JPH0567197A - Shape measuring instrument - Google Patents
Shape measuring instrumentInfo
- Publication number
- JPH0567197A JPH0567197A JP3225904A JP22590491A JPH0567197A JP H0567197 A JPH0567197 A JP H0567197A JP 3225904 A JP3225904 A JP 3225904A JP 22590491 A JP22590491 A JP 22590491A JP H0567197 A JPH0567197 A JP H0567197A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- detecting means
- photocurrent
- slit light
- position detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Image Processing (AREA)
- Image Analysis (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、非接触で物体の形状を
測定する形状測定装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape measuring device for measuring the shape of an object in a non-contact manner.
【０００２】[0002]
【従来の技術】従来の立体物測定装置としては、接触式
の三次元測定器が多く使用されているが、測定に時間が
かかるため非接触で高速に測定できる三次元測定器が開
発されている。非接触三次元測定器の一例として、特開
昭６３−１８２５０３号公報には、レ−ザ光を用いた非
接触三次元測定器が提案されている。2. Description of the Related Art As a conventional three-dimensional object measuring device, a contact type three-dimensional measuring device is often used. However, since it takes a long time to measure, a non-contact three-dimensional measuring device has been developed. There is. As an example of the non-contact three-dimensional measuring device, Japanese Patent Application Laid-Open No. 63-182503 proposes a non-contact three-dimensional measuring device using laser light.
【０００３】図４に、その従来例の基本構成を示す。４
０１はレ−ザ発振器、４０２はレ−ザ発振器４０１より
発射されたレ−ザビ−ム、４０３は被測定物、４０４は
被測定物４０３を撮影するテレビカメラ、４０５はテレ
ビカメラ４０４で撮影した被測定物４０３の映像情報を
Ａ／Ｄ変換するＡ／Ｄコンバ−タである。４０６はＡ／
Ｄ変換された画像情報の雑音成分を除去する雑音除去回
路、４０７は画像メモリ、４０８は画像情報の中で最大
値を見つけ出し、その時のアドレス情報を検出するアド
レス検出器、４０９は画像メモリ４０７に記憶されてい
る画像情報の中から、アドレス検出器４０８で検出され
たアドレス情報をもとに小領域の画像情報を抽出し、重
心座標を計算する重心座標演算器である。４１０は装置
の制御を行うＣＰＵ、４１１はＣＰＵメモリ、４１２は
ＣＲＴコントロ−ラ、４１３はモニタである。FIG. 4 shows the basic configuration of the conventional example. Four
Reference numeral 01 is a laser oscillator, 402 is a laser beam emitted from the laser oscillator 401, 403 is an object to be measured, 404 is a television camera for photographing the object 403 to be measured, and 405 is a television camera 404 for photographing. It is an A / D converter for A / D converting the image information of the DUT 403. 406 is A /
A noise removal circuit for removing noise components of D-converted image information, 407 is an image memory, 408 is an address detector that finds the maximum value in the image information and detects address information at that time, and 409 is an image memory 407. It is a barycentric coordinate calculator that calculates barycentric coordinates by extracting image information of a small area from the stored image information based on the address information detected by the address detector 408. 410 is a CPU for controlling the apparatus, 411 is a CPU memory, 412 is a CRT controller, and 413 is a monitor.
【０００４】以下、その動作を説明する。レ−ザ発振器
４０１より発射されたレ−ザビ−ム４０２を被測定物４
０３に照射し、その被測定物４０３をテレビカメラ４０
４で撮影する。テレビカメラ４０４で撮影した映像はＡ
／Ｄコンバ−タ４０５でＡ／Ｄ変換され、雑音除去回路
４０６に入力され、定められた値より小さい画像情報
は”０”に変換された後、画像メモリ４０７に格納され
る。The operation will be described below. The laser beam 402 emitted from the laser oscillator 401 is used as the measured object 4
03, and the measured object 403 is displayed on the TV camera 40.
Shoot at 4. The video shot with the TV camera 404 is A
A / D converter 405 performs A / D conversion, inputs to noise removal circuit 406, and image information smaller than a predetermined value is converted to "0" and then stored in image memory 407.
