence chamber filled with an inert atmosphere gas in order to stably obtain the luminescence light of the sample, 12 denotes a sample stage having an opening hole 14 communicating with the luminescence chamber 10, and 16 denotes an arrangement inside the luminescence chamber 10. It is an installed electrode. The sample fixing device 17 is a sample table 1
2, an arm 22 having a hole 20 having a diameter slightly larger than the diameter of the pillar 18 and the pillar 18 fitted in the hole 20, and a rotation about an axis parallel to the pillar 18. A plate-like spring 24 movably supported on the arm 22 in a cantilever manner.
And the plate-shaped spring 2 fixed to the tip of the plate-shaped spring 24.
4 and a pressing member 28 that presses the sample 26 with a pressing force corresponding to the elastic deformation. In such a sample fixing device 17, the plate-like spring 24 is elastically deformed and the sample 2
6 is fixed on the sample table 12 in a state where the opening hole 14 is sealed. FIG. 4 shows this state. At this time, arm 2
2 is fixed at an arbitrary height position of the support column 18 by a frictional force generated between the inner peripheral surface of the guide hole 20 and the outer peripheral surface of the support column 18 by the elastic restoring force of the plate spring 24.
【０００４】[0004]
【発明が解決すべき課題】しかし、上記従来の試料固定
装置１７では、板状ばね２４が弾性変形させられること
により試料２６に押圧力が付与されるようになっていた
ため、押圧部材２８が試料２６に当接した状態から更に
アーム２２が適当寸法だけ押し下げられることにより、
上記押圧力が決定されていた。このため、作業者は、適
切な押圧力が発生するように試料２６の高さに応じてア
ーム２２を押し下げねばならず、そのアーム２２の位置
決め作業が面倒であった。However, in the above-described conventional sample fixing device 17, the pressing force is applied to the sample 26 by elastically deforming the plate spring 24. When the arm 22 is further pushed down by an appropriate size from the state of being in contact with 26,
The pressing force has been determined. Therefore, the operator has to push down the arm 22 according to the height of the sample 26 so that an appropriate pressing force is generated, and the positioning work of the arm 22 is troublesome.
【０００５】また、上記アーム２２の位置決め操作は熟
練を要し、作業者の勘に頼って行われるため、操作毎に
板状ばね２４の弾性変形量にばらつきが生じ、試料２６
にこれを安定的に固定するのに充分な押圧力が付与され
ない場合があった。このような場合には、分析中に試料
２６が僅かに移動したり、或いはその試料２６の移動に
より開口穴１４と試料２６との間の隙間から発光室１０
内に空気が入り込んだりすることに起因して、輝線スペ
クトルが不安定となる不都合が生じる。このため、従来
の固体発光分光分析装置では、試料の分析精度が充分得
られない場合があった。Further, since the positioning operation of the arm 22 requires skill and is performed depending on the intuition of an operator, the elastic deformation amount of the plate spring 24 varies from operation to operation, and the sample 26
In some cases, a sufficient pressing force to stably fix this was not applied. In such a case, the sample 26 slightly moves during analysis, or the movement of the sample 26 causes the light emitting chamber 10 to move from the gap between the opening hole 14 and the sample 26.
There is a problem that the bright line spectrum becomes unstable due to air entering the inside. Therefore, in the conventional solid-state emission spectroscopic analyzer, the analysis accuracy of the sample may not be sufficiently obtained.
【０００６】本発明は以上の事情を背景として為された
ものであり、その目的とするところは、試料固定装置に
よる試料の固定作業が簡単で、しかも高い分析精度が安
定して得られる固体発光分光分析装置を提供することに
ある。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a solid-state light emitting device which can easily fix a sample by a sample fixing device and can stably obtain high analysis accuracy. It is to provide a spectroscopic analysis device.
