JPH0624262B2 - Transverse bending type vibrator - Google Patents
Transverse bending type vibratorInfo
- Publication number
- JPH0624262B2 JPH0624262B2 JP3336247A JP33624791A JPH0624262B2 JP H0624262 B2 JPH0624262 B2 JP H0624262B2 JP 3336247 A JP3336247 A JP 3336247A JP 33624791 A JP33624791 A JP 33624791A JP H0624262 B2 JPH0624262 B2 JP H0624262B2
- Authority
- JP
- Japan
- Prior art keywords
- polarization
- vibration
- piezoelectric ceramic
- polarized
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は長さ方向の電気的歪変化
（長さ振動）を厚み方向の機械的振動に転換する異方向
複屈曲形振動子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a different-direction double-bend type vibrator which converts electric strain change (length vibration) in the length direction into mechanical vibration in the thickness direction.
【０００２】[0002]
【従来の技術】電圧印加によって長さ振動する圧電セラ
ミックの特性を利用し、長さ振動を厚み方向の機械的振
動に変換するものとして、圧電セラミックに金属板を貼
り合せた圧電バイモルフが知られている。2. Description of the Related Art A piezoelectric bimorph in which a metal plate is bonded to a piezoelectric ceramic is known as a device for converting length vibration into mechanical vibration in the thickness direction by utilizing the characteristics of a piezoelectric ceramic that vibrates in length by applying a voltage. ing.
【０００３】又、二枚の圧電セラミックを電圧印加時の
伸縮方向が逆方向となるように貼り合せ、一方に伸び、
他方に縮みを交互に生じさせることによっても厚み方向
の機械的振動に転換することが可能である。Further, two piezoelectric ceramics are attached so that the directions of expansion and contraction when a voltage is applied are opposite to each other, and they are extended to one side.
It is also possible to convert to mechanical vibration in the thickness direction by alternately causing shrinkage on the other side.
【０００４】何れの場合も圧電セラミックの製造におい
ては自発分極を持つ強誘電セラミックに、高電圧を印加
し分極方向を一方向に固定する、所謂分極処理（ポ−リ
ング処理）が不可欠となるが、該分極処理は常に単分極
処理、即ち一個のセラミックに対して一方向の分極処理
のみが考えられている。In either case, so-called polarization treatment (polling treatment) of applying a high voltage and fixing the polarization direction in one direction is indispensable to the ferroelectric ceramic having spontaneous polarization in the manufacture of piezoelectric ceramics. The polarization treatment is always considered to be a single polarization treatment, that is, only one direction of polarization treatment for one ceramic.
【０００５】[0005]
【発明が解決しようとする問題点】而して上記圧電セラ
ミックは単分極構成であり、電圧印加時の厚み方向の振
動動作は単純なベンディング運動である。The above-mentioned piezoelectric ceramic has a monopolar structure, and the vibration operation in the thickness direction when a voltage is applied is a simple bending motion.
【０００６】従って、上記圧電セラミックはベンディン
グ運動を振動源とする用途、例えば電気音響変換機や圧
電形フィルタ−等の限定された用途に狭められている。Therefore, the above-mentioned piezoelectric ceramics are narrowed down to limited uses, such as electroacoustic transducers and piezoelectric filters, using bending motion as a vibration source.
【０００７】上記の如く従来の圧電セラミック振動子
は、基本的には単なるベンディング運動による厚み方向
の振動か、又は長さ振動、或は径方向振動等の振動モ−
ドに限られていたが、本発明は上記圧電セラミックに異
方向複屈曲性を具有させ、圧電セラミックが厚み方向の
一方に部分屈曲すると同時に、厚み方向の他方に部分屈
曲する、所謂捻れ振動を生起させるようにした固有の振
動モ−ドを有する異方向複屈曲形振動子を提供せんとす
るものである。As described above, the conventional piezoelectric ceramic vibrator is basically a vibration mode such as a vibration in the thickness direction due to a simple bending motion, a length vibration, or a radial vibration.
However, in the present invention, the piezoelectric ceramic is provided with different-direction bi-flexibility so that the piezoelectric ceramic partially bends in one direction in the thickness direction, and at the same time, partially bends in the other direction in the thickness direction. It is intended to provide a different-direction double-bending type oscillator having an inherent vibration mode which is generated.
