JPH06143043A - Minute hole electric discharge machining method and device - Google Patents

Minute hole electric discharge machining method and device

Info

Publication number
JPH06143043A
JPH06143043A JP32117392A JP32117392A JPH06143043A JP H06143043 A JPH06143043 A JP H06143043A JP 32117392 A JP32117392 A JP 32117392A JP 32117392 A JP32117392 A JP 32117392A JP H06143043 A JPH06143043 A JP H06143043A
Authority
JP
Japan
Prior art keywords
electrode wire
workpiece
electric discharge
electrode
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32117392A
Other languages
Japanese (ja)
Inventor
Seiji Furuta
政治 古田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP32117392A priority Critical patent/JPH06143043A/en
Publication of JPH06143043A publication Critical patent/JPH06143043A/en
Pending legal-status Critical Current

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  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

PURPOSE:To process plural minute holes with the same diameter regardless of the number of holes, by carrying out an electric discharge machining by using a continued electrode wire of a minute diameter. CONSTITUTION:A continued minute diameter electrode wire 10 drawn out from a reel 11 is held between a driving roller 15 and a presser roller 18, and drawn out to the lower side. A guide member 20 to guide the electrode wire 10 drawn out by the rollers 15 and 18 is installed to the lower side holding board 21 of a frame 1. The delivered electrode wire 10 advances while rotating in the guide hole 21 of the guide member 20, and some level of bending of the electrode wire 10 is corrected while it passes through the guide hole 12. Then, by applying a voltage between a work W and a contact chip 12, a discharge is generated between the electrode wire 10 and the work W, so as to make it possible to process a minute hole H in the work W.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は微細穴放電加工方法およ
び装置、特に直径が0.3mm以下の微細穴を連続的に
放電加工し得る方法および装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for micro-hole electric discharge machining, and more particularly to a method and apparatus for continuously electric-discharge machining fine holes having a diameter of 0.3 mm or less.

【0002】[0002]

【従来の技術】放電加工にはワイヤカット方式と形彫方
式とがある。前者は被工作物に出発穴を開けておき、こ
の穴に電極ワイヤを挿通し、ワイヤをその軸線と垂直方
向に動かしながら放電加工を行うものであり、後者は被
工作物に対して電極を直交方向に配置し、電極の先端を
被工作物に近接させて両者の間に放電を生じさせ、被工
作物に穴加工を行うものである。
2. Description of the Related Art There are a wire cutting method and a die-sinking method for electric discharge machining. The former is to make a starting hole in the workpiece, insert the electrode wire into this hole, and perform EDM while moving the wire in the direction perpendicular to its axis. The electrodes are arranged in the orthogonal direction, and the tip of the electrode is brought close to the work piece to generate an electric discharge between the two, thereby making a hole in the work piece.