【０００７】[0007]
【課題を解決するための手段】斯かる目的を達成するた
めの、本発明の要旨とすることろは、雰囲気ガスが充填
される発光室と、その発光室に連通する開口穴を有し且
つ水平面に対して所定角度傾斜させられた試料台と、試
料を上記開口穴を密閉した状態でその試料台上に固定す
る試料固定装置と、上記発光室内の電極と試料との間の
放電により発せられる光線を分光する分光器とを備え、
その分光器により分光された輝線スペクトルに基づいて
試料の組成を分析する固体発光分光分析装置において、
前記試料固定装置が、(a) 前記試料台に立設された支柱
と、(b) その支柱により支柱の軸心まわりの回動自在に
支持され、且つその軸心と直交する方向に突き出すアー
ム部材と、(c) そのアーム部材の先端部に設けられ、前
記試料に当接させられる当接部材を前記試料台に接近離
隔する方向に案内する案内手段と、(d) 前記当接部材を
前記試料台へ接近する方向へ付勢する予圧付勢手段と
を、備えたことにある。Means for Solving the Problems To achieve the above object, the gist of the present invention is to have a light emitting chamber filled with atmospheric gas and an opening hole communicating with the light emitting chamber. A sample table tilted at a predetermined angle with respect to the horizontal plane, a sample fixing device for fixing the sample on the sample table with the opening hole sealed, and a discharge generated between the electrode and the sample in the light emitting chamber. And a spectroscope that disperses the emitted light,
In a solid-state emission spectroscopic analyzer that analyzes the composition of a sample based on the emission line spectrum that is dispersed by the spectroscope,
The sample fixing device includes (a) a column that is erected on the sample table, and (b) an arm that is rotatably supported by the column about the axis of the column and that projects in a direction orthogonal to the axis. A member, (c) guide means provided at the tip of the arm member, for guiding a contact member to be brought into contact with the sample in a direction of approaching and separating from the sample base, and (d) the contact member. And a preload urging means for urging in a direction approaching the sample table.
【０００８】[0008]
【作用】このようにすれば、試料固定装置は、試料に当
接させられる当接部材が、試料台に立設された支柱と直
交する方向に突き出すアーム部材の先端部に設けられた
案内手段により試料台から接近離隔する方向へ案内され
るように構成され、且つ予圧付勢手段により試料台へ接
近する方向に付勢される。According to this structure, in the sample fixing device, the abutting member, which abuts against the sample, is provided at the leading end of the arm member protruding in the direction orthogonal to the support column erected on the sample table. Is configured to be guided toward and away from the sample stage, and is biased in a direction toward the sample stage by the preload biasing means.
【０００９】[0009]
【発明の効果】このため、試料を試料台上に固定する際
には、単に予圧付勢手段の付勢力に抗して当接部材を試
料台から離隔する方向に移動させ、且つ試料を試料台上
に載置した状態でその当接部材を離すことにより、試料
にはその高さに応じた一定の押圧力が常に付与される。
従って、本発明の固体発光分光分析装置によれば、従来
の試料固定装置におけるアームの面倒な位置決め作業が
不要となって試料の固定作業が簡単となる。また、当接
部材は予圧付勢手段により付勢されており、試料の高さ
のばらつきに拘わらず充分な押圧力が発生させられるた
め、作業者の熟練度や試料高さのばらつきに拘わらず試
料が常に安定的に固定される。このため、分析中に試料
が移動することが解消され、試料の高い分析精度が安定
して得られる。Therefore, when fixing the sample on the sample table, the contact member is simply moved in the direction away from the sample table against the urging force of the preload urging means. By releasing the contact member in a state of being placed on the table, a constant pressing force according to the height of the sample is always applied.
Therefore, according to the solid-state emission spectroscopic analyzer of the present invention, the cumbersome positioning work of the arm in the conventional sample fixing device is unnecessary, and the sample fixing work is simplified. Further, since the abutting member is biased by the preload biasing means, a sufficient pressing force is generated regardless of the variation of the height of the sample, so that regardless of the skill level of the operator or the variation of the sample height. The sample is always fixed stably. Therefore, the movement of the sample during the analysis is eliminated, and high analysis accuracy of the sample can be stably obtained.
【００１０】ここで、前記予圧付勢手段は、好適には、
予圧コイルスプリング、或いは所定の流体圧が付与され
る圧力室と、その圧力室の流体圧に基づいて前記当接部
材に推力を伝えるピストンとを有している。Here, the preload biasing means is preferably
It has a preload coil spring or a pressure chamber to which a predetermined fluid pressure is applied, and a piston that transmits a thrust force to the contact member based on the fluid pressure in the pressure chamber.
【００１１】[0011]
【実施例】以下、本発明の一実施例を図面に基づいて詳
細に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings.
