JPH0549273A - Ultrasonic linear motor - Google Patents
Ultrasonic linear motorInfo
- Publication number
- JPH0549273A JPH0549273A JP3196759A JP19675991A JPH0549273A JP H0549273 A JPH0549273 A JP H0549273A JP 3196759 A JP3196759 A JP 3196759A JP 19675991 A JP19675991 A JP 19675991A JP H0549273 A JPH0549273 A JP H0549273A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- linear motor
- piezoelectric elements
- curve
- ultrasonic linear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、超音波振動を駆動源と
し棒材に沿って駆動する超音波リニアモータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic linear motor which is driven by ultrasonic vibrations along a rod.
【０００２】[0002]
【従来の技術】従来の超音波リニアモータは、特開平０
２−３０２９７号公報に記載されているように、振動面
をある部材に圧接させ、圧接面と振動面にある加圧力を
加える方法がとられている。2. Description of the Related Art A conventional ultrasonic linear motor is disclosed in Japanese Patent Laid-Open No.
As described in Japanese Patent Laid-Open No. 2-30297, a method is used in which a vibrating surface is brought into pressure contact with a certain member and a pressure is applied to the pressure contact surface and the vibrating surface.
【０００３】[0003]
【発明が解決しようとする課題】上記従来技術では、振
動面をある部材に圧接させるために、加圧用のバネ、摺
動のためのベアリング機構が必要となり、リニアモータ
の小型化が阻害され、コストも高くなるという問題があ
った。In the above prior art, in order to bring the vibrating surface into pressure contact with a certain member, a spring for pressurization and a bearing mechanism for sliding are required, which hinders miniaturization of the linear motor. There was a problem that the cost would be high.
【０００４】本発明の目的は、棒材の外周面を駆動する
超音波リニアモータにより、小型で安価な超音波リニア
モータを提供することにある。It is an object of the present invention to provide a small and inexpensive ultrasonic linear motor that drives the outer peripheral surface of a bar.
【０００５】[0005]
【課題を解決するための手段】上記目的を達成するため
に、本発明の超音波リニアモータでは圧電素子により構
成される駆動部に棒材を貫通させ、この棒材の外周面を
圧電素子がつかむようにしながら移動するようにするこ
とで達成される。In order to achieve the above object, in an ultrasonic linear motor of the present invention, a rod is made to pass through a driving portion constituted by a piezoelectric element, and the piezoelectric element is attached to the outer peripheral surface of the rod. It is achieved by moving while grasping.
【０００６】[0006]
【作用】本発明の作用は、人が棒登りをするときと似て
いる。まず前記２対の圧電素子のうち一方で棒材をつか
み、他方はつかまない。この状態で前記中央の圧電素子
を進行方向に伸ばす。つぎに前記２対の圧電素子のつか
む、つかまないを逆にしてやり、この状態で前記中央の
圧電素子を縮めてやる。以上の動作により、前記中央の
圧電素子の伸び量分移動する。これを繰り返すことによ
り、リニア駆動を実現する。The operation of the present invention is similar to that of a person climbing a stick. First, one of the two pairs of piezoelectric elements holds the rod and the other does not. In this state, the central piezoelectric element is extended in the traveling direction. Next, the grasping and non-grabbing of the two pairs of piezoelectric elements are reversed, and in this state, the central piezoelectric element is contracted. By the above operation, the central piezoelectric element is moved by the amount of expansion. By repeating this, linear drive is realized.
【０００７】[0007]
【実施例】以下、本発明の実施例を図１により説明す
る。図１は棒材１に丸棒を使用した例で、棒材１を包む
ようにして、径方向に振動するリング状圧電素子３およ
び４、棒材１の軸方向に振動するリング状圧電素子２、
さらに前記３つの圧電素子２、３、４の間に挟まれる中
間リング５ａ、５ｂが一体に構成されている。圧電素子
３、４の内径は棒材１の外径に対し、収縮時には締め
代、膨張時には隙間ができるよう設定されている。ま
た、圧電素子２と中間リング５ａ、５ｂは棒材１と径方
向に隙間をとってある。このように構成された図１にお
いて、棒材１上を図面左から右へ駆動する場合を説明す
る。まず圧電素子３は収縮の状態で、棒材１を挟み付け
ている。圧電素子４は膨張の状態で棒材１とは隙間があ
る。この時に圧電素子２を膨張の状態にすると、その膨
張分圧電素子４は右に移動する。つぎに圧電素子４を収
縮の状態にして、圧電素子３を膨張の状態に切り替え
る。この時圧電素子２を収縮の状態にすると、その収縮
分つまり前記の膨張分圧電素子２は右に移動する。以上
これまでの動作により、圧電素子２、３、４および中間
リング５ａ、５ｂが圧電素子２の変位量分移動すること
となり、この動作を圧電素子２、３、４に超音波振動を
適当な位相差で駆動させて繰り返すことにより、高速の
リニア駆動が実現する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. FIG. 1 is an example in which a round bar is used as the bar 1. The ring-shaped piezoelectric elements 3 and 4 that vibrate in the radial direction so as to wrap the bar 1, the ring-shaped piezoelectric element 2 that vibrates in the axial direction of the bar 1.
