JPH06320086A - Coating device - Google Patents
Coating deviceInfo
- Publication number
- JPH06320086A JPH06320086A JP13003693A JP13003693A JPH06320086A JP H06320086 A JPH06320086 A JP H06320086A JP 13003693 A JP13003693 A JP 13003693A JP 13003693 A JP13003693 A JP 13003693A JP H06320086 A JPH06320086 A JP H06320086A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- bar
- substrate
- pressing roll
- roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は，枚葉の硬質基板に塗布
バーを用いて塗布液を塗布する塗布装置，特に，フラッ
トパネルディスプレイ製造工程において，感光性樹脂組
成物を透明基板上に塗布するロッドコーターあるいはバ
ーコーターに関わるものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating apparatus for coating a coating liquid onto a single-piece hard substrate using a coating bar, and particularly, in a flat panel display manufacturing process, coating a photosensitive resin composition on a transparent substrate. It is related to a rod coater or a bar coater.
【０００２】[0002]
【従来の技術】バー状の支持体に，塗布液を計量し，塗
布するコーターは，ロッドコーターあるいはバーコータ
ーと呼ばれている。バーコーターの塗布方法は，塗布
液をキスアプリケーターで塗布し，バーを用いて平滑化
と計量を行うもの，ワイヤーを巻いたバーの前方に塗
布液を供給し，バーを移動させコーティングを行うも
の，塗布バー（ワイヤーバー）を回転させ，塗布液を
計量し，上方の押圧ロ−ルと塗布バーとで基板を挟持し
ながら，コーティングを行うもの，以上の３方式に大別
される。このうち，は，連続フイルムへの塗布に適
し，は，枚葉フイルムへの塗布に適し，は，ガラス
・セラミックス等硬基板への塗布に適している。2. Description of the Related Art A coater for measuring and applying a coating liquid on a bar-shaped support is called a rod coater or a bar coater. The coating method of the bar coater is one in which the coating solution is applied with a kiss applicator and smoothing and weighing is performed using the bar, and the method in which the coating solution is supplied in front of the bar wound with wire and the bar is moved to perform coating. , The coating bar (wire bar) is rotated, the coating liquid is measured, and the coating is performed while the substrate is held between the upper pressing roll and the coating bar. Among them, is suitable for coating on a continuous film, is suitable for coating on a single-wafer film, and is suitable for coating on a hard substrate such as glass and ceramics.
【０００３】次に，本発明の対象であるの方式につい
ての従来技術について説明する。表面にゴムを巻いたロ
−ル状の押圧ロ−ルを回転させ基板を送り出し塗布バー
を順方向に回転させることにより，ガラス基板に塗布を
行う装置においては，塗膜の膜厚分布，スジムラ，面状
ムラ等の膜特性は，塗布装置のワイヤー径，塗布バーの
精度，押圧ロ−ルの表面の材質・構造，押圧ロ−ルの押
込量，塗布バーへの塗布液ののり，装置駆動時の振動等
に影響され易く，次のような問題が起こることが多い。Next, a conventional technique for the system which is the object of the present invention will be described. In an apparatus for coating a glass substrate by rotating a roll-shaped pressure roll having rubber on its surface to feed the substrate and rotating the coating bar in the forward direction, the film thickness distribution of the coating film , Film characteristics such as unevenness of surface, wire diameter of coating device, precision of coating bar, surface material / structure of pressing roll, pressing amount of pressing roll, paste of coating liquid on coating bar, device It is easily affected by vibrations during driving, and the following problems often occur.
