JPH0563068A - Wafer basket - Google Patents
Wafer basketInfo
- Publication number
- JPH0563068A JPH0563068A JP24525691A JP24525691A JPH0563068A JP H0563068 A JPH0563068 A JP H0563068A JP 24525691 A JP24525691 A JP 24525691A JP 24525691 A JP24525691 A JP 24525691A JP H0563068 A JPH0563068 A JP H0563068A
- Authority
- JP
- Japan
- Prior art keywords
- bar member
- wafer basket
- end wall
- handle
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、複数枚のウエーハを収
納するウエーハバスケットに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer basket containing a plurality of wafers.
【０００２】[0002]
【従来の技術】図１０は従来例に係るウエーハバスケッ
ト１の正面図であり、該ウエーハバスケット１は、相対
向する一対の側壁２−１，２−２と、該側壁２−１，２
−２を結合する一対の端壁３（一方のみ図示）とで矩形
枠状に成形され、一方の端壁３には水平なバー部材６が
設けられ、該バー部材６の表面には、断面半円形（図１
１参照）のインデックス用突起７がバー部材６の長さ方
向（水平方向）に突設されている。尚、図１１は図１０
のＦ−Ｆ線断面図である。2. Description of the Related Art FIG. 10 is a front view of a conventional wafer basket 1. The wafer basket 1 includes a pair of side walls 2-1 and 2-2 facing each other and the side walls 2-1 and 2-1.
-2 is formed into a rectangular frame shape with a pair of end walls 3 (only one is shown), and one end wall 3 is provided with a horizontal bar member 6, and the surface of the bar member 6 has a cross section. Semicircle (Fig. 1
The indexing projection 7 (see No. 1) is provided so as to project in the length direction (horizontal direction) of the bar member 6. Incidentally, FIG. 11 shows FIG.
FIG. 6 is a sectional view taken along line FF of
【０００３】[0003]
【発明が解決しようとする課題】ところで、ウエーハバ
スケット１は、耐薬品性及び耐熱性に優れたＰＦＡ（パ
ーフルオロアルキルビニールエーテルとテトラフルオロ
エチレンの共重合体）等で一体成形されるが、前述のよ
うにバー部材６の表面にはインデックス用突起７が突設
されているため、該バー部材６においては、その表面側
にマスが集中し、型成形後の冷却時にバー部材６の表面
側が裏面側よりも長さ方向により大きく縮むという現象
が生じ、この現象のためにバー部材６に反りが発生する
という問題が生ずる。そして、このバー部材６の反り
は、ウエーハバスケット１全体の変形を招く。The wafer basket 1 is integrally formed of PFA (copolymer of perfluoroalkyl vinyl ether and tetrafluoroethylene) having excellent chemical resistance and heat resistance. As described above, since the index projections 7 are provided on the surface of the bar member 6, the bar member 6 has a mass concentrated on the surface side, and the bar member 6 has a front surface side during cooling after molding. There occurs a phenomenon that the bar member 6 shrinks more in the length direction than the back surface side, and this phenomenon causes a problem that the bar member 6 warps. The warp of the bar member 6 causes deformation of the entire wafer basket 1.
【０００４】又、図１０には図示しないが、ウエーハバ
スケット１の端壁３には把手が部分的に形成されていた
ため、該把手が端壁３を補強する剛性部材として機能せ
ず、端壁３に反りが発生し、この反りによってもウエー
ハバスケット１全体が変形するという問題があった。Although not shown in FIG. 10, since the handle is partially formed on the end wall 3 of the wafer basket 1, the handle does not function as a rigid member for reinforcing the end wall 3 and the end wall is not formed. There is a problem in that the wafer 3 is warped and the entire wafer basket 1 is also deformed by the warp.