Further, intermediate rings 5a and 5b sandwiched between the three piezoelectric elements 2, 3 and 4 are integrally formed. The inner diameters of the piezoelectric elements 3 and 4 are set with respect to the outer diameter of the bar member 1 so that a contraction margin is provided when contracting and a gap is provided when expanding. Further, the piezoelectric element 2 and the intermediate rings 5a and 5b are spaced from the bar 1 in the radial direction. In FIG. 1 configured as described above, the case where the rod 1 is driven from left to right in the drawing will be described. First, the piezoelectric element 3 is in a contracted state, and the rod 1 is sandwiched between them. The piezoelectric element 4 has a gap with the bar 1 in the expanded state. When the piezoelectric element 2 is expanded at this time, the expanded piezoelectric element 4 moves to the right by the expanded amount. Next, the piezoelectric element 4 is set in the contracted state, and the piezoelectric element 3 is switched to the expanded state. If the piezoelectric element 2 is contracted at this time, the contracted piezoelectric element 2, that is, the expanded piezoelectric element 2 moves to the right. As a result of the above operations, the piezoelectric elements 2, 3, 4 and the intermediate rings 5a, 5b move by the amount of displacement of the piezoelectric element 2, and this operation allows appropriate ultrasonic vibration to be applied to the piezoelectric elements 2, 3, 4. High-speed linear drive is realized by driving with a phase difference and repeating.
【０００８】図２は図１の圧電素子２、３、４に加える
交流電圧の例で、曲線６は圧電素子３に加える電圧、曲
線７は圧電素子４に加える電圧、曲線８は圧電素子２に
加える電圧を示す。曲線６と曲線７は互いに反対の極性
のため、これによって動作する圧電素子３と圧電素子４
は、一方が膨張の時は他方は収縮となり、その逆に一方
が収縮の時は他方は膨張となる。ここで圧電素子２に曲
線８の電圧を加えると、これは圧電素子４に加わる電圧
と同じ極性のため、図１において説明した動作を繰り返
すことになる。なお、駆動方向を逆の図１右から左にす
るには、圧電素子２の振動の位相を１８０゜変えてやれ
ばよい。つまり曲線８を反対にすればよい。FIG. 2 shows an example of the AC voltage applied to the piezoelectric elements 2, 3 and 4 of FIG. 1. Curve 6 is the voltage applied to the piezoelectric element 3, curve 7 is the voltage applied to the piezoelectric element 4, and curve 8 is the piezoelectric element 2. Indicates the voltage applied to. Since the curves 6 and 7 have polarities opposite to each other, the piezoelectric element 3 and the piezoelectric element 4 which are operated by this are
When one is expanded, the other is contracted, and conversely, when one is contracted, the other is expanded. Here, when the voltage of the curve 8 is applied to the piezoelectric element 2, since this has the same polarity as the voltage applied to the piezoelectric element 4, the operation described in FIG. 1 is repeated. In order to change the driving direction from the right to the left in FIG. 1, the phase of vibration of the piezoelectric element 2 may be changed by 180 °. That is, the curve 8 may be reversed.
【０００９】次に本発明の他の実施例を図３により説明
する。Next, another embodiment of the present invention will be described with reference to FIG.
