JPH06254518A - Water-based precision cleaning system - Google Patents
Water-based precision cleaning systemInfo
- Publication number
- JPH06254518A JPH06254518A JP6307093A JP6307093A JPH06254518A JP H06254518 A JPH06254518 A JP H06254518A JP 6307093 A JP6307093 A JP 6307093A JP 6307093 A JP6307093 A JP 6307093A JP H06254518 A JPH06254518 A JP H06254518A
- Authority
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- Japan
- Prior art keywords
- cleaning
- water
- cleaning agent
- tank
- agent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は水系洗浄剤を用いて被洗
浄物を精密洗浄する洗浄システムに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning system for precisely cleaning an object to be cleaned using an aqueous cleaning agent.
【０００２】[0002]
【従来の技術】スチルカメラ、光学顕微鏡、半導体用ス
テッパー、レーザー装置などに使用されるレンズ、プリ
ズムなどの光学素子あるいはポリゴンミラー等の金属製
の光学要素の洗浄では、精密洗浄が要求されている。こ
の精密洗浄においては、洗浄能力が大きく、しかも基材
に対する影響が少ない観点からトリクレン、トリクロロ
エタン、フロン等のハロゲン系溶剤が多用されていた。
しかしながら、これらのハロゲン系溶剤はオゾン層破壊
の原因となる環境上の問題から、今後の使用を制限する
ことが好ましい。2. Description of the Related Art Precision cleaning is required for cleaning optical elements such as lenses and prisms used in still cameras, optical microscopes, semiconductor steppers, laser devices and the like, or metal optical elements such as polygon mirrors. . In this precision cleaning, halogen-based solvents such as trichlene, trichloroethane and freon have been frequently used from the viewpoint of high cleaning ability and little influence on the substrate.
However, it is preferable to limit future use of these halogen-based solvents because of environmental problems that cause ozone layer depletion.
【０００３】かかるハロゲン系溶剤に対し、水系洗浄剤
を用いて精密洗浄することが行われており、実開昭４７
−１１９７０号公報、同５１−５３７６５号公報、同５
１−５３７６８号公報には、水系洗浄剤を使用した精密
洗浄システムが開示されている。例えば、実開昭４７−
１１９７０号公報および同５１−５３７６５号公報に
は、複数の洗浄槽をライン状に並設し、被洗浄物を洗浄
槽間に移送しながら洗浄するシステムが記載され、実開
昭５１−５３７６８号公報には洗浄槽に対して水系洗浄
剤を循環させると共に、その温度調整を行うシステムが
記載されている。Precise cleaning of such a halogen-based solvent using a water-based cleaning agent is carried out.
-11970 gazette, the same 51-53765 gazette, the same 5
Japanese Patent Publication No. 1-53768 discloses a precision cleaning system using an aqueous cleaning agent. 47-
Japanese Patent No. 11970 and No. 51-53765 disclose a system in which a plurality of cleaning tanks are arranged in a line and the objects to be cleaned are transferred while being transferred between the cleaning tanks. The publication describes a system in which an aqueous cleaning agent is circulated in a cleaning tank and its temperature is adjusted.
【０００４】これらのシステムに使用される水系洗浄剤
は、界面活性剤と洗浄助剤（ビルダー）との組み合わせ
により構成されるが、環境汚染に対応するべく排水処理
性が高く、生物分解性の良好なものが選択されている。
また、この水系洗浄剤は加熱によってその洗浄力の増強
がなされているが、過度の加熱は光学素子などの精密部
品に悪影響を及ぼすところから、室温〜４０℃程度の穏
和な加熱がなされ、このための加熱手段としては、温度
制御範囲が小さく、加熱容量の少ないフィルムヒーター
が使用されている。さらに、超音波振動、シャワー噴
射、噴流などの補助的手段を併用することにより、洗浄
力の増強が行われている。一方、水系洗浄剤を循環使用
することも必要であり、このため洗浄槽を濾過装置と接
続して、濾過後の洗浄液を洗浄槽にフィードバックする
こともなされている。The water-based cleaning agents used in these systems are composed of a combination of a surfactant and a cleaning aid (builder), but have high wastewater treatment properties and biodegradability to cope with environmental pollution. Good ones are selected.