【０００５】本発明は上記問題に鑑みてなされたもの
で、その目的とする処は、変形を最小限に抑えることが
できるウエーハバスケットを提供することにある。The present invention has been made in view of the above problems, and an object of the present invention is to provide a wafer basket capable of minimizing deformation.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成すべく本
発明は、相対向する一対の側壁と、該側壁を結合する一
対の端壁とで矩形枠状に一体成形され、前記端壁の一方
には水平なバー部材が設けられ、該バー部材の表面にイ
ンデックス用突起を長さ方向に突設して成るウエーハバ
スケットにおいて、前記バー部材の裏面に、長さ方向に
沿って突起を突設したことを特徴とする。In order to achieve the above object, the present invention has a pair of side walls opposed to each other and a pair of end walls connecting the side walls integrally formed in a rectangular frame shape. In a wafer basket in which a horizontal bar member is provided on one side, and an indexing projection is provided on the surface of the bar member in the lengthwise direction, a projection is provided on the back surface of the bar member along the lengthwise direction. It is characterized by being set up.
【０００７】又、本発明は、前記端壁の前記バー部材が
設けられる側とは反対側に把手を含む補強部材を略全幅
に亘って形成したことを特徴とする。Further, the present invention is characterized in that a reinforcing member including a handle is formed over substantially the entire width on the side of the end wall opposite to the side on which the bar member is provided.
【０００８】[0008]
【作用】本発明によれば、端壁のバー部材の裏面側に
は、表面側に突設されたインデックス用突起に対応する
突起が設けられるため、該バー部材においては、マスが
表面側と裏面側とに略均等に配分される。このため、当
該ウエーハバスケットの製造工程における型成形後の冷
却によって、バー部材はその表面側と裏面側が長さ方向
に略均等に熱収縮し、従って、該バー部材に反りが発生
することがなく、ウエーハバスケット全体の変形が防が
れる。According to the present invention, since the projections corresponding to the projections for the index provided on the front surface side are provided on the rear surface side of the bar member of the end wall, the bar member has a mass on the front surface side. Almost evenly distributed on the back side. For this reason, the bar member is heat-shrinked substantially evenly in the length direction on the front surface side and the back surface side by cooling after the die molding in the manufacturing process of the wafer basket, and therefore, the bar member does not warp. , The deformation of the entire wafer basket can be prevented.
【０００９】又、本発明によれば、端壁には把手を含む
補強部材が略全幅に亘って形成されているため、補強部
材は端壁を補強する剛性部材として機能し、これによっ
て端壁の剛性が高められ、該端壁に反りが発生するのが
防がれ、ウエーハバスケット全体の変形が防がれる。
尚、把手をリブで補強すれば、上記効果が更に高められ
る。Further, according to the present invention, since the reinforcing member including the handle is formed on the end wall over substantially the entire width, the reinforcing member functions as a rigid member which reinforces the end wall, and thereby the end wall. The rigidity of the wafer is increased, warpage of the end wall is prevented, and deformation of the entire wafer basket is prevented.
If the handle is reinforced with ribs, the above effect can be further enhanced.
【００１０】[0010]
【実施例】以下に本発明の一実施例を添付図面に基づい
て説明する。An embodiment of the present invention will be described below with reference to the accompanying drawings.
【００１１】図１は本発明に係るウエーハバスケットの
平面図、図２は図１のＡ−Ａ線断面図、図３は図１のＢ
−Ｂ線断面図、図４は図１の矢視Ｃ方向の図、図５は図
４のＥ−Ｅ線拡大断面図、図６は図１の矢視Ｄ方向の図
である。FIG. 1 is a plan view of a wafer basket according to the present invention, FIG. 2 is a sectional view taken along the line AA of FIG. 1, and FIG.
-B line sectional view, FIG. 4 is a view in the direction of arrow C in FIG. 1, FIG. 5 is an enlarged sectional view in the line EE of FIG. 4, and FIG. 6 is a view in the direction of arrow D in FIG.
【００１２】本発明に係るウエーハバスケット１は、相
対向する一対の側壁２−１，２−２と、該側壁２−１，
２−２をその端部で結合する相対向する一対の端壁３−
１，３−２とで矩形枠状に一体成形されており、その
上、下面はそれぞれ開口している。尚、このウエーハバ
スケット１の材質としては、従来と同様にフッ素樹脂系
のＰＦＡ等が用いられている。The wafer basket 1 according to the present invention includes a pair of side walls 2-1 and 2-2 facing each other and the side walls 2-1 and 2-1.
2-2 A pair of end walls facing each other that joins 2-2 at their ends 3-
1 and 3-2 are integrally formed in a rectangular frame shape, and the upper and lower surfaces thereof are open. As the material of the wafer basket 1, a fluororesin PFA or the like is used as in the conventional case.