【００１０】図３は図１における軸方向に振動する圧電
素子２を２対に増やした例で圧電素子９、１０を軸方向
の振動に使用している。基本動作は図１と同様である
が、軸方向に２対の圧電素子９、１０を使用しているた
め変位量が大きくなり、より高速な駆動を実現できる。
さらに、圧電素子９、１０の振動の位相をずらすこと
で、駆動速度を変えることも可能である。これを図を使
って説明する。図４の曲線１１は圧電素子９に加わる電
圧、曲線１２は圧電素子１０に加わる電圧を示す。圧電
素子９と１０の変位の合計は曲線１３で表され、曲線１
１と１２の位相差のない図４のときが最大の変位を得ら
れる。つぎに図５は、圧電素子９に加わる電圧の曲線１
４と圧電素子１０に加わる電圧の曲線１５の位相をずら
したときで、圧電素子９と圧電素子１０の変位の合計を
示す曲線１６は、図４の曲線１３より振幅が小さくな
り、変位が減ることがわかる。この結果、駆動速度も減
ることになり、圧電素子９と圧電素子１０に加える電圧
の位相を変えることで駆動速度を変えることができるこ
とがわかる。なお、図１の例、図３の例とも、より大き
な変位を得るために圧電素子２、３、４、９、１０に積
層型の圧電素子を使用してもよい。FIG. 3 shows an example in which the number of the piezoelectric elements 2 vibrating in the axial direction in FIG. 1 is increased to two pairs, and the piezoelectric elements 9 and 10 are used for the axial vibration. The basic operation is the same as that of FIG. 1, but since two pairs of piezoelectric elements 9 and 10 are used in the axial direction, the displacement amount becomes large, and higher speed driving can be realized.
Further, the driving speed can be changed by shifting the phase of vibration of the piezoelectric elements 9 and 10. This will be described with reference to the drawings. A curve 11 in FIG. 4 shows a voltage applied to the piezoelectric element 9, and a curve 12 shows a voltage applied to the piezoelectric element 10. The total displacement of the piezoelectric elements 9 and 10 is represented by the curve 13 and the curve 1
The maximum displacement can be obtained in the case of FIG. 4 in which there is no phase difference between 1 and 12. Next, FIG. 5 shows a curve 1 of voltage applied to the piezoelectric element 9.
4 and the curve 15 of the voltage applied to the piezoelectric element 10 are out of phase, the curve 16 showing the total displacement of the piezoelectric element 9 and the piezoelectric element 10 has a smaller amplitude and a smaller displacement than the curve 13 of FIG. I understand. As a result, the driving speed also decreases, and it is understood that the driving speed can be changed by changing the phase of the voltage applied to the piezoelectric element 9 and the piezoelectric element 10. In addition, in both the example of FIG. 1 and the example of FIG. 3, a laminated piezoelectric element may be used as the piezoelectric elements 2, 3, 4, 9, and 10 in order to obtain a larger displacement.
【００１１】[0011]
【発明の効果】本発明によれば、１本の棒材と、圧電素
子と中間材で構成される駆動部のみで超音波リニアモー
タが構成でき、加圧用のバネ、摺動のためのベアリング
機構が不要であり、小型で安価な超音波リニアモータが
できるという効果がある。さらに駆動電圧の位相を変え
るだけで駆動方向、駆動速度を変えることができ、制御
性に優れた超音波リニアモータができるという効果があ
る。According to the present invention, an ultrasonic linear motor can be constructed with only one rod, and a drive section composed of a piezoelectric element and an intermediate material, and a spring for pressing and a bearing for sliding are provided. There is an effect that a mechanism is unnecessary and a small and inexpensive ultrasonic linear motor can be realized. Furthermore, the driving direction and the driving speed can be changed only by changing the phase of the driving voltage, and an ultrasonic linear motor having excellent controllability can be obtained.
【図１】本発明の一実施例を示す斜視図。FIG. 1 is a perspective view showing an embodiment of the present invention.
【図２】本発明の一実施例の駆動電圧と変位を示す図。FIG. 2 is a diagram showing a drive voltage and displacement according to an embodiment of the present invention.
【図３】本発明の他の実施例を示す斜視図。FIG. 3 is a perspective view showing another embodiment of the present invention.
【図４】本発明の他の実施例の駆動電圧と変位を示す
図。FIG. 4 is a diagram showing a drive voltage and displacement according to another embodiment of the present invention.
【図５】本発明の他の実施例の駆動電圧と変位を示す
図。FIG. 5 is a diagram showing a drive voltage and displacement according to another embodiment of the present invention.