Further, although the cleaning power of this water-based cleaning agent is enhanced by heating, excessive heating adversely affects precision parts such as optical elements. Therefore, mild heating at room temperature to 40 ° C. is performed. As a heating means for this, a film heater having a small temperature control range and a small heating capacity is used. Further, the cleaning power is enhanced by using auxiliary means such as ultrasonic vibration, shower jet, and jet flow. On the other hand, it is also necessary to circulate the water-based cleaning agent, and for this reason, the cleaning tank is connected to a filtering device and the cleaning liquid after filtration is fed back to the cleaning tank.
【０００５】以上のような種々の改良により、水系洗浄
剤であっても、ハロゲン系溶剤と同等程度の洗浄能力を
有するようになっているが、水系洗浄剤はハロゲン系溶
剤に比べて、液変質が激しい問題を有していた。この変
質のほとんどの要因は、微生物の洗浄液中での繁殖であ
る。特に、精密洗浄の場合においては、洗浄温度が微生
物の繁殖に好適なところから、短期間に微生物が繁殖
し、これにより刺激臭や、スライム等が発生するためで
ある。かかる刺激臭は、作業環境の低下と作業者への悪
影響を及ぼし、一方、スライム発生は、洗浄システム自
体のトラブル（フィルターの目詰まりや洗浄能力の低下
等）を伴うため放置することができず、洗浄液を交換し
たりクリーニングする必要が生じる。Due to various improvements as described above, even a water-based cleaning agent has a cleaning ability equivalent to that of a halogen-based solvent. However, the water-based cleaning agent is more liquid than a halogen-based solvent. It had a problem of severe alteration. Most of the causes of this alteration are the growth of microorganisms in the wash liquor. Especially in the case of precision cleaning, since the cleaning temperature is suitable for the growth of microorganisms, the microorganisms propagate in a short period of time, which causes irritating odor and slime. Such an irritating odor has a negative impact on the work environment and has a negative effect on workers. On the other hand, the occurrence of slime causes problems with the cleaning system itself (clogging of filters, deterioration of cleaning ability, etc.), and cannot be left unattended. Therefore, it is necessary to replace the cleaning liquid or perform cleaning.
【０００６】このような微生物繁殖に基づいた変質に対
し、従来では抗微生物薬剤の添加、紫外線照射殺菌等に
より対処してきている。Conventionally, such alteration due to microbial propagation has been dealt with by adding an antimicrobial agent, sterilizing by irradiation with ultraviolet rays and the like.
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、抗微生
物薬剤の添加は、水系洗浄剤の洗浄力の低下の原因とな
り、洗浄剤の長期使用ができない原因となっている。一
方、紫外線照射殺菌も、洗浄剤に取り込まれた汚れ成分
の変質を促進するため好ましくない。この場合、洗浄剤
を濾過することも考えられるが、この濾過は洗浄で除去
された汚れ等の固体粒子の除去しかできず、微生物を除
去することは実用上不可能となっている。However, the addition of the antimicrobial agent causes a decrease in the detergency of the water-based cleaning agent, which causes the cleaning agent to be unusable for a long period of time. On the other hand, ultraviolet irradiation sterilization is also unfavorable because it accelerates the deterioration of the dirt component taken into the cleaning agent. In this case, it is conceivable to filter the detergent, but this filtration can only remove solid particles such as dirt removed by washing, and it is practically impossible to remove microorganisms.
【０００８】本発明は、上記事情を考慮してなされたも
のであり、微生物繁殖に起因した水系洗浄剤の変質に対
し、好適に対処でき、これにより洗浄剤の長期使用およ
び洗浄力の保持を可能とした洗浄システムを提供するこ
とを目的とする。The present invention has been made in consideration of the above circumstances, and it is possible to favorably deal with the deterioration of the water-based cleaning agent due to the microbial propagation, whereby the cleaning agent can be used for a long period of time and the cleaning power can be maintained. An object is to provide a cleaning system that enables the cleaning.