【０００５】雑音除去された画像情報はアドレス検出器
４０８に入力され、画像情報が最大のときのＸおよびＹ
座標をアドレスとして出力する。このアドレスは重心座
標演算器４０９に引き渡され、この値を中心にその周辺
の小領域の画像情報とアドレス情報により重心座標が計
算され、この重心座標により被測定物４０３までの距離
を第５図に示す三角測量の原理を用いて計算して、被測
定物４０３の形状を求めている。The noise-removed image information is input to the address detector 408, and X and Y when the image information is maximum.
Output coordinates as addresses. This address is passed to the barycentric coordinate calculator 409, and the barycentric coordinate is calculated based on this value based on the image information and the address information of the small area around the barycentric coordinate. The shape of the object 403 to be measured is obtained by calculation using the principle of triangulation shown in FIG.
【０００６】即ち、図５は三角測量の原理を示してお
り、レ−ザビ−ム５０１を対象物上の点Ｐ５０２に照射
し、その時の反射光５０３をテレビカメラ５０４などで
撮像する。このとき、被測定物の表面の凹凸により生じ
たテレビカメラ５０４のスクリ−ン５０５上での像の移
動量を抽出することにより、基線ＡＢ５０６と反射光５
０３との交差角θｂ及びθｄが求められ、これらの値と
レ−ザビ−ム５０１の照射角、即ち基線ＡＢ５０６とレ
−ザビ−ム５０１との交差角θａ及びθｃと基線ＡＢ５
０６の長さＬから物体表面の三次元座標情報を取得する
ことができる。That is, FIG. 5 shows the principle of triangulation. A laser beam 501 is applied to a point P502 on an object, and reflected light 503 at that time is picked up by a television camera 504 or the like. At this time, by extracting the movement amount of the image on the screen 505 of the television camera 504 caused by the unevenness of the surface of the object to be measured, the baseline AB 506 and the reflected light 5 are extracted.
And the irradiation angles of the laser beam 501, that is, the intersection angles .theta.a and .theta.c between the base line AB506 and the laser beam 501 and the base line AB5.
The three-dimensional coordinate information of the object surface can be acquired from the length L of 06.
【０００７】[0007]
【発明が解決しようとする課題】しかし、物体の形状を
測定して、その物体を検査したり認識したりする時にそ
の物体の表面の輝度情報も必要になる場合が多い。例え
ば、第３回日本ロボット学会学術講演会（昭和６０年）
「濃淡画像の境界線として抽出された線分からの線図形
構成」では、物体の輝度情報（濃淡情報）を用いること
により物体のエッジ（境界線）を抽出する有効な手法が
提案されており、検査や認識を行う際のデータとして形
状情報に加え輝度情報が有効であることがわかる。また
製造ライン等の検査工程への組み込みを考えた場合検査
時間が限られてくるため、形状情報及び輝度情報を高速
に計測する必要がある。しかし図４に示した従来の三次
元測定器では、被測定物の形状を非接触で測定する事は
できるが、被測定物の表面の輝度情報までは読み取るこ
とはできないという課題があり、またテレビカメラを用
いているため、テレビカメラの撮像速度によって測定速
度が限定されてしまっている。本発明は上記従来技術の
課題を解決するもので、被測定物の形状を非接触で高速
に測定すると同時に、被測定物の表面の輝度情報までも
読み取ることができる形状計測装置を提供することを目
的とする。However, when measuring the shape of an object and inspecting or recognizing the object, the brightness information of the surface of the object is often necessary. For example, the 3rd Academic Conference of the Robotics Society of Japan (1985)
In "Line drawing configuration from line segments extracted as boundary lines of grayscale image", an effective method of extracting the edge (boundary line) of the object by using the luminance information (grayscale information) of the object is proposed. It can be seen that the luminance information is effective in addition to the shape information as the data for the inspection and recognition. Further, when considering the incorporation into the inspection process of a manufacturing line or the like, the inspection time is limited, so it is necessary to measure the shape information and the brightness information at high speed. However, although the conventional three-dimensional measuring device shown in FIG. 4 can measure the shape of the object to be measured in a non-contact manner, there is a problem that it is not possible to read the brightness information of the surface of the object to be measured. Since a TV camera is used, the measurement speed is limited by the imaging speed of the TV camera. The present invention solves the above-mentioned problems of the prior art, and provides a shape measuring device capable of measuring the shape of an object to be measured at high speed in a non-contact manner and also reading the brightness information of the surface of the object to be measured. With the goal.