【０００４】図３に示すように，第１に塗膜にスジ状で
ない面状のムラが発生しやすい。第２に，面状のムラに
加えて，タテスジ，ヨコスジ等のスジムラも発生しやす
い。第３にこれらのムラの他に，基板の塗り始めからワ
イヤーバーの円周長さに相当する距離までの膜厚が其以
後の膜厚より厚くなってしまうという問題である。これ
らのムラは，塗膜の均一性が要求される工業分野におい
て非常に問題になる。例えば，液晶ディスプレイのカラ
ーフィルタ基板の作成においては，このような塗布装置
を用いてブラックマトリックスを形成するためにレジス
ト塗布を行った場合，レジスト膜厚分布が悪いため，現
像後のレジスト線幅がばらつくという問題が起こり，着
色感光性樹脂組成物の塗布に用いた場合は，塗膜のムラ
が視覚的にも容易に認識されるため，カラーフィルタと
しては，致命的な問題となってしまう。As shown in FIG. 3, firstly, non-striped surface unevenness is likely to occur in the coating film. Secondly, in addition to surface unevenness, streaks, horizontal stripes, and other streaks are likely to occur. Thirdly, in addition to these irregularities, there is a problem that the film thickness from the beginning of coating the substrate to the distance corresponding to the circumferential length of the wire bar becomes thicker than the subsequent film thickness. These irregularities become a serious problem in the industrial field where uniformity of the coating film is required. For example, in the production of a color filter substrate for a liquid crystal display, when resist coating is performed using such a coating device to form a black matrix, the resist film thickness distribution is poor and the resist line width after development is When the colored photosensitive resin composition is used for coating, the unevenness of the coating film is easily visually recognized, which is a fatal problem for the color filter.
【０００５】[0005]
【発明が解決しようとする課題】本発明は，上述の問題
点に鑑みてなされたものである。すなわち，塗膜に発生
するタテスジ，ヨコスジの線状ムラ，面状ムラ，塗布開
始部分の過剰膜厚部を除去し，膜厚分布に関しても視覚
的にも良好な塗膜を得ることができる塗布装置を提供す
ることである。The present invention has been made in view of the above problems. That is, it is possible to obtain a coating that is visually good in terms of film thickness distribution by removing vertical stripes, uneven stripes, surface unevenness, and excess film thickness portion at the start of coating that occur in the coating film. It is to provide a device.
【０００６】[0006]
【課題を解決するための手段】請求項１に記載の手段
は，塗布バーと押圧ロ−ルとの間に水平に挟持された基
板を移動させることにより，塗布液が塗布される塗布装
置において，塗布バー２と基板１とが接する部分より基
板進行方向側の塗布バー２の近傍もしくは塗布バー２に
接してドクター４が配置されていることを特徴とする塗
布装置である。請求項２に記載の手段は，請求項１記載
の塗布装置において，押圧ロ−ル３の表面ゴム層３ａの
下に圧縮層３ｃが設けられていることを特徴とする塗布
装置である。請求項３に記載の手段は，請求項２記載の
塗布装置において，押圧ロ−ル３の表面ゴム層３ａのゴ
ム硬度が７０°未満であることを特徴とする塗布装置で
ある。請求項４に記載の手段は，請求項１記載の塗布装
置において，基板搬送機構と塗布バー回転機構と押圧ロ
−ル回転機構とが各々独立して駆動されることを特徴と
する塗布装置である。According to a first aspect of the present invention, there is provided a coating apparatus in which a coating liquid is coated by moving a substrate horizontally sandwiched between a coating bar and a pressing roll. The doctor apparatus is characterized in that a doctor 4 is arranged in the vicinity of the coating bar 2 on the substrate advancing direction side of a portion where the coating bar 2 and the substrate 1 contact each other or in contact with the coating bar 2. According to a second aspect of the present invention, in the coating apparatus according to the first aspect, the compression layer 3c is provided below the surface rubber layer 3a of the pressing roll 3. According to a third aspect of the present invention, in the coating apparatus according to the second aspect, the surface rubber layer 3a of the pressing roll 3 has a rubber hardness of less than 70 °. According to a fourth aspect of the present invention, in the coating apparatus according to the first aspect, the substrate transport mechanism, the coating bar rotating mechanism, and the pressing roll rotating mechanism are independently driven. is there.
