JPS63240382A - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JPS63240382A JPS63240382A JP62072436A JP7243687A JPS63240382A JP S63240382 A JPS63240382 A JP S63240382A JP 62072436 A JP62072436 A JP 62072436A JP 7243687 A JP7243687 A JP 7243687A JP S63240382 A JPS63240382 A JP S63240382A
- Authority
- JP
- Japan
- Prior art keywords
- slit
- ultrasonic motor
- vibrating body
- bending vibration
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005452 bending Methods 0.000 claims abstract description 25
- 239000000919 ceramic Substances 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 6
- 230000005684 electric field Effects 0.000 abstract description 2
- 238000006073 displacement reaction Methods 0.000 description 7
- 239000002783 friction material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は圧電体を用いて駆動力を発生する超音波モータ
に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an ultrasonic motor that generates driving force using a piezoelectric material.
従来の技術
近年圧電セラミック等の圧電体を用いた振動体に弾性振
動を励振し、これを駆動力とした超音波モータが注目さ
れている。2. Description of the Related Art In recent years, ultrasonic motors have attracted attention, in which elastic vibrations are excited in a vibrating body using a piezoelectric material such as a piezoelectric ceramic, and this vibration is used as a driving force.
以下、図面を参照しながら超音波モータの従来技術につ
いて説明を行う。Hereinafter, the conventional technology of an ultrasonic motor will be explained with reference to the drawings.
第４図は従来の円環形超音波モータの斜視図であり、円
環形の弾性体１の円環面の一方に圧電体として円環形の
圧電セラミック２を貼合せて振動体３を構成している。FIG. 4 is a perspective view of a conventional toroidal ultrasonic motor, in which a vibrating body 3 is constructed by pasting a toroidal piezoelectric ceramic 2 as a piezoelectric body on one of the toric surfaces of a toroidal elastic body 1. There is.
４は耐磨耗性材料の摩擦材、５は弾性体であり、互いに
貼合せられて移動体６を構成している。移動体６は摩擦
材４を介して振動体３と接触している。圧電体２に電界
を印加すると振動体３の周方向に曲げ撮動の進行波が励
起され、移動体６を駆動する。尚、同図中の矢印は移動
体６の回転方向を示す。4 is a friction material made of a wear-resistant material, and 5 is an elastic body, which are pasted together to form a moving body 6. The moving body 6 is in contact with the vibrating body 3 via the friction material 4. When an electric field is applied to the piezoelectric body 2, a traveling wave for bending and imaging is excited in the circumferential direction of the vibrating body 3, thereby driving the movable body 6. Note that the arrow in the figure indicates the rotation direction of the moving body 6.
第５図は第４図の超音波モータに使用した圧電セラミッ
ク２の電極構造の一例を示している。同図では円周方向
に９波の弾性波がのるようにしである。同図において、
ＡおよびＢはそれぞれ２分の１波長相当の小領域から成
る電極群で、Ｃは４分の３波長、Ｄは４分の１波長の長
さの電極である。電極ＣおよびＤは電極群ＡとＢに位置
的に４分の１波長く＝９０度）の位相差を作っている。FIG. 5 shows an example of the electrode structure of the piezoelectric ceramic 2 used in the ultrasonic motor shown in FIG. In the figure, nine elastic waves are placed in the circumferential direction. In the same figure,
A and B are electrode groups each consisting of a small region corresponding to a half wavelength, C is an electrode group having a length of three-quarters of a wavelength, and D is an electrode having a length of a quarter of a wavelength. Electrodes C and D create a positional phase difference of 1/4 wave length (90 degrees) between electrode groups A and B.
電極ＡとＢ内の隣り合う小電極部は互いに反対に厚み方
向に分極されている。圧電体２の弾性体１との接着面は
、第５図に示めされた面と反対の面であり、電極はベタ
電極である。使用時には、電極群ＡおよびＢは第５図に
斜線で示されたように、それぞれ短絡して用いられる。Adjacent small electrode portions in electrodes A and B are polarized oppositely to each other in the thickness direction. The adhesive surface of the piezoelectric body 2 with the elastic body 1 is the opposite surface to the surface shown in FIG. 5, and the electrode is a solid electrode. During use, electrode groups A and B are short-circuited, as indicated by diagonal lines in FIG.