【０００８】[0008]
【課題を解決するための手段】この目的を達成するため
に本発明は、スリット光を被測定物へ照射するスリット
光走査手段と、幅の細い非分割型の１次元位置検出セン
サを、その幅方向に複数個配列して構成した撮像面を有
する位置検出手段と、前記スリット光の照射により前記
被測定物上から反射して得られる散乱光を集光レンズで
前記位置検出手段に集光し光電流信号を出力する光電流
検出手段と、前記光電流検出手段からの光電流信号によ
り前記被測定物の高さデ−タを演算する高さ演算手段
と、前記光電流信号により前記被測定物の輝度デ−タを
演算する輝度演算手段と、全体系を制御する装置制御手
段から構成されている。In order to achieve this object, the present invention provides a slit light scanning means for irradiating an object to be measured with slit light and a non-divided one-dimensional position detection sensor having a narrow width. Position detecting means having an imaging surface formed by arranging a plurality in the width direction, and scattered light obtained by being reflected from the object to be measured by irradiation of the slit light is condensed on the position detecting means by a condenser lens. A photocurrent detecting means for outputting a photocurrent signal; a height calculating means for calculating height data of the object to be measured by the photocurrent signal from the photocurrent detecting means; It is composed of a brightness calculation means for calculating the brightness data of the object to be measured and a device control means for controlling the entire system.
【０００９】[0009]
【作用】本発明は上記構成によって、スリット光を被測
定物に照射し、被測定物から反射して得られる散乱光を
集光レンズで位置検出手段に導き、被測定物上の高さの
凹凸に従って変化する位置検出手段上の散乱光の集光位
置を光電流信号で検出し、その光電流信号から高さ演算
手段及び輝度演算手段により被測定物表面の高さデータ
及びその高さデータに対応した輝度データを高速に取得
することができる。According to the present invention, with the above structure, the slit light is applied to the object to be measured, and the scattered light obtained by being reflected from the object to be measured is guided to the position detecting means by the condensing lens so that the height above the object to be measured can be improved. The condensing position of scattered light on the position detecting means, which changes according to the unevenness, is detected by a photocurrent signal, and height data and height data of the surface of the object to be measured are calculated from the photocurrent signal by the height calculating means and the brightness calculating means. The luminance data corresponding to can be acquired at high speed.
【００１０】[0010]
【実施例】以下、本発明の一実施例について、図面を参
照しながら説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.
【００１１】図１は本発明の一実施例における形状計測
装置のブロック結線図である。図１において、１０１は
被測定物、１０２はレーザ光源、１０３はスリット光走
査手段、１０４はスリット光、１０５は位置検出手段、
１０６は集光レンズ、１０７は光電流検出手段、１０８
及び１０９は光電流検出手段１０７からの光電流信号、
１１０は光電流信号を電圧信号に変化するＩ／Ｖ変換手
段、１１１は電圧信号をデジタル信号に変換するＡ／Ｄ
変換手段、１１２はデジタル信号を一次的に記憶してお
く画像メモリ、１１３はスリット光走査手段１０３を制
御するスキャナ制御ドライバ、１１４は全体を制御する
制御ＭＰＵ、１１５は画像メモリ１１２に記憶されたデ
ジタル信号により三次元形状情報を計算する高さ演算手
段、１１６は画像メモリ１１２に記憶されたデジタル信
号により被測定物１０１表面の輝度情報を計算する輝度
演算手段、１１７はＭＰＵバスである。FIG. 1 is a block connection diagram of a shape measuring apparatus according to an embodiment of the present invention. In FIG. 1, 101 is an object to be measured, 102 is a laser light source, 103 is slit light scanning means, 104 is slit light, 105 is position detecting means,
106 is a condenser lens, 107 is photocurrent detection means, and 108
And 109 are photocurrent signals from the photocurrent detection means 107,
110 is an I / V conversion means for converting a photocurrent signal into a voltage signal, and 111 is an A / D for converting the voltage signal into a digital signal.