【００１２】図１は、本発明の固体発光分光分析装置の
一構成例を示すブロック線図である。本固体発光分光分
析装置は、たとえば鉄鋼材料片の含有元素の定量分析の
ために用いられる。図１において、３０は、アルゴンガ
スが空気と置換されて充填される暗室である。暗室３０
の上面には、水平面に対して所定角度傾斜させられた傾
斜部３２が設けられており、この傾斜部３２上に試料載
置板３４が固設されている。試料載置板３４には、暗室
３０に連通する開口穴３６が形成されており、試料３８
が試料載置板３４上に開口穴３６を密閉した状態で試料
固定装置４０によって安定して固定されるようになって
いる。上記試料載置板３４はたとえばステンレス鋼や銅
合金などの導体材から構成されており、後者はメッキが
施されることにより耐久性が高められている。また、試
料３８は、たとえば高さ寸法が約１０乃至２０mmの鉄鋼
材料片であって、開口穴３６を密閉する側の被分析面４
２が粒度１００番乃至２００番の砥石にて表面粗さが５
μ乃至１０μとなるように研磨されている。FIG. 1 is a block diagram showing an example of the configuration of the solid-state emission spectroscopic analyzer of the present invention. The solid-state emission spectroscopic analyzer is used, for example, for quantitative analysis of elements contained in steel material pieces. In FIG. 1, 30 is a dark room filled with argon gas replaced with air. Darkroom 30
An inclined portion 32 that is inclined at a predetermined angle with respect to the horizontal plane is provided on the upper surface of, and a sample mounting plate 34 is fixedly mounted on the inclined portion 32. An opening hole 36 communicating with the dark chamber 30 is formed in the sample mounting plate 34, and a sample 38
Is stably fixed by the sample fixing device 40 in a state in which the opening hole 36 is sealed on the sample mounting plate 34. The sample mounting plate 34 is made of a conductive material such as stainless steel or a copper alloy, and the latter is plated to enhance its durability. The sample 38 is, for example, a piece of steel material having a height dimension of about 10 to 20 mm, and the surface to be analyzed 4 on the side where the opening hole 36 is sealed.
2 is a grindstone with a grain size of 100 to 200 and has a surface roughness of 5
Polished to have a size of μ to 10 μ.
【００１３】前記暗室３０内には、例えばタングステ
ン、銀などにより構成された棒状電極４４が挿入されて
おり、その先端が試料３８の被分析面４２と僅かな隙間
を隔てて対向するように開口穴３６近傍に位置させられ
ている。棒状電極４４には発光装置４６が接続されてお
り、発光装置４６から棒状電極４４および試料３８の間
に高電圧が加えられると、棒状電極４４および試料３８
の間で放電が行われる。なお、暗室３０、試料載置板３
４および試料固定装置４０は、作業者の安全のために図
示しない外壁で囲まれた分析箱内に配設されて外部と電
気絶縁されている。A rod-shaped electrode 44 made of, for example, tungsten, silver or the like is inserted in the dark chamber 30, and its tip is opened so as to face the surface 42 to be analyzed of the sample 38 with a slight gap. It is located near the hole 36. A light emitting device 46 is connected to the rod-shaped electrode 44, and when a high voltage is applied between the light emitting device 46 and the rod-shaped electrode 44 and the sample 38, the rod-shaped electrode 44 and the sample 38.
A discharge is generated between the two. The dark room 30 and the sample mounting plate 3
4 and the sample fixing device 40 are disposed in an analysis box surrounded by an outer wall (not shown) and electrically insulated from the outside for the safety of the operator.
【００１４】放電により暗室３０内で発せられた光線
は、分光器４８により輝線スペクトルに分光され且つ検
出される。すなわち、上記光線は、分光器４８に設けら
れた集光レンズ５０、入射スリット５２、回折格子５４
を順次通過させられることにより試料３８の含有元素に
対応する波長の複数本の輝線スペクトルに分光された
後、複数の出射スリット５６をそれぞれ通過させられて
複数の光電子倍増管５８によりそれぞれ検出される。な
お、図１において、暗室３０および試料固定装置４０
は、分光器４８に対して約９０°展開された状態で構成
されている。The light beam emitted in the dark room 30 by the discharge is separated into a bright line spectrum by the spectroscope 48 and detected. That is, the above-mentioned light rays are collected by the condenser lens 50 provided in the spectroscope 48, the entrance slit 52, the diffraction grating 54.
Of the emission lines 56 having a wavelength corresponding to the element contained in the sample 38 and then passed through the output slits 56, respectively, and detected by the photomultiplier tubes 58. . In FIG. 1, the dark room 30 and the sample fixing device 40
Are expanded by about 90 ° with respect to the spectroscope 48.