１ 棒材 ２ 圧電素子 ３ 圧電素子 ４ 圧電素子 ５ａ 中間リング ５ｂ 中間リング ６ 曲線 ７ 曲線 ８ 曲線 ９ 圧電素子 １０ 圧電素子 １１ 曲線 １２ 曲線 １３ 曲線 １４ 曲線 １５ 曲線 １６ 曲線 1 bar material 2 piezoelectric element 3 piezoelectric element 4 piezoelectric element 5a intermediate ring 5b intermediate ring 6 curve 7 curve 8 curve 9 piezoelectric element 10 piezoelectric element 11 curve 12 curve 13 curve 14 curve 15 curve 16 curve
Claims (4)
子を挟んで、その両側に進行方向と垂直に振動する２対
の圧電素子を有し、これらのなかに棒材が進行方向と平
行に貫通し、前記２対の圧電素子が棒材をつかむように
構成したことを特徴とする超音波リニアモータ。1. A pair of piezoelectric elements that oscillates in a direction perpendicular to the traveling direction is sandwiched by a central piezoelectric element that oscillates in parallel with the traveling direction. An ultrasonic linear motor, characterized in that it is configured such that the two pairs of piezoelectric elements are configured so as to grab a rod material.
素子に位相差のある駆動電圧を加え、その位相差を変え
ることにより駆動方向を変えることを特徴とする請求項
１記載の超音波リニアモータ。2. The supercharger according to claim 1, wherein a driving voltage having a phase difference is applied to the two pairs of piezoelectric elements on both sides and a central piezoelectric element, and the driving direction is changed by changing the phase difference. Sound wave linear motor.
とを特徴とする請求項１記載の超音波リニアモータ。3. The ultrasonic linear motor according to claim 1, wherein two or more central piezoelectric elements are provided.
のある交流電圧を加え、その位相差を変えることによ
り、駆動速度を変えることを特徴とする請求項３記載の
超音波リニアモータ。4. The ultrasonic linear motor according to claim 3, wherein the driving speed is changed by applying an AC voltage having a phase difference to the two or more piezoelectric elements in the center and changing the phase difference. ..
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19675991A JP3356790B2 (en) | 1991-08-06 | 1991-08-06 | Ultrasonic linear motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19675991A JP3356790B2 (en) | 1991-08-06 | 1991-08-06 | Ultrasonic linear motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0549273A true JPH0549273A (en) | 1993-02-26 |
| JP3356790B2 JP3356790B2 (en) | 2002-12-16 |
Family
ID=16363151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19675991A Expired - Lifetime JP3356790B2 (en) | 1991-08-06 | 1991-08-06 | Ultrasonic linear motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3356790B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1699093A2 (en) * | 2005-03-03 | 2006-09-06 | Pratt & Whitney Canada Corp. | Electromagnetic Actuator |
| JP2008312438A (en) * | 2007-05-17 | 2008-12-25 | Nikon Corp | Piezoelectric actuator, piezoelectric actuator device, lens barrel, and optical apparatus |
| EP2017905A2 (en) | 2007-07-20 | 2009-01-21 | Canon Kabushiki Kaisha | Actuator |
| WO2009113617A1 (en) | 2008-03-14 | 2009-09-17 | ダイヤニトリックス株式会社 | Method for stabilization of aqueous acrylamide solution |
-
1991
- 1991-08-06 JP JP19675991A patent/JP3356790B2/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1699093A2 (en) * | 2005-03-03 | 2006-09-06 | Pratt & Whitney Canada Corp. | Electromagnetic Actuator |
| EP1699093A3 (en) * | 2005-03-03 | 2007-07-25 | Pratt & Whitney Canada Corp. | Electromagnetic Actuator |
| JP2008312438A (en) * | 2007-05-17 | 2008-12-25 | Nikon Corp | Piezoelectric actuator, piezoelectric actuator device, lens barrel, and optical apparatus |
| EP2017905A2 (en) | 2007-07-20 | 2009-01-21 | Canon Kabushiki Kaisha | Actuator |
| US7915787B2 (en) | 2007-07-20 | 2011-03-29 | Canon Kabushiki Kaisha | Actuator |
| WO2009113617A1 (en) | 2008-03-14 | 2009-09-17 | ダイヤニトリックス株式会社 | Method for stabilization of aqueous acrylamide solution |
| US8569012B2 (en) | 2008-03-14 | 2013-10-29 | Mitsubishi Rayon Co., Ltd. | Method for stabilization of aqueous acrylamide solution |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3356790B2 (en) | 2002-12-16 |
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