【０００７】まず，塗布開始部分の膜厚過剰部の膜厚を
他の部分と等しくする手段について述べる。塗布開始部
分が他の部分より厚くなる理由として次のようなことが
考えられる。塗布バー２（ワイヤーバー）の下部は，塗
布液５の中に浸漬されている。塗布前の塗布バー２上の
塗布液量を２の量とする。このうち１．５の量が基板１
に塗布されるとすれば，塗布バー２が１回転する間は，
１．５の量が塗布される。この時，塗布バー２上に残っ
た量は，０．５の量である。塗布バー２が塗布液５の中
を通り，再び液面上に出てきた時，塗布バー２上に１．
７の量があったとすると２回転目以後は，１回転目の膜
厚よりも薄くなるであろう。すなわち，一旦，液が塗布
されると，その後１回，液中を通るだけでは，塗布バー
２は塗布前よりも少ない液量しか掻き上げることができ
ない。First, a means for making the film thickness of the excessive film thickness portion at the coating start portion equal to the other portion will be described. The following may be the reason why the coating start portion becomes thicker than other portions. The lower part of the coating bar 2 (wire bar) is immersed in the coating liquid 5. The amount of the coating liquid on the coating bar 2 before coating is set to 2. Of these, 1.5 is substrate 1
If the coating bar 2 is rotated once,
An amount of 1.5 is applied. At this time, the amount remaining on the coating bar 2 is 0.5. When the coating bar 2 passes through the coating liquid 5 and comes out again on the liquid surface, 1.
If there is an amount of 7, it will be thinner than the film thickness of the first rotation after the second rotation. That is, once the liquid is applied, the application bar 2 can scrape up only a smaller amount of the liquid than before the application, by merely passing through the liquid once.
【０００８】そこで，図１に示すように，塗布バー２と
基板１とが接する部分より，進行方向側に塗布バー２に
接してドクター４を設け，塗布バー２上の余分な塗布液
５を掻き落とすようにしたところ，塗布開始部分だけ膜
厚が厚くなる問題を解決することができた。すなわち，
基板１に塗布するしないにかかわらず，常に一定量の塗
布液５を掻き上げることにより，塗布開始から終了まで
一定の膜厚を得ることができる。ドクター４の位置は，
塗布液５面上又は塗布液５の中が可能であるが，塗布液
５の中に設けると液面が低い場合に掻き上げる塗布液５
の量が不十分になる恐れがあるため，塗布液５の液面よ
り上方に設けるのが好ましい。Therefore, as shown in FIG. 1, a doctor 4 is provided in contact with the coating bar 2 on the advancing direction side of the portion where the coating bar 2 and the substrate 1 are in contact with each other, and the excess coating liquid 5 on the coating bar 2 is removed. By scraping off, the problem that the film thickness was thick only at the coating start part could be solved. That is,
Regardless of whether or not the substrate 1 is coated, a constant amount of the coating liquid 5 is constantly scraped up to obtain a constant film thickness from the start to the end of coating. The position of doctor 4 is
The coating liquid 5 can be on the surface of the coating liquid 5 or in the coating liquid 5. However, when the coating liquid 5 is provided, the coating liquid 5 is scraped up when the liquid surface is low.
Therefore, it is preferable to provide it above the liquid surface of the coating liquid 5.
【０００９】次に，面状ムラの除去手段について説明す
る。本発明の対象となるバーコーターにおいては，押圧
ロ−ル３の表面が，ゴム層からなる場合が多い。これ
は，基板１のそり，うねり，ワイヤーバーのそり等があ
る場合でも，基板１を表面にゴム層を有する押圧ロ−ル
３でバーに押しつけることにより，基板１と塗布バーと
がガラス全長にわたって接するようにし，塗膜の均一性
を得るものと考えられる。Next, the means for removing surface unevenness will be described. In the bar coater to which the present invention is applied, the surface of the pressing roll 3 is often made of a rubber layer. This is because even if the substrate 1 has a warp, a swell, a warp of a wire bar, etc., the substrate 1 and the coating bar are pressed against the bar by a pressing roller 3 having a rubber layer on the surface thereof so that the entire length of the glass can be maintained. It is considered that the coating film becomes uniform by making contact with each other.
