JPH06306667A - Electrolytic regeneration device for alkali permanganate solution - Google Patents

Electrolytic regeneration device for alkali permanganate solution

Info

Publication number
JPH06306667A
JPH06306667A JP5112491A JP11249193A JPH06306667A JP H06306667 A JPH06306667 A JP H06306667A JP 5112491 A JP5112491 A JP 5112491A JP 11249193 A JP11249193 A JP 11249193A JP H06306667 A JPH06306667 A JP H06306667A
Authority
JP
Japan
Prior art keywords
solution
electrolytic
anode
flow
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5112491A
Other languages
Japanese (ja)
Inventor
Hiroki Shono
浩己 庄野
Yoshihiko Morikawa
佳彦 森川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Densan Ltd
Original Assignee
Ebara Densan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Densan Ltd filed Critical Ebara Densan Ltd
Priority to JP5112491A priority Critical patent/JPH06306667A/en
Publication of JPH06306667A publication Critical patent/JPH06306667A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes For Compound Or Non-Metal Manufacture (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • ing And Chemical Polishing (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PURPOSE:To efficiently perform electrolytic regeneration of a manganate to a permanganate by electrolytic oxidation and to extremely simplify the operation and handling. CONSTITUTION:The electrolytic regeneration device is provided with an electrode composed of a rod like cathode 2 and an anode 3 in solution dipping state in a closed tank main body 1 having a flow-out opening and flow-in opening 12, 13 of an alkali permanganate solution and the net like anode 3 is provided around the rod like cathode 1 in cylindrical shape and the regeneration efficiency is improved by connecting the tank main body 1 to a besmear treating vessel 7 in a circulating passage between a solution flow-in passage 5 provided with a pump 4 and stop valves 14, 15 and a solution flow-out passage 6 provided with a stop valve 16 and arranged with a strainer 8 in the solution flow-in passage 5 to constantly allow a large quantity of the solution containing the high conc. manganate solution to come into contact with the electrolytic regeneration electrode. Since the solution is forcibly circulated, it is unnecessary to control flow rate and to frequently adjust the valves and the handling is easy.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、デスミア処理槽のアル
カリ過マンガン酸塩溶液中に発生したマンガン酸塩に対
して電気的に酸化して、過マンガン酸塩に再生処理する
ための装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for electrically reoxidizing manganate generated in an alkaline permanganate solution in a desmear treatment tank to regenerate it into permanganate. It is a thing.

【0002】[0002]

【従来の技術】一般に、プリント基板の製造のための処
理工程で用いられる腐蝕溶液では、酸化剤として過マン
ガン酸塩を含むアルカリ性浴であるため腐蝕操作する
と、過マンガン酸塩が転化してマンガン酸塩の沈殿物が
分解副生物として蓄積され、腐蝕液の能力低下を来すこ
とが知れ、特に、プリント基板として多層配線回路板の
製造ではドリリングによる摩擦熱で、溶融した樹脂(ス
ミア)がホール内の内層回路断面に付着して接続障害を
生じる。そこでこのスミアを除去するためにアルカリ過
マンガン酸塩溶液を用いてスミアを除去するのである
が、プリント基板を処理することで、過マンガン酸塩が
マンガン酸塩へと変化してしまい、さらに反応がすすむ
と二酸化マンガンのスラッジとなってしまう。そこで、
この二酸化マンガンのスラッジを発生させないようマン
ガン酸塩の段階で過マンガン酸塩に再生するように、数
種の方法が見出されてきた。その方法としては再生剤
による方法(米国特許第4592852号)単筒電極
式電解再生装置(図7に示すように多孔筒対a内に中心
に陰極棒bとその周囲に陽極棒cとを備えたもの)をデ
スミア処理槽に直接入れるインタンク方式や非密閉型
オーバーフロータイプのアウトタンク方式などが知られ
ている。
2. Description of the Related Art Generally, a corrosive solution used in a processing step for manufacturing a printed circuit board is an alkaline bath containing permanganate as an oxidant, and therefore, when corrosive operation is performed, permanganate is converted into manganese. It is known that the precipitate of acid salt accumulates as a decomposition by-product, which lowers the ability of the corrosive liquid. In particular, in the production of a multilayer wiring circuit board as a printed circuit board, the molten resin (smear) is generated by the frictional heat caused by drilling. It adheres to the inner layer circuit cross section in the hole and causes a connection failure. Therefore, in order to remove this smear, smear is removed using an alkaline permanganate solution, but by treating the printed circuit board, permanganate is changed to manganate, and further reaction occurs. As it proceeds, it becomes manganese dioxide sludge. Therefore,
Several methods have been found to regenerate the permanganate at the manganate stage so as not to generate this manganese dioxide sludge. As the method, a method using a regenerant (US Pat. No. 4,592,852) is provided with a single-tube electrode type electrolytic regenerator (as shown in FIG. 7, a perforated tube pair a is provided with a cathode rod b at the center and an anode rod c around the cathode rod b. It is known that the in-tank system that puts directly into the desmear processing tank and the non-sealed overflow-type out tank system.

