JPH0574355A - Magnetron - Google Patents
MagnetronInfo
- Publication number
- JPH0574355A JPH0574355A JP23776591A JP23776591A JPH0574355A JP H0574355 A JPH0574355 A JP H0574355A JP 23776591 A JP23776591 A JP 23776591A JP 23776591 A JP23776591 A JP 23776591A JP H0574355 A JPH0574355 A JP H0574355A
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- anode cylinder
- magnetron
- anode
- liquid refrigerant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Microwave Tubes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電子レンジ用に量産さ
れているマグネトロンの強制空冷用冷却フィンを別個に
製作した高熱伝導率金属板製の液体冷媒用導管に置き換
えた、周囲の空気を撹乱せず、クリーンルーム内で使用
可能で、安価で出力増大も可能な、半導体製造工程用な
どに好適なマグネトロンに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention replaces ambient air in which a cooling fin for forced air cooling of a magnetron mass-produced for a microwave oven is replaced with a liquid refrigerant conduit made of a high thermal conductivity metal plate which is separately manufactured. The present invention relates to a magnetron that is not disturbed, can be used in a clean room, is inexpensive, and can increase output, and is suitable for semiconductor manufacturing processes.
【０００２】[0002]
【従来の技術】マグネトロンがマイクロ波発振動作を行
なっている際には、運動電子に衝突されて陽極に熱損失
が発生し陽極の温度は上昇する。陽極の温度が過度に上
昇すれば陽極その他の各部の表面に、なお吸着、吸蔵さ
れていた気体が真空外囲器内に放出されて管内真空度を
低下させ短寿命の原因となったり、陽極円筒両端に配置
された環状永久磁石の温度が熱伝導により上昇し、その
ため作用空間内の静磁界強度が低下し、陽極電流を所定
値に維持または低下させて陽極温度の上昇を防止しよう
とすれば陽極電圧を低下させることを余儀なくされ、マ
イクロ波電力出力を低減させざるを得ない。したがっ
て、通常のマグネトロンは何等かの陽極冷却手段を備え
ている。2. Description of the Related Art While a magnetron is performing a microwave oscillating operation, it collides with moving electrons to generate heat loss in the anode and the temperature of the anode rises. If the temperature of the anode rises excessively, the gas that is still adsorbed and occluded on the surface of the anode and other parts will be released into the vacuum envelope, reducing the degree of vacuum in the tube and causing a short life. The temperature of the annular permanent magnets arranged at both ends of the cylinder rises due to heat conduction, which reduces the strength of the static magnetic field in the working space and tends to maintain or reduce the anode current to a predetermined value to prevent the anode temperature from rising. Therefore, the anode voltage must be reduced, and the microwave power output must be reduced. Therefore, a conventional magnetron is equipped with some kind of anode cooling means.
【０００３】近年、マイクロ波電力により食品などの誘
電加熱を行なう電子レンジが家庭用として極めて広く用
いられるようになり、同時にこれら電子レンジのマイク
ロ波発生用のマグネトロンが量産されるようになり、こ
れらのマグネトロンは長い量産の経験により性能対価格
比が極めて高いものとなっている。そして、電子レンジ
の場合は、使用環境が極めて多様であり、かつ使用場所
を簡単に移動できるようにする必要もあって、マグネト
ロン陽極の冷却は、陽極円筒の外側に圧入嵌合させた複
数のラジエータフィンに送風機により冷却風を通風させ
る強制空冷方式が広く適用されている（例えば特開昭６
３−８１７３４号公報参照）。In recent years, microwave ovens for inductively heating foods and the like by microwave power have become very widely used for household use, and at the same time, magnetrons for microwave generation of these microwave ovens have been mass-produced. The magnetrons have a very high performance-to-price ratio due to their long experience in mass production. In the case of a microwave oven, the environment of use is extremely diverse, and it is necessary to easily move the place of use. Therefore, cooling of the magnetron anode is performed by pressing a plurality of magnets into the outside of the anode cylinder. A forced air cooling system in which cooling air is blown through a radiator fin by a blower is widely applied (for example, Japanese Patent Laid-Open No. 6-86242)
3-81734 gazette).