【００１３】ところで、図３に示すように、前記側壁２
−１，２−２の下半部は内方へ後退しており、該側壁２
−１，２−２の各内面には、上下方向に長いウエーハ隔
離用のリブ４…が適当なピッチで図３の紙面垂直方向に
複数形成されている。そして、これらのリブ４…の間に
は複数の仕切り溝５…（図１及び図２参照）が適当なピ
ッチで形成されている。尚、両側壁２−１，２−２に各
々突設されたリブ４…の配列ピッチは互いに全く同一に
設定されており、従って、各側壁２−１，２−２のリブ
４…の間に形成される前記仕切り溝５…も互いに同一ピ
ッチで配列されている。By the way, as shown in FIG.
The lower half portions of -1, 2-2 are receded inward, and the side wall 2
On each inner surface of -1, 2-2, a plurality of ribs 4 for separating the wafer, which are long in the vertical direction, are formed at an appropriate pitch in the direction perpendicular to the paper surface of FIG. A plurality of partition grooves 5 (see FIGS. 1 and 2) are formed between these ribs 4 at an appropriate pitch. The pitches of the ribs 4 protruding from the side walls 2-1 and 2-2 are set to be exactly the same, so that the ribs 4 of the side walls 2-1 and 2-2 are arranged between them. The partition grooves 5 formed in the above are also arranged at the same pitch.
【００１４】而して、側壁２−１，２−２の相対向する
仕切り溝５，５に１枚のウエーハＷが嵌め込まれて収納
され、同様にして複数枚のウエーハＷ…が当該ウエーハ
バスケット１内に適当な間隔をあけて図３の紙面垂直方
向に整然と配列されて収納される。Thus, one wafer W is fitted and stored in the partition grooves 5 and 5 of the side walls 2-1 and 2-2 which face each other. Similarly, a plurality of wafers W ... 3 are housed in a regular array in the direction perpendicular to the paper surface of FIG.
【００１５】一方、図４に示すように、前記端壁３−１
は水平なバー部材６を有しており、該バー部材６の表面
には断面半円状（図５参照）のインデックス用突起７が
全幅に亘って突設されている。又、バー部材６の下端縁
は裏面側（内方）へ折り返されて突起８を形成してお
り、この結果、バー部材６の表、裏面には突起７，８が
互いに平行に突設されることとなる。On the other hand, as shown in FIG. 4, the end wall 3-1.
Has a horizontal bar member 6, and an indexing projection 7 having a semicircular cross section (see FIG. 5) is provided on the surface of the bar member 6 so as to project over the entire width. Further, the lower end edge of the bar member 6 is folded back toward the back surface (inward) to form a projection 8, and as a result, projections 7 and 8 are provided in parallel on the front and back surfaces of the bar member 6. The Rukoto.
【００１６】又、前記端壁３−２の上部には、図１、図
２及び図６に示すように、補強部材１１が全幅に亘って
形成されており、該補強部材１１は端壁３−２の全幅に
亘って形成された把手９で構成されており、この把手９
は縦方向に長い複数のリブ１０…によって補強されてい
る。Further, as shown in FIGS. 1, 2 and 6, a reinforcing member 11 is formed over the entire width of the end wall 3-2, and the reinforcing member 11 is formed on the end wall 3-2. The handle 9 is formed over the entire width of -2.
Are reinforced by a plurality of longitudinally long ribs 10.
【００１７】以上において、本実施例では、前述のよう
に端壁３−１のバー部材６の裏面側に、表面側に突設さ
れたインデックス用突起７に対応する突起８が突設され
るため、該バー部材６においてはマスが表面側と裏面側
とに略均等に配分される。このため、当該ウエーハバス
ケット１の製造工程における型成形後の冷却によって、
バー部材６はその表面側と裏面側が長さ方向に略均一等
に熱収縮し、従って、該バー部材６に反りが発生するこ
とがなく、ウエーハバスケット１全体の変形が防がれ
る。As described above, in this embodiment, the projection 8 corresponding to the index projection 7 projecting on the front surface is provided on the rear surface of the bar member 6 of the end wall 3-1 as described above. Therefore, in the bar member 6, the mass is distributed substantially evenly on the front surface side and the back surface side. Therefore, by cooling after the molding in the manufacturing process of the wafer basket 1,
The front and back surfaces of the bar member 6 are heat-contracted substantially uniformly in the lengthwise direction, so that the bar member 6 does not warp and deformation of the entire wafer basket 1 is prevented.