【００１０】ところが，押圧ロ−ル３のロ−ル芯３ｅ上
に表面ゴム層３ａのみしかないと面状のムラが発生しや
すい。そこで図２に示すように，押圧ロ−ル３の表面ゴ
ム層３ａの下に圧縮層３ｃを設けたところ面状ムラを除
去することが可能となった。圧縮層３ｃは表面ゴム層３
ａの直下でもよいし，他の層，基布層３ｂを挟んで設け
ても良い。更に，表面ゴム層３ａ／圧縮層３ｃの構成
は，表面ゴム層３ａのゴム硬度が，７０°未満の場合
に，特に，有効であることがわかった。However, if there is only the surface rubber layer 3a on the roll core 3e of the pressing roll 3, the unevenness of the surface is likely to occur. Therefore, as shown in FIG. 2, when the compression layer 3c is provided under the surface rubber layer 3a of the pressing roll 3, it becomes possible to remove the unevenness of the surface. The compression layer 3c is the surface rubber layer 3
It may be directly below a, or may be provided by sandwiching another layer or the base fabric layer 3b. Further, it has been found that the constitution of the surface rubber layer 3a / the compression layer 3c is particularly effective when the rubber hardness of the surface rubber layer 3a is less than 70 °.
【００１１】圧縮層３ｃの材料としては，振動，衝撃の
伝達防止又は緩衝の目的で使用されるゴム材料を用いる
ことができる。この圧縮層３ｃは防振ゴム材料を用いる
ことができ，エボナイト，気泡性ゴム，布またはコード
で補強されたゴム等も含む。また，天然ゴムラテックス
及び合成ゴムラテックスまたはこれらの混合物から作ら
れるクッション用フォームラバーを使用することができ
る。As the material of the compression layer 3c, a rubber material used for the purpose of preventing transmission of vibrations and shocks or buffering can be used. This compression layer 3c can use a vibration-proof rubber material, and also includes ebonite, foamed rubber, rubber reinforced with cloth or cord, or the like. Also, foam rubber for cushions made from natural rubber latex and synthetic rubber latex or mixtures thereof can be used.
【００１２】なお，上記のゴムの硬さ試験は，ＪＩＳに
よるゴム硬度試験の次のいずれかにより行いうる。 （１）スプリング式硬さ試験（Ａ形及びＣ形） （２）定荷重（オルゼン）式硬さ試験 （３）定荷重（プセイ・ジョンズ）式硬さ試験 実施例では，（１）スプリング式硬さ試験（Ａ形及びＣ
形）で行った。図４に示すように，Ａ形では，１０００
ｇｆの荷重で，Ｃ形では５０００ｇｆｋの荷重で，試験
片表面に加圧面を接触させたとき，加圧面の中心の穴か
らバネ圧力により，突き出ている押針がゴム面によって
押し戻される距離を硬さとして目盛りに示すようになっ
ている。試験方法は，試験機を垂直に保ち，押針が試験
片表面に垂直になるように加圧面を接触させて，直ちに
目盛りを読み，その試験片の硬さを求める。もし，試験
片を接触させてから一定時間後に目盛りを読む様な場合
には，試験機を垂直に保ち，押針が測定面に垂直になる
ように作られた適当な補助装置を用いることが望まし
い。The hardness test of the above rubber can be carried out by any of the following rubber hardness tests according to JIS. (1) Spring type hardness test (A type and C type) (2) Constant load (Olzen) type hardness test (3) Constant load (Pussey-Johns) type hardness test In the examples, (1) spring type Hardness test (Type A and C
Shape). As shown in FIG.