【０００４】図３（ａ）は上記のような電子レンジ用マ
グネトロンの一例の側面図を示し、図３（ｂ）は同マグ
ネトロンの真空外囲器に囲まれ内部が真空に排気された
本体部分を示す斜視図である。これらの図中、１は陽極
円筒、２は陰極ステム、３はマイクロ波出力部、４は環
状永久磁石、５はヨーク、７はラジエータフィン、８は
フィルタケースである。陽極円筒内面には複数のベイン
が放射状に突出固着され、これらで空洞共振器群を形成
している。図示のように陰極ステム２を経由して陰極加
熱用電力が供給され、ステムに植設された支持棒兼給電
線によって熱陰極が陽極円筒中心部に支持されている。
陰極の周囲のベイン端部との間の空間がいわゆる作用空
間で、その内部に環状永久磁石４、ヨーク５、及び図示
しない磁極により管軸方向に静磁界が形成されている。
陰極から放出された電子は、静磁界内でそれに直交する
方向に陽極の吸引力で加速され、電子雲を形成して作用
空間内を周回し、上記空洞共振器群内にマイクロ波振動
を発生させる。発生したマイクロ波の電力はベインに接
続されたアンテナリードによりマイクロ波出力部３に伝
搬されそこから放射される。なお、陰極加熱電力導入部
にはマイクロ波が加熱用給電線に乗って外部へ漏洩する
のを防止するため、給電線に直列接続されたチョークコ
イルと、給電線と接地部材の間に適当な静電容量を持た
せる貫通コンデンサとで形成されるフィルタを格納した
フィルタケース８が配設されている。FIG. 3 (a) is a side view of an example of the magnetron for a microwave oven as described above, and FIG. 3 (b) is a main body part surrounded by a vacuum envelope of the magnetron and the inside of which is evacuated to a vacuum. It is a perspective view showing. In these figures, 1 is an anode cylinder, 2 is a cathode stem, 3 is a microwave output part, 4 is an annular permanent magnet, 5 is a yoke, 7 is a radiator fin, and 8 is a filter case. A plurality of vanes are radially projected and fixed to the inner surface of the anode cylinder to form a cavity resonator group. As shown, electric power for heating the cathode is supplied via the cathode stem 2, and the hot cathode is supported at the center of the anode cylinder by a support rod and a power supply line implanted in the stem.
A space between the cathode and the end of the vane is a so-called working space, in which a static magnetic field is formed in the tube axis direction by the annular permanent magnet 4, the yoke 5, and a magnetic pole (not shown).
The electrons emitted from the cathode are accelerated in the direction perpendicular to the static magnetic field by the attractive force of the anode, form an electron cloud and circulate in the working space, and generate microwave vibration in the cavity resonator group. Let The generated microwave power is propagated to the microwave output unit 3 by the antenna lead connected to the vane and is radiated from the microwave output unit 3. In order to prevent microwaves from riding on the heating power supply line and leaking to the outside, the choke coil connected in series with the power supply line and an appropriate power source between the power supply line and the grounding member are provided in the cathode heating power introduction part. A filter case 8 storing a filter formed of a feedthrough capacitor having an electrostatic capacity is provided.
【０００５】家庭用の電子レンジに用いられるマグネト
ロンは多数生産されてきたので、品質的には信頼性が高
く、しかも安価に生産され、性能対価格比が極めて高い
ものになっているが、マイクロ波出力は５ｋＷ未満、大
部分は２ｋＷ以下である。一方、工業加熱用のマイクロ
波出力５ｋＷ以上の大電力マグネトロンでは陽極の冷却
に液体冷媒（通常は水か、水に凍結防止やバクテリア発
生防止用の薬品を混入したものなどで、以後、水と略称
する）を用いたものもある。図４（ａ）に示すように陽
極円筒の外側に冷却用通水蛇管を巻き付けてろう付けし
たもの、図４（ｂ）に示すように陽極円筒の外側にジャ
ケットを取付けて２重構造としてその間隙に通水して冷
却するものなどがある。Since many magnetrons used for household microwave ovens have been produced, they are highly reliable in terms of quality and inexpensive, and their performance-to-price ratio is extremely high. Wave power is less than 5 kW, mostly below 2 kW. On the other hand, in a high power magnetron with a microwave output of 5 kW or more for industrial heating, a liquid refrigerant (usually water or a mixture of water with a chemical for freezing prevention or bacteria generation) is used for cooling the anode. Some abbreviations) are used. As shown in FIG. 4 (a), a cooling water passage is wound around the anode cylinder and brazed, and as shown in FIG. 4 (b), a jacket is attached to the outside of the anode cylinder to form a double structure. There is something that cools by passing water through the gap.