【０００９】[0009]
【課題を解決するための手段および作用】上記目的を達
成するため本発明は、以下の知見に基づいてなされたも
のである。すなわち、水系洗浄剤を加熱して洗浄力の増
強を図ることは必要であるが、この加熱手段とは別個に
食品等の殺菌に使用される殺菌装置を洗浄システムに組
み込み、一定の時間間隔で運用し、洗浄剤全体を殺菌す
ることにより排水処理性にも、洗浄剤組成にも全く影響
を与えず、微生物の繁殖による洗浄剤の変質を防止し
て、その長寿命化が実現することを見出した。Means and Actions for Solving the Problems In order to achieve the above object, the present invention has been made based on the following findings. That is, it is necessary to heat the water-based cleaning agent to enhance the cleaning power, but in addition to this heating means, a sterilizing device used for sterilizing food etc. is incorporated into the cleaning system, and at regular time intervals. By operating and sterilizing the entire cleaning agent, it has no effect on the wastewater treatment property and the cleaning agent composition, and prevents the deterioration of the cleaning agent due to the growth of microorganisms, thus extending its life. I found it.
【００１０】この場合における水系洗浄剤の殺菌手段は
種々あるが、洗浄液にも、排水処理のし易さにも影響を
与えない方法としては、加熱殺菌方法が最も好ましい。
しかしながら、通常の加熱殺菌条件である１００℃以上
の温度では水分の蒸発が激しく、洗浄剤組成が変化する
不都合がある。特に、微生物増殖による洗浄剤の変質防
止の観点からは、完全に殺菌する必要はなく、しかも変
質の原因となる菌は主にバクテリア等で、加熱殺菌条件
としては比較的おだやかな条件でも充分な効果を期待す
ることができる。In this case, there are various means for sterilizing the water-based detergent, but the heat sterilization method is most preferable as a method that does not affect the cleaning liquid or the ease of wastewater treatment.
However, at a temperature of 100 ° C. or higher, which is a normal heat sterilization condition, evaporation of water is so severe that the composition of the detergent changes. In particular, from the viewpoint of preventing the deterioration of the detergent due to microbial growth, it is not necessary to completely sterilize, and the bacteria that cause the deterioration are mainly bacteria, etc. You can expect an effect.
【００１１】以上のことから、食品等のように高温加熱
ができない場合に使用される低温殺菌が最適であるとの
結論に達し、これに基づいて本発明を完成したものであ
る。From the above, it was concluded that pasteurization used when high temperature heating such as food is not possible is optimal, and the present invention has been completed based on this.
【００１２】かかる本発明の水系精密洗浄システムは、
水系洗浄剤が充填される洗浄槽と、洗浄槽を加熱する加
熱手段と、洗浄槽から抜き出された水系洗浄剤を濾過す
る濾過装置と、洗浄槽から抜き出された水系洗浄剤を低
温加熱して殺菌処理する殺菌装置と、水系洗浄剤が洗浄
槽、濾過装置および殺菌装置の間を循環するように連結
する循環手段とを備えていることを特徴とするものであ
る。The water-based precision cleaning system of the present invention is
A cleaning tank filled with an aqueous cleaning agent, a heating means for heating the cleaning tank, a filtering device for filtering the aqueous cleaning agent extracted from the cleaning tank, and a low temperature heating of the aqueous cleaning agent extracted from the cleaning tank. It is characterized by comprising a sterilizing device for performing sterilization treatment and a circulating means for connecting the water-based cleaning agent so as to circulate between the cleaning tank, the filtering device and the sterilizing device.