【0003】[0003]

【発明が解決しようとする課題】ところが、従来の再生
剤による方法では同時にスラッジの発生も認められ、
また単筒電極式電解再生装置では電流に対する電解再
生効率が10〜15%と低いし、インタンク方式では液
の対流が自然対流となるため電解再生電極の回りではマ
ンガン酸塩から過マンガン酸塩に再生されていくが、電
極から遠い所は再生されにくいため液に濃度差が生じて
しまう欠点があるし、また、非密閉型オーバーフロータ
イプのアウトタンク方式では液があふれ出てしまうこ
とがあり、また、電解再生槽に流れる流量が少ないため
効率も悪いなど問題があった。本発明は、これら従来の
諸欠点を容易に排除しようとするもので、マンガン酸塩
から過マンガン酸塩への電解再生効率を著しく向上さ
せ、かつ取扱いもすこぶる容易である電解再生装置を提
供することを目的とするものである。
However, in the conventional method using the regenerant, the generation of sludge is recognized at the same time,
Further, in the single-tube electrode type electrolytic regenerator, the electrolytic regenerating efficiency with respect to the current is as low as 10 to 15%, and in the in-tank system, the convection of the liquid is natural convection. However, there is a drawback that concentration difference occurs in the liquid because it is difficult to regenerate in the place far from the electrode, and the liquid may overflow in the non-sealed overflow type out tank system. In addition, there is a problem that the efficiency is poor because the flow rate of the electrolytic regeneration tank is small. The present invention intends to easily eliminate these conventional drawbacks, and provides an electrolytic regenerator that significantly improves the electrolytic regeneration efficiency from manganate to permanganate and is extremely easy to handle. That is the purpose.

【0004】[0004]

【課題を解決するための手段】本発明は、アルカリ過マ
ンガン酸塩溶液の流出入口を有する密閉タンク本体内に
棒状陰極と陽極とからなる電極を溶液浸漬状態下に配備
した電解再生装置をポンプおよび開閉弁のある液流入経
路と液流出経路との循環経路でデスミア処理槽に連結
し、該液流入経路にストレーナーを配備したことを特徴
とするアルカリ過マンガン酸塩溶液の電解再生装置であ
る。
DISCLOSURE OF THE INVENTION The present invention is a pump for an electrolytic regenerator in which an electrode composed of a rod-shaped cathode and an anode is arranged in a solution-immersed state in a closed tank body having an outflow / inflow port for an alkaline permanganate solution. An electrolytic regenerator for an alkaline permanganate solution, characterized in that it is connected to a desmear treatment tank through a circulation path of a liquid inflow path and a liquid outflow path having an on-off valve, and a strainer is provided in the liquid inflow path. .