【0003】上記形彫方式の放電加工において、従来で
は加工すべき穴より太い径の棒状電極を用い、この電極
の先端部を成形用電極で放電加工により成形し、成形さ
れた細径部を被工作物に近接させ、棒状電極を軸心を中
心として回転させながら放電することにより、穴加工を
行っていた。
In the above-mentioned die-sinking electric discharge machining, a rod-shaped electrode having a diameter larger than that of a hole to be machined conventionally is used, and the tip end of this electrode is formed by electric discharge machining with a forming electrode, and the formed small diameter portion A hole was formed by bringing a rod-shaped electrode close to a work piece and causing an electric discharge while rotating the rod-shaped electrode about an axis.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、放電加
工には当然ながら電極の消耗を伴う。成形用電極で成形
される細径部の長さ(成形ストローク)は、通常の場
合、細径部の直径の10〜20倍程度であるため、細径
部は直ぐに消耗してしまう。したがって、細径部が消耗
すれば、棒状電極の先端部を成形用電極で再成形しなけ
ればならず、その間、被工作物の加工を中止することに
なる。このように、従来では被工作物の加工途中で棒状
電極の再成形のために頻繁に作業を中断しなければなら
ず、作業能率が悪いという問題があった。また、従来で
は成形された細径部の径が一定しないので、同一径の微
細穴を何個も加工できないという問題があった。そこ
で、本発明の目的は、電極の再成形を不要とし、連続的
に微細穴を加工できる、作業能率に優れた微細穴放電加
工方法および装置を提供することにある。また、他の目
的は、同一径の微細穴を何個でも加工できる微細穴放電
加工方法および装置を提供することにある。
However, the electric discharge machining naturally involves the consumption of electrodes. Since the length (molding stroke) of the small-diameter portion formed by the forming electrode is usually about 10 to 20 times the diameter of the small-diameter portion, the small-diameter portion is immediately consumed. Therefore, when the small-diameter portion is consumed, the tip end portion of the rod-shaped electrode must be reshaped with the molding electrode, and the processing of the workpiece is stopped during that time. As described above, in the past, the work had to be frequently interrupted during the machining of the workpiece to reshape the rod-shaped electrode, and there was a problem that the work efficiency was poor. Further, conventionally, there is a problem in that the diameter of the formed small diameter portion is not constant, so that it is not possible to process a number of fine holes having the same diameter. Therefore, an object of the present invention is to provide a fine hole electric discharge machining method and apparatus which do not require re-forming of electrodes and can continuously form fine holes and which are excellent in work efficiency. Another object of the present invention is to provide a fine hole electric discharge machining method and apparatus capable of machining any number of fine holes having the same diameter.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するた
め、本発明の微細穴放電加工方法は、加工すべき微細穴
に対応した線径を有する電極線を巻回したリールから、
電極線を引き出すステップと、電極線に給電するステッ
プと、電極線と被工作物との間に電圧を印加することに
より、電極線と被工作物との間で放電を生じさせ、被工
作物に微細穴を加工するステップとを含むものである。
また、本発明の微細穴放電加工装置は、加工すべき微細
穴に対応した線径を有する電極線を巻回したリールと、
リールから繰り出された電極線を摺動自在に挿通し、電
極線に給電するコンタクトチップと、コンタクトチップ
に挿通された電極線を被加工物方向へ所定の速度で送り
出す送り出し機構と、送り出し機構により送り出された
電極線を被工作物に対して垂直方向に案内するガイド部
材とを備え、被工作物とコンタクトチップとの間に電圧
を印加することにより、電極線と被工作物との間で放電
を生じさせ、被工作物に微細穴を加工するものである。
In order to achieve the above object, the fine hole electric discharge machining method of the present invention comprises a reel wound with an electrode wire having a wire diameter corresponding to the fine hole to be machined.
The step of pulling out the electrode wire, the step of supplying power to the electrode wire, and the application of a voltage between the electrode wire and the workpiece cause an electric discharge between the electrode wire and the workpiece to generate the workpiece. And a step of processing fine holes.
Further, the fine hole electric discharge machining apparatus of the present invention is a reel around which an electrode wire having a wire diameter corresponding to a fine hole to be processed is wound,
With a contact tip that slidably inserts the electrode wire fed from the reel and feeds the electrode wire, a feed mechanism that feeds the electrode wire inserted into the contact tip toward the workpiece at a predetermined speed, and a feed mechanism. A guide member for guiding the sent electrode wire in a direction perpendicular to the work piece is provided, and by applying a voltage between the work piece and the contact tip, the electrode wire and the work piece are provided. It is to generate an electric discharge and machine fine holes in a workpiece.

【0006】[0006]

【作用】被工作物に微細穴を形成するには、コンタクト
チップと被工作物との間に電圧を印加し、電極線と被工
作物との間で放電を発生させる。放電加工が進行するに
従い、被工作物に穴が形成されるとともに電極線が消耗
するので、被工作物の加工部と電極線の先端との距離に
応じて送り出し機構が電極線を被工作物方向へ送り出
す。コンタクトチップと電極線との摺動抵抗により電極
線が屈曲するのを防止するため、送り出し機構はコンタ
クトチップより前方(被工作物側)に設けるのが望まし
い。送り出し機構で送り出された電極線はガイド部材に
よって被工作物に対して垂直方向に案内されるので、電
極線の先端が横振れするのを防止でき、穴の精度が向上
する。電極線はリールに巻装されているので、電極の消
耗により加工を中断する必要がなく、連続的に加工でき
る。また、電極として一定線径の線材を使用するので、
同一径の微細穴を何個でも加工できる。
In order to form fine holes in the work piece, a voltage is applied between the contact tip and the work piece to generate an electric discharge between the electrode wire and the work piece. As the electrical discharge machining progresses, holes are formed in the workpiece and the electrode wires are consumed.Therefore, the feeding mechanism moves the electrode wires to the workpiece according to the distance between the machined part of the workpiece and the tip of the electrode wire. Send in the direction. In order to prevent the electrode wire from bending due to the sliding resistance between the contact tip and the electrode wire, it is desirable that the feeding mechanism be provided in front of the contact tip (on the side of the workpiece). Since the electrode wire sent out by the sending-out mechanism is guided by the guide member in the vertical direction with respect to the workpiece, the tip of the electrode wire can be prevented from swinging laterally, and the accuracy of the hole is improved. Since the electrode wire is wound around the reel, there is no need to interrupt the processing due to the consumption of the electrode, and continuous processing is possible. Also, since a wire material with a constant wire diameter is used as the electrode,
It is possible to machine any number of micro holes with the same diameter.