A conversion unit, 112 is an image memory that temporarily stores digital signals, 113 is a scanner control driver that controls the slit light scanning unit 103, 114 is a control MPU that controls the whole, and 115 is stored in the image memory 112. Height calculation means for calculating three-dimensional shape information by a digital signal, 116 a brightness calculation means for calculating brightness information on the surface of the object 101 to be measured by a digital signal stored in the image memory 112, and 117 a MPU bus.
【００１２】図２は光電流検出手段１０７の撮像面を構
成する位置検出手段１０５の構成図である。非分割型の
一次元位置検出センサ２０１を幅方向に１２８個配列し
て撮像面を構成している。本実施例では、非分割型の一
次元位置検出センサ２０１に、ＰＳＤ（Position Sensi
tive Detector：半導***置検出素子）を用いており、
ＰＳＤに入射する被測定物からのスリット光の散乱光の
入射位置は、素子の両端電極２０２及び２０３に流れる
電流が各電極間との距離に反比例する特徴を利用して求
めることができる。即ち、両電極２０２及び２０３に流
れる電流Ｉ１及びＩ２より式（１）を用いて位置データ
を計算できる。FIG. 2 is a block diagram of the position detecting means 105 constituting the image pickup surface of the photocurrent detecting means 107. 128 non-divided one-dimensional position detection sensors 201 are arranged in the width direction to form an imaging surface. In this embodiment, a PSD (Position Sensi) is used for the non-division type one-dimensional position detection sensor 201.
tive Detector: semiconductor position detection element) is used,
The incident position of the scattered light of the slit light from the DUT which is incident on the PSD can be obtained by utilizing the feature that the current flowing through the electrodes 202 and 203 of the element is inversely proportional to the distance between the electrodes. That is, the position data can be calculated using the equation (1) from the currents I1 and I2 flowing through the electrodes 202 and 203.
【００１３】 位置データ＝Ｋ・（Ｉ１−Ｉ２）／（Ｉ１＋Ｉ２） ---------（１） なお、Ｋは正規化するための係数である。Position data = K · (I1−I2) / (I1 + I2) --------- (1) Note that K is a coefficient for normalization.
【００１４】一方、輝度データは、両電極２０２及び２
０３に流れる電流Ｉ１及びＩ２より式（２）を用いて求
めることができる。On the other hand, the brightness data is obtained by comparing the electrodes 202 and 2 with each other.
It can be obtained from the currents I1 and I2 flowing in 03 using Equation (2).
【００１５】 輝度データ＝（Ｉ１＋Ｉ２） ---------（２） 光電流検出手段１０７の撮像面をこのような構成にする
ことにより、従来のＣＣＤカメラによる撮像方式に比べ
より高速にスリット光の散乱光を撮像することができ
る。即ち、従来のＣＣＤカメラによる撮像方式では、１
画面（例えば垂直走査４８０ライン）を撮像するのに３
３ms必要であり、１点の撮像時間に換算すると約６０μ
ｓとなる。これに対し、本実施例によれば各ラインでの
一次元位置検出センサの応答速度は約１０μｓであり、
センサそれぞれに対応したＩ／Ｖ変換手段を設けること
により従来方式より約６倍の高速計測が実現でき、かつ
同時に輝度情報も高速に取得することができる。Luminance data = (I1 + I2) --------- (2) By configuring the image pickup surface of the photocurrent detection means 107 in this way, it is faster than the image pickup method by the conventional CCD camera. The scattered light of the slit light can be imaged. That is, in the conventional imaging method using the CCD camera, 1
3 to image the screen (for example, vertical scanning 480 lines)
3ms is required, and when converted to the imaging time of one point, it is about 60μ
s. On the other hand, according to this embodiment, the response speed of the one-dimensional position detection sensor on each line is about 10 μs,
By providing the I / V conversion means corresponding to each sensor, high-speed measurement about 6 times faster than the conventional method can be realized, and at the same time, the brightness information can be acquired at high speed.