【０００６】近年、マイクロ波によりプラズマを発生さ
せ、それを応用する各種の装置が、研究、開発されつつ
ある。例えば、半導体製造に用いるプラズマエッチン
グ、プラズマアッシャ、プラズマ光源によるフォトリソ
グラフィ、微粒子計数装置などがある。これらの装置に
用いられるマイクロ波電力は１〜３ｋＷ程度の場合が多
く、電子レンジ用マグネトロンと工業加熱用マグネトロ
ンの中間に位置する出力を用いている。従来は、これら
の装置に適した出力のマグネトロンは生産されていない
ので、電子レンジ用や工業加熱用の５ｋＷ級のマグネト
ロンが組み込まれていた。しかし、プラズマを応用した
装置の需要が増加するのに伴い、これらの装置に適当な
出力のマグネトロンの開発が要望されるようになってき
た。なお、プラズマ応用装置の需要が、半導体製造工程
で用いる場合が比較的多いことを考慮すると、クリーン
ルーム内使用に適するように塵埃を飛散させる恐れのあ
る強制空冷を避けて、すべて液冷にすることがプラズマ
応用装置に用いるマグネトロンには必要になる。In recent years, various devices for generating plasma by microwaves and applying the plasma have been researched and developed. For example, there are plasma etching used in semiconductor manufacturing, plasma asher, photolithography using a plasma light source, and a particle counting device. The microwave power used in these devices is often about 1 to 3 kW, and an output located between the microwave oven magnetron and the industrial heating magnetron is used. Heretofore, a magnetron having an output suitable for these devices has not been produced, so that a 5 kW class magnetron for a microwave oven or industrial heating has been incorporated. However, as the demand for plasma-applied devices has increased, it has become necessary to develop magnetrons having an appropriate output for these devices. Considering that the demand for plasma application equipment is often used in the semiconductor manufacturing process, avoid all forced air cooling that may disperse dust so that it is suitable for use in a clean room, and use all liquid cooling. Is necessary for the magnetron used in plasma application equipment.
【０００７】このような要望に応えて、電子レンジ用マ
グネトロンの真空外囲器に囲まれた内部を真空に排気す
る排気工程が終了した段階の図３（ｂ）に示したような
ものを流用して、その陽極円筒の外部に、図５（ｂ）に
斜視図を示すような、高い熱伝導率を有する固体たとえ
ばアルミニウムのブロックの内部に、冷却水の流通管路
を形成させた冷却ブロックを、このブロックの孔の円筒
形内面が陽極円筒の外面に密着するように機械的に締め
付けて、図５（ａ）に側面図を示すように、取付けるこ
とが特願平３−４９３４７号で提案されている。この提
案に従えば、マグネトロンの本体部分（図３（ｂ）参
照）は安価でしかも信頼性が高いものを利用でき、かつ
水冷にしたために、強制空冷で用いる場合よりも高出力
に耐え、プラズマ応用装置などに適当な出力に上昇でき
るが、上記冷却ブロックは材料の使用量や機械加工の点
から高原価なものになり、冷却装置を含めたマグネトロ
ン全体としても高原価になってしまうのは避けられな
い。In response to such a demand, the one shown in FIG. 3 (b) at the stage when the exhaust step of exhausting the inside of the vacuum envelope of the magnetron for a microwave oven to a vacuum is finished is diverted. Then, outside the anode cylinder, as shown in the perspective view in FIG. 5B, a cooling block in which a cooling water flow passage is formed inside a solid block having a high thermal conductivity, for example, a block of aluminum. In Japanese Patent Application No. 3-49347, the block is mechanically tightened so that the cylindrical inner surface of the hole closely contacts the outer surface of the anode cylinder, as shown in the side view of FIG. 5 (a). Proposed. According to this proposal, the magnetron body (see FIG. 3 (b)) can be inexpensive and highly reliable, and since it is water-cooled, it can withstand a higher output than when it is used by forced air cooling, and plasma Although the output can be increased to an appropriate level for application equipment, the cooling block becomes expensive due to the amount of materials used and machining, and the magnetron as a whole including the cooling device will also be expensive. Inevitable.