【0007】送り出し機構としては、電極線をチャック
して前後方向に往復動作するチャック機構であってもよ
いが、電極線を挟持する一対の回転ローラで構成する方
が、連続的に電極線を送り出すことができるので望まし
い。被工作物に対して垂直な微細穴を形成するため、放
電加工中、電極線を被工作物に対して垂直な軸を中心と
して相対的に旋回させるのが望ましい。電極線を旋回さ
せる際の捩れを防止するため、リール,コンタクトチッ
プおよび送り出し機構を一体に旋回させる必要がある。
この旋回は、電極線側(リール,コンタクトチップ,送
り出し機構)を旋回させてもよく、被工作物側を旋回さ
せてもよい。電極線を旋回させる際、ガイド部材を電極
線と一体的に旋回させてもよいが、微細穴の加工精度を
向上させるには、ガイド部材を静止させておく方がよ
い。この場合には、電極線がガイド部材の中を回転しつ
つ前進することになり、ガイド部材を通過する間に電極
線の屈曲が自動的に解消されるからである。ガイド部材
は、電極線あるいは工作物との間で不要な放電を発生さ
せないため、絶縁材料で形成するのが望ましい。
The sending-out mechanism may be a chuck mechanism that chucks the electrode wire and reciprocates in the front-back direction. However, a pair of rotating rollers that sandwich the electrode wire continuously feed the electrode wire. It is desirable because it can be sent out. In order to form fine holes perpendicular to the work piece, it is desirable to swivel the electrode wires relative to an axis perpendicular to the work piece during electrical discharge machining. In order to prevent twisting when rotating the electrode wire, it is necessary to integrally rotate the reel, the contact tip and the feeding mechanism.
In this turning, the electrode wire side (reel, contact tip, delivery mechanism) may be turned, or the workpiece side may be turned. When turning the electrode wire, the guide member may be turned together with the electrode wire, but it is better to keep the guide member stationary in order to improve the processing accuracy of the fine holes. This is because, in this case, the electrode wire advances while rotating in the guide member, and the bending of the electrode wire is automatically eliminated while passing through the guide member. The guide member is preferably made of an insulating material because it does not generate unnecessary electric discharge between the guide member and the work piece.

【0008】[0008]

【実施例】図1は本発明にかかる微細穴放電加工装置の
一例を示す。この放電加工装置は、フレーム1と、フレ
ーム1の上下支持台1a,1b間に鉛直な支軸2a,2
bを中心として回転自在に支持された回転体2と、フレ
ーム1の下部に設けられた載置台3とを備えている。被
工作物Wは載置台3上に水平姿勢で載置される。フレー
ム1の頂部には旋回用モータ4が設けられ、このモータ
4は回転体2を一定速度で旋回させる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an example of a fine hole electric discharge machine according to the present invention. This electric discharge machining apparatus includes a frame 1 and vertical support shafts 2a, 2 between the upper and lower support bases 1a, 1b of the frame 1.
The rotating body 2 is rotatably supported around b, and the mounting table 3 is provided below the frame 1. The workpiece W is mounted on the mounting table 3 in a horizontal posture. A turning motor 4 is provided on the top of the frame 1, and the motor 4 turns the rotating body 2 at a constant speed.