【００１８】尚、以上の実施例では、バー部材６の下端
縁を裏面側に折り返して突起８を形成したが、該突起８
はバー部材６の上端縁を同様に折り返して形成しても良
く、或いはバー部材６の裏面の適宜の高さ位置に長さ方
向に平行に突起８を突設しても良い。又、突起８の本数
や突設高さ、寸法及び形状は、該突起８が突設されたバ
ー部材６の表面側と裏面側が長さ方向に略均等に熱収縮
する限り、任意であって、具体的には図５に示した横断
面矩形状のものの他、横断面半円状、楕円状、台形状の
もの等が考えられる。In the above embodiment, the lower end edge of the bar member 6 is folded back to the back surface side to form the protrusion 8.
May be formed by folding back the upper end edge of the bar member 6 in the same manner, or the protrusion 8 may be provided in parallel with the longitudinal direction at an appropriate height position on the back surface of the bar member 6. Further, the number of protrusions 8, the height of protrusion, the size and the shape thereof are arbitrary as long as the front side and the back side of the bar member 6 on which the protrusion 8 is protruded are contracted substantially uniformly in the length direction. Specifically, in addition to the rectangular cross section shown in FIG. 5, semi-circular cross section, elliptical cross section, trapezoidal cross section, and the like can be considered.
【００１９】又、本実施例によれば、把手９で構成され
る補強部材１１は端壁３−２の全幅に亘って形成されて
いるため、端壁３−２を補強する剛性部材として機能
し、これによって端壁３−２の剛性が高められ、該端壁
３−２の剛性が高められてその反りの発生が防がれ、ウ
エーハバスケット１全体の変形が防がれる。又、把手９
はリブ１０…によって補強されているため、補強部材１
１の剛性部材としての機能が更に高められる。Further, according to this embodiment, since the reinforcing member 11 formed of the handle 9 is formed over the entire width of the end wall 3-2, it functions as a rigid member for reinforcing the end wall 3-2. Then, the rigidity of the end wall 3-2 is increased, the rigidity of the end wall 3-2 is increased, the occurrence of warpage is prevented, and the deformation of the entire wafer basket 1 is prevented. Also, handle 9
Are reinforced by ribs 10 ...
The function of the rigid member 1 is further enhanced.
【００２０】尚、以上の実施例では、補強部材１１を端
壁３−２の全幅に亘って形成された把手９で構成した
が、図７に示すように、端壁３−２の幅方向中央部に部
分的に形成された把手９−１と該把手９−１の両端に接
続されるリブ１２，１２によって補強部材１１を構成し
ても良い。又、図８及び図９に示すように、把手９−１
としては、指を掛けるためにその自由端を下方へ折り返
しただけのものであっても良い。In the above embodiment, the reinforcing member 11 is constituted by the handle 9 formed over the entire width of the end wall 3-2, but as shown in FIG. The reinforcing member 11 may be configured by the handle 9-1 partially formed in the central portion and the ribs 12, 12 connected to both ends of the handle 9-1. Further, as shown in FIGS. 8 and 9, the handle 9-1
As the above, the free end may be simply folded back to hang a finger.
【００２１】[0021]
【発明の効果】以上の説明で明らかな如く、本発明によ
れば、相対向する一対の側壁と、該側壁を結合する一対
の端壁とで矩形枠状に一体成形され、前記端壁の一方に
は水平なバー部材が設けられ、該バー部材の表面にイン
デックス用突起を長さ方向に突設して成るウエーハバス
ケットにおいて、前記バー部材の裏面に、長さ方向に沿
って突起を突設し、更には前記端壁のバー部材が設けら
れる側とは反対側に把手を含む補強部材を略全幅に亘っ
て形成したため、端壁のバー部材や端壁の反りの問題を
解消することができ、ウエーハバスケット全体の変形を
防ぐことができるという効果が得られる。As is apparent from the above description, according to the present invention, a pair of side walls opposed to each other and a pair of end walls connecting the side walls are integrally formed into a rectangular frame shape, and In a wafer basket in which a horizontal bar member is provided on one side, and an indexing projection is provided on the surface of the bar member in the lengthwise direction, a projection is provided on the back surface of the bar member along the lengthwise direction. Further, since the reinforcing member including the handle is formed over substantially the entire width on the side of the end wall opposite to the side where the bar member is provided, the problem of the warp of the end wall bar member or the end wall can be solved. Therefore, it is possible to prevent the deformation of the entire wafer basket.