【0005】[0005]

【作用】アルカリ過マンガン酸塩溶液中において、電気
酸化によって発生したマンガン酸塩を含む溶液を、陰極
と陽極とのある密閉タンク本体にポンプで強制循環させ
て、両極を浸漬状態下で電流を流す。即ち、液漏れがな
く、絶えず濃度の高いマンガン酸塩の含まれる液を電解
再生電極に多量に接触させることが出来るので再生効率
を上げることとなるし、液が強制循環されるので流量を
調節しなくてもよく、バルブ調整を頻繁に行う必要がな
く、取扱い容易であって、かつ電解再生タンクの中にス
ラッジが溜りにくいし、容易に排除できて性能を大巾に
高められる。
[Operation] In an alkaline permanganate solution, a solution containing manganate generated by electro-oxidation is forcibly circulated by a pump in a closed tank body having a cathode and an anode, and current is applied while both electrodes are immersed. Shed. In other words, there is no liquid leakage, and a large amount of liquid containing manganate with a high concentration can be brought into contact with the electrolytic regeneration electrode in a large amount, which improves regeneration efficiency. It does not need to be performed, does not require frequent valve adjustments, is easy to handle, and sludge does not easily accumulate in the electrolytic regeneration tank, and can be easily removed to greatly improve performance.

【0006】[0006]

【実施例】本発明の実施例を図1乃至図5の例で説明す
ると、アルカリ過マンガン酸塩溶液の流出入口12,1
3を有する密閉タンク本体1内に棒状陰極2と陽極3と
からなる電極を溶液浸漬状態下に配備した電解再生装置
であって、前記棒状陰極1の周囲に網状陽極3を筒形に
対設すると共に、前記密閉タンク本体1をポンプ4及び
開閉弁14,15のある液流入経路5と開閉弁16のあ
る液流出経路6との循環経路でデスミア処理槽7に連結
し、該液流入経路5にストレーナー8を配備してアルカ
リ過マンガン酸塩溶液における電解再生装置としてあ
る。
EXAMPLE An example of the present invention will be described with reference to the examples of FIGS. 1 to 5. Inflow ports 12 and 1 of alkaline permanganate solution are described.
1. An electrolytic regenerator in which an electrode composed of a rod-shaped cathode 2 and an anode 3 is provided in a closed tank main body 1 having 3 in a solution-immersed state, and a reticulated anode 3 is provided in a cylindrical shape around the rod-shaped cathode 1. In addition, the closed tank body 1 is connected to the desmear treatment tank 7 through a circulation path of a liquid inflow path 5 having the pump 4 and the on-off valves 14 and 15 and a liquid outflow path 6 having the on-off valve 16, and the liquid inflow path 5 is equipped with a strainer 8 as an electrolytic regenerator for alkaline permanganate solution.

【0007】前記タンク本体1としては、上部に着脱可
能の蓋体9を持った密閉タンクであって、底部にスラッ
ジ排出用のドレーン口10を備え、ドレーンバルブ11
のある配管に接続してある。
The tank body 1 is a closed tank having a detachable lid 9 at the top, and a drain port 10 for discharging sludge at the bottom, and a drain valve 11
It is connected to a pipe with.

【0008】前記電解再生用の密閉タンク本体1は、脚
体20で設置できるようにし、前記陰極2及び陽極3の
接続ターミナル22,23を蓋体9に突設し、該ターミ
ナル22,23を接続コードで整流器21に接続して電
流を流すようにしてある。
The closed tank body 1 for electrolytic regeneration is installed on the leg 20, and the connection terminals 22 and 23 for the cathode 2 and the anode 3 are provided on the lid 9 so as to project therefrom. A connection cord is connected to the rectifier 21 so that an electric current can flow.

【0009】図6の例では、前記密閉タンク本体1をデ
スミア処理槽7外に設置したアウトタンク方式としたも
ので、該デスミア処理槽7にポンプ4の吸込口を設け
て、吐出側を開閉弁15を介して密閉タンク本体1の流
入口12に連結し、流出口13に接続した液流出経路6
をデスミア処理槽7に開口した循環経路を構成し、ポン
プ4で多量の液の強制循環ができるようにして電解再生
を効率よく行えるようにしてある。
In the example of FIG. 6, the closed tank body 1 is of an out-tank type installed outside the desmear treatment tank 7, and the desmear treatment tank 7 is provided with a suction port of a pump 4 to open and close the discharge side. The liquid outflow path 6 connected to the inflow port 12 of the closed tank body 1 via the valve 15 and connected to the outflow port 13
A circulation path opened to the desmear treatment tank 7 is configured so that a large amount of liquid can be forcibly circulated by the pump 4 so that electrolytic regeneration can be efficiently performed.

