JPH0634559B2 - Ultrasonic probe - Google Patents
Ultrasonic probeInfo
- Publication number
- JPH0634559B2 JPH0634559B2 JP62191296A JP19129687A JPH0634559B2 JP H0634559 B2 JPH0634559 B2 JP H0634559B2 JP 62191296 A JP62191296 A JP 62191296A JP 19129687 A JP19129687 A JP 19129687A JP H0634559 B2 JPH0634559 B2 JP H0634559B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- ultrasonic
- block
- electrode
- ultrasonic probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は２次元的に配列される超音波振動子を備える超
音波探触子に関する。TECHNICAL FIELD The present invention relates to an ultrasonic probe provided with ultrasonic transducers arranged two-dimensionally.
（従来の技術） 従来から、スライス方向の分解能を向上する超音波探触
子の提案が種々なされている。例えば、特開昭６２−２
７９９号にその一例が開示されている。上記開示によれ
ば、超音波探触子は第５図に示す構成となっている。第
５図において、超音波振動子１は、長軸、短軸及び厚み
がそれぞれＸ、Ｙ及びＺの各方向にある直方体状圧電体
を、Ｘ方向に所定のピッチで分割し、Ｙ方向に３分割し
て構成される。図示されていないが、各エレメントの上
面には共通電極、下面には信号電極がそれぞれ固着され
る。信号電極は板面をＸ−Ｚ面にして配置されるプリン
ト板２、３及び４にそれぞれ形成される信号リード（２
aはプリント板２に形成された信号リードである）に個
々に接続され取出される。又、各プリント板２、３及び
４は所定の設置状態にて、各プリント板間にバッキング
材５をそれぞれ挟持する。又、図示されていないが、通
常、共通電極側には音響整合層を接合して半円柱状音響
レンズが設置される。(Prior Art) Conventionally, various proposals have been made for ultrasonic probes that improve the resolution in the slice direction. For example, JP-A-62-2
No. 799 discloses one example. According to the above disclosure, the ultrasonic probe has the configuration shown in FIG. In FIG. 5, an ultrasonic transducer 1 has a rectangular parallelepiped piezoelectric body having a major axis, a minor axis, and a thickness in each of the X, Y, and Z directions, divided in the X direction at a predetermined pitch, and then divided in the Y direction. It is divided into three parts. Although not shown, a common electrode is fixed to the upper surface of each element and a signal electrode is fixed to the lower surface thereof. Signal electrodes (2) are formed on the printed boards 2, 3 and 4 which are arranged with the board surface in the XZ plane.
a is a signal lead formed on the printed board 2) and individually taken out. The printed boards 2, 3 and 4 are sandwiched with a backing material 5 between the printed boards in a predetermined installation state. Although not shown, a semi-cylindrical acoustic lens is usually installed on the common electrode side by joining an acoustic matching layer.
上記の構成において、関心領域の変化に対応してＹ方向
の開口が可変され、Ｘ方向に対しては公知のリニアアレ
イ型超音波探触子と同じ走査が行われる。これにより浅
い部位から深い部位にかけてＹ方向の分解能が改善され
る。In the above configuration, the opening in the Y direction is changed in response to the change in the region of interest, and the same scanning as in the known linear array ultrasonic probe is performed in the X direction. This improves the resolution in the Y direction from the shallow region to the deep region.
（発明が解決しようとする問題点） ところで、信号電極の取出しを上記のプリント板で行う
ことにより、信号リードの束が不要となるため、信号電
極周りの構成が簡単になる。一方、上記の例では、共通
電極の取り出しについてなんら手当てがなされていな
い。しかし、共通電極が２次元的な配置となっているた
めに、通常、多くの共通リードを２次元的に張巡らせて
接続することになる。従って、従来の超音波探触子にお
いて、共通電極周りの構成が複雑になる恐れがある。
又、共通電極に整合層等を設置する場合、上記共通リー
ドの存在が整合層等の処理を煩わしくする恐れもある。(Problems to be Solved by the Invention) By taking out the signal electrodes by the above-mentioned printed board, a bundle of signal leads is not required, so that the structure around the signal electrodes is simplified. On the other hand, in the above example, no measure is taken for taking out the common electrode. However, since the common electrodes are arranged two-dimensionally, many common leads are usually connected in a two-dimensional manner. Therefore, in the conventional ultrasonic probe, the structure around the common electrode may be complicated.