With a load of gf and a load of 5000 gfk for C type, when the pressure surface is brought into contact with the surface of the test piece, the distance that the protruding needle is pushed back by the rubber surface due to the spring pressure from the hole in the center of the pressure surface is hardened. As a matter of fact, the scale is shown. The test method is to keep the tester vertical, contact the pressure surface so that the push needle is perpendicular to the surface of the test piece, read the scale immediately, and determine the hardness of the test piece. If the scale is read after a certain period of time after contacting the test piece, keep the tester vertical and use a suitable auxiliary device designed so that the push needle is perpendicular to the measuring surface. desirable.
【００１３】次に，タテスジ，ヨコスジ等の線状ムラを
除去する手段について説明する。この種の塗布装置は，
基板１を搬送しつつ押圧ロ−ル３にて送りだす機構であ
るため，搬送機構と押圧ロ−ルが同期して駆動されるこ
とが望ましい。このためには，ギヤ，チェーン，ベルト
等で２つの機構を連結し，一つの駆動力で同時に駆動さ
せるようにすることが，最も簡便である。ところが，こ
のような構造においては，連結部分の機械的要因，例え
ば，ギア同志の噛み合い，チェーンとギヤの噛み合い，
ベルトのたるみ等に起因する振動や回転ムラが起こり，
塗膜に細かい線状ムラが生じやすい。Next, a means for removing linear unevenness such as vertical stripes and horizontal stripes will be described. This type of applicator
Since the substrate 1 is a mechanism that conveys the substrate 1 and sends it out by the pressing roll 3, it is desirable that the conveying mechanism and the pressing roll be driven in synchronization. For this purpose, it is simplest to connect the two mechanisms with a gear, a chain, a belt, etc., and drive them simultaneously with one driving force. However, in such a structure, mechanical factors of the connecting portion, such as meshing between gears, meshing between chain and gear,
Vibration and uneven rotation due to slack in the belt occur,
Fine linear unevenness is likely to occur on the coating film.
【００１４】そこで，本発明においては，基板搬送機構
と押圧ロ−ル回転機構とを連結させずに駆動させ，塗布
を行うことにより，線状ムラを除去することができる。
ここで，押圧部材が押圧ロ−ル３の場合は，回転精度の
良いモーターから直動で回転させることにより，良好な
塗膜の面状態をうることができる。また，複数の基板搬
送ロ−ラー６上に基板１をのせて搬送を行う場合，塗布
時の基板搬送をローラーは用いず，押圧ロ−ル３による
移動のみで行うと，良好な塗膜の面状態を得ることがで
きる。そして，塗布終了後は，再びローラーにて搬送す
ればよい。さらに，塗布バー２も独立して，回転させる
ことにより，順，逆両方向塗布が可能となり，回転数を
変えれば，膜厚の変更も可能である。Therefore, in the present invention, the linear unevenness can be removed by driving the substrate transfer mechanism and the pressing roll rotating mechanism without connecting them to perform coating.
Here, when the pressing member is the pressing roll 3, it is possible to obtain a good surface condition of the coating film by rotating the motor with direct rotation from a motor having high rotational accuracy. Further, when the substrates 1 are placed on a plurality of substrate transport rollers 6 and transported, the substrate is not transported at the time of coating, and only the movement by the pressing roll 3 is performed to obtain a good coating film. The surface state can be obtained. Then, after the application is completed, it may be conveyed again by the rollers. Furthermore, by independently rotating the coating bar 2, coating can be performed in both forward and backward directions, and the film thickness can be changed by changing the number of rotations.