【0010】実施例では、アルカリ過マンガン酸塩溶液
中に発生したマンガン酸塩に対して使用するが、発生し
たマンガン酸塩を電気的に酸化し、過マンガン酸塩に再
生するのに、電極の材質は電気の通りやすいものとする
ことが配慮され、電極の構造は網状体を筒形にした陽極
3の真ん中に陰極2を通すようにし、陰極2と陽極3の
距離を近づけるようにするのがよい。なお、陽極3は、
網状体を筒形とした単筒形に限らずハニカム形または筒
形を並列接続したものでもよい。
In the embodiment, the manganate generated in the alkaline permanganate solution is used. However, the manganate generated is electrically oxidized and regenerated into permanganate by using an electrode. It is considered that the material of is easy for electricity to pass through, and the structure of the electrode is such that the cathode 2 is passed through the center of the anode 3 having a cylindrical net-like body, and the distance between the cathode 2 and the anode 3 is shortened. Is good. The anode 3 is
The net-like body is not limited to a single tubular shape, but may be a honeycomb shape or a tubular shape connected in parallel.

【0011】[0011]

【発明の効果】本発明は、アルカリ過マンガン酸塩溶液
の流出入口を有する密閉タンク本体内に棒状陰極と陽極
とからなる電極を溶液浸漬状態下に配備した電解再生装
置をポンプおよび開閉弁のある液流入経路と液流出経路
との循環経路でデスミア処理槽に連結し、該液流入経路
にストレーナーを配備したことにより、電解再生用の密
閉タンク本体内では、絶えず濃度の高いマンガン酸塩の
含まれる液を電解再生電極に多量に接触させることが出
来るので、再生効率を上げることとなるし、液が強制循
環されるので流量を調節しなくてもよく、バルブ調整を
頻繁に行う必要がなく、取扱い容易であって、かつ電解
再生タンクの中にスラッジが溜りにくいし、容易に排除
できて性能を大巾に高められるほか、液漏れの心配がな
く、安全に取扱え、作業性を著しく向上でき、二酸化マ
ンガンのスラッジを低減し、満足すべき性能をした処理
ができると共に、デスミア処理の連続的処理が容易にで
きるので、その生産性を大巾に向上できるし、低コスト
で非常に有利な再生装置とすることができる。
Industrial Applicability According to the present invention, an electrolytic regenerator in which an electrode composed of a rod-shaped cathode and an anode is arranged in a solution-immersed state in a closed tank main body having an outflow / inflow port for an alkaline permanganate solution is used as a pump and an on-off valve. By connecting to a desmear treatment tank through a circulation route of a liquid inflow route and a liquid outflow route, and disposing a strainer in the liquid inflow route, in the closed tank main body for electrolytic regeneration, there is a constantly high concentration of manganate. Since a large amount of the contained liquid can be brought into contact with the electrolytic regeneration electrode, the regeneration efficiency is improved, and since the liquid is forcedly circulated, it is not necessary to adjust the flow rate, and frequent valve adjustment is required. It is easy to handle, and sludge does not easily accumulate in the electrolytic regeneration tank, and it can be easily removed, greatly improving performance, and there is no risk of liquid leakage, and it can be handled safely. Workability can be significantly improved, sludge of manganese dioxide can be reduced, treatment with satisfactory performance can be performed, and continuous desmear treatment can be easily performed, so that the productivity can be greatly improved and low. It is possible to make the reproducing apparatus very advantageous in terms of cost.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例の系統説明図である。FIG. 1 is a system explanatory diagram of an embodiment of the present invention.

【図2】図1の例の電解槽の一部切断側面図である。FIG. 2 is a partially cut side view of the electrolytic cell of the example of FIG.

【図3】図2のA−A線における平面図である。FIG. 3 is a plan view taken along the line AA of FIG.

【図4】図2のB−B線における切断平面図である。4 is a sectional plan view taken along the line BB in FIG.

【図5】図3のC−C線における拡大切断側面図であ
る。
5 is an enlarged cutaway side view taken along the line CC of FIG.