Further, when the matching layer or the like is provided on the common electrode, the presence of the common lead may make the processing of the matching layer or the like complicated.
本発明は、かかる点に鑑みてなされたものであり、その
目的は、共通電極周りの構成を簡単にし、整合層等の設
置を容易にする超音波探触子を実現するにある。The present invention has been made in view of the above points, and an object thereof is to realize an ultrasonic probe that simplifies the configuration around a common electrode and facilitates installation of a matching layer and the like.
（問題点を解決するための手段） 上記目的を達成する本発明の超音波探触子は、そのＸ−
Ｙ面の２次元配列の超音波振動子は、Ｘ方向が所定のピ
ッチで分割され、Ｙ方向の分割は超音波送受波側を分割
することなく超音波送受波側の逆側からの切り込みによ
ってＺ軸を対称軸として奇数のブロックに分割され、超
音波送受波側面はＹ方向で各ブロックにまたがって帯状
の共通電極があり、反対面にて各振動子の各ブロック毎
に信号電極があり、前記と同じピッチの平行パターン状
の信号リードを備えるＫ個のプリント板を超音波振動子
のピッチに合せて信号電極に略垂直にかつＹ方向に対し
て左右対称に配置して信号リードを介して信号電極を取
出す構成になっている。(Means for Solving Problems) The ultrasonic probe of the present invention which achieves the above-mentioned object has X-
The two-dimensional array of ultrasonic transducers on the Y plane is divided in the X direction at a predetermined pitch, and the division in the Y direction is made by cutting from the opposite side of the ultrasonic transmitting / receiving side without dividing the ultrasonic transmitting / receiving side. The Z axis is divided into an odd number of blocks, the ultrasonic wave transmitting / receiving side surface has a strip-shaped common electrode across each block in the Y direction, and the opposite surface has a signal electrode for each block of each transducer. , The K printed boards having parallel pattern signal leads with the same pitch as described above are arranged substantially vertically to the signal electrodes and symmetrically with respect to the Y direction in accordance with the pitch of the ultrasonic transducer to arrange the signal leads. The signal electrode is taken out through the structure.
（実施例） 以下、本発明について図面を参照して詳細に説明する。(Example) Hereinafter, the present invention will be described in detail with reference to the drawings.