【００１３】ここで低温加熱としては、５５〜７０℃の
温度域、特に６２〜６３℃の温度域で、３０分程度加熱
することが殺菌効率および洗浄剤への悪影響防止の観点
から好ましい。かかる低温加熱を行う殺菌装置の構造と
しては、ジャケット式、パイプ式、プレート式等の熱交
換構造、蒸気吹き込み等の加熱構造、その他のものを選
択できるが、別系統の熱媒体を用いたパイプ式の熱交換
構造が好ましい。As the low-temperature heating, heating at a temperature range of 55 to 70 ° C., particularly at a temperature range of 62 to 63 ° C. for about 30 minutes is preferable from the viewpoint of sterilization efficiency and prevention of adverse effects on the detergent. As the structure of the sterilizer for performing such low-temperature heating, a heat exchange structure such as a jacket type, a pipe type, a plate type, a heating structure such as steam blowing, and others can be selected, but a pipe using a heat medium of another system Formula heat exchange structures are preferred.
【００１４】この殺菌装置の稼働は微生物の繁殖度合に
合わせて行うが、洗浄システム全体の稼働率からは、洗
浄システムの停止時が良好であり、これ以外としては一
定の時間間隔で行うことが好ましい。このような低温加
熱の殺菌装置を用いることにより、微生物繁殖を制御で
きて洗浄剤の変質が少なくなり、長期間循環使用できる
と共に、メンテナンス回数も減少し保守が容易となる。The sterilizer is operated according to the degree of growth of microorganisms, but from the viewpoint of the operating rate of the entire cleaning system, it is preferable that the cleaning system is stopped. Otherwise, it should be performed at regular time intervals. preferable. By using such a low-temperature heating sterilizer, microbial growth can be controlled, the deterioration of the cleaning agent can be reduced, the cleaning agent can be circulated for a long period of time, and the maintenance frequency can be reduced to facilitate maintenance.
【００１５】[0015]
【実施例】図１は本発明の一実施例を示し、洗浄槽１
と、循環装置２と、濾過装置３と、殺菌装置４とを備え
て洗浄システムが構成されている。洗浄槽１は、水系洗
浄剤が内部に充填され、光学素子などの被洗浄物を精密
洗浄する。この洗浄槽１は被洗浄物を振盪したり水系洗
浄剤を超音波振動するなどの手段あるいは水系洗浄剤を
噴射や噴流する手段を適宜備えており、これらの手段に
より水系洗浄剤に浸漬されている被洗浄物を洗浄する。
この洗浄が終了した被洗浄物は洗浄槽１から引き上げら
れて市水、純水等によりリンスされた後、適宜乾燥され
る。１０は洗浄槽１を所定温度に加熱する加熱手段であ
る。FIG. 1 shows an embodiment of the present invention, in which a cleaning tank 1 is used.
The circulation system 2, the filtration device 3, and the sterilization device 4 constitute a cleaning system. The cleaning tank 1 is internally filled with a water-based cleaning agent and precisely cleans an object to be cleaned such as an optical element. This cleaning tank 1 is provided with means for shaking the object to be cleaned, ultrasonically vibrating the water-based cleaning agent, or means for injecting or jetting the water-based cleaning agent, and is immersed in the water-based cleaning agent by these means. Clean the object to be cleaned.
The object to be cleaned after this cleaning is pulled out from the cleaning tank 1, rinsed with city water, pure water, etc., and then appropriately dried. Reference numeral 10 is a heating means for heating the cleaning tank 1 to a predetermined temperature.
