JPH06281359A - Jig for calcining ceramic - Google Patents
Jig for calcining ceramicInfo
- Publication number
- JPH06281359A JPH06281359A JP6815493A JP6815493A JPH06281359A JP H06281359 A JPH06281359 A JP H06281359A JP 6815493 A JP6815493 A JP 6815493A JP 6815493 A JP6815493 A JP 6815493A JP H06281359 A JPH06281359 A JP H06281359A
- Authority
- JP
- Japan
- Prior art keywords
- jig
- firing
- ceramic
- mounting portion
- surface mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
- B28B11/24—Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
- B28B11/243—Setting, e.g. drying, dehydrating or firing ceramic articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
- B28B11/24—Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
- B28B11/248—Supports for drying
Landscapes
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Structural Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Furnace Charging Or Discharging (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、表面に被焼成物を載せ
て焼成するために使用されるセラミック焼成用冶具に関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic firing jig used for placing an object to be fired on its surface and firing it.
【０００２】[0002]
【従来の技術】従来から、表面に被焼成物を載せて焼成
するために使用されるセラミック焼成用冶具は、種々の
ものが知られている。そのうち、セラミック焼成用冶具
の表面との反応を嫌う被焼成物用として、図５に示すよ
うに、基体となるセッターに、ジルコニアをコーティン
グしたり、別のセッターを重ねて使用するセラミック焼
成用冶具が知られている。2. Description of the Related Art Conventionally, various types of ceramic firing jigs have been known which are used for placing and firing an object to be fired on the surface. Among them, for a material to be fired that does not like to react with the surface of a jig for firing ceramics, as shown in FIG. 5, a jig for firing ceramics in which a setter as a base is coated with zirconia or another setter is stacked. It has been known.
【０００３】図５において２１はセラミック焼成用冶具
であり、図５（ａ）に示す例は、セラミック基体２２の
表面にジルコニア等の耐火物粉末で成形された別体のセ
ッター２３を敷いてその上で被焼成物２４を焼成する例
を、図５（ｂ）に示す例は、セラミック基体２２の表面
に均一な厚さにジルコニア等の耐反応性耐火粉末層２５
をコーティングして設けてその上で被焼成物２４を焼成
する例を、図５（ｃ）に示す例は、セラミック基体２２
の表面にジルコニア等の耐火粉末を敷粉２６を敷いてそ
の上で被焼成物２４を焼成する例を、それぞれ示してい
る。In FIG. 5, reference numeral 21 is a jig for firing ceramics. In the example shown in FIG. 5A, a separate setter 23 formed of refractory powder such as zirconia is laid on the surface of a ceramic base 22 to form a jig. An example of firing the article to be fired 24, as shown in FIG. 5B, is a reaction-resistant refractory powder layer 25 such as zirconia having a uniform thickness on the surface of the ceramic substrate 22.
5C, an example in which the object to be fired 24 is fired by coating is provided, and the example shown in FIG.
An example is shown in which refractory powder such as zirconia is spread on the surface of the above and the baking object 24 is baked on it.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、図５
（ａ）に示す構造のセラミック焼成用冶具２１では、製
造上の問題でセッター２３の肉厚が３ｍｍ以上となり冶
具２１が高熱容量となり、被焼成物２４が均一に焼成で
きない問題があった。また、図５（ｂ）に示す構造のセ
ラミック焼成用冶具２１では、被焼成物２４とコーティ
ング層が接する部分に雰囲気のよどみができて熱風の流
れが生じず、製品特性にバラツキがでる問題があった。
さらに、図５（ｃ）に示す構造のセラミック焼成用冶具
２１では、被焼成物２４に敷粉２６が付着してしまい製
品欠陥の原因となるとともに、製品から付着した敷粉２
６を除く手間がかかる問題があった。However, as shown in FIG.
In the ceramic firing jig 21 having the structure shown in (a), the wall thickness of the setter 23 was 3 mm or more due to manufacturing problems, and the jig 21 had a high heat capacity, so that the object to be fired 24 could not be fired uniformly. Further, in the ceramic firing jig 21 having the structure shown in FIG. 5B, there is a problem that a stagnation of the atmosphere is generated in a portion where the object to be fired 24 and the coating layer are in contact with each other, hot air does not flow, and product characteristics vary. there were.
Further, in the ceramic firing jig 21 having the structure shown in FIG. 5C, the spread powder 26 adheres to the material 24 to be burned, which causes a product defect, and the spread powder 2 attached from the product.