【００１５】光電子倍増管５８は各輝線スペクトルを検
出して、これらを表す信号を、所定時間毎に入力信号の
積分値を出力する複数の積分器６０へそれぞれ供給す
る。マイクロコンピュータ６２は、予め記憶されたプロ
グラムに従ってＡ／Ｄ変換器６４を介して入力された積
分信号をそれぞれ処理することにより、各輝線スペクト
ルの波長に対応する元素の含有量を測定し、その含有量
を表す信号をインターフェース６６を介してＣＲＴ６８
およびプリンタ７０に供給することにより、ＣＲＴ６８
および紙面上に分析結果を表示させる。また、マイクロ
コンピュータ６２は、積分器制御信号および発光装置制
御信号をインターフェース６６を介して積分器６０およ
び発光装置４６にそれぞれ供給することにより、積分器
６０および発光装置４６の作動を制御する。更に、マイ
クロコンピュータ６２には、分光器４８内に設けられた
温度センサ７２から分光器４８内の温度を表す信号がＡ
／Ｄ変換器６４を介して供給されている。The photomultiplier tube 58 detects each bright line spectrum and supplies the signals representing these to a plurality of integrators 60 that output the integrated value of the input signal at predetermined time intervals. The microcomputer 62 measures the content of the element corresponding to the wavelength of each emission line spectrum by processing the integrated signals input via the A / D converter 64 according to a program stored in advance, and the content thereof is measured. A signal representing the quantity is sent to the CRT 68 via the interface 66.
And the printer 70 to supply the CRT 68
And display the analysis results on the paper. Further, the microcomputer 62 controls the operation of the integrator 60 and the light emitting device 46 by supplying the integrator control signal and the light emitting device control signal to the integrator 60 and the light emitting device 46 via the interface 66, respectively. Further, the microcomputer 62 receives a signal A representing the temperature in the spectroscope 48 from the temperature sensor 72 provided in the spectroscope 48.
It is supplied via the / D converter 64.
【００１６】図２は、前記試料固定装置４０の要部を詳
細に示す図であって、一部を切り欠いた正面図である。
試料固定装置４０は、試料載置板３４に立設された支柱
７４と、支柱７４の軸心と直交する方向に突き出した状
態で支柱７４に設けられたアーム部材７６と、試料３８
に当接させられる当接部材７８と、当接部材７８が先端
部に固定された管状部材７９と、アーム部材７６の先端
部に設けられて当接部材７８を管状部材７９とともに試
料載置板３４に接近離隔する方向に案内する案内装置８
０と、当接部材７８を試料載置板３４へ接近する方向へ
付勢する予圧コイルスプリング８２とから構成されてい
る。FIG. 2 is a view showing in detail a main part of the sample fixing device 40 and is a front view with a part cut away.
The sample fixing device 40 includes a column 74 that is erected on the sample mounting plate 34, an arm member 76 that is provided on the column 74 so as to project in a direction orthogonal to the axis of the column 74, and the sample 38.
A contact member 78 to be brought into contact with the sample member, a tubular member 79 having the contact member 78 fixed to the distal end portion thereof, and a contact member 78 provided at the distal end portion of the arm member 76 together with the tubular member 79. Guide device 8 for guiding in the direction of approaching and separating from
0 and a preload coil spring 82 for urging the contact member 78 in a direction approaching the sample mounting plate 34.
【００１７】支柱７４は、両端部に形成された第１雌ね
じ穴８４および第２雌ねじ穴８６を有し、試料載置板３
４の穴８８を貫通したビス９０のねじ部９１が第１雌ね
じ穴８４と螺合されることにより試料載置板３４に固定
されている。一方、アーム部材７６は、大径穴９２およ
び小径穴９４から成る段付き穴が形成された円筒状の軸
心部９６と、この一端から直線状に延びる平板状部であ
って、先端部に穴９８が形成されたアーム部１００とか
ら構成されている。そして、大径穴９２および小径穴９
４内にビス１０２の頭部１０３および胴部１０４がそれ
ぞれ嵌め入れられるとともに、ビス１０２のねじ部１０
５が前記第２雌ねじ穴８６と螺合されている。これによ
り、アーム部材７６は、支柱７４によって支柱７４の軸
心まわりの回動自在且つ軸方向の相対移動不能に支持さ
れている。アーム部１００の穴９８にはビス１０６がね
じ部１０８が突出した状態で嵌め入れられており、案内
装置８０がこのビス１０６を介してアーム部１００に支
持されている。The column 74 has a first female screw hole 84 and a second female screw hole 86 formed at both ends, and the sample mounting plate 3
The screw portion 91 of the screw 90 penetrating the fourth hole 88 is fixed to the sample mounting plate 34 by being screwed into the first female screw hole 84. On the other hand, the arm member 76 is a cylindrical shaft center portion 96 in which a stepped hole including a large diameter hole 92 and a small diameter hole 94 is formed, and a flat plate-shaped portion linearly extending from one end of the arm member 76. The arm portion 100 is formed with a hole 98. Then, the large diameter hole 92 and the small diameter hole 9
The head portion 103 and the body portion 104 of the screw 102 are fitted into the screw 4, and the screw portion 10 of the screw 102 is inserted.