【0009】回転体2の内部には、長尺な電極線10を
連続的に巻回したリール11が回転可能に支持されてい
る。電極線10は加工すべき微細穴Hに対応した線径を
有しており、この実施例では直径が0.3mm以下の黄
銅等の導電性線材を使用している。リール11から繰り
出された電極線10は、回転体2の支軸2a,2bと同
軸上に配置されたコンタクトチップ12に摺動自在に挿
通されている。このコンタクトチップ12は導電性筒体
よりなり、外部の電源回路13と電気的に接続されてい
るため、コンタクトチップ12を介して電極線10に給
電される。コンタクトチップ12の下方には、コンタク
トチップ12に挿通された電極線10を被加工物W方向
へサーボ送りする送り出す送り出し機構14が同軸上に
設けられている。この送り出し機構14は、駆動ローラ
15と、駆動ローラ15を回転駆動させるモータ16
と、駆動ローラ15にバネ17で押し付けられる押えロ
ーラ18とで構成されており、電極線10は駆動ローラ
15と押えローラ18との間で挟持されて下方へ送り出
される。ローラ15,18は電極線10を確実に把持す
るため、ゴム等の弾性体で形成されている。電極線10
の送り出し速度は、放電加工に伴う電極線10の先端部
と被工作物Wの加工部との距離(極間距離)が一定にな
るように制御される。そのため、公知の極ギャップ自動
制御装置(図示せず)を使用してもよい。
Inside the rotating body 2, a reel 11 in which a long electrode wire 10 is continuously wound is rotatably supported. The electrode wire 10 has a wire diameter corresponding to the fine hole H to be processed. In this embodiment, a conductive wire material such as brass having a diameter of 0.3 mm or less is used. The electrode wire 10 extended from the reel 11 is slidably inserted into a contact tip 12 arranged coaxially with the support shafts 2a and 2b of the rotating body 2. The contact tip 12 is made of a conductive cylindrical body and is electrically connected to an external power supply circuit 13, so that power is supplied to the electrode wire 10 through the contact tip 12. Below the contact tip 12, a feeding mechanism 14 for feeding the electrode wire 10 inserted through the contact tip 12 by servo in the direction of the workpiece W is provided coaxially. The delivery mechanism 14 includes a drive roller 15 and a motor 16 for rotating the drive roller 15.
And a pressing roller 18 that is pressed against the driving roller 15 by a spring 17, and the electrode wire 10 is sandwiched between the driving roller 15 and the pressing roller 18 and sent downward. The rollers 15 and 18 are made of an elastic material such as rubber in order to reliably grip the electrode wire 10. Electrode wire 10
Is controlled so that the distance between the tip of the electrode wire 10 and the machined portion of the workpiece W (distance between the electrodes) due to the electric discharge machining becomes constant. Therefore, a known pole gap automatic control device (not shown) may be used.

【0010】フレーム1の下側支持台1bには、ローラ
15,18によって送り出された電極線10を案内する
ガイド部材20が取り付けられている。このガイド部材
20の案内穴21は、上記支軸2a,2bおよびコンタ
クトチップ12と同軸上に配置されている。ガイド部材
20は回転体2とは一体回転しないので、ローラ15,
18によって送り出された電極線10が案内穴21の中
を回転しつつ前進することになり、電極線10に多少の
屈曲があっても案内穴21の中を通過する間に自動的に
矯正され、被工作物Wに真直な穴Hを加工できる。な
お、ガイド部材20は被工作物Wに近接するため、ダイ
ヤモンド,サファイヤ,セラミックスのような耐熱性に
優れた絶縁材料を用いるのが望ましい。
A guide member 20 for guiding the electrode wire 10 sent by the rollers 15 and 18 is attached to the lower support 1b of the frame 1. The guide hole 21 of the guide member 20 is arranged coaxially with the support shafts 2a, 2b and the contact tip 12. Since the guide member 20 does not rotate integrally with the rotating body 2, the rollers 15,
The electrode wire 10 sent out by 18 moves forward while rotating in the guide hole 21, and even if the electrode wire 10 is slightly bent, it is automatically corrected while passing through the guide hole 21. The straight hole H can be machined in the workpiece W. Since the guide member 20 is close to the workpiece W, it is desirable to use an insulating material having excellent heat resistance such as diamond, sapphire, or ceramics.

【0011】被工作物Wは上記電源回路13と接続され
ており、被工作物Wとコンタクトチップ12との間に電
圧を印加することにより、電極線10と被工作物Wとの
間で放電を生じさせ、被工作物Wに微細穴Hを加工する
ことができる。なお、実際の放電加工は、被工作物Wお
よび電極線10の先端部を加工液中に浸漬した状態で行
われる。
The workpiece W is connected to the power supply circuit 13 and a voltage is applied between the workpiece W and the contact tip 12 to discharge between the electrode wire 10 and the workpiece W. And the fine hole H can be processed in the workpiece W. It should be noted that the actual electric discharge machining is performed with the workpiece W and the tip of the electrode wire 10 immersed in the machining liquid.