【図6】本発明の他の実施例の系統説明図である。FIG. 6 is a system diagram of another embodiment of the present invention.

【図7】従来例の単槽式電解再生装置の一部を切欠した
斜視図である。
FIG. 7 is a perspective view in which a part of a conventional single-cell electrolytic regenerator is cut away.

【符号の説明】[Explanation of symbols]

1 タンク本体 2 陰極 3 陽極 4 ポンプ 5 液流入経路 6 液流出経路 7 デスミア処理槽 8 ストレーナー 9 蓋体 10 ドレーン 11 ドレーンバルブ 12 流入口 13 流出口 14 開閉弁 15 開閉弁 16 開閉弁 1 Tank Main Body 2 Cathode 3 Anode 4 Pump 5 Liquid Inflow Path 6 Liquid Outflow Path 7 Desmear Treatment Tank 8 Strainer 9 Lid 10 Drain 11 Drain Valve 12 Inlet 13 Outlet 14 Open / close valve 15 Open / close valve 16 Open / close valve

フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 H05K 3/46 Z 6921−4E Continuation of the front page (51) Int.Cl. 5 Identification number Office reference number FI technical display location H05K 3/46 Z 6921-4E

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 アルカリ過マンガン酸塩溶液の流出入口
を有する密閉タンク本体内に棒状陰極と陽極とからなる
電極を溶液浸漬状態下に配備した電解再生装置をポンプ
および開閉弁のある液流入経路と液流出経路との循環経
路でデスミア処理槽に連結し、該液流入経路にストレー
ナーを配備したことを特徴とするアルカリ過マンガン酸
塩溶液の電解再生装置。
1. An electrolytic regenerator in which an electrode composed of a rod-shaped cathode and an anode is disposed in a solution-immersed state in a closed tank body having an outflow / inflow port for an alkaline permanganate solution, and a liquid inflow path having a pump and an on-off valve. An electrolytic regenerator for alkaline permanganate solution, characterized in that it is connected to a desmear treatment tank through a circulation path of a liquid and a liquid outflow path, and a strainer is provided in the liquid inflow path.
【請求項2】 前記タンク本体が、上部に着脱可能の蓋
体を持った密閉タンクであって、底部にスラッジ排出用
のドレーン口を備えた請求項1記載の電解再生装置。
2. The electrolytic regenerator according to claim 1, wherein the tank body is a closed tank having a detachable lid on an upper portion thereof, and a drain port for sludge discharge is provided on a bottom portion.
【請求項3】 前記陽極が、網状体を筒形にした単筒
形,ハニカム形または筒形を並列接続したものであっ
て、前記棒状陰極の周囲に対設されている請求項1また
は2記載の電解再生装置。
3. The anode according to claim 1 or 2, wherein the anode is a single tubular shape in which a net-like body is tubular, a honeycomb shape or a tubular shape is connected in parallel, and is arranged around the rod-shaped cathode. The electrolytic regenerator described.
JP5112491A 1993-04-16 1993-04-16 Electrolytic regeneration device for alkali permanganate solution Pending JPH06306667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5112491A JPH06306667A (en) 1993-04-16 1993-04-16 Electrolytic regeneration device for alkali permanganate solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5112491A JPH06306667A (en) 1993-04-16 1993-04-16 Electrolytic regeneration device for alkali permanganate solution

Publications (1)

Publication Number Publication Date
JPH06306667A true JPH06306667A (en) 1994-11-01

Family

ID=14587980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5112491A Pending JPH06306667A (en) 1993-04-16 1993-04-16 Electrolytic regeneration device for alkali permanganate solution

Country Status (1)

Country Link
JP (1) JPH06306667A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120298505A1 (en) * 2011-05-24 2012-11-29 C. Uyemura & Co., Ltd. Electrolytic regeneration unit and electrolytic regeneration apparatus using same
CN109701315A (en) * 2019-01-22 2019-05-03 昆山广谦电子有限公司 PCB de-smear process potassium permanganate reducing/regenerating device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01127700A (en) * 1987-11-11 1989-05-19 Shimano Ind Co Ltd Device for regenerating plating liquid of plating cell
JPH02267288A (en) * 1989-04-07 1990-11-01 Fuji Electric Co Ltd Etching liquid regenerator
JPH02301582A (en) * 1989-05-05 1990-12-13 Morton Internatl Inc Method and apparatus for regeneration of permanganate salt bath
JPH04362183A (en) * 1991-06-07 1992-12-15 Nippon Paint Co Ltd Method for regenerating aluminum surface cleaning bath