【００１６】循環装置２は濾過装置２、殺菌装置４およ
び洗浄槽１の間で、水系洗浄剤を循環させるものであ
り、ポンプ等を駆動源として使用している。かかる循環
を行うため、洗浄槽１と循環装置２、循環装置２と濾過
装置３、濾過装置３と洗浄槽１とが管路５，６，７によ
りそれぞれ接続されている。この循環装置２と管路６で
接続されている濾過装置３は洗浄により混入した油、埃
等の汚れを濾過して、水系洗浄剤を再生する。これによ
り水系洗浄剤の循環使用が可能となる。The circulation device 2 circulates an aqueous cleaning agent among the filtration device 2, the sterilization device 4 and the cleaning tank 1, and uses a pump or the like as a drive source. In order to perform such circulation, the washing tank 1 and the circulating device 2, the circulating device 2 and the filtering device 3, and the filtering device 3 and the washing tank 1 are connected by pipe lines 5, 6 and 7, respectively. A filter device 3 connected to the circulation device 2 by a pipe line 6 filters dirt such as oil and dust mixed by cleaning to regenerate the water-based cleaning agent. This allows the water-based cleaning agent to be recycled.
【００１７】殺菌装置４は濾過装置３を通過した水系洗
浄剤を低温加熱して洗浄剤内の微生物を殺菌する。この
殺菌装置４は、バルブ８を介した分岐管９により管路７
と接続され、バルブ８の切り換えにより、必要に応じて
洗浄剤を殺菌する。The sterilizing device 4 heats the aqueous cleaning agent passing through the filtering device 3 at a low temperature to sterilize microorganisms in the cleaning agent. This sterilization device 4 is provided with a pipe 7 by a branch pipe 9 via a valve 8.
The cleaning agent is sterilized as necessary by switching the valve 8.
【００１８】図２はかかる殺菌装置４の構成を示し、同
装置４は水系洗浄剤が分岐路９から流入する殺菌槽４ａ
と、殺菌槽４ａ内に配置された熱媒体循環パイプ４ｂと
からなっている。熱媒体循環パンプ４ｂは６０℃前後の
水、油等の熱媒体が循環しており、熱交換作用により殺
菌槽４ａ内に供給された水系洗浄剤を低温殺菌する。FIG. 2 shows the structure of such a sterilizing device 4, which is a sterilizing tank 4a into which an aqueous cleaning agent flows in from a branch passage 9.
And a heat medium circulation pipe 4b arranged in the sterilization tank 4a. The heat medium circulation pump 4b circulates a heat medium such as water or oil at about 60 ° C., and pasteurizes the water-based cleaning agent supplied into the sterilization tank 4a by heat exchange.
【００１９】以下、本実施例の作用をさらに具体的数値
により説明する。被洗浄物として、切削油が付着したア
ルミニウム製切削部品を使用し、この被洗浄物を洗浄槽
１内の水系洗浄剤に浸漬する。洗浄槽１には、純度９
９．９％のポリオキシエチレン（７）２級アルキルエー
テル５ｗｔ％、純水９５ｗｔ％および微量の添加剤を混
合した水系洗浄剤が充填されている。殺菌装置４へ水系
洗浄剤が流入しないようにバルブ８を閉じた状態で、水
系洗浄剤を３５℃に保ちながら、１日に８時間循環させ
て洗浄し、１６時間洗浄を停止する。洗浄終了後におい
ては、バルブ８を切り換えて水系洗浄剤を殺菌装置４に
導入し、６３℃の低温で３０分間循環させる殺菌を行
う。以上の作動を１箇月続行したところ、水系洗浄剤は
臭気およびスライムが発生することがなかった。この１
箇月経過時においては、洗浄能力が低下したため、水系
洗浄剤を交換した。The operation of the present embodiment will be described below with more specific numerical values. An aluminum cutting part to which cutting oil adheres is used as the object to be cleaned, and the object to be cleaned is immersed in the water-based cleaning agent in the cleaning tank 1. The cleaning tank 1 has a purity of 9
It is filled with an aqueous cleaning agent in which 5 wt% of 9.9% polyoxyethylene (7) secondary alkyl ether, 95 wt% of pure water, and a trace amount of additives are mixed. With the valve 8 closed to prevent the water-based cleaning agent from flowing into the sterilizer 4, the water-based cleaning agent is circulated for 8 hours a day for cleaning while maintaining the water-based cleaning agent at 35 ° C., and the cleaning is stopped for 16 hours. After completion of the cleaning, the valve 8 is switched to introduce the water-based cleaning agent into the sterilization device 4, and sterilization is performed by circulating it at a low temperature of 63 ° C. for 30 minutes. When the above operation was continued for one month, the water-based cleaning agent did not generate odor and slime. This one
After the lapse of several months, the cleaning ability deteriorated, so the aqueous cleaning agent was replaced.