【0012】なお、本発明は上記実施例に限定されるも
のではない。例えば、上記実施例ではリール11とコン
タクトチップ12と送り出し機構14とを装備した回転
体2を旋回させる場合を示したが、被工作物Wが小型部
品の場合には、被工作物Wを載置した載置台3を旋回さ
せてもよい。また、上記実施例では電極線にコンタクト
チップを介して給電する場合を示したが、送り出し機構
(例えばローラ)を導電体で形成し、コンタクトチップ
を省略してもよい。さらに、上記実施例は装置を一定位
置に固定し、電極線を送り出す方法に基づいて説明され
ているが、装置全体を電極線と一体的に上下させる方法
を用いてもよい。この場合には、複数列の電極線を並列
配置し、1回の加工が終了すれば、装置を複数穴分だけ
横方向に間欠送りをすればよい。
The present invention is not limited to the above embodiment. For example, in the above embodiment, the case where the rotating body 2 equipped with the reel 11, the contact tip 12, and the feeding mechanism 14 is swung is shown. However, when the workpiece W is a small part, the workpiece W is mounted. The mounting table 3 placed may be rotated. Further, in the above embodiment, the case where the electric power is supplied to the electrode wire through the contact tip has been described, but the feed-out mechanism (for example, the roller) may be formed of a conductor and the contact tip may be omitted. Further, although the above-mentioned embodiment is described based on the method of fixing the device at a fixed position and sending out the electrode wire, a method of vertically moving the entire device integrally with the electrode wire may be used. In this case, a plurality of rows of electrode wires are arranged in parallel, and when one machining is completed, the apparatus may be intermittently fed laterally by a plurality of holes.

【0013】[0013]

【発明の効果】以上の説明で明らかなように、本発明に
よれば、連続した細径の電極線を用いて放電加工を行う
ようにしたので、従来のように電極の先端部を成形する
必要がなく、作業能率が向上するとともに、電極線の線
径が一定しているので、加工される微細穴の穴径にバラ
ツキが生じず、同一径の微細穴を何個でも加工できると
いう効果がある。
As is apparent from the above description, according to the present invention, the electric discharge machining is performed by using the electrode wire having a continuous small diameter, and therefore the tip of the electrode is formed as in the conventional case. Since there is no need to improve work efficiency and the wire diameter of the electrode wire is constant, there is no variation in the diameter of the fine holes to be processed, and it is possible to process any number of fine holes of the same diameter. There is.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明にかかる微細穴放電加工装置の一例の構
造図である。
FIG. 1 is a structural diagram of an example of a fine hole electric discharge machining apparatus according to the present invention.

【符号の説明】[Explanation of symbols]

1 フレーム 2 回転体 2a,2b 支軸 4 旋回用モータ 10 電極線 11 リール 12 コンタクトチップ 13 電源回路 14 送り出し機構 20 ガイド部材 W 被工作物 1 Frame 2 Rotating Body 2a, 2b Spindle 4 Turning Motor 10 Electrode Wire 11 Reel 12 Contact Chip 13 Power Supply Circuit 14 Feeding Mechanism 20 Guide Member W Workpiece

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】被工作物に微細穴を加工する方法であっ
て、 加工すべき微細穴に対応した線径を有する電極線を巻回
したリールから、電極線を引き出すステップと、 電極線に給電するステップと、 電極線と被工作物との間に電圧を印加することにより、
電極線と被工作物との間で放電を生じさせ、被工作物に
微細穴を加工するステップとを含むことを特徴とする微
細穴放電加工方法。
1. A method for machining a fine hole in a workpiece, comprising the steps of pulling an electrode wire from a reel around which an electrode wire having a wire diameter corresponding to the fine hole to be machined is wound. By applying a voltage and applying a voltage between the electrode wire and the workpiece,
A step of generating an electric discharge between the electrode wire and the workpiece to machine a fine hole in the workpiece.
【請求項2】加工すべき微細穴に対応した線径を有する
電極線を巻回したリールと、 リールから繰り出された電極線を摺動自在に挿通し、電
極線に給電するコンタクトチップと、 コンタクトチップに挿通された電極線を被加工物方向へ
所定の速度で送り出す送り出し機構と、 送り出し機構により送り出された電極線を被工作物に対
して垂直方向に案内するガイド部材とを備え、 被工作物とコンタクトチップとの間に電圧を印加するこ
とにより、電極線と被工作物との間で放電を生じさせ、
被工作物に微細穴を加工することを特徴とする微細穴放
電加工装置。
2. A reel on which an electrode wire having a wire diameter corresponding to a fine hole to be machined is wound, and a contact tip for slidably inserting the electrode wire fed from the reel to supply power to the electrode wire. A feed mechanism is provided for feeding the electrode wire inserted through the contact tip toward the workpiece at a predetermined speed, and a guide member for guiding the electrode wire fed by the feed mechanism in a direction perpendicular to the workpiece. By applying a voltage between the workpiece and the contact tip, a discharge is generated between the electrode wire and the workpiece,
A micro hole electrical discharge machine characterized by machining micro holes on a workpiece.
【請求項3】請求項2に記載の微細穴放電加工装置にお
いて、 上記リールとコンタクトチップと送り出し機構とを一体
的に、被工作物に対して垂直な軸を中心として相対的に
旋回させる旋回機構を備えたことを特徴とする微細穴放
電加工装置。
3. The fine hole electric discharge machining apparatus according to claim 2, wherein the reel, the contact tip, and the feeding mechanism are integrally swung so as to relatively swivel about an axis perpendicular to the workpiece. A micro-hole electric discharge machine equipped with a mechanism.
JP32117392A 1992-11-04 1992-11-04 Minute hole electric discharge machining method and device Pending JPH06143043A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32117392A JPH06143043A (en) 1992-11-04 1992-11-04 Minute hole electric discharge machining method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32117392A JPH06143043A (en) 1992-11-04 1992-11-04 Minute hole electric discharge machining method and device