【０００８】これによって、従来想定されていなかった
上記捻れ振動モ−ドを利用する新分野への圧電セラミッ
クの用途拡張を図り、例えば粘度検出素子等の検出用振
動子としての実用化を可能としたものである。As a result, it is possible to expand the application of the piezoelectric ceramic to a new field utilizing the above-mentioned torsional vibration mode, which has not been expected in the past, and it is possible to put it into practical use as a detecting vibrator such as a viscosity detecting element. It was done.
【０００９】[0009]
【問題点を解決するための手段】本発明は上記問題点を
解決する手段として、矩形の圧電セラミックの一方の対
角となるニ象限を正方向分極領域とすると共に、他方の
対角となるに象限を負方向分極領域に区分し、電圧印加
時、正方向分極領域と負方向分極領域の一方では縮み、
他方では伸びを交互に生ずるような複合振動モ−ドを惹
起させ、これを振動板に貼り合わせるとことによって圧
電バイモルフ振動子を形成することにより、厚み方向の
捻れ振動モ−ドを得るようにしたものである。According to the present invention, as means for solving the above-mentioned problems, the two quadrants of one diagonal of the rectangular piezoelectric ceramic are used as the forward polarization region and the other is diagonal. The quadrant is divided into negative polarization regions, and when voltage is applied, it shrinks in one of the positive polarization region and the negative polarization region,
On the other hand, a composite vibration mode that alternately causes elongation is induced, and a piezoelectric bimorph vibrator is formed by attaching this to a vibration plate to obtain a torsional vibration mode in the thickness direction. It was done.
【００１０】[0010]
【作用】本発明によれば、複分極圧電セラミックの振動
モ−ドが、正分極領域で縮みを生じた時負分極領域で伸
びを生じ、逆に正分極領域で伸びを生じた時負分極領域
で縮みを生じ、各区分された分極領域において相反する
方向の伸縮振動モ−ドが複合して生ずる。従って、これ
に貼り合せられた振動板は縮み領域において厚み方向の
一方に屈曲し、伸び領域において厚み方向の他方に屈曲
することとなる。これを交互に生ずることにより、所謂
複屈曲振動（捻れ振動）を誘起する。According to the present invention, when the vibration mode of the bi-polarized piezoelectric ceramic is contracted in the positive polarization region, it is expanded in the negative polarization region, and conversely, when it is expanded in the positive polarization region, it is negatively polarized. Shrinkage occurs in the region, and stretching vibration modes in opposite directions are combined in each divided polarization region. Therefore, the vibration plate bonded to this bends in one direction in the thickness direction in the contracted region and bends in the other direction in the thickness direction in the stretched region. By alternately generating this, so-called double bending vibration (torsional vibration) is induced.
【００１１】[0011]
【実施例】以下本発明の実施例を第１図乃至第７図に基
いて説明する。前記の如く圧電セラミックは強誘電セラ
ミックに分極処理（ポ−リング処理）を施して圧電性が
付与される。Embodiments of the present invention will be described below with reference to FIGS. 1 to 7. As described above, the piezoelectric ceramic is provided with piezoelectricity by subjecting the ferroelectric ceramic to polarization treatment (polling treatment).
【００１２】分極処理は前記の如く分極方向を一方向に
固定する処理であり、その分極方向によって正電圧又は
負電圧に対する伸び又は縮み方向（長さ振動方向）が逆
方向となる。この異なる振動モ−ドを示す分極方向を区
別するため、図面上圧電セラミックの一方表面側に
（＋）ポ−リング電極を、他方表面側に（−）ポ−リン
グ電極を有するように分極処理された領域を正方向分極
領域と呼び、逆に圧電セラミックの他方表面側に（＋）
ポ−リング電極を、一方表面側に（−）ポ−リング電極
を有するように分極処理された領域を負方向分極領域と
呼称する。The polarization treatment is a treatment for fixing the polarization direction to one direction as described above, and the extension or contraction direction (length vibration direction) with respect to the positive voltage or the negative voltage becomes the opposite direction depending on the polarization direction. In order to distinguish the polarization directions indicating the different vibration modes, a polarization treatment is performed so that the piezoelectric ceramic has a (+) polling electrode on one surface side and a (-) polling electrode on the other surface side in the drawing. The polarized area is called the forward polarization area.