【００１５】[0015]
【実施例】本発明の塗布装置を第１図に示す。本発明の
塗布装置を用い，カラーフィルタ用青色感光性樹脂組成
物（ザ・インクテック株式会社製）を塗布液５として，
３００×３５０×１．１ｍｍガラス基板１（コーニング
社製７０５９）上に塗布した。押圧ロ−ル３は，図２に
示すように，ロ−ル芯３ｅ上に１ｍｍ厚のソリッドラバ
ー製ゴム層３ｄ，綿布製の基布層（５００μｍ厚）３
ｂ，発泡ＮＢＲゴム（アクリロニトリルとブタジエンの
共重合体）からなる５００μｍ厚の圧縮層３ｃ，綿布製
の基布層（５００μｍ厚）３ｂ，メチルビニルシロキサ
ン重合体にシリカを４９％含有させた表面ゴム層（５０
０μｍ厚）３ａを順に積層したものを用い，表面ゴム層
３ａのゴム硬度（ＪＩＳ）が３０°，４０°，５０°，
６０°，６５°のものについて検討した。塗布中は，基
板搬送ロ−ラー６は，駆動させず，押圧ロ−ル３の回転
によってのみ基板１を送った。塗布バー２は，正方向に
回転させた。塗布液５の高さは，塗布バー２のボトムか
ら２ｍｍ上方にくるようにした。塗布バー２は，ステン
レススチール製ロッドにワイヤー（１５０〜２００μ
ｍ）を巻いたものを用いた。ドクター４を液面より上方
で塗布バー２に接して設けた。押圧ロ−ル３はモーター
から直動させた。塗布前に，塗布バー２を回転させて塗
布バー２に塗布液５を十分なじませた。以上の条件で塗
布を行ったところ，ナトリウムランプ光下で面状態の目
視検査を行ったところ，表１のような結果が得られた。
面内膜厚分布は，１．０±０．０３μｍであった。EXAMPLE FIG. 1 shows a coating apparatus of the present invention. Using the coating apparatus of the present invention, a blue photosensitive resin composition for color filters (manufactured by The Inktech Co., Ltd.) was used as a coating liquid 5,
It was applied onto a 300 × 350 × 1.1 mm glass substrate 1 (7059 manufactured by Corning Incorporated). As shown in FIG. 2, the pressing roll 3 includes a rubber layer 3d made of solid rubber having a thickness of 1 mm and a base cloth layer made of cotton cloth (thickness of 500 μm) 3 having a thickness of 1 mm on the roll core 3e.
b, a compressed layer 3c of foamed NBR rubber (copolymer of acrylonitrile and butadiene) having a thickness of 500 μm, a base cloth layer (500 μm thick) 3b made of cotton cloth, a surface rubber containing 49% silica in a methyl vinyl siloxane polymer. Layer (50
0 μm thickness) 3a are laminated in this order, and the surface rubber layer 3a has a rubber hardness (JIS) of 30 °, 40 °, 50 °,
Examinations were made for 60 ° and 65 °. During coating, the substrate transfer roller 6 was not driven, and the substrate 1 was sent only by the rotation of the pressing roll 3. The coating bar 2 was rotated in the forward direction. The height of the coating liquid 5 was set to be 2 mm above the bottom of the coating bar 2. The coating bar 2 is a stainless steel rod with a wire (150 to 200 μm).
m) was used. A doctor 4 was provided above the liquid surface and in contact with the coating bar 2. The pressing roll 3 was moved directly from the motor. Before coating, the coating bar 2 was rotated so that the coating liquid 5 was sufficiently spread on the coating bar 2. When the coating was performed under the above conditions, the surface condition was visually inspected under the light of a sodium lamp, and the results shown in Table 1 were obtained.
The in-plane film thickness distribution was 1.0 ± 0.03 μm.
【００１６】（比較例）押圧ロ−ル３の表面ゴム層３ａ
のゴム硬度を７０°とした以外は，実施例と同様にして
塗布をおこなったところ塗布ムラが多発してしまった。(Comparative Example) Surface rubber layer 3a of the pressing roll 3
When coating was performed in the same manner as in the example except that the rubber hardness of 70 was 70 °, uneven coating occurred frequently.