5 is screwed into the second female screw hole 86. As a result, the arm member 76 is supported by the support column 74 so as to be rotatable about the axis of the support column 74 and not relatively movable in the axial direction. A screw 106 is fitted into the hole 98 of the arm portion 100 with the screw portion 108 protruding, and the guide device 80 is supported by the arm portion 100 via the screw 106.
【００１８】案内装置８０は本発明の案内手段に対応す
るものであって、貫通穴１０９を有する円筒状の案内部
材１１０と、円板状のつまみ部１１２およびそのつまみ
部１１２より小径の円筒部１１４から成る操作部材１１
６と、操作部材１１６を案内部材１１０に対して所定以
上の相対移動を阻止するストッパピン１１８とから構成
されている。案内部材１１０は、アーム部１００側の端
部に形成された雌ねじ穴１２０と、軸方向に平行な方向
に延びる長穴１２２とを有し、雌ねじ穴１２０が前記ビ
ス１０６のねじ部１０８と螺合されることによりアーム
部材７６に螺着されている。操作部材１１６には、案内
部材１１０よりやや大径の嵌合穴１２４と、嵌合穴１２
４の一端に形成された雌ねじ穴１２６と、前記ストッパ
ピン１１８が圧入により固定されるために円筒部１１４
の厚み方向に貫通するピン穴１２８とが形成されてい
る。嵌合穴１２４および雌ねじ穴１２６内には、案内部
材１１０が軸方向の相対移動可能に嵌め入れられ、且つ
雌ねじ穴１２６には、管状部材７９が螺着されている。The guide device 80 corresponds to the guide means of the present invention, and includes a cylindrical guide member 110 having a through hole 109, a disc-shaped knob portion 112, and a cylindrical portion having a diameter smaller than that of the knob portion 112. Operation member 11 composed of 114
6 and a stopper pin 118 that prevents the operation member 116 from moving relative to the guide member 110 by a predetermined amount or more. The guide member 110 has a female screw hole 120 formed at an end portion on the arm portion 100 side and a long hole 122 extending in a direction parallel to the axial direction. The female screw hole 120 is screwed with the screw portion 108 of the screw 106. It is screwed to the arm member 76 by being combined. The operation member 116 includes a fitting hole 124 having a diameter slightly larger than that of the guide member 110 and a fitting hole 12
4 has a female screw hole 126 formed at one end thereof and the cylindrical pin 114 for fixing the stopper pin 118 by press fitting.
And a pin hole 128 penetrating in the thickness direction thereof is formed. The guide member 110 is fitted into the fitting hole 124 and the female screw hole 126 so as to be relatively movable in the axial direction, and the tubular member 79 is screwed into the female screw hole 126.
【００１９】管状部材７９は、案内部材１１０の外径よ
り若干大きい径の円筒穴１３０を備え、前記雌ねじ穴１
２６と螺合される雄ねじ部１３２と、当接部材７８の雄
ねじ部１３６と螺合される雌ねじ穴１３４がそれぞれ形
成されている。そして、円筒穴１３０内であって、前記
案内部材１１０の先端部と雄ねじ部１３６の先端部との
間には予圧コイルスプリング８２が介挿されている。こ
れにより、当接部材７８は、操作部材１１６および管状
部材７９と共に案内部材１１０に対して軸まわりの相対
回転が阻止され、且つ長穴１２２の軸方向寸法により規
定される範囲で軸方向の移動が許容されるとともに、予
圧コイルスプリング８２により試料載置板３４に接近す
る方向へ常時付勢されている。The tubular member 79 has a cylindrical hole 130 having a diameter slightly larger than the outer diameter of the guide member 110.