【０００８】一方、図４（ａ）に示したように陽極円筒
の外側に銅製の冷却用通水蛇管１０を巻き付けて半田付
けする構造や、図４（ｂ）に示したように陽極円筒の外
側にジャケット１１をろう付けにより取付けて２重構造
とし、其の間隙に通水して冷却する構造は、既に排気作
業を終了した電子レンジ用マグネトロンの本体部分を利
用しようとすると、冷却装置を取付けるための、半田付
けやろう付けなどの工程で高温にさらされるため、真空
外囲器内の真空度が幾分低下してエージング作業を追加
する必要が生じ、場合によっては追加エージング作業を
行なっても良好な特性が得られず、短寿命になるなどの
問題が生ずる。従って、上記図５に示した冷却ブロック
を取り付ける方法に比べて特性上からも不向きである。On the other hand, as shown in FIG. 4 (a), a structure in which a copper cooling water passage 10 is wound around the outside of the anode cylinder and soldered, or as shown in FIG. 4 (b), The structure in which the jacket 11 is attached to the outside by brazing to form a double structure, and water is passed through the gap to cool, the cooling device is used when the main part of the magnetron for microwave oven which has already been exhausted is used. Since it is exposed to high temperature in the process of soldering and brazing for mounting, the vacuum degree inside the vacuum envelope is somewhat lowered and it becomes necessary to add aging work.In some cases, additional aging work is performed. However, good characteristics cannot be obtained, and problems such as shortened life occur. Therefore, compared with the method of mounting the cooling block shown in FIG. 5, the characteristics are not suitable.
【０００９】[0009]
【発明が解決しようとする課題】本発明は、上記のよう
な従来の種々の問題を解決し、電子レンジ用マグネトロ
ンの真空外囲器に囲まれた内部を真空に排気する排気工
程が終了した段階のマグネトロン本体を利用して、それ
にマグネトロンとしての特性を劣化させる恐れのない方
法で液体冷却用部材を装着させた、安価で、しかも信頼
性の高いマグネトロンを提供することを目的とする。DISCLOSURE OF THE INVENTION The present invention has solved the above-mentioned various problems of the prior art, and completes the exhaust step of exhausting the inside of the magnetron for a microwave oven enclosed by the vacuum envelope to a vacuum. An object of the present invention is to provide an inexpensive and highly reliable magnetron in which a liquid cooling member is attached to the magnetron main body in stages by a method that does not deteriorate the characteristics of the magnetron.
【００１０】[0010]
【課題を解決するための手段】上記目的を達成するため
に本発明においては、真空外囲器の一部をなす陽極円筒
とその内面に放射状に突出固着させた複数枚のベインと
よりなる空洞共振器群と、真空外囲器の一端を封止する
ステムに植設された支持と給電を兼ねる棒により陽極円
筒中心部に保持された陰極と、真空外囲器の他端に封着
され上記ベインにアンテナリードによって接続されたマ
イクロ波出力部とを備え、更に真空外囲器外に、陽極円
筒両端それぞれに配置した環状永久磁石と、環状永久磁
石を陽極円筒端部に押付けて保持し永久磁石と陽極円筒
の外側を枠状に囲んで管外磁路を形成する上下２部分を
結合させたヨークとを備えたマグネトロンにおいて、内
径が上記陽極円筒の外径にほぼ等しく円筒壁の高さが陽
極円筒にほぼ等しい円筒形をなし板厚０．３〜２．０ｍ
ｍの高熱伝導率金属板で円筒壁断面を中空矩形状に製作
した液体冷媒用導管を、それぞれ注入孔と排出孔を有す
る上記液体冷媒用導管の両端を締付け手段により接近さ
せることにより、液体冷媒用導管の上記内径面が陽極円
筒外面に密着するように取付けることにした。In order to achieve the above object, in the present invention, a cavity composed of an anode cylinder forming a part of a vacuum envelope and a plurality of vanes radially and fixedly secured to the inner surface thereof. A resonator group, a cathode that is held in the center of the anode cylinder by a rod that also functions as a support and a power source, is embedded in a stem that seals one end of the vacuum envelope, and the other end of the vacuum envelope is sealed. A microwave output section connected to the vane by an antenna lead is provided, and further, outside the vacuum envelope, annular permanent magnets arranged at both ends of the anode cylinder and the annular permanent magnet are pressed and held at the anode cylinder end portion. In a magnetron including a permanent magnet and a yoke that connects the upper and lower parts forming an outer magnetic path by surrounding the outside of the anode cylinder in a frame shape, the inner diameter is approximately equal to the outer diameter of the anode cylinder, and the height of the cylinder wall is Is almost equal to the anode cylinder A cylindrical shape plate thickness 0.3~2.0m
A liquid refrigerant conduit having a cylindrical wall cross section formed of a high thermal conductivity metal plate of m in a hollow rectangular shape is brought into proximity by tightening means at both ends of the liquid refrigerant conduit having an injection hole and a discharge hole. The inner diameter surface of the conduit was attached so as to be in close contact with the outer surface of the anode cylinder.