There was a problem that it took a lot of work except for 6.
【０００５】本発明の目的は上述した課題を解消して、
被焼成物を均一に焼成することができるセラミック焼成
用冶具を提供しようとするものである。The object of the present invention is to solve the above problems,
An object of the present invention is to provide a jig for ceramic firing capable of uniformly firing an object to be fired.
【０００６】[0006]
【課題を解決するための手段】本発明のセラミック焼成
用冶具は、被焼成物と接するセラミック基体の表面に、
凹凸構造の表面載置部を形成したことを特徴とするもの
である。Means for Solving the Problems The jig for firing ceramics according to the present invention comprises:
It is characterized in that a surface mounting portion having an uneven structure is formed.
【０００７】[0007]
【作用】上述した構成において、被焼成物と接するセラ
ミック基体の表面に設けた凹凸構造の表面載置部が、冶
具上の熱風の流れを均一にするため、被焼成物を均一に
焼成することができるとともに、別体のセッターや敷粉
等を必要とせず、これらの部材に起因する問題点も皆無
にすることができる。なお、凹凸構造の表面載置部は、
研摩材をマスクを介してブラスト処理して形成するか、
無機耐火物粉末をマスクを介してコーティング処理して
形成すると、表面載置部を簡単に形成することができる
ため好ましい。また、表面の凹凸構造の表面載置部は２
００〜１５００μm であると好ましい。凹凸の高さが２
００μｍ未満であると焼成の熱風の流れが十分でない場
合があり、また高さが１５００μｍを超えると凹凸構造
部の強度が低く、数回の使用で凹凸部がこわれる場合が
ある。In the above-mentioned structure, the surface mounting portion having the uneven structure provided on the surface of the ceramic substrate which is in contact with the object to be fired uniformly fires the object to be fired in order to make the flow of hot air on the jig uniform. In addition, a separate setter, spread powder, etc. are not required, and the problems caused by these members can be eliminated. In addition, the surface mounting portion of the uneven structure,
Formed by blasting the abrasive through a mask,
It is preferable to form the inorganic refractory powder by coating it through a mask because the surface mounting portion can be easily formed. In addition, the surface mounting portion with the uneven structure of the surface is 2
It is preferably from 00 to 1500 μm. The height of the unevenness is 2
If it is less than 00 μm, the flow of hot air for firing may not be sufficient, and if the height exceeds 1500 μm, the strength of the uneven structure portion may be low, and the uneven portion may be broken after several uses.
【０００８】[0008]
【実施例】図１〜図３はそれぞれ本発明のセラミック焼
成用冶具の一例を示す図である。図１に示すセラミック
焼成用冶具１は、セラミック基体２の表面上に、波型で
連続した形状の凹凸構造を有する表面載置部３を設けた
構造を有している。図２に示すセラミック焼成用冶具１
は、セラミック基体２の表面上に、波型で不連続の形状
の凹凸構造を有する表面載置部３を設けた構造を有して
いる。図３に示すセラミック焼成用冶具１は、セラミッ
ク基体２の表面上に、均一な表面層３−１と突起形状の
凹凸構造３−２とからなる表面載置部３を設けた構造を
有している。1 to 3 are views showing an example of a jig for ceramic firing according to the present invention. The ceramic firing jig 1 shown in FIG. 1 has a structure in which a surface mounting portion 3 having a corrugated and continuous uneven structure is provided on the surface of a ceramic substrate 2. Ceramic firing jig 1 shown in FIG.
Has a structure in which the surface mounting portion 3 having a corrugated and discontinuous uneven structure is provided on the surface of the ceramic substrate 2. The ceramic firing jig 1 shown in FIG. 3 has a structure in which a surface mounting portion 3 including a uniform surface layer 3-1 and a projection-shaped uneven structure 3-2 is provided on the surface of a ceramic substrate 2. ing.