26, and a female screw hole 134 screwed with the male screw portion 136 of the contact member 78 is formed. A preload coil spring 82 is inserted in the cylindrical hole 130 between the tip of the guide member 110 and the tip of the male screw 136. This prevents the contact member 78 from rotating relative to the guide member 110 about the axis together with the operating member 116 and the tubular member 79, and moves in the axial direction within a range defined by the axial dimension of the slot 122. Is allowed and is always biased by the preload coil spring 82 in the direction of approaching the sample mounting plate 34.
【００２０】予圧コイルスプリング８２は予圧付勢手段
に対応するものであって、このばね定数は、試料３８の
材質或いは重量に適した値が適宜選択され、その予荷重
は試料３８の厚み寸法のばらつきに拘わらず試料３８が
試料載置板３４上に安定的に固定されるように予め決定
される。また、当接部材７８が開口穴３６と係合させら
れて開口穴３６が塞がれるようになっており、これによ
り暗室３０内のアルゴンガスの漏洩が防止される。この
時、ストッパピン１１８は、長穴１２２内の最下端位置
よりアーム部１００に所定寸法接近した位置に位置させ
られる。図２はこの状態を示している。また、支柱７
４、アーム部材７６、当接部材７８、管状部材７９、案
内部材１１０および操作部材１１６は、例えば銅合金な
どの導電性の高い材料から構成されており、メッキが施
されることにより耐久性が高められている。The preload coil spring 82 corresponds to preload urging means, and the spring constant is appropriately selected as a value suitable for the material or weight of the sample 38, and its preload is the thickness of the sample 38. It is determined in advance that the sample 38 is stably fixed on the sample mounting plate 34 regardless of variations. Further, the contact member 78 is engaged with the opening hole 36 to close the opening hole 36, thereby preventing the argon gas in the dark chamber 30 from leaking. At this time, the stopper pin 118 is located at a position closer to the arm portion 100 by a predetermined dimension than the lowermost end position in the elongated hole 122. FIG. 2 shows this state. Also, the pillar 7
4, the arm member 76, the abutting member 78, the tubular member 79, the guide member 110, and the operating member 116 are made of a highly conductive material such as a copper alloy, and have durability by being plated. Has been elevated.
【００２１】以上のように構成された試料固定装置４０
により試料３８を試料載置板３４上に固定する際には、
予圧コイルスプリング８２の付勢力に抗して操作部材１
１６を上方に移動操作することより、当接部材７８を試
料載置板３４から試料３８の高さ寸法以上に離隔させ
る。この時、必要に応じてつまみ部１１２の支柱７４の
軸心まわりの位置を変更する。そして、この状態を維持
しつつ試料３８を試料載置板３４上の開口穴３６を密閉
する位置に載置した後、操作部材１１６を下方に下ろし
て当接部材７８を試料３８に当接させる。The sample fixing device 40 configured as described above
When the sample 38 is fixed on the sample mounting plate 34 by
The operation member 1 is resisted against the biasing force of the preload coil spring 82.
By operating 16 to move upward, the contact member 78 is separated from the sample mounting plate 34 by the height dimension of the sample 38 or more. At this time, the position around the shaft center of the pillar 74 of the knob portion 112 is changed if necessary. Then, while maintaining this state, the sample 38 is mounted on the sample mounting plate 34 at a position where the opening hole 36 is sealed, and then the operating member 116 is lowered to bring the contact member 78 into contact with the sample 38. .
【００２２】上述のように、本実施例の固体発光分光分
析装置によれば、試料３８を試料載置板３４上に固定す
る際には、単に操作部材１１６を予圧コイルスプリング
８２の付勢力に抗して移動させ、且つ試料３８を試料載
置板３４上に載置してからその操作部材１１６を離せば
よく、これにより、試料３８には予圧コイルスプリング
８２により常に一定の押圧力が付与される。従って、本
実施例の固体発光分光分析装置によれば、図４に示され
る従来の試料固定装置１７におけるアーム２２の面倒な
位置決め作業が不要となって試料の固定作業が簡単とな
る。As described above, according to the solid-state emission spectroscopic analyzer of this embodiment, when the sample 38 is fixed on the sample mounting plate 34, the operating member 116 is simply applied with the biasing force of the preload coil spring 82. It is only necessary to move the sample 38 against the sample mounting plate 34 and then move the operation member 116 away from the sample mounting plate 34, whereby a constant pressing force is always applied to the sample 38 by the preload coil spring 82. To be done. Therefore, according to the solid-state emission spectroscopic analyzer of the present embodiment, the troublesome positioning work of the arm 22 in the conventional sample fixing device 17 shown in FIG. 4 is unnecessary, and the sample fixing work is simplified.