以上のように構成された超音波モータの圧電体２の電極
ＡおよびＢに
Ｖ １−Ｖｏｘ：５ｉｎ（ωｔ ）
−−−（１）Ｖ２−Ｖ。ｘｃｏｓ（ωｔ）−−−（２＞
ただし、ｖｏ＝電圧の瞬時値
ω；角周波数
ｔ−、時間
で表される電圧ｖ１およびｖ２をそれぞれ印加すれば、
撮動体３には
ξ−ξ０ｘ（ｃｏｓ（ωｔ）ｘｃｏｓ（ｋｘ）＋５ｉｎ
（ωｔ）ｘｓｉｎ（ｋｘ））
−ξｏｘｃｏｓ（ωｔ−ｋｘ） −−−（
３）ただし ξ：曲げ振動の振幅値
ξ ：曲げ振動の瞬時値
ｋ ：波数（２π／λ）
λ：波長
Ｘ ：位置
で表せる、円周方向に進行する曲げ振動の進行波が励起
される。V 1-Vox: 5 in (ωt) at electrodes A and B of the piezoelectric body 2 of the ultrasonic motor configured as above.
--- (1) V2-V. xcos(ωt)---(2>
However, if vo = instantaneous value of voltage ω; angular frequency t- and voltages v1 and v2 expressed in time are applied, respectively,
The camera body 3 has ξ−ξ0x(cos(ωt)xcos(kx)+5in
(ωt)xsin(kx)) −ξoxcos(ωt−kx) −−−(
3) where ξ: amplitude value of bending vibration ξ: instantaneous value of bending vibration k: wave number (2π/λ) λ: wavelength
第６図は振動体３の表面のＡ点が進行波の励起によって
、長軸２ｗ１短軸２ｕの楕円運動をし、撮動体３上に加
圧して設置された移動体６が、楕円の頂点近傍で接触す
ることにより、摩擦力により波の進行方向とは逆方向に
シーω×ｕの速度で運動する様子を示している。FIG. 6 shows that point A on the surface of the vibrating body 3 moves in an ellipse with major axis 2w1 and minor axis 2u due to the excitation of the traveling wave, and the movable body 6, which is placed under pressure on the photographing body 3, moves at the apex of the ellipse. It is shown that due to close contact, the waves move at a speed of ω x u in the opposite direction to the direction of wave propagation due to frictional force.
発明が解決しようとする問題点
第７図に円環形超音波モータの振動体の径方向の変位分
布を示す。超音波モータの出力を太き（するためには、
振動体の変位または質量を大きくして運動エネルギーを
太き（すればよい。撮動体の外径が決まれば、内径をで
きるだけ小さくするか、厚さを厚（するか、または変位
を太き（しなければならない。しかし、内径を小さくし
ても、内径が小さくなるに従って、第７図に示すように
急に振幅値は小さくなり、振動体の穴を小さくしても運
動エネルギーはあまり大きくならない。そして、厚さを
厚くすれば振動体の曲げ剛性が大きくなり変位を大きく
することはできない。また、変位の増大は破壊限界によ
り上限が決まっている。従って、従来の円環の曲げ振動
を使用した超音波モータは出力を太き（できないという
問題点がある。Problems to be Solved by the Invention FIG. 7 shows the radial displacement distribution of the vibrating body of the annular ultrasonic motor. In order to increase the output of the ultrasonic motor,
You can increase the kinetic energy by increasing the displacement or mass of the vibrating body. Once the outer diameter of the object is determined, you can either make the inner diameter as small as possible, increase the thickness, or increase the displacement. However, even if the inner diameter is made smaller, as the inner diameter becomes smaller, the amplitude value suddenly decreases as shown in Figure 7, and even if the hole in the vibrating body is made smaller, the kinetic energy does not increase much. .If the thickness is increased, the bending rigidity of the vibrating body increases, and the displacement cannot be increased.Also, the upper limit of the increase in displacement is determined by the fracture limit.Therefore, the bending vibration of the conventional circular ring is The problem is that the ultrasonic motor used has a large output (not possible).
本発明はかかる点に鑑みてなされたもので、同体積で出
力を太き（でき、しかも効率の良い超音波モータを提供
することを目的としている。The present invention has been made in view of this point, and an object of the present invention is to provide an ultrasonic motor that has the same volume but has a higher output and is more efficient.