【０００９】上述した構造のセラミック焼成用冶具１の
セラミック基体２の材質としては、従来から焼成用冶具
の材質として知られているムライト質、コージェライト
質、アルミナ質、炭化珪素質等を用いることができ、さ
らに本出願人が提案しているウレタンフォーム技術を利
用した軽量材料を用いることもできる。また、表面載置
部３の材質としては、上述したセラミック基体２と同一
の材料とすることができるとともに、反応を嫌う被焼成
物を焼成する目的の場合は、ジルコニア等の材料を用い
ると好ましい。さらに、表面載置部１３の凹凸のピッチ
は、焼成の対象となる被焼成品例えば電子部品等の大き
さより小さくした方が、被焼成物の下側に空間を形成で
き、雰囲気の流れを良くすることができるため好まし
い。As the material of the ceramic substrate 2 of the ceramic firing jig 1 having the above-mentioned structure, mullite, cordierite, alumina, silicon carbide, etc., which are conventionally known as the materials of firing jigs, are used. In addition, a lightweight material utilizing the urethane foam technology proposed by the present applicant can be used. Further, as the material of the surface mounting portion 3, the same material as that of the above-mentioned ceramic substrate 2 can be used, and in the case of firing an object to be fired which is unfavorable to reaction, it is preferable to use a material such as zirconia. . Furthermore, if the pitch of the unevenness of the surface mounting portion 13 is smaller than the size of the article to be fired, such as an electronic component, a space can be formed below the article to be fired, and the flow of the atmosphere is improved. It is possible to do so, which is preferable.
【００１０】図４は、本発明のセラミック焼成用冶具１
における凹凸構造のセラミック基体２の形成方法の一例
を説明するための図である。図４（ａ）は使用するマス
ク１１の一例を示す図であり、マスク１１には、コーテ
ィング処理により凹凸構造を形成したい場合は凹凸パタ
ーンの凸部を形成したい部分に、ブラスト処理により凹
凸構造を形成したい場合は凹凸パターンの凹部を形成し
たい部分に、それぞれ窓部１２を開けて構成している。FIG. 4 shows a ceramic firing jig 1 according to the present invention.
FIG. 6 is a diagram for explaining an example of a method of forming the ceramic base body 2 having the uneven structure in FIG. FIG. 4A is a diagram showing an example of the mask 11 to be used. In the mask 11, when it is desired to form a concavo-convex structure by a coating process, the concavo-convex structure is formed by a blasting process on a portion where a convex part of a concavo-convex pattern is to be formed. When it is desired to form, a window portion 12 is opened at each portion where the concave portion of the concave-convex pattern is to be formed.
【００１１】このマスク１１を使用して、図４（ｂ）に
示すように、ノズル１３から、コーティング処理の場合
は無機耐火物粉末のスラリーを、ブラスト処理の場合は
研摩材を、セラミック基板２に吹き付けることにより、
凹凸構造の表面載置部３を形成することができる。な
お、ノズル１３の１箇所からスラリーまたは研摩材を吹
き付けているため、ノズル１３からの距離に応じて凹凸
構造を形成することができるが、必要に応じてこのノズ
ル１３のマスク１１に対する位置を吹き付け中変化させ
ることにより、より好適に凹凸構造を形成することがで
きる。Using this mask 11, as shown in FIG. 4B, from the nozzle 13, a slurry of inorganic refractory powder in the case of coating treatment, an abrasive material in the case of blast treatment, and a ceramic substrate 2 are used. By spraying on
The surface mounting portion 3 having an uneven structure can be formed. Since the slurry or the abrasive is sprayed from one position of the nozzle 13, a concavo-convex structure can be formed according to the distance from the nozzle 13, but the position of the nozzle 13 with respect to the mask 11 is sprayed if necessary. The uneven structure can be more suitably formed by changing the inside.
【００１２】以下、実際の例について説明する。実施例 実施例１として図４（ｂ）に示す形状の治具を得るた
め、３００×３００×１０ｔ（ｍｍ）のムライト質棚板
２の表面に、図４（ａ）に示すような形状で幅２ｍｍ、
長さ５ｍｍの窓部１２をピッチ５ｍｍで設けたマスクを
使用して＃１００の研摩材でブラスト処理を行い、凹凸
構造の表面載置部３を形成した。ブラスト処理時間を変
化させ、凹凸構造物の高さが１００〜１８００μｍのも
のを製作した。An actual example will be described below. To obtain a jig having a shape shown in FIG. 4 (b) as an example in Example 1, the 300 × 300 × mullite shelves 2 of the surface of 10t (mm), a shape as shown in FIG. 4 (a) Width 2mm,
Blasting was performed with a # 100 abrasive using a mask in which window portions 12 having a length of 5 mm were provided at a pitch of 5 mm to form a surface mounting portion 3 having an uneven structure. By changing the blasting time, the uneven structure having a height of 100 to 1800 μm was manufactured.