第１図及び第２図は本発明の一実施例による超音波探触
子を示す構成図であり、第１図はＹ−Ｚ断面図、第２図
は第１図におけるＡ−Ａ断面図（Ｘ−Ｚ断面図）であ
る。第１図及び第２図において、超音波振動子１１は、
Ｙ方向に溝１２及び１３で３分割される短冊状のエレメ
ント１１xをＸ方向にピッチｔで多数配列する構成とな
っている。溝１２及び１３により、ブロック１１y1、１
１y2及び１１y3は音響的に完全に分離される。帯状の共
通電極１４はエレメント１１xの上面に固着され、その
両端はエレメント１１xのＸ−Ｚ面に位置する。信号電
極１５y1、１５y2及び１５y3はブロック１１y1、１１y2
及び１１y3の各面（エレメント１１xの下面）に固着さ
れる。プリント板１６y1、１６y2及び１６y3は、各板面
にピッチｔの平行パターンの信号リードを備えている
（プリント板は皆同じ構成）。プリント板１６y2はＺ軸
上（ブロック１１y2の中心線上）に設置され、プリント
板１６y1及び１６y2はプリント板１６y3に対し左右対称
の位置に設置される。この設置は、プリント板１６y1、
１６y2及び１６y3の各板面をＸ−Ｚ面にして行われ、信
号電極１５y1、１５y2及び１５y3と各プリント板の信号
リード（１７はプリント板１６y2に形成された信号リー
ド）が接続される。バッキング材１８y1はプリント板１
６y1及び１６y2、並びに信号電極板１５y1及び１５y2に
接合する。又、バッキング材１８y2はプリント板１６y2
及び１６y3、並びに信号電極板１５y2及び１５y3に接合
する。共通電極１４は両端のブロック１１y1及び１１y2
の側壁にてそれぞれ共通リード１９y1及び１９y2に半田
付けされる。共通リード１９y1及び１９y2はプリント板
１６y1及び１６y3に絶縁スペーサ２０y1及び２０y2を介
在して一体化される。図示されていないが超音波振動子
１１の上に整合層が接合され、音響レンズが設置され
る。上記のバッキング材と各信号電極及び各プリント板
との接合、並びにスペーサとプリント板と共通リードと
の接合は絶縁性接着剤で行われる。1 and 2 are configuration diagrams showing an ultrasonic probe according to an embodiment of the present invention. FIG. 1 is a YZ sectional view, and FIG. 2 is an AA sectional view in FIG. It is (XZ sectional drawing). In FIGS. 1 and 2, the ultrasonic transducer 11 is
A large number of strip-shaped elements 11 x divided into three by the grooves 12 and 13 in the Y direction are arranged at a pitch t in the X direction. Grooves 12 and 13 allow blocks 11 y1 , 1
1 y2 and 11 y3 are acoustically completely separated. The strip-shaped common electrode 14 is fixed to the upper surface of the element 11 x , and both ends thereof are located on the XZ plane of the element 11 x . The signal electrodes 15 y1 , 15 y2, and 15 y3 are blocks 11 y1 and 11 y2.
And 11 y3 on each surface (the lower surface of the element 11 x ). The printed boards 16 y1 , 16 y2, and 16 y3 are provided with signal leads in a parallel pattern with a pitch t on each board surface (all printed boards have the same configuration). The printed board 16 y2 is installed on the Z axis (on the center line of the block 11 y2 ), and the printed boards 16 y1 and 16 y2 are installed at symmetrical positions with respect to the printed board 16 y3 . This installation is for the printed board 16 y1 ,
The signal electrodes 15 y1 , 15 y2 and 15 y3 and the signal leads of each printed board (17 is a signal lead formed on the printed board 16 y2) are formed by setting the board surfaces of 16 y2 and 16 y3 to the XZ plane. Are connected. Backing material 18 y1 is printed board 1
6 y1 and 16 y2 and the signal electrode plates 15 y1 and 15 y2 . The backing material 18 y2 is the printed board 16 y2.
And 16 y3 and the signal electrode plates 15 y2 and 15 y3 . The common electrode 14 has blocks 11 y1 and 11 y2 on both ends.
Are soldered to the common leads 19 y1 and 19 y2 , respectively, on the side walls. The common leads 19 y1 and 19 y2 are integrated with the printed boards 16 y1 and 16 y3 with insulating spacers 20 y1 and 20 y2 interposed. Although not shown, a matching layer is bonded on the ultrasonic transducer 11 and an acoustic lens is installed. The backing material is bonded to each signal electrode and each printed board, and the spacer, the printed board, and the common lead are bonded with an insulating adhesive.
以上の構成において、２次元的な配置となる超音波振動
子の共通電極を、超音波振動子（ブロック）の両側面に
て共通リードを介して取出すことができる。従って、共
通電極用リードを２次元的に張巡らす必要がない。又、
信号電極の取出しにおいても信号リードの束を２次元的
に張巡らす必要もない。With the above configuration, the common electrode of the ultrasonic transducer having a two-dimensional arrangement can be taken out via the common lead on both sides of the ultrasonic transducer (block). Therefore, it is not necessary to stretch the common electrode leads two-dimensionally. or,
Even when the signal electrodes are taken out, it is not necessary to stretch the bundle of signal leads two-dimensionally.