【００１７】[0017]
【表１】 ◎ 極めて良好 ○ 良好 × ムラが多い[Table 1] ◎ Very good ○ Good × Much unevenness
【００１８】[0018]
【発明の効果】本発明の塗布装置によれば，基板や塗布
バーのそり等の影響を押圧ロ−ルにより相殺でき，塗布
バー１回転目の膜厚増加現象をドクターにより防止する
ことができ，押圧ロ−ル回転機構，基板搬送機構，塗布
バー回転機構を独立して駆動させることにより，機械的
振動等を除去することができるため，膜厚分布が良好な
かつ視覚的にもムラのない塗膜を得ることができる。特
に，カラーフィルタの着色感光性樹脂組成物の塗布に本
発明を適用すれば，ムラのない均一な着色膜が作成でき
るため，高品質カラーフィルターの製造が可能となる。According to the coating apparatus of the present invention, the influence of the warp of the substrate and the coating bar can be offset by the pressing roll, and the film thickness increase phenomenon at the first rotation of the coating bar can be prevented by the doctor. By independently driving the pressure roll rotation mechanism, substrate transfer mechanism, and coating bar rotation mechanism, it is possible to eliminate mechanical vibration, etc., so that the film thickness distribution is good and there is no unevenness visually. A coating film can be obtained. In particular, when the present invention is applied to the application of the colored photosensitive resin composition of the color filter, a uniform and uniform colored film can be formed, and thus a high quality color filter can be manufactured.
【図１】本発明の塗布装置の実施例を説明する側面図で
ある。FIG. 1 is a side view illustrating an embodiment of a coating apparatus of the present invention.
【図２】本発明の押圧ロ−ル３の層構成例を説明する概
念図である。FIG. 2 is a conceptual diagram illustrating an example of a layer structure of a pressing roll 3 of the present invention.
【図３】従来の塗布装置で発生する欠陥を説明する平面
図である。FIG. 3 is a plan view illustrating a defect that occurs in a conventional coating apparatus.
【図４】ゴムの硬さ試験を説明する側面図である。FIG. 4 is a side view illustrating a rubber hardness test.
１ 基板 ２ 塗布バー ３ 押圧ロ−ル ３ａ 表面ゴム層 ３ｂ 基布層 ３ｃ 圧縮層 ３ｄ ゴム層 ３ｅ ロ−ル芯 ４ ドクター ５ 塗布液 ６ 基板搬送ロ−ラー 1 substrate 2 coating bar 3 pressing roll 3a surface rubber layer 3b base cloth layer 3c compression layer 3d rubber layer 3e roll core 4 doctor 5 coating liquid 6 substrate transfer roller
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成５年１０月２２日[Submission date] October 22, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】図面[Document name to be corrected] Drawing
【補正対象項目名】全図[Correction target item name] All drawings
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図１】 [Figure 1]
【図２】 [Fig. 2]
【図３】 [Figure 3]
【図４】 [Figure 4]
Claims (4)
持された基板を移動させることにより，塗布液が塗布さ
れる塗布装置において，塗布バー（２）と基板（１）と
が接する部分より基板進行方向側の塗布バー（２）の近
傍もしくは塗布バー（２）に接してドクター（４）が配
置されていることを特徴とする塗布装置。1. A coating device in which a coating liquid is coated by moving a substrate horizontally sandwiched between a coating bar and a pressing roll, the coating bar (2) and the substrate (1) are separated from each other. A coating apparatus, characterized in that a doctor (4) is arranged in the vicinity of the coating bar (2) on the substrate advancing direction side of the contact portion or in contact with the coating bar (2).