【００１６】図３はＡ／Ｄ変換手段１１１の構成要素を
示す図であり、前段のＩ／Ｖ変換手段１１０からの８個
の信号３０１はマルチプレクサ３０２により時分割的に
統合され、１個のＡ／Ｄ変換器３０３でデジタル信号に
変換されメモリ書き込み制御回路３０４により画像メモ
リ１１２に書き込まれる。Ａ／Ｄ変換手段１１１は図４
の構成要素３２個で構成されており、位置検出手段１０
５の両電極２０２及び２０３に流れる電流Ｉ１及びＩ２
をそれぞれＡ／Ｄ変換している。このＡ／Ｄ変換及びメ
モリ書き込みを１信号当り約１μｓ強で実行しており、
センサの応答速度約１０μｓを実現している。FIG. 3 is a diagram showing the components of the A / D conversion means 111. The eight signals 301 from the I / V conversion means 110 at the preceding stage are integrated by a multiplexer 302 in a time division manner, and one signal 301 is obtained. The digital signal is converted by the A / D converter 303 and written in the image memory 112 by the memory write control circuit 304. The A / D conversion means 111 is shown in FIG.
The position detecting means 10 is composed of 32 components.
Currents I1 and I2 flowing through both electrodes 202 and 203
Are A / D converted. This A / D conversion and memory writing are executed in a little over 1 μs per signal,
The response speed of the sensor is about 10 μs.
【００１７】以上のように構成された形状計測装置につ
いて、以下にその動作を説明する。レーザ光源１０２か
らのレーザ光をスリット光走査手段１０３によりスリッ
ト光１０４に変換し被測定物１０１上に照射する。スリ
ット光１０４の照射により被測定物１０１上から反射し
てくる散乱光を、集光レンズ１０６及び複数配列された
位置検出手段１０５から構成される光電流検出手段１０
７で撮像する。位置検出手段１０５からの光電流信号１
０８及び１０９は、それぞれＩ／Ｖ変換手段１１０によ
り電圧信号に変換され、さらにＡ／Ｄ変換手段１１１に
より所定の同期信号のタイミングで１スリット当り約１
０μｓでデジタル信号に変換され、画像メモリ１１２に
書き込まれる。その後、スキャナ制御ドライバ１１３か
らの制御信号によりスリット光走査手段１０３でスリッ
ト光１０４を被測定物１０１上の異なる位置に移動さ
せ、上記の画像メモリ１１２までの信号処理を繰り返す
ことにより高速に被測定物１０１全面をスリット走査す
る。The operation of the shape measuring apparatus configured as described above will be described below. Laser light from the laser light source 102 is converted into slit light 104 by the slit light scanning means 103, and the slit light 104 is irradiated onto the DUT 101. The scattered current reflected from the object to be measured 101 by the irradiation of the slit light 104 is composed of a condensing lens 106 and a plurality of arranged position detecting means 105.
Image at 7. Photocurrent signal 1 from position detecting means 105
Each of 08 and 109 is converted into a voltage signal by the I / V conversion means 110, and further about 1 per slit at a timing of a predetermined synchronization signal by the A / D conversion means 111.
It is converted into a digital signal in 0 μs and written in the image memory 112. After that, by the control signal from the scanner control driver 113, the slit light scanning means 103 moves the slit light 104 to a different position on the object 101 to be measured, and the signal processing up to the image memory 112 is repeated to measure the object at high speed. The entire surface of the object 101 is slit-scanned.
【００１８】次に高さ演算手段において、各スリットの
各一次元位置検出センサ（ＰＳＤ）毎のデジタル信号よ
り式（１）に基づいて各スリットの各ＰＳＤ毎の散乱光
入射位置を計算し、これを測定点の位置信号とし、図５
に示した三角測量の原理に基づき被測定物１０１の測定
点の所定の座標系に対する三次元形状情報を取得する。
また、輝度演算手段１１６において、各スリットの各一
次元位置検出センサ（ＰＳＤ）毎のデジタル信号より式
（２）に基づいて各スリットの各ＰＳＤ毎の光電流値の
総和を計算し、これを測定点の輝度信号とし、高さ演算
手段１１５で求めた三次元形状情報に一対一で対応する
被測定物１０１の表面の輝度情報を取得する。なお、こ
の一連の動作は制御ＭＰＵ１１４により制御される。Next, in the height calculation means, the scattered light incident position of each PSD of each slit is calculated from the digital signal of each one-dimensional position detection sensor (PSD) of each slit based on the equation (1), This is used as the position signal of the measurement point, and FIG.