【００１３】同様に、実施例２として図３に示す形状の
治具を得るため、３００×３００×１０ｔ（ｍｍ）のム
ライト質棚板２の表面に、粒度配合されたジルコニアス
ラリーを全面にスプレーコーティングし、５０〜８０μ
m の均一なコーティング層３−１を形成させた後、３ｍ
ｍφの窓部をピッチ６ｍｍで設けたマスクをコーティン
グ装置と棚板表面間に設置してコーティングをさらに行
い、図３に示すように、コーティング層３−１の表面に
凹凸構造３−２を有する表面載置部３を形成した。コー
ティング時間を変化させ、凹凸構造物の高さが１００〜
１８００μｍのものを製作した。さらに、比較例とし
て、表面載置部を形成しないムライト質棚板からなる治
具を準備した。Similarly, in order to obtain a jig having a shape shown in FIG. 3 as Example 2, the surface of a mullite shelf plate 2 of 300 × 300 × 10 t (mm) is sprayed with a zirconia slurry having a particle size blended over the entire surface. Coated, 50-80μ
3 m after forming a uniform coating layer 3-1 of m
A mask having mφ windows with a pitch of 6 mm is installed between the coating device and the surface of the shelf plate to further perform coating, and as shown in FIG. 3, the surface of the coating layer 3-1 has an uneven structure 3-2. The surface mounting part 3 was formed. By changing the coating time, the height of the uneven structure is 100 ~
A 1800 μm one was manufactured. Further, as a comparative example, a jig made of a mullite shelf plate having no surface mounting portion was prepared.
【００１４】その後、準備した焼成用治具に５００ｇの
セラミックコンデンサー素子の生成形品を載せ、１３８
０℃の温度で焼成を行い、その時の素子の電気特性を測
定して評価した。評価は素子誘電率のバラツキ具合で、
Ｏ：２４００±１００以内、Ｘ：２４００±５００以内
として評価した。結果を表１，２に示す。表１，２の結
果から、本発明例である実施例１，２は比較例に比べて
素子誘電率のバラツキが少なく、良好な電気特性を示す
ことがわかった。After that, 500 g of a ceramic capacitor element production product was placed on the prepared firing jig 138.
Firing was performed at a temperature of 0 ° C., and the electrical characteristics of the device at that time were measured and evaluated. The evaluation is the degree of variation in the element dielectric constant,
O: Within 2400 ± 100 and X: Within 2400 ± 500. The results are shown in Tables 1 and 2. From the results shown in Tables 1 and 2, it was found that Examples 1 and 2 which are examples of the present invention have less variation in the dielectric constant of the element than the comparative example and exhibit good electrical characteristics.
【００１５】[0015]
【表１】 [Table 1]
【００１６】[0016]
【表２】 [Table 2]
【００１７】本発明は上述した実施例にのみ限定される
ものでなく、幾多の変形、変更が可能である。例えば、
上述した実施例における凹凸構造はその一例を示したも
ので、他の形状でも本発明の目的を達成できる形状であ
れば使用することができることはいうまでもない。The present invention is not limited to the above-mentioned embodiments, but various modifications and changes can be made. For example,
It is needless to say that the concavo-convex structure in the above-mentioned embodiment is one example, and other shapes can be used as long as they can achieve the object of the present invention.
【００１８】[0018]
【発明の効果】以上の説明から明らかなように、本発明
によれば、被焼成物と接するセラミック基体の表面に凹
凸構造の表面載置部を設けているため、冶具上の熱風の
流れを均一にでき、被焼成物を均一に焼成することがで
きるとともに、別体のセッターや敷粉等を必要とせず、
これらの部材に起因する問題点も皆無にすることができ
る。As is apparent from the above description, according to the present invention, since the surface mounting portion having the uneven structure is provided on the surface of the ceramic substrate which is in contact with the object to be fired, the flow of hot air on the jig is prevented. It can be made uniform and the object to be fired can be evenly fired, without the need for a separate setter or spread powder,
The problems caused by these members can be eliminated.
【図１】本発明のセラミック焼成用冶具の一例の構成を
示す図である。FIG. 1 is a diagram showing a configuration of an example of a ceramic firing jig of the present invention.
【図２】本発明のセラミック焼成用冶具の他の例の構成
を示す図である。FIG. 2 is a diagram showing the configuration of another example of the jig for ceramic firing of the present invention.
【図３】本発明のセラミック焼成用冶具のさらに他の例
を示す図である。FIG. 3 is a view showing still another example of the jig for ceramic firing of the present invention.
【図４】本発明のセラミック焼成用冶具の凹凸形状の表
面載置部の形成法の一例を説明するための図である。FIG. 4 is a diagram for explaining an example of a method of forming a concavo-convex surface mounting portion of the ceramic firing jig of the present invention.