【図１】本発明に係るウエーハバスケットの平面図であ
る。FIG. 1 is a plan view of a wafer basket according to the present invention.
【図２】図１のＡ−Ａ線断面図である。FIG. 2 is a sectional view taken along the line AA of FIG.
【図３】図１のＢ−Ｂ線断面図である。FIG. 3 is a sectional view taken along line BB of FIG.
【図４】図１の矢視Ｃ方向の図である。FIG. 4 is a view in the direction of arrow C in FIG.
【図５】図４のＥ−Ｅ線拡大断面図である。5 is an enlarged cross-sectional view taken along the line EE of FIG.
【図６】図１の矢視Ｄ方向の図である。6 is a view in the direction of arrow D in FIG.
【図７】本発明の別実施例を示すウエーハバスケットの
部分平面図である。FIG. 7 is a partial plan view of a wafer basket showing another embodiment of the present invention.
【図８】本発明の別実施例を示すウエーハバスケットの
部分側断面図である。FIG. 8 is a partial side sectional view of a wafer basket showing another embodiment of the present invention.
【図９】図８の矢視Ｇ方向の図である。9 is a view in the direction of arrow G in FIG.
【図１０】従来のウエーハバスケットの正面図である。FIG. 10 is a front view of a conventional wafer basket.
【図１１】図７のＦ−Ｆ線断面図である。11 is a sectional view taken along line FF of FIG.
１ ウエーハバスケット ２−１，２−２ 側壁 ３−１，３−２ 端壁 ６ バー部材 ７ インデックス用突起 ８ 突起 ９ 把手 １０ リブ １１ 補強部材 １２ リブ 1 Wafer Basket 2-1 and 2-2 Side Walls 3-1 and 3-2 End Wall 6 Bar Member 7 Index Protrusion 8 Protrusion 9 Handle 10 Rib 11 Reinforcing Member 12 Rib
Claims (6)
する一対の端壁とで矩形枠状に一体成形され、前記端壁
の一方には水平なバー部材が設けられ、該バー部材の表
面にインデックス用突起を長さ方向に突設して成るウエ
ーハバスケットにおいて、前記バー部材の裏面に、長さ
方向に沿って突起を突設したことを特徴とするウエーハ
バスケット。1. A pair of side walls facing each other and a pair of end walls connecting the side walls are integrally molded in a rectangular frame shape, and one of the end walls is provided with a horizontal bar member. 1. A wafer basket having an indexing protrusion projecting in the length direction on its front surface, wherein a protrusion is projecting along the length direction on the back face of the bar member.
下端縁に沿って裏面側に折り返されて形成されることを
特徴とする請求項１記載のウエーハバスケット。2. The wafer basket according to claim 1, wherein the projection is formed by being folded back toward the back surface along the upper edge or the lower edge of the bar member.
とは反対側に把手を含む補強部材を略全幅に亘って形成
したことを特徴とする請求項１記載のウエーハバスケッ
ト。3. The wafer basket according to claim 1, wherein a reinforcing member including a handle is formed on a side of the end wall opposite to a side where the bar member is provided, over substantially the entire width.
形成された把手で構成されることを特徴とする請求項３
記載のウエーハバスケット。4. The reinforcing member is constituted by a handle formed over substantially the entire width of the end wall.
The indicated wafer basket.
に部分的に形成された把手と、該把手の両端に接続され
たリブで構成されることを特徴とする請求項３記載のウ
エーハバスケット。5. The reinforcing member comprises a handle partially formed at a substantially central portion in the width direction of the end wall, and ribs connected to both ends of the handle. Wafer basket.