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01127700A (en) * 1987-11-11 1989-05-19 Shimano Ind Co Ltd Device for regenerating plating liquid of plating cell
JPH02267288A (en) * 1989-04-07 1990-11-01 Fuji Electric Co Ltd Etching liquid regenerator
JPH02301582A (en) * 1989-05-05 1990-12-13 Morton Internatl Inc Method and apparatus for regeneration of permanganate salt bath
JPH04362183A (en) * 1991-06-07 1992-12-15 Nippon Paint Co Ltd Method for regenerating aluminum surface cleaning bath

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120298505A1 (en) * 2011-05-24 2012-11-29 C. Uyemura & Co., Ltd. Electrolytic regeneration unit and electrolytic regeneration apparatus using same
JP2012244103A (en) * 2011-05-24 2012-12-10 C Uyemura & Co Ltd Electrolytic regeneration processing unit and electrolytic regeneration processing apparatus equipped with the unit
US8877020B2 (en) * 2011-05-24 2014-11-04 C. Uyemura & Co., Ltd. Electrolytic regeneration unit and electrolytic regeneration apparatus using same
TWI464304B (en) * 2011-05-24 2014-12-11 Uyemura C & Co Ltd An electrolytic regeneration processing unit, and an electrolytic regeneration processing device having the same
KR101472425B1 (en) * 2011-05-24 2014-12-12 우에무라 고교 가부시키가이샤 Electrolytic recycling unit and electrolytic recycling device with the same
CN109701315A (en) * 2019-01-22 2019-05-03 昆山广谦电子有限公司 PCB de-smear process potassium permanganate reducing/regenerating device

Similar Documents

Publication Publication Date Title
CA2468856A1 (en) Method and apparatus for producing negative and positive oxidative reductive potential (orp) water
US4105534A (en) Apparatus for removing impurities from electrolyte solutions
US6899803B2 (en) Method and device for the regulation of the concentration of metal ions in an electrolyte and use thereof
JPH0780466A (en) Method and device for regenerating aqueous solution containing metal ion and sulfuric acid
US4482440A (en) Electrochemical cell and process for manufacturing temperature sensitive solutions
CN100413999C (en) Method for regenerating etching solutions containing iron for the use in etching or pickling copper or copper alloys and an apparatus for carrying out said method
JPH06306667A (en) Electrolytic regeneration device for alkali permanganate solution
JPWO2003066939A1 (en) Electrolytic regeneration treatment equipment
KR101545245B1 (en) Device for regeneration of etchant and copper recovery using rgb color sensor and orp sensor
CN212050656U (en) Water electrolysis equipment
CN110735149B (en) Water electrolysis oxygen generation system and air quality control system for closed space
CN212347865U (en) Liquid filtering equipment containing precipitate
US4508599A (en) Method and apparatus for regeneration of a copper-containing etching solution
JP2912511B2 (en) Electrolysis tank for closed processing of waste etching liquid
JPH06306668A (en) Method and device for regenerating manganate to permanganate
US4597842A (en) Metal recovery process
JP4102526B2 (en) Copper chloride etchant electrolytic regeneration system
JPH04318185A (en) Desilverizing method
JPH04308097A (en) Device for removing metallic ion
RU2075448C1 (en) Plant for regenerating chromium-containing liquors
EP0329275A1 (en) Method of recovering silver from photographic processing solution and apparatus therefor
JP2003205289A (en) Denitrification method of water and water treatment equipment used therefor
JP2001107271A (en) Copper chloride etching solution electrolytic regeneration system
JPH04311588A (en) Desilverizing method
JP3568805B2 (en) Treatment method of ferric chloride etching waste liquid and its regeneration method