A region of the polling electrode that is polarized so as to have a (-) polling electrode on one surface side is referred to as a negative polarization region.
【００１３】本発明においては、貼り合せ体を形成する
圧電セラミックが上記正方向分極領域と負方向分極領域
とに区分されている。該区分態様として第１図等に示す
ように一枚の圧電セラミック１を分極方向が異なる複数
の分極領域にポ−リング処理し、正方向と負方向分極領
域に区分する。In the present invention, the piezoelectric ceramic forming the bonded body is divided into the positive polarization region and the negative polarization region. As the division mode, as shown in FIG. 1 and the like, one piezoelectric ceramic 1 is subjected to a polling process into a plurality of polarization regions having different polarization directions to divide into positive and negative polarization regions.
【００１４】又他の区分態様として第５図に示すよう
に、正方向分極セラミック片と負方向分極セラミック片
の複数片の圧電セラミック１を平面集合して分極パタ−
ンを形成する。As another sectional mode, as shown in FIG. 5, a plurality of piezoelectric ceramics 1 of a positive polarization ceramic piece and a negative polarization ceramic piece are plane-assembled to form a polarization pattern.
Form
【００１５】上記各例における分極パタ−ンの適例とし
て各図に示すように、圧電セラミック１を四象限単位に
区分する。該分極処理にて対角となる二象限に正方向分
極領域Ｐ２ ，Ｐ３ を、他の対角となる二象限に負方
向分極領域Ｐ１ ，Ｐ４ を形成する。該複分極圧電セ
ラミック１の対向せる表面には全分極領域を覆う駆動電
圧印加用の電極３，４が施されている。As a suitable example of the polarization pattern in each of the above examples, the piezoelectric ceramic 1 is divided into four quadrant units as shown in the respective drawings. By the polarization process, positive polarization regions P2 and P3 are formed in two quadrants that are diagonal, and negative polarization regions P1 and P4 are formed in two quadrants that are diagonal. Electrodes 3 and 4 for applying a drive voltage are provided on the surfaces of the multi-polarized piezoelectric ceramic 1 which are opposed to each other so as to cover the entire polarized region.
【００１６】第２図乃至第５図に示すように、上記分割
形又は非分割形複分極圧電セラミック１を金属板等から
成る振動板２に貼り合せ、振動板２の片面に正方向分極
領域Ｐ２ ，Ｐ３ と負方向分極領域Ｐ１ ，Ｐ４ に
区分された複分極圧電セラミック層を形成する。上記に
よれば、第１図に示すように複分極圧電セラミック１の
振動モ−ドが、正方向分極領域Ｐ２ ，Ｐ３ で伸びｘ
１ を生じた時負方向分極領域Ｐ１ ，Ｐ４ で縮みｘ
２ を生じ、逆に正方向分極領域Ｐ２ ，Ｐ３ で縮み
を生じた時負方向分極領域Ｐ１ ，Ｐ４ で伸びを生
じ、各区分された分極領域において相反する方向の伸縮
振動モ−ドが複合して生ずる。従って、第３図に示すよ
うにこれに貼り合せられた振動板２は縮み領域において
厚み方向の一方に屈曲ｙ２し、伸び領域において厚み方
向の他方に屈曲ｙ１ することとなる。これを交互に生
ずることにより、所謂複屈曲振動（捻れ振動）ｚを誘起
する。As shown in FIGS. 2 to 5, the split type or non-split type multi-polarized piezoelectric ceramic 1 is attached to a diaphragm 2 made of a metal plate or the like, and a forward polarization region is formed on one side of the diaphragm 2. A multi-polarization piezoelectric ceramic layer divided into P2 and P3 and negative polarization regions P1 and P4 is formed. According to the above, as shown in FIG. 1, the vibration mode of the double-polarized piezoelectric ceramic 1 is extended x in the forward polarization regions P2 and P3.