問題点を解決するための手段
円環形振動体を構成する弾性体に、径方向に複数個の幅
が一定なスリットを入れる。Means for Solving the Problem A plurality of slits having a constant width are provided in the radial direction in the elastic body constituting the annular vibrating body.
作 用
円環形娠動体を構成する弾性体に、径方向に複数個のス
リットを入れることにより、振動体の厚さを厚（しても
等価的に曲げ剛性が小さい構造をとり、スリットの幅を
一定にすることにより、曲げ振動を効率良く励振するこ
とができ、変位を太き（とり、しかも振動体の機械的損
失を小さくして、その結果出力が大きく、効率の良い超
音波モータを実現できる。By making a plurality of slits in the radial direction in the elastic body that makes up the annular moving body, the thickness of the vibrating body can be increased (even if the vibrating body is thick, the structure has equivalently small bending rigidity, and the width of the slit is By keeping constant the bending vibration, it is possible to excite the bending vibration efficiently, increase the displacement, and reduce the mechanical loss of the vibrating body, resulting in a high output and efficient ultrasonic motor. realizable.
実施例
以下、図面に従って本発明の一実施例について詳細な説
明を行う。EXAMPLE Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
第１図は本発明の超音波モータの構成を示す切り欠き斜
視図である。円環形の弾性体７の主面の一方に、圧電体
として円環形の圧電セラミック８を貼合せて振動体９を
構成している。また、弾性体７の他の主面には、幅が一
定なスリット１０が構成されている。このスリット１０
により摂動体９の曲げ振動の進行方向の曲げ剛性は見掛
は上小さくできる。１１は耐磨耗性材料の摩擦材、１２
は弾性体であり、互いに貼合せられて移動体１３を構成
している。移動体１３は、摩擦材１１を介して振動体９
にと加圧接触している。圧電体８に動じ、移動体１３は
回転運動を始める。FIG. 1 is a cutaway perspective view showing the configuration of the ultrasonic motor of the present invention. A vibrating body 9 is constructed by bonding a toroidal piezoelectric ceramic 8 as a piezoelectric body to one of the main surfaces of the toroidal elastic body 7. Furthermore, a slit 10 having a constant width is formed on the other main surface of the elastic body 7. This slit 10
As a result, the bending rigidity of the perturbation body 9 in the direction in which the bending vibration advances can be made smaller in appearance. 11 is a friction material made of wear-resistant material; 12
are elastic bodies, and are pasted together to form the moving body 13. The moving body 13 connects to the vibrating body 9 via the friction material 11.
is in pressure contact with. Moved by the piezoelectric body 8, the movable body 13 starts rotating.
第２図は、第１図の超音波モータの振動体、９を構成す
る弾性体７の平面図と側面図である。同図より、スリッ
ト１０の入っている部分と入っていない部分とでは厚さ
が大きく異なり、そのため曲げ剛性が双方で大きく累な
り、曲げ振動の大部分はスリット１０の部分で変位して
いる。弾性体７の径方向に入れられたスリット１０は、
その幅Ｗ。2 is a plan view and a side view of the elastic body 7 constituting the vibrating body 9 of the ultrasonic motor of FIG. 1. FIG. As can be seen from the figure, the thickness of the part with the slit 10 and the part without the slit 10 is greatly different, and therefore the bending stiffness is greatly accumulated in both parts, and most of the bending vibration is displaced in the part of the slit 10. The slit 10 made in the radial direction of the elastic body 7 is
Its width W.
を一定にしている。これにより、スリット部での駆動は
矩形の貼合素子と同様の動作をすることになり、内外周
のスリットの幅が異なる等価的に扇形の貼合素子とみな
せる場合よりも、機械損失の小さい駆動ができる。また
、同図中のλは１波長を示し、スリットが１波長相当長
に８個入っていることを示す。is kept constant. As a result, the drive at the slit section operates in the same way as a rectangular bonding element, and the mechanical loss is smaller than when it can be regarded as an equivalent fan-shaped bonding element with different widths of the slits on the inner and outer circumferences. Can be driven. Further, λ in the same figure indicates one wavelength, indicating that eight slits are included in a length corresponding to one wavelength.