【図５】従来のセラミック焼成用冶具の一例の構成を示
す図である。FIG. 5 is a diagram showing a configuration of an example of a conventional ceramic firing jig.
１ セラミック焼成用冶具 ２ セラミック基板 ３ 表面載置部 １１ マスク １２ 窓部 １３ ノズル DESCRIPTION OF SYMBOLS 1 Ceramic firing jig 2 Ceramic substrate 3 Surface mounting part 11 Mask 12 Window part 13 Nozzle
Claims (4)
に、凹凸構造の表面載置部を形成したことを特徴とする
セラミック焼成用冶具。1. A jig for firing ceramics, characterized in that a surface mounting portion having a concavo-convex structure is formed on the surface of the ceramic substrate which is in contact with the object to be fired.
１５００μｍとする請求項１記載のセラミック焼成用治
具。2. The height of the unevenness of the surface mounting portion is 200 to
The ceramic firing jig according to claim 1, which has a thickness of 1500 μm.
マスクを介してブラスト処理して形成した請求項１記載
のセラミック焼成用冶具。3. The jig for ceramic firing according to claim 1, wherein the surface mounting portion having the uneven structure is formed by blasting an abrasive with a mask.
物粉末をマスクを介してコーティング処理して形成した
請求項１記載のセラミック焼成用冶具。4. The jig for firing ceramics according to claim 1, wherein the surface mounting portion having the concavo-convex structure is formed by coating inorganic refractory powder through a mask.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6815493A JPH06281359A (en) | 1993-03-26 | 1993-03-26 | Jig for calcining ceramic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6815493A JPH06281359A (en) | 1993-03-26 | 1993-03-26 | Jig for calcining ceramic |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06281359A true JPH06281359A (en) | 1994-10-07 |
Family
ID=13365548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6815493A Withdrawn JPH06281359A (en) | 1993-03-26 | 1993-03-26 | Jig for calcining ceramic |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06281359A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000109370A (en) * | 1998-10-02 | 2000-04-18 | Kikusui Chemical Industries Co Ltd | Production of burning tool with pattern |
| EA009523B1 (en) * | 2002-06-05 | 2008-02-28 | Инститьют Оф Медисинал Молекьюлар Дизайн. Инк. | Inhibitors against the activation of ap-1 and nfat |
| JP2012177514A (en) * | 2011-02-25 | 2012-09-13 | Tdk Corp | Setter and method for manufacturing ceramic electronic component |
| US9279618B2 (en) | 2008-03-05 | 2016-03-08 | Ngk Insulators, Ltd. | Kiln tool plate for firing ceramic material |
| CN110015910A (en) * | 2018-01-10 | 2019-07-16 | 日本碍子株式会社 | Load bearing board is used in firing |
| JP2019158201A (en) * | 2018-03-09 | 2019-09-19 | 東京窯業株式会社 | Firing fixture |
| JP2019163877A (en) * | 2018-03-19 | 2019-09-26 | 日本碍子株式会社 | Firing setter |
-
1993
- 1993-03-26 JP JP6815493A patent/JPH06281359A/en not_active Withdrawn
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000109370A (en) * | 1998-10-02 | 2000-04-18 | Kikusui Chemical Industries Co Ltd | Production of burning tool with pattern |
| EA009523B1 (en) * | 2002-06-05 | 2008-02-28 | Инститьют Оф Медисинал Молекьюлар Дизайн. Инк. | Inhibitors against the activation of ap-1 and nfat |
| US9279618B2 (en) | 2008-03-05 | 2016-03-08 | Ngk Insulators, Ltd. | Kiln tool plate for firing ceramic material |
| JP2012177514A (en) * | 2011-02-25 | 2012-09-13 | Tdk Corp | Setter and method for manufacturing ceramic electronic component |
| CN110015910A (en) * | 2018-01-10 | 2019-07-16 | 日本碍子株式会社 | Load bearing board is used in firing |
| JP2019120467A (en) * | 2018-01-10 | 2019-07-22 | 日本碍子株式会社 | Setter for firing |
| TWI763965B (en) * | 2018-01-10 | 2022-05-11 | 日商日本碍子股份有限公司 | Setter plate for firing |
| JP2019158201A (en) * | 2018-03-09 | 2019-09-19 | 東京窯業株式会社 | Firing fixture |
| JP2019163877A (en) * | 2018-03-19 | 2019-09-26 | 日本碍子株式会社 | Firing setter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20000530 |