Publications (1)

Publication Number Publication Date
JPH06143043A true JPH06143043A (en) 1994-05-24

Family

ID=18129612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32117392A Pending JPH06143043A (en) 1992-11-04 1992-11-04 Minute hole electric discharge machining method and device

Country Status (1)

Country Link
JP (1) JPH06143043A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002024389A1 (en) * 2000-09-20 2002-03-28 Mitsubishi Denki Kabushiki Kaisha Electric discharge machining device and electric discharge machining method
JP2007007856A (en) * 2000-09-20 2007-01-18 Mitsubishi Electric Corp Electrical discharge machining device
JP2007054938A (en) * 2005-08-26 2007-03-08 Ogura Jewel Ind Co Ltd Electrode guide for small hole electric discharge machining
JP2008200806A (en) * 2007-02-20 2008-09-04 Denso Corp Electrical discharge machine
US7518081B2 (en) * 2004-01-23 2009-04-14 Mitsubishi Denki Kabushiki Kaisha Electric discharge machining apparatus
US7645958B2 (en) * 2004-10-27 2010-01-12 Mitsubishi Electric Corporation Electric-discharge-machining power supply apparatus and small-hole electric-discharge machining apparatus
CN108817579A (en) * 2018-07-09 2018-11-16 南京航空航天大学 A kind of meander electrode fixture that the curved hole machined of monocrystalline silicon electric spark may be implemented
WO2020246469A1 (en) * 2019-06-07 2020-12-10 株式会社牧野フライス製作所 Narrow-hole electric discharge machine

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002024389A1 (en) * 2000-09-20 2002-03-28 Mitsubishi Denki Kabushiki Kaisha Electric discharge machining device and electric discharge machining method
US6788019B2 (en) 2000-09-20 2004-09-07 Mitsubishi Denki Kabushiki Kaisha Electric discharge machining device and electric discharge machining method
JP2007007856A (en) * 2000-09-20 2007-01-18 Mitsubishi Electric Corp Electrical discharge machining device
US7518081B2 (en) * 2004-01-23 2009-04-14 Mitsubishi Denki Kabushiki Kaisha Electric discharge machining apparatus
US7645958B2 (en) * 2004-10-27 2010-01-12 Mitsubishi Electric Corporation Electric-discharge-machining power supply apparatus and small-hole electric-discharge machining apparatus
JP2007054938A (en) * 2005-08-26 2007-03-08 Ogura Jewel Ind Co Ltd Electrode guide for small hole electric discharge machining
JP4490889B2 (en) * 2005-08-26 2010-06-30 オグラ宝石精機工業株式会社 Electrode guide for small hole electric discharge machining
JP2008200806A (en) * 2007-02-20 2008-09-04 Denso Corp Electrical discharge machine
CN108817579A (en) * 2018-07-09 2018-11-16 南京航空航天大学 A kind of meander electrode fixture that the curved hole machined of monocrystalline silicon electric spark may be implemented
WO2020246469A1 (en) * 2019-06-07 2020-12-10 株式会社牧野フライス製作所 Narrow-hole electric discharge machine
CN113874148A (en) * 2019-06-07 2021-12-31 株式会社牧野铣床制作所 Fine hole electric discharge machine

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