この様な超音波探触子は、所定のピッチの平行パターン
状の信号リードを備えたプリント板１６y1、１６y2及び
１６y3と、バッキング材１８y1及び１８y2と、スペーサ
２０y1及び２０y2と、共通リード１９y1及び１９y2を用
意し、第３図の部材、即ち、予め溝１２及び１３でＹ方
向に３分割され、Ｘ−Ｙ面に共通電極部材２２が固着さ
れ、反対面にはＸ方向に帯状の信号電極部材２３、２４
及び２５が固着されている圧電体２１を用いて作られ
る。以下にその工程について簡単に説明する。Such an ultrasonic probe includes printed boards 16 y1 , 16 y2 and 16 y3 having parallel pattern signal leads with a predetermined pitch, backing materials 18 y1 and 18 y2 , spacers 20 y1 and 20 y2. And common leads 19 y1 and 19 y2 are prepared, and the members shown in FIG. 3, that is, divided into 3 in the Y direction in advance by the grooves 12 and 13, the common electrode member 22 is fixed to the XY plane, and the opposite surface is formed. Is a strip-shaped signal electrode member 23, 24 in the X direction.
And 25 are made with the piezoelectric body 21 fixed. The process will be briefly described below.
(1)プリント板１６y1・バッキング材１８y1・プリント
板１６y2・バッキング材１８y2・プリント板１６y3の配
列で接着一体化する。このとき、各部材の一端をＸ−Ｙ
面に揃え、各プリント板のピッチを一致させる。(1) The printed board 16 y1 , the backing material 18 y1 , the printed board 16 y2 , the backing material 18 y2, and the printed board 16 y3 are bonded and integrated. At this time, connect one end of each member to XY
Align them on the surface and match the pitch of each printed board.
(2)一体化された構造体に、圧電体２１の中心軸線（長
手方向）をプリント板１６y2の信号リードのピッチ方向
に合せて乗せ、圧電体２１の各信号電極とプリント板１
６y1、１６y2及び１６y3の各信号リードを接続すると共
に（導電性接着剤、半田等使用）、圧電体２１とバッキ
ング材１８y1及び１８y2との接着をする（絶縁性接着剤
使用）。(2) The central axis (longitudinal direction) of the piezoelectric body 21 is placed on the integrated structure in accordance with the pitch direction of the signal leads of the printed board 16 y2 , and each signal electrode of the piezoelectric body 21 and the printed board 1 are placed.
The signal leads 6 y1 , 16 y2 and 16 y3 are connected (using conductive adhesive, solder, etc.), and the piezoelectric body 21 and the backing material 18 y1 and 18 y2 are bonded (using insulating adhesive). .
(3)プリント板１６y1及び１６y3の非バッキング材側の
それぞれに絶縁性スペーサ２０y1及び２０y2を接着する
（絶縁性接着剤使用）。(3) Insulating spacers 20 y1 and 20 y2 are adhered to the non-backing material sides of the printed boards 16 y1 and 16 y3 (using an insulating adhesive).
(4)Ｘ方向に所定のピッチで圧電体２１をダイシング加
工する。これにより超音波振動子１１が作られる。(4) The piezoelectric body 21 is diced at a predetermined pitch in the X direction. As a result, the ultrasonic transducer 11 is produced.
(5)共通電極に共通リード１９y1及び１９y2を接続す
る。(5) Connect common leads 19 y1 and 19 y2 to the common electrode.
(6)超音波振動子１１の上に整合層を接着し、その上に
音響レンズを設置する。(6) A matching layer is adhered on the ultrasonic oscillator 11, and an acoustic lens is placed on the matching layer.