【００２３】また、予圧コイルスプリング８２は予め予
圧されており、試料３８の高さのばらつきに拘わらず充
分な押圧力が発生させられるため、作業者の熟練度や試
料高さのばらつきに拘わらず試料３８が常に安定的に固
定される。このため、分析中に試料３８が移動すること
が解消され、試料３８の高い分析精度が安定して得られ
る。Further, since the preload coil spring 82 is preloaded in advance and a sufficient pressing force is generated regardless of the height variation of the sample 38, regardless of the skill level of the operator or the sample height variation. The sample 38 is always stably fixed. Therefore, the movement of the sample 38 during the analysis is eliminated, and high analysis accuracy of the sample 38 can be stably obtained.
【００２４】図３に、本実施例の装置と従来の固体発光
分光分析装置とにおける鉄鋼材料片の定量分析の分析精
度を比較して示す。従来の固体発光分光分析装置は、本
実施例の試料固定装置４０に替えて、図４に示される試
料固定装置１７が適用されている点のみが本装置と異な
る。図３において、分析精度は定量分析値のばらつきの
分布の標準偏差σにより表されている。この標準偏差σ
は、従来および本実施例の分析装置によるそれぞれ１０
回ずつの元素含有量測定から得られた測定値に基づいて
それぞれ算出されたものである。この結果から明らかな
ように、本実施例の固体発光分光分析装置によれば、従
来の分析装置に比較してばらつきが小さく、高い分析精
度が得られる。FIG. 3 shows a comparison of the analytical accuracy of the quantitative analysis of steel material pieces in the apparatus of this embodiment and the conventional solid-state emission spectroscopic analysis apparatus. The conventional solid-state emission spectroscopic analyzer is different from the present device only in that the sample fixing device 17 shown in FIG. 4 is applied instead of the sample fixing device 40 of the present embodiment. In FIG. 3, the analysis accuracy is represented by the standard deviation σ of the distribution of variations in the quantitative analysis values. This standard deviation σ
Is 10 in each of the conventional and the analyzers of this embodiment.
The values are calculated based on the measured values obtained by measuring the element content each time. As is clear from this result, according to the solid-state emission spectroscopic analyzer of the present embodiment, the variation is smaller than that of the conventional analyzer, and high analysis accuracy can be obtained.
【００２５】以上、本発明の一実施例を図面に基づいて
詳細に説明したが、本発明は他の態様においても適用さ
れる。Although one embodiment of the present invention has been described in detail with reference to the drawings, the present invention can be applied to other modes.
【００２６】たとえば、前述の実施例では、予圧付勢手
段は予圧コイルスプリング８２を有するものであった
が、これに替えて、所定の流体圧が付与される圧力室
と、その圧力室の流体圧に基づいて前記当接部材に推力
を伝えるピストンとを有するものでもよい。このように
しても、試料の高さのばらつきに拘わらず上記所定の流
体圧に応じた充分な押圧力が発生させられるため、前述
の実施例と同様の効果が得られる。For example, in the above-described embodiment, the preload urging means has the preload coil spring 82. Instead of this, the pressure chamber to which a predetermined fluid pressure is applied and the fluid in the pressure chamber. It may have a piston which transmits thrust to the contact member based on pressure. Even in this case, a sufficient pressing force corresponding to the predetermined fluid pressure is generated regardless of the variation in the height of the sample, so that the same effect as that of the above-described embodiment can be obtained.
【００２７】その他、一々例示しないが、本発明は当業
者の知識に基づいて種々の変更、改良を加えた態様で実
施することができる。Although not exemplarily shown, the present invention can be carried out in various modified and improved modes based on the knowledge of those skilled in the art.
【図１】本発明の一実施例である固体発光分光分析装置
の構成を示すブロック線図である。FIG. 1 is a block diagram showing the configuration of a solid-state emission spectroscopic analysis apparatus that is an embodiment of the present invention.
【図２】図１の要部を示す図であって、試料固定装置の
一部を切り欠いた正面図である。FIG. 2 is a view showing a main part of FIG. 1, and is a front view in which a part of the sample fixing device is cut away.
【図３】図４の試料固定装置が適用された従来の固体発
光分光分析装置と、図１の固体発光分光分析装置とによ
る鉄鋼材料片の定量分析精度を比較して示す図表であ
る。3 is a table showing a comparison of quantitative analysis accuracy of steel material pieces by the conventional solid-state emission spectroscopic analyzer to which the sample fixing device of FIG. 4 is applied and the solid-state emission spectroscopic analyzer of FIG. 1.