【００２０】図３は本実施例に対する比較例を示し、同
一の要素は同一の符号で対応させてある。すなわち、こ
の比較例においては、殺菌装置４を備えることなく、水
系洗浄剤の循環使用するものである。かかる比較例に対
し、本実施例と同様にその洗浄を行ったところ、１０日
目に臭気およびスライムが発生して使用できなくなった
ため洗浄剤の交換を必要とした。FIG. 3 shows a comparative example with respect to this embodiment, in which the same elements are designated by the same reference numerals. That is, in this comparative example, the water-based cleaning agent is circulated without using the sterilization device 4. When this comparative example was washed in the same manner as this example, odor and slime were generated on the 10th day and it became unusable, so that it was necessary to replace the cleaning agent.
【００２１】[0021]
【発明の効果】以上のとおり本発明は、低温加熱によっ
て水系洗浄剤を殺菌するため、臭気およびスライムの発
生を制御でき、これにより水系洗浄剤を長期間循環使用
できると共に、メンテナンス回数を少なくすることがで
きる。As described above, according to the present invention, since the water-based cleaning agent is sterilized by low-temperature heating, the generation of odor and slime can be controlled, which allows the water-based cleaning agent to be circulated for a long period of time and the number of maintenances can be reduced. be able to.
【図１】本発明の一実施例のブロック図である。FIG. 1 is a block diagram of an embodiment of the present invention.
【図２】殺菌装置の一例の構成図である。FIG. 2 is a configuration diagram of an example of a sterilization device.
【図３】比較例のブロック図である。FIG. 3 is a block diagram of a comparative example.
１ 洗浄槽 ２ 循環装置 ３ 濾過装置 ４ 殺菌装置 1 Cleaning tank 2 Circulation device 3 Filtration device 4 Sterilization device
Claims (1)
槽を加熱する加熱手段と、洗浄槽から抜き出された水系
洗浄剤を濾過する濾過装置と、洗浄槽から抜き出された
水系洗浄剤を低温加熱して殺菌処理する殺菌装置と、水
系洗浄剤が洗浄槽、濾過装置および殺菌装置の間を循環
するように連結する循環手段とを備えていることを特徴
とする水系精密洗浄システム。1. A cleaning tank filled with an aqueous cleaning agent, heating means for heating the cleaning tank, a filtering device for filtering the aqueous cleaning agent withdrawn from the cleaning tank, and an aqueous system withdrawn from the cleaning tank. Precision cleaning of water system, comprising: a sterilizing device for sterilizing the cleaning agent by low-temperature heating, and a circulation means for connecting the water-based cleaning agent so as to circulate between the cleaning tank, the filtering device and the sterilizing device. system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6307093A JPH06254518A (en) | 1993-02-26 | 1993-02-26 | Water-based precision cleaning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6307093A JPH06254518A (en) | 1993-02-26 | 1993-02-26 | Water-based precision cleaning system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06254518A true JPH06254518A (en) | 1994-09-13 |
Family
ID=13218725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6307093A Withdrawn JPH06254518A (en) | 1993-02-26 | 1993-02-26 | Water-based precision cleaning system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06254518A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7562665B2 (en) | 2004-02-26 | 2009-07-21 | Panasonic Electric Works Co., Ltd. | Cleaning device for a hair removing apparatus and method of cleaning the same |
-
1993
- 1993-02-26 JP JP6307093A patent/JPH06254518A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7562665B2 (en) | 2004-02-26 | 2009-07-21 | Panasonic Electric Works Co., Ltd. | Cleaning device for a hair removing apparatus and method of cleaning the same |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20000509 |