これで２次元配列の超音波振動子を備えた超音波探触子
が構成される。This constitutes an ultrasonic probe provided with a two-dimensional array of ultrasonic transducers.
又、以下の工程によっても同じ構成の超音波探触子を得
ることができる。Also, the ultrasonic probe having the same configuration can be obtained by the following steps.
(1)バッキング材１８y1の両側にプリント板１６y1及び
１６y2を接着一体化し、これに圧電体２１を乗せて接合
する。このとき、プリント板１６y2の信号リードのピッ
チ方向と圧電体２１の中心軸線（長手方向）を一致さ
せ、信号電極１５y1及び１５y2とプリント板１６y1及び
１６y2の各信号リードをそれぞれ接続する（導電性接着
剤、半田等使用）。(1) The printed boards 16 y1 and 16 y2 are bonded and integrated on both sides of the backing material 18 y1 , and the piezoelectric body 21 is placed on and bonded to the printed boards. At this time, the pitch direction of the signal leads of the printed board 16 y2 and the central axis (longitudinal direction) of the piezoelectric body 21 are made to coincide, and the signal electrodes 15 y1 and 15 y2 are connected to the signal leads of the printed boards 16 y1 and 16 y2 , respectively. Yes (use conductive adhesive, solder, etc.).
(2)バッキング材１８y2とプリント板１６y3を接着一体
化し、これを圧電体２１及びプリント板１６y2それぞれ
に接合して信号電極１５y3とプリント板１６y3の信号リ
ードを接続する（導電性接着剤、半田等使用）。(2) The backing material 18 y2 and the printed board 16 y3 are integrally bonded and bonded to the piezoelectric body 21 and the printed board 16 y2 to connect the signal electrode 15 y3 and the signal lead of the printed board 16 y3 (conductivity). Use adhesive, solder, etc.).
(3)以下、上記(3)乃至(6)の各工程に基づく処理がなさ
れる。(3) Hereinafter, processing based on each of the above steps (3) to (6) is performed.
尚、本発明は上記実施例に限定するものではない。Ｙ方
向の分割を第４図（第３図と同一符号が付されている）
に示すような信号電極２３と２４の間及び２４と２５の
間にそれぞれスリット２６及び２７を設け、溝によると
同じ作用効果を得るようにしてもよい。又、第３図のよ
うに溝を設けた場合においても、溝の中に樹脂を充填し
機械的な強度を得るようにしてもよい。更にＹ方向の分
割数は５、７、…の奇数個であってもよい。The present invention is not limited to the above embodiment. FIG. 4 shows the division in the Y direction (the same reference numerals as in FIG. 3).
The slits 26 and 27 may be provided between the signal electrodes 23 and 24 and between the signal electrodes 24 and 25, respectively, as shown in FIG. Further, even when the groove is provided as shown in FIG. 3, the groove may be filled with resin to obtain mechanical strength. Further, the number of divisions in the Y direction may be an odd number of 5, 7, ...
（発明の効果） 以上の説明の通り、本発明の超音波探触子によれば、超
音波振動子の共通電極側を分割するとなく超音波振動子
の信号電極側を分割し、更に、各振動子個々に固着され
る信号電極を、超音波振動子のＸ方向ピッチと同じピッ
チの平行パターン状の信号リードを備えるプリント板で
中央のブロックでは中心に、端のブロックでは中央に対
して対称的な位置において取出しているため、対象形の
超音波ビームの形状を崩すことなく、信号電極の取出し
の簡便さに加えて、共通電極周りの構成を簡単し、音響
整合層等の接合を容易にし、超音波送受波特性の優れた
超音波探触子を提供することができる。(Advantages of the Invention) As described above, according to the ultrasonic probe of the present invention, the signal electrode side of the ultrasonic transducer is divided without dividing the common electrode side of the ultrasonic transducer, and The signal electrode fixed to each transducer is a printed board with parallel pattern signal leads with the same pitch as the ultrasonic transducer in the X direction. Since it is taken out at a specific position, the shape of the target ultrasonic beam is not disturbed, the signal electrode can be taken out easily, the configuration around the common electrode is simplified, and the acoustic matching layer etc. can be easily joined. In addition, it is possible to provide an ultrasonic probe having excellent ultrasonic wave transmission / reception characteristics.