【００１１】[0011]
【作用】上記のような手段をとれば、電子レンジ用マグ
ネトロンの真空外囲器に囲まれた内部を真空に排気する
排気工程が終了した段階のマグネトロン本体部分に、別
の工程、別の作業場で製作を終了した上記のような液体
冷媒用導管を、加熱は一切しないで、ただ円筒形をした
液体冷媒用導管の円筒内径面がマグネトロン本体の陽極
円筒外面に密着するように締め付けて取付けるだけであ
るから、マグネトロンの特性が劣化する恐れは全くな
い。もし、液体冷媒用導管の円筒内面に多少の凹凸があ
って（陽極円筒外面は通常まったく凹凸がないように作
られている）締め付けた際に所々隙間ができるようでも
接触面に伝熱ペースト、例えば富士高分子社製ＦＳ熱拡
散コンパウンドを塗布しておけば良好な熱伝導特性を実
現できる。後述するように、液体冷媒用導管は、断面が
矩形の中空管を、市販品として調達、板材を加工して内
製など、最も適当な方法で低原価で製造できるから、冷
却部材を含めたマグネトロンは安価になり、しかも信頼
性の高い特性の製品が得られる。According to the above means, the magnetron main body portion at the stage where the exhaust step of exhausting the inside of the vacuum envelope of the magnetron for a microwave oven to a vacuum has been completed, another process, another work place. No need to heat the liquid refrigerant conduit as described above, which is just finished, by simply tightening it so that the cylindrical inner diameter surface of the cylindrical liquid refrigerant conduit is in close contact with the outer surface of the anode cylinder of the magnetron body. Therefore, there is no possibility that the characteristics of the magnetron will deteriorate. If the inner surface of the cylinder of the liquid refrigerant conduit has some irregularities (the outer surface of the anode cylinder is usually made to have no irregularities), heat transfer paste will be applied to the contact surfaces even if there are gaps when tightened. For example, good thermal conductivity can be realized by applying FS thermal diffusion compound manufactured by Fuji Polymer Co., Ltd. As will be described later, since the liquid refrigerant conduit can be manufactured at a low cost by the most suitable method such as procuring a hollow tube having a rectangular cross section as a commercial product, processing a plate material and manufacturing it in-house, a cooling member is included. In addition, magnetrons are cheaper and more reliable products can be obtained.
【００１２】[0012]
【実施例】図１（ａ）は本発明一実施例の外観側面図、
図１（ｂ）は同実施例の液体冷媒用導管と締付け金具を
示す斜視図である。図中、１は陽極円筒、３はマイクロ
波出力部、４は環状永久磁石、５はヨーク、６は液体冷
媒用導管、６ａは締付け用金具である。液体冷媒用導管
６には図示のように注入孔と排出孔が設けてあり、これ
らを用いて中空矩形状断面の内部に液体冷媒を循環させ
る。実際には、図３（ｂ）に示したようなマグネトロン
本体の排気作業を完了したものの陽極円筒１の外部に液
体冷媒用導管６を、その両端部間の隙間が狭くなるよう
に締付け金具６ａにより締付けて装着する。その後、陽
極円筒１の両端に環状永久磁石４を配置し、更に、それ
らの外側に上下２部分に分かれたヨーク５を配置してヨ
ーク５が環状永久磁石４を陽極円筒１の両端に押しつけ
て保持するように、ヨークの上下２部分をねじ又はリベ
ットで結合する。液体冷媒用導管６は、板厚０．８ｍｍ
の銅パイプを、外形を長辺が陽極円筒１の高さにほぼ等
しい矩形に成形したもので作られている。この液体冷媒
用導管６は、通常、マグネトロン製造現場とは別の作業
場で作り、その円筒形の内径が陽極円筒の外径に等しい
直径になるように治具などを用いて製作する。矩形断面
の導管を円筒形に加工する際に必要ならば加熱しても差
し支えないし、また加工工程で円筒内径面に多少しわが
生ずるようなことがあるかもしれないが、既述のよう
に、接触面に伝熱ペーストを塗布しておけば、多少の凹
凸は問題にならない。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 (a) is an external side view of an embodiment of the present invention,
FIG. 1 (b) is a perspective view showing the liquid refrigerant conduit and the tightening fitting of the embodiment. In the figure, 1 is an anode cylinder, 3 is a microwave output part, 4 is an annular permanent magnet, 5 is a yoke, 6 is a liquid refrigerant conduit, and 6a is a fastening fitting. As shown in the figure, the liquid refrigerant conduit 6 is provided with an injection hole and a discharge hole, and these are used to circulate the liquid refrigerant inside the hollow rectangular cross section. Actually, although the exhaust work of the magnetron body as shown in FIG. 3 (b) has been completed, the liquid refrigerant conduit 6 is provided outside the anode cylinder 1 so that the gap between the both ends of the liquid metal conduit 6 is tightened. Install by tightening. Then, annular permanent magnets 4 are arranged at both ends of the anode cylinder 1, and a yoke 5 divided into upper and lower parts is arranged outside them, and the yoke 5 presses the annular permanent magnets 4 at both ends of the anode cylinder 1. The upper and lower two parts of the yoke are connected by screws or rivets to hold them. The liquid refrigerant conduit 6 has a plate thickness of 0.8 mm
The copper pipe is made of a rectangular shape whose long side is approximately equal to the height of the anode cylinder 1. The liquid refrigerant conduit 6 is usually manufactured in a work place different from the magnetron manufacturing site, and is manufactured using a jig or the like so that the inner diameter of the cylindrical shape is equal to the outer diameter of the anode cylinder. It may be heated if necessary when processing a conduit of rectangular cross section into a cylindrical shape, and there may be some wrinkles on the inner diameter surface of the cylinder in the processing step, but as described above, If the heat transfer paste is applied to the contact surface, some unevenness does not matter.