ロ−ル（３）の表面ゴム層（３ａ）の下に圧縮層（３
ｃ）が設けられていることを特徴とする塗布装置。2. The coating device according to claim 1, wherein a compression layer (3) is formed under the surface rubber layer (3a) of the pressing roll (3).
c) The coating device is provided.
ロ−ル（３）の表面ゴム層（３ａ）のゴム硬度が７０°
未満であることを特徴とする塗布装置。3. The coating apparatus according to claim 2, wherein the surface rubber layer (3a) of the pressure roll (3) has a rubber hardness of 70 °.
The coating device is less than.
搬送機構と塗布バー回転機構と押圧ロ−ル回転機構とが
各々独立して駆動されることを特徴とする塗布装置。4. The coating apparatus according to claim 1, wherein the substrate transporting mechanism, the coating bar rotating mechanism and the pressing roll rotating mechanism are independently driven.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13003693A JP3563745B2 (en) | 1993-05-07 | 1993-05-07 | Coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13003693A JP3563745B2 (en) | 1993-05-07 | 1993-05-07 | Coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06320086A true JPH06320086A (en) | 1994-11-22 |
| JP3563745B2 JP3563745B2 (en) | 2004-09-08 |
Family
ID=15024557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13003693A Expired - Lifetime JP3563745B2 (en) | 1993-05-07 | 1993-05-07 | Coating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3563745B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113782915A (en) * | 2021-08-27 | 2021-12-10 | 合肥国轩高科动力能源有限公司 | Diaphragm and preparation method and application thereof |
-
1993
- 1993-05-07 JP JP13003693A patent/JP3563745B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113782915A (en) * | 2021-08-27 | 2021-12-10 | 合肥国轩高科动力能源有限公司 | Diaphragm and preparation method and application thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3563745B2 (en) | 2004-09-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100577792B1 (en) | Rubbing machine of LCD having religning function and method for rubbing using the same | |
| KR100423161B1 (en) | Thin film forming device | |
| JPH06320086A (en) | Coating device | |
| CN1203357C (en) | Abrasivi device for providing uniform orientaction in liquid crystal display device | |
| JP3507782B2 (en) | Roll coater and coating method using the same | |
| JP4739809B2 (en) | Manufacturing method of large-diameter tubular product | |
| JPH04247259A (en) | Device for applying adhesive agent to sheet material | |
| JP2002514506A (en) | Method and apparatus for coating a solution on a substrate | |
| EP1080791B1 (en) | Process for coating a solution onto a substrate | |
| JP2003112405A (en) | Back wiping squeegee of screen printing machine | |
| JP2004148309A (en) | Tension expansion film forming apparatus | |
| KR100310611B1 (en) | Device for printing alignment solution of lcd | |
| JPH0447291B2 (en) | ||
| JPH03198029A (en) | Apparatus for producing liquid crystal display element | |
| JP2002301803A (en) | Orientation film printing device | |
| JPH10202156A (en) | Roll coater | |
| JPH08211626A (en) | Resist coating device | |
| KR20070105456A (en) | Apparatus and method for coating polyimide film | |
| JPH09299841A (en) | Roll coater | |
| JPS6231178Y2 (en) | ||
| JP2888411B2 (en) | Printing method using plate-shaped intaglio and apparatus used for the printing method | |
| JPH11202334A (en) | Manufacture of liquid crystal display device | |
| JPH11219055A (en) | Fixing device | |
| JPH0615655A (en) | Heating roll cleaning device | |
| JPS6359534A (en) | Cleaning roller for screen printing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Effective date: 20040511 Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20040604 |
|
| R150 | Certificate of patent (=grant) or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080611 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090611 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090611 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 6 Free format text: PAYMENT UNTIL: 20100611 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 7 Free format text: PAYMENT UNTIL: 20110611 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110611 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 8 Free format text: PAYMENT UNTIL: 20120611 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 8 Free format text: PAYMENT UNTIL: 20120611 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130611 Year of fee payment: 9 |
|
| EXPY | Cancellation because of completion of term |