Based on the principle of triangulation shown in (3), the three-dimensional shape information of the measurement point of the DUT 101 with respect to a predetermined coordinate system is acquired.
Further, in the brightness calculation means 116, the sum of the photocurrent values for each PSD of each slit is calculated from the digital signal for each one-dimensional position detection sensor (PSD) of each slit based on equation (2), and this is calculated. The brightness information of the surface of the object to be measured 101, which corresponds to the three-dimensional shape information obtained by the height calculation means 115 on a one-to-one basis, is acquired as the brightness signal of the measurement point. The series of operations is controlled by the control MPU 114.
【００１９】以上のように本実施例によれば、スリット
光を被測定物へ照射し、幅の細い非分割型の１次元位置
検出センサをその幅方向に複数個配列して構成した撮像
面を有する位置検出手段により、前記スリット光の被測
定物上から反射して得られる散乱光を撮像し、そのセン
サからの光電流信号を用いて高さ演算手段と輝度演算手
段により被測定物表面の高さデータおよびその高さデー
タに対応した輝度データを高速に取得することができ、
その物体の形状情報とさらに輝度情報を用いることによ
り物体のエッジ検出等のアルゴリズムを簡略化できるな
ど、三次元形状を有する物体の認識や検査等を高精度か
つ効率的に行うことができる。As described above, according to the present embodiment, the imaging surface formed by irradiating the object to be measured with slit light and arranging a plurality of narrow non-divided one-dimensional position detecting sensors in the width direction thereof. By the position detecting means having the above, the scattered light obtained by reflecting the slit light from the object to be measured is imaged, and the surface of the object to be measured is calculated by the height calculating means and the brightness calculating means using the photocurrent signal from the sensor. Height data and brightness data corresponding to the height data can be acquired at high speed,
By using the shape information of the object and the brightness information, an algorithm such as edge detection of the object can be simplified, and recognition and inspection of an object having a three-dimensional shape can be performed with high accuracy and efficiency.
【００２０】[0020]
【発明の効果】以上のように本発明は、スリット光を被
測定物へ照射するスリット光走査手段と、幅の細い非分
割型の１次元位置検出センサを、その幅方向に複数個配
列して構成した撮像面を有する位置検出手段と、前記ス
リット光の照射により前記被測定物上から反射して得ら
れる散乱光を集光レンズで前記位置検出手段に集光し光
電流信号を出力する光電流検出手段と、前記光電流検出
手段からの光電流信号により前記被測定物の高さデ−タ
を演算する高さ演算手段と、前記光電流信号により前記
被測定物の輝度デ−タを演算する輝度演算手段とを設け
ることにより、被測定物表面の高さデータおよびその高
さデータに対応した輝度データを高速に取得することが
でき、その物体の形状情報とさらに輝度情報を用いるこ
とにより高精度かつ効率的な三次元形状を有する物体の
認識や検査等を可能とする優れた形状計測装置を実現で
きるものである。As described above, according to the present invention, a plurality of slit light scanning means for irradiating an object to be measured with slit light and a non-divided one-dimensional position detecting sensor having a narrow width are arranged in the width direction. Position detecting means having an image pickup surface configured as described above, and scattered light obtained by being reflected from the object to be measured by irradiation of the slit light is condensed by the condensing lens on the position detecting means and outputs a photocurrent signal. Photocurrent detecting means, height calculating means for calculating height data of the object to be measured based on the photocurrent signal from the photocurrent detecting means, and brightness data of the object to be measured based on the photocurrent signal. By providing the brightness calculating means for calculating, the height data of the surface of the object to be measured and the brightness data corresponding to the height data can be acquired at high speed, and the shape information of the object and further the brightness information are used. Is it highly accurate Those that can achieve excellent shape measurement apparatus capable of recognition and inspection of an object having an efficient three-dimensional shape.
【図１】本発明の一実施例における形状計測装置のブロ
ック結線図FIG. 1 is a block connection diagram of a shape measuring apparatus according to an embodiment of the present invention.
【図２】同実施例における形状計測装置の要部である位
置検出手段の概念図FIG. 2 is a conceptual diagram of a position detecting means which is a main part of the shape measuring apparatus in the embodiment.