When 1 occurs, contraction x occurs in the negative polarization regions P1 and P4
2 occurs, and conversely when contraction occurs in the positive polarization regions P2 and P3, expansion occurs in the negative polarization regions P1 and P4, and stretching vibration modes in opposite directions are compounded in each divided polarization region. Occurs. Therefore, as shown in FIG. 3, the vibration plate 2 attached thereto is bent y2 in one direction in the thickness direction in the contraction region and is bent y1 in the other direction in the extension region in the thickness direction. By causing this alternately, so-called double bending vibration (torsion vibration) z is induced.
【００１７】又第６図，第７図は振動板２を媒体として
その両面に上記分割形又は非分割形複分極圧電セラミッ
ク１を貼り合せ、上記捻れ振動子を形成した場合を示
す。上記の如く、振動板２の両面において二組の分極領
域が交互に逆方向へ屈曲する運動を繰り返すことによ
り、厚み方向の複屈曲振動、即ち捻れ振動を誘起する。FIGS. 6 and 7 show the case where the above-mentioned divided or non-divided multi-polarized piezoelectric ceramic 1 is bonded to both surfaces of the vibration plate 2 as a medium to form the above-mentioned torsional vibrator. As described above, the double bending vibration in the thickness direction, that is, the torsional vibration is induced by repeating the movement in which the two sets of polarized regions alternately bend in opposite directions on both surfaces of the diaphragm 2.
【００１８】上記単位複分極圧電セラミック１は、同一
の区分パタ−ンから成る複分極圧電セラミックを複層に
し、これを振動板２に貼り合せ上記異方向複屈曲形振動
子を形成しても良い。The unit double-polarized piezoelectric ceramic 1 has a multi-layered structure of multi-polarized piezoelectric ceramics having the same sectional pattern, and is laminated on the diaphragm 2 to form the different-direction double-bend type vibrator. good.
【００１９】又、上記実施例においては圧電セラミック
を四分極処理した場合を示したが、該実施例に従い四分
極領域の単位を複数単位帯状に並設して上記捻れ振動を
連続的に行わせる場合を含む。Further, in the above-mentioned embodiment, the case where the piezoelectric ceramic is subjected to the four-polarization treatment is shown, but according to the embodiment, a plurality of units of the four-polarization region are arranged side by side in a strip shape so that the torsional vibration is continuously performed. Including cases.
【００２０】[0020]
【発明の効果】本発明によれば、複分極圧電セラミック
は一方の対角となる二象限内の正分極領域で縮みを生じ
た時他方の対角となる二象限内の負分極領域で伸びを生
じ、逆に一方の対角となる二象限内の正分極領域で伸び
を生じた時他方の対角となる二象限内の負分極領域で縮
みを生じ、各区分された分極領域において相反する方向
の伸縮振動モードが複合して生ずる。従ってこれに貼り
合わせられた振動板は一方の対角となる二象限の縮み領
域において厚み方向の一方に屈曲し、他方の対角となる
二象限の延び領域において厚み方向の他方に屈曲するこ
ととなる。これを交互に生ずることにより、顕著で且つ
安定なる捻れ振動を効率良く誘起することができる。こ
れによって、従来想定されていなかった上記捻れ振動モ
−ドを利用する新分野への圧電セラミックの用途拡張を
図り、例えば粘度検出素子等の検出用振動子等、新たな
工業的利用の展開を可能としたものである。According to the present invention, when a multi-polarized piezoelectric ceramic contracts in a positive polarization region in one diagonal quadrant, it expands in a negative polarization region in the other diagonal quadrant. On the contrary, when elongation occurs in the positive polarization region in the two quadrants on one diagonal, contraction occurs in the negative polarization region in the two quadrants on the other diagonal, and reciprocity occurs in each divided polarization region. Stretching vibration modes in different directions occur in combination. Therefore, the diaphragm attached to this should bend in one direction in the thickness direction in the contracted area of the two quadrants on one diagonal and bend in the other direction in the thickness direction in the extended area of the two quadrants on the other diagonal. Becomes By causing this alternately, remarkable and stable torsional vibration can be efficiently induced. As a result, we will expand the applications of piezoelectric ceramics to new fields that utilize the above-mentioned torsional vibration mode, which has not been previously assumed, and develop new industrial applications such as detection vibrators such as viscosity detection elements. It was possible.
