JPH0588308B2 - - Google Patents

Info

Publication number: JPH0588308B2
Authority: JP; Japan
Prior art keywords: base material; film; tin; thin films; ion
Prior art date: 1988-08-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP20000288A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0250949A (ja

Inventor

Tokiaki Hayashi

Shuji Hida

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

SURFACE HIGH PERFORMANCE RES

Original Assignee

SURFACE HIGH PERFORMANCE RES

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-08-12

Filing date

1988-08-12

Publication date

1993-12-21

1988-08-12 Application filed by SURFACE HIGH PERFORMANCE RES filed Critical SURFACE HIGH PERFORMANCE RES

1988-08-12 Priority to JP20000288A priority Critical patent/JPH0250949A/ja

1990-02-20 Publication of JPH0250949A publication Critical patent/JPH0250949A/ja

1993-12-21 Publication of JPH0588308B2 publication Critical patent/JPH0588308B2/ja

Status Granted legal-status Critical Current

Links

239000000463 material Substances 0.000 claims description 57
239000010409 thin film Substances 0.000 claims description 47
239000010408 film Substances 0.000 claims description 37
239000002131 composite material Substances 0.000 claims description 25
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 21
239000011195 cermet Substances 0.000 claims description 7
238000010030 laminating Methods 0.000 claims description 2
150000002500 ions Chemical class 0.000 description 19
IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
229910052757 nitrogen Inorganic materials 0.000 description 9
230000000052 comparative effect Effects 0.000 description 8
238000005520 cutting process Methods 0.000 description 8
-1 nitrogen ions Chemical class 0.000 description 8
238000000034 method Methods 0.000 description 7
238000004544 sputter deposition Methods 0.000 description 6
238000000576 coating method Methods 0.000 description 5
229910052735 hafnium Inorganic materials 0.000 description 5
229910052726 zirconium Inorganic materials 0.000 description 5
239000011248 coating agent Substances 0.000 description 4
238000009684 ion beam mixing Methods 0.000 description 4
229910052751 metal Inorganic materials 0.000 description 4
239000002184 metal Substances 0.000 description 4
150000004767 nitrides Chemical class 0.000 description 4
229910052719 titanium Inorganic materials 0.000 description 4
239000007789 gas Substances 0.000 description 3
238000007733 ion plating Methods 0.000 description 3
239000010410 layer Substances 0.000 description 3
239000012299 nitrogen atmosphere Substances 0.000 description 3
238000003466 welding Methods 0.000 description 3
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
229910000831 Steel Inorganic materials 0.000 description 2
238000005299 abrasion Methods 0.000 description 2
230000001133 acceleration Effects 0.000 description 2
150000001875 compounds Chemical class 0.000 description 2
229910001873 dinitrogen Inorganic materials 0.000 description 2
238000010894 electron beam technology Methods 0.000 description 2
238000005468 ion implantation Methods 0.000 description 2
238000010884 ion-beam technique Methods 0.000 description 2
238000003475 lamination Methods 0.000 description 2
150000001247 metal acetylides Chemical class 0.000 description 2
239000010959 steel Substances 0.000 description 2
229920001169 thermoplastic Polymers 0.000 description 2
239000004416 thermosoftening plastic Substances 0.000 description 2
238000007738 vacuum evaporation Methods 0.000 description 2
229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
230000001070 adhesive effect Effects 0.000 description 1
229910052786 argon Inorganic materials 0.000 description 1
239000012298 atmosphere Substances 0.000 description 1
238000005229 chemical vapour deposition Methods 0.000 description 1
239000013078 crystal Substances 0.000 description 1
238000000151 deposition Methods 0.000 description 1
230000008021 deposition Effects 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000005566 electron beam evaporation Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
238000001704 evaporation Methods 0.000 description 1
230000008020 evaporation Effects 0.000 description 1
238000001659 ion-beam spectroscopy Methods 0.000 description 1
229910052742 iron Inorganic materials 0.000 description 1
230000001678 irradiating effect Effects 0.000 description 1
238000001755 magnetron sputter deposition Methods 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
239000000203 mixture Substances 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
230000000737 periodic effect Effects 0.000 description 1
238000005240 physical vapour deposition Methods 0.000 description 1
239000002356 single layer Substances 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1

Landscapes

Physical Vapour Deposition (AREA)

JP20000288A 1988-08-12 1988-08-12 複合超硬材料 Granted JPH0250949A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP20000288A JPH0250949A (ja)	1988-08-12	1988-08-12	複合超硬材料

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP20000288A JPH0250949A (ja)	1988-08-12	1988-08-12	複合超硬材料

Publications (2)

Publication Number	Publication Date
JPH0250949A JPH0250949A (ja)	1990-02-20
JPH0588308B2 true JPH0588308B2 (fr)	1993-12-21

Family

ID=16417163

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP20000288A Granted JPH0250949A (ja)	1988-08-12	1988-08-12	複合超硬材料

Country Status (1)

Country	Link
JP (1)	JPH0250949A (fr)

1988
- 1988-08-12 JP JP20000288A patent/JPH0250949A/ja active Granted

Also Published As

Publication number	Publication date
JPH0250949A (ja)	1990-02-20

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