【００１３】一般的には、液体冷媒用導管６は、矩形断
面に成形した市販品を購入して円筒形に加工して製作す
れば良いが、矩形に成形した銅管の価格が高過ぎると
か、陽極温度に余裕のある場合には、図２（ａ）に示す
ように、やや太めの円形断面の極めて普通な銅管６ｂを
銅板６ｃにろう付けしたものを用いてもよい。この場
合、ろう付けするもの同士を高温に加熱することは何等
差し支えない。銅板６ｃは端部を図示のように予め曲げ
ておいて、曲げた端部間に生じた隙間を狭めるようにね
じ締めして取付けるから、折り曲げ部が変形しないよう
に充分厚い板厚が必要で本実施例では、板厚３．０ｍｍ
の銅板を用いた。図２（ａ）に示したような構造にすれ
ば、製造は極めて簡単であるが、図１（ｂ）に示したも
のに比べて冷却性能が多少劣るので、低出力向きであ
る。また、矩形に成形した銅管の代りに、図２（ｂ）に
示すように、内側部分と外側部分をそれぞれ銅板をプレ
ス加工して図２（ｅ）に断面を示すように製作し、両方
の合わせ目を溶接またはろう付けして銅管６ｄを作って
もよい。この場合にも加工に際して任意に加熱して何等
差し支えない。なお、図２（ｃ）は、矩形に成形した銅
管を用いた場合の断面を示し、図２（ｄ）と図２（ｅ）
は、平らな銅板をプレス成形して内側部分と外側部分と
を別々に作り、あとで合わせ目を溶接またはろう付けし
たものの断面を示す。どのような素材から出発するか
は、それぞれの場合に応じて適当に最も経済的になるよ
うに選択すれば良い。このようにすることによって、図
５に示したアルミニウム製の冷却ブロックの約１／１０
の原価に抑えることができた。Generally, the liquid refrigerant conduit 6 may be manufactured by purchasing a commercially available product having a rectangular cross section and processing it into a cylindrical shape, but the price of the rectangular shaped copper pipe is too high. If the anode temperature has a margin, as shown in FIG. 2 (a), an extremely common copper tube 6b having a slightly thick circular cross-section may be brazed to the copper plate 6c. In this case, it does not matter that the brazing objects are heated to a high temperature. The copper plate 6c is bent in advance as shown in the figure, and is attached by tightening screws so as to narrow the gap generated between the bent ends. Therefore, it is necessary to have a sufficiently thick plate thickness so as not to deform the bent portion. In this embodiment, the plate thickness is 3.0 mm
The copper plate of was used. If the structure shown in FIG. 2 (a) is used, the manufacture is extremely simple, but the cooling performance is somewhat inferior to that shown in FIG. 1 (b), so that it is suitable for low output. Further, instead of the rectangular shaped copper tube, as shown in FIG. 2 (b), the inner portion and the outer portion are respectively pressed with copper plates to manufacture them as shown in the cross section in FIG. 2 (e). The copper pipe 6d may be made by welding or brazing the seams. In this case as well, heating may be arbitrarily performed during processing without any problem. Note that FIG. 2C shows a cross section in the case where a rectangular copper tube is used, and FIG. 2D and FIG.
Shows a cross section of a flat copper plate that has been press molded to form the inner and outer portions separately and then welded or brazed to the seams. The starting material to be used may be appropriately selected in each case so as to be most economical. By doing so, about 1/10 of the cooling block made of aluminum shown in FIG.
I was able to keep it at the cost of.