第１図及び第２図は本発明の一実施例を示す構成図、第
３図は本発明の一実施例における超音波振動子用圧電体
を示す構成図、第４図は本発明の他の実施例における超
音波振動子用圧電体を示す構成図、第５図は従来例を示
す構成図である。 １１…超音波振動子、１１x…超音波振動子のエレメン
ト、１１y1、１１y2、１１y3…Ｙ方向に分割されて形成
されるブロック、１２、１３…溝、１４…共通電極、１
５y1、１５y2、１５y3…信号電極、１６y1、１６y2、１
６y3…プリント板、１７…信号リード、１８y1、１８y2
…バッキング材、１９y1、１９y2…絶縁スペーサ、２０
y1、２０y2…共通リード。1 and 2 are configuration diagrams showing an embodiment of the present invention, FIG. 3 is a configuration diagram showing a piezoelectric body for an ultrasonic transducer in an embodiment of the present invention, and FIG. 4 is another embodiment of the present invention. FIG. 5 is a configuration diagram showing a piezoelectric body for an ultrasonic transducer in the above example, and FIG. 5 is a configuration diagram showing a conventional example. 11 ... ultrasonic oscillator, 11 x ... ultrasonic transducer elements, 11 y1, 11 y2, 11 y3 ... block formed is divided in the Y direction, 12,13 ... groove, 14 ... common electrode, 1
5 y1 , 15 y2 , 15 y3 ... Signal electrodes, 16 y1 , 16 y2 , 1
6 y3 ... Printed board, 17 ... Signal lead, 18 y1 , 18 y2
… Backing materials, 19 y1 , 19 y2 … Insulating spacers, 20
y1 , 20 y2 ... Common lead.
Claims (1)
構成し、Ｘ方向で所定の走査を行いながらＹ方向の開口
可変を行う超音波探触子において、 Ｘ方向が所定のピッチで分割され、Ｙ方向がＺ軸を対称
軸として奇数Ｋ（Ｋ＝３，５，…）のブロックに分割さ
れる超音波振動子であって、Ｙ方向の分割は超音波送受
波側を分割することなく超音波送受波側の反対面からの
切り込みによって分割される超音波振動子と、 超音波送受波側面にＹ方向で各ブロックにまたがって固
着され、各ブロックを電気的に接続する帯状の共通電極
と、 該電極固着面の反対面にて各振動子の各ブロック毎に固
着される信号電極と、 前記と同じピッチの平行パターン状の信号リードを備え
るＫ個のプリント板を超音波振動子のピッチに合せて信
号電極に略垂直に配置して信号リードを介して信号電極
を取出す手段であって、中央のブロックに対しては信号
リードを備えたプリント板を該ブロックの略中央に配置
し、相対する両側のブロックに対してはそれぞれプリン
ト板をＺ軸に対して対称的な位置に配置してなる信号電
極を取出す手段と、 隣接するブロックに接続されたプリント板の間に位置し
て固定されるバッキング材と、 Ｙ方向の端に位置するブロックから共通リードを介して
共通電極を取出す手段とを備えることを特徴とする超音
波探触子。1. An ultrasonic probe in which ultrasonic transducers are arranged in a two-dimensional array on the XY plane and the aperture of the ultrasonic probe is changed in the Y direction while performing predetermined scanning in the X direction. The ultrasonic transducer is divided at a pitch of Y and divided into blocks of odd K (K = 3, 5, ...) With the Z axis as a symmetry axis. An ultrasonic transducer that is divided by cutting from the opposite surface on the ultrasonic wave transmitting and receiving side without dividing it, and is fixed to the ultrasonic wave transmitting and receiving side surface across each block in the Y direction and electrically connects each block. A strip-shaped common electrode, a signal electrode fixed to each block of each transducer on the surface opposite to the electrode fixing surface, and K printed boards having parallel pattern signal leads with the same pitch as described above. Almost perpendicular to the signal electrode according to the pitch of the ultrasonic transducer It is a means for arranging and taking out the signal electrode through the signal lead, wherein a printed board having a signal lead is arranged substantially in the center of the block for the central block, and for the blocks on opposite sides, Means for extracting the signal electrodes, which are respectively