よって補強されていることを特徴とする請求項３，４又
は５記載のウエーハバスケット。6. The wafer basket according to claim 3, wherein the handle is reinforced by a plurality of longitudinally long ribs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24525691A JPH0563068A (en) | 1991-08-30 | 1991-08-30 | Wafer basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24525691A JPH0563068A (en) | 1991-08-30 | 1991-08-30 | Wafer basket |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0563068A true JPH0563068A (en) | 1993-03-12 |
Family
ID=17130976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24525691A Pending JPH0563068A (en) | 1991-08-30 | 1991-08-30 | Wafer basket |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0563068A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6245259B1 (en) | 1996-09-20 | 2001-06-12 | Osram Opto Semiconductors, Gmbh & Co. Ohg | Wavelength-converting casting composition and light-emitting semiconductor component |
| US6614179B1 (en) | 1996-07-29 | 2003-09-02 | Nichia Kagaku Kogyo Kabushiki Kaisha | Light emitting device with blue light LED and phosphor components |
| US6613247B1 (en) | 1996-09-20 | 2003-09-02 | Osram Opto Semiconductors Gmbh | Wavelength-converting casting composition and white light-emitting semiconductor component |
| JP2008205382A (en) * | 2007-02-22 | 2008-09-04 | Shin Etsu Polymer Co Ltd | Cassette and substrate storage container using the same |
| US7859193B2 (en) | 2005-03-10 | 2010-12-28 | Citizen Electronics Co., Ltd. | Illumination apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57141928A (en) * | 1981-01-15 | 1982-09-02 | Fluoroware Inc | Wafer treating container |
-
1991
- 1991-08-30 JP JP24525691A patent/JPH0563068A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57141928A (en) * | 1981-01-15 | 1982-09-02 | Fluoroware Inc | Wafer treating container |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7071616B2 (en) | 1996-07-29 | 2006-07-04 | Nichia Kagaku Kogyo Kabushiki Kaisha | Light emitting device with blue light led and phosphor components |
| US7362048B2 (en) | 1996-07-29 | 2008-04-22 | Nichia Kagaku Kogyo Kabushiki Kaisha | Light emitting device with blue light led and phosphor components |
| US7531960B2 (en) | 1996-07-29 | 2009-05-12 | Nichia Corporation | Light emitting device with blue light LED and phosphor components |
| US6614179B1 (en) | 1996-07-29 | 2003-09-02 | Nichia Kagaku Kogyo Kabushiki Kaisha | Light emitting device with blue light LED and phosphor components |
| US7126274B2 (en) | 1996-07-29 | 2006-10-24 | Nichia Corporation | Light emitting device with blue light LED and phosphor components |
| US7026756B2 (en) | 1996-07-29 | 2006-04-11 | Nichia Kagaku Kogyo Kabushiki Kaisha | Light emitting device with blue light LED and phosphor components |
| US7215074B2 (en) | 1996-07-29 | 2007-05-08 | Nichia Corporation | Light emitting device with blue light led and phosphor components |
| US7329988B2 (en) | 1996-07-29 | 2008-02-12 | Nichia Corporation | Light emitting device with blue light LED and phosphor components |
| US6613247B1 (en) | 1996-09-20 | 2003-09-02 | Osram Opto Semiconductors Gmbh | Wavelength-converting casting composition and white light-emitting semiconductor component |
| US6245259B1 (en) | 1996-09-20 | 2001-06-12 | Osram Opto Semiconductors, Gmbh & Co. Ohg | Wavelength-converting casting composition and light-emitting semiconductor component |
| US6277301B1 (en) | 1996-09-20 | 2001-08-21 | Osram Opto Semiconductor, Gmbh & Co. Ohg | Method of producing a wavelength-converting casting composition |
| US6592780B2 (en) | 1996-09-20 | 2003-07-15 | Osram Opto Semiconductors Gmbh | Wavelength-converting casting composition and white light-emitting semiconductor component |
| US7859193B2 (en) | 2005-03-10 | 2010-12-28 | Citizen Electronics Co., Ltd. | Illumination apparatus |
| JP2008205382A (en) * | 2007-02-22 | 2008-09-04 | Shin Etsu Polymer Co Ltd | Cassette and substrate storage container using the same |
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