【００１４】[0014]
【発明の効果】以上説明したように本発明によれば、電
子レンジ用マグネトロン本体を利用して、半導体製造工
程などで用いられるプラズマ応用装置などに好適な、性
能対価格比の極めて優秀なマグネトロンが容易に得られ
る。As described above, according to the present invention, the magnetron main body for a microwave oven is used, and the magnetron having an extremely excellent performance-to-price ratio suitable for a plasma application device used in a semiconductor manufacturing process or the like. Is easily obtained.
【図１】図１（ａ）は本発明一実施例の外観側面図、図
１（ｂ）は同実施例の液体冷媒用導管と締付け金具を示
す斜視図である。FIG. 1 (a) is an external side view of an embodiment of the present invention, and FIG. 1 (b) is a perspective view showing a liquid refrigerant conduit tube and a fastening metal fitting of the embodiment.
【図２】図２（ａ）と図２（ｂ）はそれぞれ本発明の他
の実施例に用いる液体冷媒用導管を示し、図２（ｃ）、
図２（ｄ）、図２（ｅ）はそれぞれ本発明に係る液体冷
媒用導管の互いに異なる中空矩形状断面を示す図であ
る。2 (a) and 2 (b) respectively show a liquid refrigerant conduit used in another embodiment of the present invention, and FIG.
2 (d) and 2 (e) are views showing mutually different hollow rectangular cross sections of the liquid refrigerant conduit according to the present invention.
【図３】図３（ａ）は従来の電子レンジ用マグネトロン
の外観側面図、図３（ｂ）は同マグネトロンの真空外囲
器に囲まれ内部が真空に排気されたマグネトロン本体部
分を示す斜視図である。FIG. 3 (a) is a side view showing an outer appearance of a conventional magnetron for a microwave oven, and FIG. 3 (b) is a perspective view showing a magnetron main body portion which is surrounded by a vacuum envelope of the magnetron and whose inside is evacuated to a vacuum. It is a figure.
【図４】図４（ａ）は従来からの陽極円筒の外側に銅製
の冷却用通水蛇管を巻き付けて半田付けする構造のマグ
ネトロンの、図４（ｂ）は従来からの陽極円筒の外側に
ジャケットをろう付けにより取付けて２重構造としその
間隙に通水して冷却するマグネトロンの外観側面図であ
る。FIG. 4 (a) is a magnetron having a structure in which a copper cooling water passage coil is wound and soldered on the outside of a conventional anode cylinder, and FIG. 4 (b) is on the outside of a conventional anode cylinder. It is an external side view of a magnetron in which a jacket is attached by brazing to form a double structure and water is passed through the gap to cool the magnetron.
【図５】図５（ａ）は従来の電子レンジ用マグネトロン
本体を利用しその陽極円筒の外側に液体冷媒を流す冷却
ブロックを取付けたマグネトロンの外観側面図、図５
（ｂ）は同マグネトロンの冷却ブロックの斜視図であ
る。FIG. 5 (a) is an external side view of a conventional magnetron main body for a microwave oven, in which a cooling block for flowing a liquid refrigerant is attached to the outside of an anode cylinder thereof.
(B) is a perspective view of a cooling block of the magnetron.
１…陽極円筒、 ２…陰極ステム、 ３…マイクロ波出
力部、 ４…環状永久磁石、 ５…ヨーク、 ６…液体
冷媒用導管、 ６ａ…締付け金具、 ６ｂ…銅管、 ６
ｃ…銅板、 ６ｄ…銅板からプレス成形した部材を溶接
して製作した銅管、 ７…ラジエータフィン、 ８…フ
ィルタケース。DESCRIPTION OF SYMBOLS 1 ... Anode cylinder, 2 ... Cathode stem, 3 ... Microwave output part, 4 ... Ring permanent magnet, 5 ... Yoke, 6 ... Liquid refrigerant conduit, 6a ... Tightening metal fitting, 6b ... Copper tube, 6
c ... Copper plate, 6d ... Copper tube manufactured by welding a member formed by pressing from a copper plate, 7 ... Radiator fins, 8 ... Filter case.