【図４】従来の固体発光分光分析装置に適用される試料
固定装置の正面図である。FIG. 4 is a front view of a sample fixing device applied to a conventional solid-state emission spectroscopic analyzer.
３０ 暗室（発光室） ３４ 試料載置板（試料台） ３６ 開口穴 ４０ 試料固定装置 ４４ 棒状電極（電極） ４８ 分光器 ７４ 支柱 ７６ アーム部材 ７８ 当接部材 ８０ 案内装置（案内手段） ８２ 予圧コイルスプリング（予圧付勢手段） 30 Dark Chamber (Light-Emitting Chamber) 34 Sample Placement Plate (Sample Stand) 36 Opening Hole 40 Sample Fixing Device 44 Rod Electrode (Electrode) 48 Spectrometer 74 Strut 76 Arm Member 78 Contact Member 80 Guide Device (Guide Means) 82 Preload Coil Spring (preload biasing means)
Claims (3)
光室に連通する開口穴を有し且つ水平面に対して所定角
度傾斜させられた試料台と、試料を該開口穴を密閉した
状態で該試料台上に固定する試料固定装置と、該発光室
内の電極と該試料との間の放電により発せられる光線を
分光する分光器とを備え、該分光器により分光された輝
線スペクトルに基づいて該試料の組成を分析する固体発
光分光分析装置において、 前記試料固定装置が、 前記試料台に立設された支柱と、 該支柱により該支柱の軸心まわりの回動自在に支持さ
れ、且つ該軸心と直交する方向に突き出すアーム部材
と、 該アーム部材の先端部に設けられ、前記試料に当接させ
られる当接部材を前記試料台に接近離隔する方向に案内
する案内手段と、 前記当接部材を前記試料台へ接近する方向へ付勢する予
圧付勢手段と、 を備えたことを特徴とする固体発光分光分析装置。1. A light emitting chamber filled with an atmosphere gas, a sample stage having an opening hole communicating with the light emitting chamber and tilted at a predetermined angle with respect to a horizontal plane, and a state in which the sample is sealed in the opening hole. And a sample fixing device fixed on the sample table, and a spectroscope for separating a light beam emitted by an electric discharge between the electrode in the light emitting chamber and the sample, based on a bright line spectrum dispersed by the spectroscope. In the solid-state emission spectroscopic analyzer for analyzing the composition of the sample by means of the above, the sample fixing device is provided with a support erected on the sample stand, and rotatably supported by the support about an axis of the support, and An arm member projecting in a direction orthogonal to the axis; a guide means provided at a tip portion of the arm member for guiding an abutting member abutting against the sample in a direction approaching and separating from the sample base; The contact member is the sample table Solid emission spectrometer, characterized in that it and a preload biasing means for biasing direction toward.
グを有するものである請求項１の固体発光分光分析装
置。2. The solid-state emission spectroscopic analyzer according to claim 1, wherein the preload biasing means has a preload coil spring.
与される圧力室と、該圧力室の流体圧に基づいて前記当
接部材に推力を伝えるピストンとを有するものである請
求項１の固体発光分光分析装置。3. The preload urging means has a pressure chamber to which a predetermined fluid pressure is applied, and a piston for transmitting a thrust force to the contact member based on the fluid pressure of the pressure chamber. 1. A solid-state optical emission spectrometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4218299A JPH0643099A (en) | 1992-07-24 | 1992-07-24 | Solid-state emission spectroscopic analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4218299A JPH0643099A (en) | 1992-07-24 | 1992-07-24 | Solid-state emission spectroscopic analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0643099A true JPH0643099A (en) | 1994-02-18 |
Family
ID=16717664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4218299A Pending JPH0643099A (en) | 1992-07-24 | 1992-07-24 | Solid-state emission spectroscopic analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0643099A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6966957B2 (en) | 2003-04-09 | 2005-11-22 | Canon Kabushiki Kaisha | Bonding method for a plurality of components, bonding method for container and lid member, and ultrasonic welding apparatus |
-
1992
- 1992-07-24 JP JP4218299A patent/JPH0643099A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6966957B2 (en) | 2003-04-09 | 2005-11-22 | Canon Kabushiki Kaisha | Bonding method for a plurality of components, bonding method for container and lid member, and ultrasonic welding apparatus |
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