第３図は振動体の曲げ振動とスリットとの関係を示す説
明図である。同図で、Ａ、Ｂは互いに位置的に位相が４
分の１波長相当分だけ異なる電極群で、それぞれ２分の
１波長相当分の小電極より成る。上記の隣り合う小電極
部は厚さ方向に反対方向に分極されている。電極群Ａに
ｓｉｎの交流電圧を印加したとき励振される曲げ振動の
定在波をＡで表し、電極群Ｂにｃｏｓの交流電圧を印加
したとき励振される曲げ振動の定在波をＢで表はす。電
極群Ａ、Ｂにより定在波が効率良く励振されるように、
２つの定在波Ａ、Ｂのいずれの山の位置付近に必ずスリ
ットがあるように、振動体にスリット１０を入れる。従
って、スリットは曲げ振動の１波長当たりに４の整数倍
個入れねばならない。逆に、この条件を満たせば、定在
波Ａ、Ｂの何れから見てもスリットは同じ条件で入るこ
とになる。従って、２つの定在波は同じ条件で励振され
、理想的な曲げ振動の進行波が得られる。FIG. 3 is an explanatory diagram showing the relationship between the bending vibration of the vibrating body and the slit. In the same figure, A and B are in phase 4 with respect to each other.
These are electrode groups that differ by an amount equivalent to 1/2 wavelength, each consisting of small electrodes equivalent to 1/2 wavelength. The adjacent small electrode portions described above are polarized in opposite directions in the thickness direction. The standing wave of bending vibration excited when a sin AC voltage is applied to electrode group A is represented by A, and the standing wave of bending vibration excited when a cos AC voltage is applied to electrode group B is represented by B. Table lotus. In order to efficiently excite standing waves by electrode groups A and B,
A slit 10 is placed in the vibrating body so that the slit is always located near the peak of either of the two standing waves A and B. Therefore, an integral multiple of 4 slits must be inserted per one wavelength of bending vibration. Conversely, if this condition is satisfied, the slit will enter under the same conditions regardless of whether it is viewed from standing waves A or B. Therefore, the two standing waves are excited under the same conditions, and an ideal traveling wave of bending vibration is obtained.
本発明によれば、効率の良い、しかも出力の大きな超音
波モータを提供できる。According to the present invention, it is possible to provide an ultrasonic motor that is efficient and has a large output.
発明の効果
本発明によれば、円環形振動体を構成する弾性体に、そ
の幅が−°定なスリットを形成して、曲げ振動を効率良
（励振することにより、効率の良い、しかも出力の大き
な超音波モータを提供できる。Effects of the Invention According to the present invention, a slit whose width is constant is formed in the elastic body constituting the annular vibrating body, and by exciting bending vibration, efficient and output We can provide large ultrasonic motors.
第１図は本発明の円環形超音波モータの切り欠き斜視図
、第２図は第１図の超音波モータで使用する振動体を構
成する弾性体の平面図と側面図、第３図は振動体の曲げ
振動を構成する２つの定在波とスリットとの位置関係を
説明するモデル図、第４図は従来の円環形超音波モータ
の切り欠き斜視図、第５図は第４図の超音波モータに用
いた圧電体の形状と電極構造を示す平面図、第６図は超
音波モータの動作原理の説明図、第７図は振動体の曲げ
振動の振動状態と径方向の変位分布図である。
７・・・・・・弾性体、８・・・・・・圧電体、９・・
・・・・振動体、１０・・・・・・スリット、１１・・
・・・・摩擦材、１２・・・・・・弾性体、１３・・・
・・・移動体。
代理人の氏名 弁理士 中尾敏男 ほか１名第１図
第２図
の °喝 ぐ
憾 憾Fig. 1 is a cutaway perspective view of the annular ultrasonic motor of the present invention, Fig. 2 is a plan view and side view of an elastic body constituting the vibrating body used in the ultrasonic motor of Fig. 1, and Fig. 3 is a perspective view of the annular ultrasonic motor of the present invention. A model diagram illustrating the positional relationship between the two standing waves that make up the bending vibration of the vibrating body and the slit. Figure 4 is a cutaway perspective view of a conventional annular ultrasonic motor. Figure 5 is the same as Figure 4. A plan view showing the shape and electrode structure of the piezoelectric body used in the ultrasonic motor, Fig. 6 is an explanatory diagram of the operating principle of the ultrasonic motor, and Fig. 7 shows the vibration state of the bending vibration of the vibrating body and the radial displacement distribution. It is a diagram. 7...Elastic body, 8...Piezoelectric body, 9...