【図１Ａ，Ｂ】本発明に係る異方向複分極圧電セラミッ
クの分極構造と長さ振動動作を説明する平面図である。1A and 1B are plan views illustrating a polarization structure and length oscillating operation of different-direction bi-polarized piezoelectric ceramics according to the present invention.
【図２】複分極圧電セラミックと振動板にて貼り合せ体
を形成した実施例を示す分解斜視図である。FIG. 2 is an exploded perspective view showing an embodiment in which a bonded body is formed of a multi-polarized piezoelectric ceramic and a vibration plate.
【図３】同貼り合せ体斜視図である。FIG. 3 is a perspective view of the bonded body.
【図４】同側面図である。FIG. 4 is a side view of the same.
【図５】複分極圧電セラミックを複数片に分割して分極
区分を形成した実施例を振動板との貼り合せ体を以って
示す斜視図である。FIG. 5 is a perspective view showing an embodiment in which a polarization section is formed by dividing a multi-polarized piezoelectric ceramic into a plurality of pieces to form a bonded body with a vibration plate.
【図６】非分割形の複分極圧電セラミック相互の貼り合
せ体を振動板を媒体として形成した実施例を示す斜視図
である。FIG. 6 is a perspective view showing an embodiment in which an undivided laminated body of multi-polarized piezoelectric ceramics is formed with a diaphragm as a medium.
【図７】分割形の複分極圧電セラミック相互の貼り合せ
体を振動板を媒体として形成した実施例を示す斜視図で
ある。FIG. 7 is a perspective view showing an embodiment in which a bonded body of split-type multi-polarized piezoelectric ceramics is formed by using a vibration plate as a medium.
１ 複分極圧電セラミック ２ 振動板 ３，４ 電極 Ｐ１，Ｐ４ 負方向分極領域 Ｐ２，Ｐ３ 正方向分極領域 1 Multi-polarized piezoelectric ceramic 2 Vibration plate 3,4 Electrode P1, P4 Negative direction polarized region P2, P3 Positive direction polarized region
Claims (1)
領域に区分して対角となる二象限内を厚み方向であって
且つ正方向の分極領域にすると共に、他の対角となる二
象限内を厚み方向であって且つ負方向の分極領域とした
複分極圧電セラミックと、振動板とにより貼り合わせ体
を形成したことを特徴とする異方向複屈曲形振動子。1. A rectangular piezoelectric ceramic is divided into polarization regions of four quadrants, and diagonally two quadrants are polarized regions in the thickness direction and in the positive direction, and at the same time, in other diagonal regions. A different-direction double-bending oscillator, wherein a laminated body is formed by a double-polarized piezoelectric ceramic having a polarization region in the negative direction and a thickness direction in the quadrant, and a vibrating plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3336247A JPH0624262B2 (en) | 1991-11-25 | 1991-11-25 | Transverse bending type vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3336247A JPH0624262B2 (en) | 1991-11-25 | 1991-11-25 | Transverse bending type vibrator |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20995686A Division JPS6365708A (en) | 1986-09-05 | 1986-09-05 | Different direction double bending type vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0575172A JPH0575172A (en) | 1993-03-26 |
| JPH0624262B2 true JPH0624262B2 (en) | 1994-03-30 |
Family
ID=18297162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3336247A Expired - Lifetime JPH0624262B2 (en) | 1991-11-25 | 1991-11-25 | Transverse bending type vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0624262B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4634174B2 (en) * | 2004-02-26 | 2011-02-16 | セイコーインスツル株式会社 | Ultrasonic motor and electronic device using the same |
| DE102011088304B4 (en) | 2011-12-12 | 2023-09-21 | Endress+Hauser SE+Co. KG | Device for determining and/or monitoring at least one process variable |
| CN104476378B (en) * | 2014-12-09 | 2017-04-12 | 苏州科技大学 | Single excitation ultrasonic elliptic vibration polishing device |
-
1991
- 1991-11-25 JP JP3336247A patent/JPH0624262B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0575172A (en) | 1993-03-26 |
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