【図３】同実施例における形状計測装置の要部であるＡ
／Ｄ変換手段の詳細ブロック図FIG. 3 is a main part A of the shape measuring apparatus in the embodiment.
Detailed block diagram of D / D conversion means
【図４】従来の形状計測装置のブロック結線図FIG. 4 is a block connection diagram of a conventional shape measuring device.
【図５】三角測量の原理を示す幾何学的配置図[Figure 5] Geometric layout showing the principle of triangulation
１０１ 被測定物 １０２ レーザ光源 １０３ スリット光走査手段 １０４ スリット光 １０５ 位置検出手段 １０６ 集光レンズ １０７ 光電流検出手段 １０８ 光電流信号 １１０ Ｉ／Ｖ変換手段 １１１ Ａ／Ｄ変換手段 １１２ 画像メモリ １１３ スキャナ制御ドライバ １１４ 制御ＭＰＵ １１５ 高さ演算手段 １１６ 輝度演算手段 101 Object to be Measured 102 Laser Light Source 103 Slit Light Scanning Means 104 Slit Light 105 Position Detection Means 106 Condenser Lens 107 Photocurrent Detection Means 108 Photocurrent Signals 110 I / V Conversion Means 111 A / D Conversion Means 112 Image Memory 113 Scanner Control Driver 114 Control MPU 115 Height calculating means 116 Brightness calculating means
───────────────────────────────────────────────────── フロントページの続き (72)発明者 三宮 邦夫 神奈川県川崎市多摩区東三田３丁目10番１ 号 松下技研株式会社内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Kunio Sannomiya 3-10-10 Higashisanda, Tama-ku, Kawasaki City, Kanagawa Prefecture Matsushita Giken Co., Ltd.
Claims (1)
ト光走査手段と、幅の細い非分割型の１次元位置検出セ
ンサを、その幅方向に複数個配列して構成した撮像面を
有する位置検出手段と、前記スリット光の走査により前
記被測定物上から反射して得られる散乱光を集光レンズ
で前記位置検出手段に集光し光電流信号を出力する光電
流検出手段と、前記光電流検出手段からの光電流信号に
より前記被測定物の高さデ−タを演算する高さ演算手段
と、前記光電流信号により前記被測定物の輝度デ−タを
演算する輝度演算手段と、全体系を制御する装置制御手
段を具備することを特徴とする形状計測装置。1. A position having an imaging surface formed by arranging a plurality of slit light scanning means for irradiating an object to be measured with slit light and a non-divided one-dimensional position detection sensor having a narrow width in the width direction. A detecting means, a photocurrent detecting means for collecting a scattered light obtained by reflecting from the object to be measured by scanning the slit light on the position detecting means with a condenser lens, and outputting a photocurrent signal; Height calculating means for calculating height data of the object to be measured by a photocurrent signal from the current detecting means, and brightness calculating means for calculating brightness data of the object to be measured by the photocurrent signal; A shape measuring device comprising a device control means for controlling the entire system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3225904A JPH0567197A (en) | 1991-09-05 | 1991-09-05 | Shape measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3225904A JPH0567197A (en) | 1991-09-05 | 1991-09-05 | Shape measuring instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0567197A true JPH0567197A (en) | 1993-03-19 |
Family
ID=16836713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3225904A Pending JPH0567197A (en) | 1991-09-05 | 1991-09-05 | Shape measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0567197A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02161302A (en) * | 1988-12-14 | 1990-06-21 | Juki Corp | Shape measuring instrument |
| JPH03158710A (en) * | 1989-11-16 | 1991-07-08 | Toyota Motor Corp | Image data generating device |
| JPH03162610A (en) * | 1989-06-19 | 1991-07-12 | Fujitsu Ltd | Height measuring instrument |
-
1991
- 1991-09-05 JP JP3225904A patent/JPH0567197A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02161302A (en) * | 1988-12-14 | 1990-06-21 | Juki Corp | Shape measuring instrument |
| JPH03162610A (en) * | 1989-06-19 | 1991-07-12 | Fujitsu Ltd | Height measuring instrument |
| JPH03158710A (en) * | 1989-11-16 | 1991-07-08 | Toyota Motor Corp | Image data generating device |
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