...Vibrating body, 10...Slit, 11...
...Friction material, 12...Elastic body, 13...
...A moving object. Name of agent: Patent attorney Toshio Nakao and one other person
Claims (2)
とから構成される振動体に弾性進行波を励振することに
より、該振動体上に接触して設置された移動体を移動さ
せる超音波モータにおいて、該振動体として円環形の振
動体を用い、該進行波として曲げ振動を用い、該振動体
を構成する弾性体に、径方向に複数個の幅が一定なスリ
ットを入れることを特徴とする超音波モータ。(1) By driving a piezoelectric body with an alternating current voltage and exciting an elastic traveling wave in a vibrating body composed of the piezoelectric body and an elastic body, a moving body placed in contact with the vibrating body can be moved. In the ultrasonic motor for movement, an annular vibrating body is used as the vibrating body, bending vibration is used as the traveling wave, and a plurality of slits having a constant width in the radial direction are formed in the elastic body constituting the vibrating body. An ultrasonic motor characterized by
る曲げ振動の１波長相当長に、４の整数倍存在すること
を特徴とする特許請求の範囲第１項記載の超音波モータ
。(2) The ultrasonic wave according to claim 1, characterized in that the number of slits is an integral multiple of 4 in a length equivalent to one wavelength of bending vibration traveling in the circumferential direction of the annular vibrating body. motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62072436A JP2574284B2 (en) | 1987-03-26 | 1987-03-26 | Ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62072436A JP2574284B2 (en) | 1987-03-26 | 1987-03-26 | Ultrasonic motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63240382A true JPS63240382A (en) | 1988-10-06 |
| JP2574284B2 JP2574284B2 (en) | 1997-01-22 |
Family
ID=13489250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62072436A Expired - Lifetime JP2574284B2 (en) | 1987-03-26 | 1987-03-26 | Ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2574284B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63314180A (en) * | 1987-06-15 | 1988-12-22 | Seiko Instr & Electronics Ltd | Wave motor |
| JPH02214477A (en) * | 1989-02-14 | 1990-08-27 | Canon Inc | Vibration wave device |
| JPH02219475A (en) * | 1989-02-17 | 1990-09-03 | Canon Inc | Vibration wave device |
| US11469689B2 (en) | 2018-06-08 | 2022-10-11 | Canon Kabushiki Kaisha | Vibration wave motor, drive control system, and optical apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59201685A (en) * | 1983-04-30 | 1984-11-15 | Canon Inc | Vibration wave motor |
| JPS61116978A (en) * | 1984-11-08 | 1986-06-04 | Matsushita Electric Ind Co Ltd | Supersonic wave drive motor |
| JPS61191278A (en) * | 1985-02-20 | 1986-08-25 | Matsushita Electric Ind Co Ltd | Ultrasonic wave motor |
-
1987
- 1987-03-26 JP JP62072436A patent/JP2574284B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59201685A (en) * | 1983-04-30 | 1984-11-15 | Canon Inc | Vibration wave motor |
| JPS61116978A (en) * | 1984-11-08 | 1986-06-04 | Matsushita Electric Ind Co Ltd | Supersonic wave drive motor |
| JPS61191278A (en) * | 1985-02-20 | 1986-08-25 | Matsushita Electric Ind Co Ltd | Ultrasonic wave motor |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63314180A (en) * | 1987-06-15 | 1988-12-22 | Seiko Instr & Electronics Ltd | Wave motor |
| JPH02214477A (en) * | 1989-02-14 | 1990-08-27 | Canon Inc | Vibration wave device |
| JPH02219475A (en) * | 1989-02-17 | 1990-09-03 | Canon Inc | Vibration wave device |
| US11469689B2 (en) | 2018-06-08 | 2022-10-11 | Canon Kabushiki Kaisha | Vibration wave motor, drive control system, and optical apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2574284B2 (en) | 1997-01-22 |
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