Claims (1)
面に放射状に突出して固着させた複数枚のベインとより
なる空洞共振器群と、真空外囲器の一端を封止するステ
ムに植設された支持と給電を兼ねる棒により陽極円筒中
心部に保持された陰極と、真空外囲器の他端に封着され
上記ベインにアンテナリードによって接続されたマイク
ロ波出力部とを備え、更に真空外囲器外に、陽極円筒両
端それぞれに配置した環状永久磁石と、環状永久磁石を
陽極円筒端部に押付けて保持し永久磁石と陽極円筒の外
側を枠状に囲んで管外磁路を形成する上下２部分を結合
させたヨークとを備えたマグネトロンにおいて、内径が
上記陽極円筒の外径にほぼ等しく円筒壁の高さが陽極円
筒にほぼ等しい円筒形をなし板厚０．３〜２．０ｍｍの
高熱伝導率金属板で円筒壁断面を中空矩形状に製作した
液体冷媒用導管を、それぞれ注入孔と排出孔を有する上
記液体冷媒用導管の両端を締付け手段により接近させる
ことにより、液体冷媒用導管の上記内径面が陽極円筒外
面に密着するように取付けたことを特徴とするマグネト
ロン。1. A cavity resonator group consisting of an anode cylinder forming a part of a vacuum envelope, a plurality of vanes radially protruding and fixed to the inner surface of the anode cylinder, and one end of the vacuum envelope are sealed. A cathode, which is held in the center of the anode cylinder by a rod that also functions as a support and a power source, which is planted in the stem, and a microwave output part, which is sealed to the other end of the vacuum envelope and is connected to the vane by an antenna lead, are provided. A ring-shaped permanent magnet arranged at each end of the anode cylinder outside the vacuum envelope, and the ring-shaped permanent magnet is pressed against the end of the anode cylinder and held to surround the permanent magnet and the outside of the anode cylinder in a frame shape. In a magnetron provided with a yoke in which upper and lower parts forming a magnetic path are joined, a cylindrical shape having an inner diameter substantially equal to the outer diameter of the anode cylinder and a height of a cylindrical wall substantially equal to the anode cylinder is formed. 3 to 2.0 mm high thermal conductivity metal plate The liquid refrigerant conduit whose cylindrical wall cross section is formed into a hollow rectangular shape is brought into contact with both ends of the liquid refrigerant conduit having an injection hole and a discharge hole by tightening means so that the inner diameter surface of the liquid refrigerant conduit is an anode. A magnetron that is mounted so as to be in close contact with the outer surface of the cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23776591A JPH0574355A (en) | 1991-09-18 | 1991-09-18 | Magnetron |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23776591A JPH0574355A (en) | 1991-09-18 | 1991-09-18 | Magnetron |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0574355A true JPH0574355A (en) | 1993-03-26 |
Family
ID=17020117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23776591A Pending JPH0574355A (en) | 1991-09-18 | 1991-09-18 | Magnetron |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0574355A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030082757A (en) * | 2002-04-18 | 2003-10-23 | 엘지전자 주식회사 | cooling device of magnetron |
| CN111261476A (en) * | 2018-11-30 | 2020-06-09 | 曾东荣 | Heat sink for microwave magnetron |
-
1991
- 1991-09-18 JP JP23776591A patent/JPH0574355A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030082757A (en) * | 2002-04-18 | 2003-10-23 | 엘지전자 주식회사 | cooling device of magnetron |
| CN111261476A (en) * | 2018-11-30 | 2020-06-09 | 曾东荣 | Heat sink for microwave magnetron |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6653788B2 (en) | Magnetron having a lowered oscillation frequency and processing equipment employing the same | |
| US11011339B2 (en) | Magnetron | |
| US4310786A (en) | Magnetron tube with improved low cost structure | |
| US3493810A (en) | Magnetron construction | |
| EP1801839B1 (en) | Magnetron | |
| JPH0574355A (en) | Magnetron | |
| US3794879A (en) | Microwave magnetron | |
| JP3329509B2 (en) | Magnetron for microwave oven | |
| JP4263896B2 (en) | Magnetron | |
| JP6343471B2 (en) | Magnetron and manufacturing method thereof | |
| JP2000285817A (en) | Magnetron device | |
| US5399938A (en) | Anode assembly for a magnetron covered by an oxygen free copper film | |
| KR200162643Y1 (en) | Magnetron | |
| JPH0554805A (en) | Magnetron | |
| JPS59688Y2 (en) | mcnetron | |
| JPH03297034A (en) | Magnetron | |
| JP2579118B2 (en) | Magnetron for microwave oven | |
| JP2001023531A (en) | Magnetron | |
| JP2661517B2 (en) | Traveling wave tube | |
| JPS5834673Y2 (en) | magnetron | |
| JP2003045346A (en) | Magnetron | |
| KR100609960B1 (en) | Magnetron | |
| JPH06267443A (en) | Magnetron | |
| JP2001060440A (en) | Magnetron | |
| KR20010092585A (en) | The structure for brazing in magnetron |