arranged at the printed boards at symmetrical positions with respect to the Z axis, a backing material fixed between the printed boards connected to the adjacent blocks, and at the end in the Y direction. A means for extracting a common electrode from a block located through a common lead, the ultrasonic probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62191296A JPH0634559B2 (en) | 1987-07-30 | 1987-07-30 | Ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62191296A JPH0634559B2 (en) | 1987-07-30 | 1987-07-30 | Ultrasonic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6436196A JPS6436196A (en) | 1989-02-07 |
| JPH0634559B2 true JPH0634559B2 (en) | 1994-05-02 |
Family
ID=16272204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62191296A Expired - Fee Related JPH0634559B2 (en) | 1987-07-30 | 1987-07-30 | Ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634559B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60192500A (en) * | 1984-03-14 | 1985-09-30 | Nippon Dempa Kogyo Co Ltd | Matrix array type ultrasonic wave probe and its manufacture |
| JPS61114178A (en) * | 1984-11-08 | 1986-05-31 | Omron Tateisi Electronics Co | Matrix array type ultrasonic oscillator |
-
1987
- 1987-07-30 JP JP62191296A patent/JPH0634559B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6436196A (en) | 1989-02-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20030085635A1 (en) | Multidimensional ultrasonic transducer arrays | |
| US4801835A (en) | Ultrasonic probe using piezoelectric composite material | |
| US5894646A (en) | Method for the manufacture of a two dimensional acoustic array | |
| US4692654A (en) | Ultrasonic transducer of monolithic array type | |
| US4640291A (en) | Bi-plane phased array for ultrasound medical imaging | |
| US4773140A (en) | Phased array transducer construction | |
| JPH0549288B2 (en) | ||
| JPH0723500A (en) | Two-dimension array ultrasonic wave probe | |
| US4644214A (en) | Probe for electronic scanning type ultrasonic diagnostic apparatus | |
| JP4426513B2 (en) | Ultrasonic probe and manufacturing method thereof | |
| US6288477B1 (en) | Composite ultrasonic transducer array operating in the K31 mode | |
| JPS5920240B2 (en) | Ultrasonic probe and method for manufacturing the ultrasonic probe | |
| JPH0634559B2 (en) | Ultrasonic probe | |
| US6333590B1 (en) | Ultrasonic transducer having laminate structure, ultrasonic probe and production method thereof | |
| JP7176346B2 (en) | Ultrasonic element and ultrasonic device | |
| JP4252441B2 (en) | Ultrasonic probe | |
| JPS6268400A (en) | Manufacture of ultrasonic probe | |
| JPS61253999A (en) | Ultrasonic oscillator | |
| JPS59152800A (en) | Manufacture of ultrasonic wave probe | |
| JP2945978B2 (en) | Array type ultrasonic probe | |
| JPH0543239B2 (en) | ||
| JPH0543240B2 (en) | ||
| JP2633549B2 (en) | Ultrasonic probe | |
| JPS63276400A (en) | Ultrasonic probe and its manufacture | |
| JP2694962B2 (en) | Ultrasonic probe and method of manufacturing the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |