JPH054287B2 - - Google Patents
Info
- Publication number
- JPH054287B2 JPH054287B2 JP13584987A JP13584987A JPH054287B2 JP H054287 B2 JPH054287 B2 JP H054287B2 JP 13584987 A JP13584987 A JP 13584987A JP 13584987 A JP13584987 A JP 13584987A JP H054287 B2 JPH054287 B2 JP H054287B2
- Authority
- JP
- Japan
- Prior art keywords
- lever
- carriage
- gear
- fixed
- rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 238000005096 rolling process Methods 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 13
- 230000032258 transport Effects 0.000 description 6
- 239000010687 lubricating oil Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Reciprocating Conveyors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
【発明の詳細な説明】
＜産業上の利用分野＞
本発明は、真空室内でシリコンウエハー等の物
体を搬送する搬送装置に関する。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a transport device for transporting objects such as silicon wafers within a vacuum chamber.
＜従来の技術＞
例えば、半導体素子の製造工程において、シリ
コンウエハー等の単結晶基板上に金属材料、半導
体材料等の薄膜をエピタキシヤル成長させること
が行なわれるが、このようなエピタキシヤル処理
は真空蒸着法に類似し、高真空の真空室内で材料
を加熱して行なわれる。<Prior art> For example, in the manufacturing process of semiconductor devices, thin films of metal materials, semiconductor materials, etc. are epitaxially grown on single crystal substrates such as silicon wafers, but such epitaxial processing is performed in a vacuum. Similar to vapor deposition, it is carried out by heating the material in a high-vacuum chamber.
一方、このような真空室内でのエピタキシヤル
層成長処理において、シリコンウエハー等の単結
晶基板を真空室内で任意に移動させることが要望
されている。 On the other hand, in such epitaxial layer growth processing in a vacuum chamber, it is desired to arbitrarily move a single crystal substrate such as a silicon wafer within the vacuum chamber.
＜発明が解決しようとする問題点＞
そこで、通常の製造工程で使用される搬送装
置、例えばチエーン、ワイヤ等によりキヤリツジ
を動かして物体を搬送する搬送装置を真空室内に
設置して使用することが考えられたが、キヤリツ
ジを動かすために使用されるチエーン、ワイヤ、
及びスプロケツト、プーリ等の駆動部品は、その
摺動部に潤滑油が付着され、それらの回転部や摺
動部が密封されてないため、高温加熱下の高真空
中では回転部等の潤滑油が直ぐに蒸発し、使用で
きなくなる問題があつた。また、ベルトや合成樹
脂を使用した場合、高温高真空状態では内部に吸
着又は含有された気体がガス放出を起こし使用で
きない問題があつた。<Problems to be Solved by the Invention> Therefore, it is possible to use a conveying device used in normal manufacturing processes, such as a conveying device that moves a carriage to convey an object using a chain, wire, etc., by installing it in a vacuum chamber. Although it was thought that the chains, wires, and
The sliding parts of drive parts such as sprockets and pulleys are coated with lubricating oil, and since their rotating and sliding parts are not sealed, lubricating oil may leak from the rotating parts in a high vacuum under high temperature heating. There was a problem that it evaporated quickly and became unusable. Furthermore, when belts or synthetic resins are used, there is a problem in that under high temperature and high vacuum conditions, gases adsorbed or contained inside the belts are released, making them unusable.
本発明は、上記の点にかんがみなされたもの
で、真空室内ででシリコンウエハー等の搬送に使
用し得る搬送装置を提供することを目的とする。 The present invention has been made in view of the above points, and an object of the present invention is to provide a transfer device that can be used to transfer silicon wafers and the like within a vacuum chamber.
＜問題点を解決するための手段＞
このために、本発明の搬送装置は、真空室内で
シリコンウエハー等の半導体材料をハンドリング
プレート上に載置して搬送する搬送装置におい
て、モータを内蔵し、該モータによつて駆動され
る旋回用の回転軸及び水平往復動用の回転駆動軸
を上方に突出させ、その周囲に真空シール部を設
けた駆動部と、旋回用の回転軸上に固定され、水
平方向にレールを設けた水平移動部と、内部を密
閉シールされたころがり軸受製の車輪を有し、レ
ール上を移動可能に配設されたキヤリツジと、キ
ヤリツジの一部に取付けられたハンドリングプレ
ートと、回転駆動軸の先端に第１レバーが固着さ
れ、第１レバーの先端に第２レバーが歯車と共
に、内部を密閉シールされたころがり軸受を介し
て軸支され、回転駆動軸と同軸心上に固定歯車が
固定され、第２レバーの軸支部分に位置する歯車
と固定歯車が第１レバー上に軸支された別の歯車
を介して連係され、第２レバーの先端がキヤリツ
ジの一部に係合され、回転駆動軸の回転により第
１レバーと第２レバーを回動させてキヤリツジを
レール上で往復動させる往復動機構を備えて構成
される。<Means for Solving the Problems> For this purpose, the transport device of the present invention is a transport device that transports a semiconductor material such as a silicon wafer on a handling plate in a vacuum chamber, and includes a built-in motor. a driving part having a rotating shaft for turning driven by the motor and a rotating driving shaft for horizontal reciprocating protruding upward and a vacuum seal portion provided around the rotating shaft; and a driving part fixed on the rotating shaft for turning, A horizontal moving part with a rail in the horizontal direction, a carriage that has wheels made of rolling bearings that are hermetically sealed inside and is movable on the rails, and a handling plate that is attached to a part of the carriage. A first lever is fixed to the tip of the rotary drive shaft, and a second lever is rotatably supported on the tip of the first lever along with a gear via a rolling bearing whose inside is hermetically sealed, and is coaxial with the rotary drive shaft. A fixed gear is fixed to the shaft, and the gear located on the pivot portion of the second lever and the fixed gear are linked via another gear pivoted on the first lever, and the tip of the second lever is connected to a part of the carriage. The reciprocating mechanism is engaged with the rotary drive shaft and rotates the first lever and the second lever by rotation of the rotary drive shaft to reciprocate the carriage on the rail.
＜実施例＞
以下、本発明の実施例を図面に基づいて説明す
る。<Example> Hereinafter, an example of the present invention will be described based on the drawings.
第１図、第２図、第３図はシリコンウエハーを
真空室内で搬送する搬送装置の正面図、右側面
図、平面図を示し、この搬送装置は、真空室外に
配置され駆動用モータを内蔵する駆動部１と、駆
動部１上に真空シール部２を介して回転可能に設
けられた水平移動部３と、水平移動部３内のレー
ル１６上を走行しハンドリングプレート５を備え
たキヤリツジ４と、キヤリツジ４をレール上で往
復動させる往復動機構６とから構成される。 Figures 1, 2, and 3 show a front view, right side view, and plan view of a transfer device that transfers silicon wafers within a vacuum chamber. This transfer device is located outside the vacuum chamber and has a built-in drive motor. a horizontal moving section 3 that is rotatably provided on the driving section 1 via a vacuum seal section 2; and a carriage 4 that runs on a rail 16 in the horizontal moving section 3 and is provided with a handling plate 5. and a reciprocating mechanism 6 that reciprocates the carriage 4 on the rail.
駆動部１には大径パイプ状の回転軸１１が上方
に突出して垂直に回転可能に支持され、回転軸１
１の下部に大歯車１２が取着され、内部に設置さ
れた減速機付きのモータ１３が歯車を介して大歯
車１２に連係され、このモータ１３の回転駆動に
より大径の回転軸１１は低速で回動する。なお、
上方に突出した回転軸１１の周囲には真空シール
部２が設けられ、真空シール部２内に充てんされ
た磁性流体が回転軸１１の周囲をシールする構造
である。また、キヤリツジ４を往復動させる往復
動機構６を動かすための駆動源として、回転駆動
軸１４が大径の回転軸１１内を貫通するように配
設され、この回転駆動軸１４の下部は駆動部１内
において歯車を介して往復動用のモータ１５に連
係される。 A rotating shaft 11 in the form of a large diameter pipe projects upward from the drive unit 1 and is vertically rotatably supported.
A large gear 12 is attached to the lower part of the gear 1, and a motor 13 with a reducer installed inside is connected to the large gear 12 via the gear.The rotation of the motor 13 causes the large diameter rotating shaft 11 to move at a low speed. Rotate with. In addition,
A vacuum seal section 2 is provided around the rotating shaft 11 that projects upward, and the magnetic fluid filled in the vacuum seal section 2 seals the circumference of the rotating shaft 11. Further, as a drive source for moving the reciprocating mechanism 6 that reciprocates the carriage 4, a rotary drive shaft 14 is disposed so as to pass through the inside of the large diameter rotary shaft 11. Within the section 1, it is linked to a reciprocating motor 15 via gears.
大径の回転軸１１の先端には細長い箱形の水平
移動部３が固定される。水平移動部３内には長手
方向に沿つて、支持板上に円柱上部を固定したレ
ール１６が配設され、このレール１６上にキヤリ
ツジ４が搭載される。キヤリツジ４は、第４図に
示すようにレール１６を上方からまたぐように搭
載され、キヤリツジ４内には放射状に４個の車輪
１７が前後に合計８個軸支され、各車輪１７はレ
ール１６の円柱上部を斜上方及び下方からその外
周部で押えるように配設される。また、キヤリツ
ジ４の下部にも２対の車輪１８がレール下部を両
側から挟むように軸支される。これらの車輪１
７，１８には内部を密閉シールされたころがり軸
受が使用され、ころがり軸受の内輪内に軸が嵌着
され、外輪が車輪の外周部を形成している。この
キヤリツジ４の上部には板状の連結部１９が固定
され、さらに連結部１９上にアーム２０がレール
の長手方向に沿つて水平に固定され、アーム２０
の先端にハンドリングプレート５が固定される。
連結部１９の先端には係合凹部１９ａが形成さ
れ、往復動機構６の第２レバーの先端に設けたロ
ーラ２６がこの係合凹部１９ａに係合される。 An elongated box-shaped horizontal moving section 3 is fixed to the tip of the large-diameter rotating shaft 11. A rail 16 having a cylindrical upper portion fixed to a support plate is disposed along the longitudinal direction inside the horizontal moving section 3, and the carriage 4 is mounted on this rail 16. The carriage 4 is mounted so as to straddle the rail 16 from above, as shown in FIG. It is arranged so that the upper part of the cylinder is pressed down with its outer periphery from diagonally above and below. Further, two pairs of wheels 18 are pivotally supported at the lower part of the carriage 4 so as to sandwich the lower part of the rail from both sides. these wheels 1
Rolling bearings 7 and 18 are hermetically sealed, and the shaft is fitted into the inner ring of the rolling bearing, and the outer ring forms the outer periphery of the wheel. A plate-shaped connecting part 19 is fixed to the upper part of this carriage 4, and an arm 20 is fixed horizontally on the connecting part 19 along the longitudinal direction of the rail.
A handling plate 5 is fixed to the tip.
An engagement recess 19a is formed at the distal end of the connecting portion 19, and a roller 26 provided at the distal end of the second lever of the reciprocating mechanism 6 is engaged with the engagement recess 19a.
往復動機構６は、第４図に示すように、駆動部
１から上方に延びた回転駆動軸１４の上部に固着
され一定の角度範囲で回動する第１レバー２１
と、第１レバー２１上に水平に回転自在に軸支さ
れ相互に噛合した２つの歯車２２，２３と、回転
駆動軸１４と同一軸心上に装置本体に対し固定さ
れ、歯車２３と噛合した固定歯車２４と、前記歯
車２２上に一体的に固定され先端にローラ２６を
突設した第２レバー２５とから構成される。回動
駆動軸１４の先端に水平に軸着される第１レバー
２１は第３図の位置から第５図の位置まで回動
し、第１レバー２１の先端に突設固定された軸２
７に、ころがり軸受２８を介して歯車２２と第２
レバー２５が回転自在に支持される。歯車２３
は、第１レバー２１の中間部に突設固定された軸
２９にころがり軸受３０を介して支持され、先端
側の歯車２２と固定歯車２４と噛合する。固定歯
車２４はころがり軸受３１を介して回転駆動軸１
４の先端に取付けられ、固定板３２により装置の
フレームの一部に固定され、回転駆動軸１４が回
転しても固定歯車２４は回転しない。上記ころが
り軸受２８，３０，３１は、上記の車輪１７，１
８と同様に内部を密閉シールされた構造である。
歯車２３の歯数は任意に、また、固定歯車２４と
歯車２２の歯数比は２対１に設定され、第１レバ
ー２１が回動すると、歯車２３が固定歯車２４の
周囲を回わりながら自転し、これにより先端の歯
車２２が回転され、歯車２２と一体の第２レバー
２５が第３図の状態から第５図の状態まで回動す
る。そして、第１レバー２１が第４図に示すよう
な中央位置に回動した時、第２レバー２５は第１
レバー２１の上にに重ねられた状態となる。一
方、第１レバー２１の回動に伴なつて回動する第
２レバー２５の先端の軌跡は水平移動部３に沿つ
た線状となる。従つて、第２レバー２５の先端の
ローラ２６がキヤリツジ４の連結部１９の係合凹
部１９ａに係合された場合、第１レバー２１が回
転駆動軸１４によつて回動されると、これに伴な
つて第２レバー２５が第３図、第５図のようにそ
の先端部を直線移動させ、これによつてキヤリツ
ジ４がレール１６上を移動し、その移動位置は回
転駆動軸１４の回転角によつて決定される。 As shown in FIG. 4, the reciprocating mechanism 6 includes a first lever 21 that is fixed to the upper part of a rotary drive shaft 14 extending upward from the drive unit 1 and rotates within a certain angular range.
and two gears 22 and 23 that are rotatably supported horizontally on the first lever 21 and mesh with each other, and a gear that is fixed to the main body of the device on the same axis as the rotary drive shaft 14 and meshes with the gear 23. It consists of a fixed gear 24 and a second lever 25 which is integrally fixed onto the gear 22 and has a roller 26 protruding from its tip. The first lever 21, which is horizontally pivoted on the tip of the rotation drive shaft 14, rotates from the position shown in FIG. 3 to the position shown in FIG.
7, the gear 22 and the second
A lever 25 is rotatably supported. gear 23
is supported via a rolling bearing 30 by a shaft 29 fixedly protruding from the intermediate portion of the first lever 21, and meshes with the gear 22 and the fixed gear 24 on the distal end side. The fixed gear 24 is connected to the rotational drive shaft 1 via a rolling bearing 31.
4 and is fixed to a part of the frame of the device by a fixing plate 32, and even if the rotary drive shaft 14 rotates, the fixed gear 24 does not rotate. The rolling bearings 28, 30, 31 are connected to the wheels 17, 1.
Similar to 8, it has a hermetically sealed structure.
The number of teeth of the gear 23 is set arbitrarily, and the ratio of the number of teeth between the fixed gear 24 and the gear 22 is set to 2:1. When the first lever 21 rotates, the gear 23 rotates around the fixed gear 24. This rotates the gear 22 at the tip, and the second lever 25, which is integral with the gear 22, rotates from the state shown in FIG. 3 to the state shown in FIG. 5. Then, when the first lever 21 rotates to the center position as shown in FIG.
It is in a state where it is stacked on top of the lever 21. On the other hand, the locus of the tip of the second lever 25 that rotates as the first lever 21 rotates is linear along the horizontal moving section 3 . Therefore, when the roller 26 at the tip of the second lever 25 is engaged with the engagement recess 19a of the connecting portion 19 of the carriage 4, when the first lever 21 is rotated by the rotary drive shaft 14, this As a result, the second lever 25 moves its tip in a straight line as shown in FIGS. Determined by the rotation angle.
なお、ハンドリングプレート５には、被搬送物
のシリコンウエハー等のハンドリング状態を光学
的に検出する光センサを設けることができる。 Note that the handling plate 5 can be provided with an optical sensor that optically detects the handling state of the transferred object, such as a silicon wafer.
このように構成された搬送装置は、例えば、半
導体素子の製造工程におけるエピタキシヤル層形
成用の真空室（真空チヤンバー）内に真空シール
部２から上を挿入するように設置され、真空室内
でシリコンウエハー等をハンドリングプレート５
に載せて次のように搬送する。 The transfer device configured in this way is installed, for example, to be inserted from the vacuum seal section 2 upwards into a vacuum chamber for forming an epitaxial layer in the manufacturing process of semiconductor devices, and is used to transfer silicon in the vacuum chamber. Handling plate 5 for wafers etc.
and transport it as follows.
すなわち、第３図に示すようにキヤリツジ４が
水平移動部３の右端に位置し、ハンドリングプレ
ート５が本体側に最も引き戻された状態におい
て、往復駆動用のモータ１５が回転駆動軸１４を
第３図の反時計方向に回転駆動すると、そこに固
着された第１レバー２１が同方向に回動する。こ
の時、歯車２３が固定歯車２４の周囲を回わり反
時計方向に自転し、この回転が先端の歯車２２に
伝達され、歯車２２が時計方向に回転する。よつ
て歯車２２と共に第２レバー２５が軸２７を中心
に時計方向に回動し、その先端のローラ２６は第
３図左方向に直線移動する。これによつて、ロー
ラ２６が連結部１９を介して係合したキヤリツジ
４は水平移動部３のレール１６上を左方向に動か
され、第１レバー２１が略中央に回動したとき、
第１レバー２１と第２レバー２５は上下に重なつ
た状態となり、キヤリツジ４はレール１６のほぼ
中央まで進む。さらに、回転駆動軸１４が同方向
に回転すると、第５図に示すように第１レバー２
１は同様に反時計方向に回動し、また、第２レバ
ー２５は軸２７を支点に時計方向に回動し、第１
レバー２に対する角度は急速に増大して第２レバ
ー２５の先端は左方向に直線移動する。これによ
つてキヤリツジ４はさらにレール１６上を左方向
に進み、第１レバー２１が回動限界に達した時、
キヤリツジ４はレール１６つまり水平移動部３の
左端に達する。これで、キヤリツジ４上にアーム
２０を介して取着されたハンドリングプレート５
は最も先端に差し出された状態となり、この状態
でハンドリングプレート５上にシリコンウエハー
が図示しないのせ換え装置等により載置され、或
は載置されていたシリコンウエハーが取り出され
たりする。 That is, as shown in FIG. 3, when the carriage 4 is located at the right end of the horizontal moving section 3 and the handling plate 5 is pulled back the most toward the main body, the reciprocating motor 15 moves the rotary drive shaft 14 to the third position. When the first lever 21 is rotated counterclockwise in the figure, the first lever 21 fixed thereto is rotated in the same direction. At this time, the gear 23 rotates around the fixed gear 24 and rotates counterclockwise, and this rotation is transmitted to the gear 22 at the tip, which rotates clockwise. Therefore, the second lever 25 rotates clockwise about the shaft 27 together with the gear 22, and the roller 26 at its tip moves linearly to the left in FIG. As a result, the carriage 4 engaged with the roller 26 via the connecting part 19 is moved leftward on the rail 16 of the horizontal moving part 3, and when the first lever 21 is rotated approximately to the center,
The first lever 21 and the second lever 25 are in a vertically overlapping state, and the carriage 4 advances to approximately the center of the rail 16. Further, when the rotary drive shaft 14 rotates in the same direction, the first lever 2 is rotated as shown in FIG.
1 similarly rotates counterclockwise, and the second lever 25 rotates clockwise about the shaft 27 as a fulcrum.
The angle with respect to the lever 2 increases rapidly, and the tip of the second lever 25 moves linearly to the left. As a result, the carriage 4 further moves to the left on the rail 16, and when the first lever 21 reaches its rotation limit,
The carriage 4 reaches the rail 16, that is, the left end of the horizontal movement section 3. The handling plate 5 is now attached to the carriage 4 via the arm 20.
is held out at the most tip end, and in this state, a silicon wafer is placed on the handling plate 5 by a transfer device (not shown) or the placed silicon wafer is taken out.
一方、回転用のモータ１３が回転すると、大歯
車１２を介して大径の回転軸１１が回わり、その
上の水平移動部３及び往復動機構６が旋回する。
これにより、キヤリツジ４のハンドリングプレー
ト５は回転軸１１を中心に、そのキヤリツジ４の
位置に応じた回転半径で約360度旋回し、シリコ
ンウエハーを所定の位置まで搬送する。 On the other hand, when the rotation motor 13 rotates, the large-diameter rotating shaft 11 rotates via the large gear 12, and the horizontal movement section 3 and reciprocating mechanism 6 thereon rotate.
As a result, the handling plate 5 of the carriage 4 rotates approximately 360 degrees around the rotating shaft 11 with a rotation radius corresponding to the position of the carriage 4, and transports the silicon wafer to a predetermined position.
このように、キヤリツジ４は合計12個の車輪１
７，１８によつてレールを挟むように支持されて
移動するため、ガタツクことなくシリコンウエハ
ーを搬送することができる。また、搬送装置の水
平移動部３が挿入配置される真空室内は高真空で
あると共に高温に加熱される場合があるが、潤滑
を必要とする摺動部は、鋼球部を良好に密封した
ころがり軸受のみであるため、軸受からの潤滑油
の蒸発や各部品の摩耗は少なく、長期にわたつて
使用することができる。 In this way, the carriage 4 has a total of 12 wheels 1
Since it moves while being supported by the rails 7 and 18, the silicon wafer can be transported without shaking. In addition, the vacuum chamber in which the horizontal moving part 3 of the conveying device is inserted is a high vacuum and may be heated to a high temperature, but the sliding parts that require lubrication are well-sealed with steel balls. Since it uses only rolling bearings, there is less evaporation of lubricating oil from the bearings and less wear on each part, allowing it to be used for a long time.
＜発明の効果＞
以上説明したように、本発明の搬送装置によれ
ば、真空シール部から上を真空室内に挿入し、真
空室内でシリコンウエハー等の搬送に使用するこ
とができ、チエーン、ワイヤ、スプロケツト、プ
ーリ等、摺動部が露出した駆動部品を使用せず、
鋼球部を良好に密封されたころがり軸受を車輪や
回転部に使用するため、高温加熱下の高真空中で
搬送作業を行なつても潤滑油の蒸発により摺動部
が直ぐに焼きつくようなことなく、真空室内にお
いても長期にわたつて使用することができる。ま
た、キヤリツジがころがり軸受の車輪によりレー
ル上に確実に支持されるため、ガタなく安定して
走行でき、第１レバー、第２レバーのリンクと歯
車の組合せによる往復動機構によりキヤリツジを
円滑に移動させ、被搬送物を安定して搬送するこ
とができる。<Effects of the Invention> As explained above, according to the transfer device of the present invention, the upper part from the vacuum seal part can be inserted into the vacuum chamber and used to transfer silicon wafers, etc. , sprockets, pulleys, and other drive parts with exposed sliding parts.
Rolling bearings with well-sealed steel balls are used in wheels and rotating parts, so even if conveyance work is carried out in a high vacuum under high temperature heating, the sliding parts will quickly seize up due to evaporation of lubricating oil. It can be used for long periods of time even in a vacuum chamber. In addition, since the carriage is securely supported on the rail by rolling bearing wheels, it can run stably without any play, and the carriage can be moved smoothly by a reciprocating mechanism made up of a combination of links between the first and second levers and gears. This allows the objects to be transported to be transported stably.
図は本発明の実施例を示し、第１図は搬送装置
の正面図、第２図は同右側面図、第３図は同平面
図、第４図は水平移動部と往復駆動部の拡大断面
図、第５図は作動状態を示す平面図である。
１…駆動部、２…真空シール部、３…水平移動
部、４…キヤリツジ、５…ハンドリングプレー
ト、６…往復動機構、１１…回転軸、１３…モー
タ、１４…回転駆動軸、１５…モータ、１６…レ
ール、１７，１８…車輪、２１…第１レバー、２
５…第２レバー。
The figures show an embodiment of the present invention, in which Fig. 1 is a front view of the conveyance device, Fig. 2 is a right side view of the same, Fig. 3 is a plan view of the same, and Fig. 4 is an enlarged view of the horizontal moving part and the reciprocating drive part. The sectional view and FIG. 5 are plan views showing the operating state. DESCRIPTION OF SYMBOLS 1... Drive part, 2... Vacuum seal part, 3... Horizontal movement part, 4... Carriage, 5... Handling plate, 6... Reciprocating mechanism, 11... Rotation shaft, 13... Motor, 14... Rotation drive shaft, 15... Motor , 16...Rail, 17, 18...Wheel, 21...First lever, 2
5...Second lever.
Claims (1)
をハンドリングプレート上に載置して搬送する搬
送装置において、 モータを内蔵し、該モータによつて駆動される
旋回用の回転軸及び水平往復動用の回転駆動軸を
上方に突出させ、その周囲に真空シール部を設け
た駆動部と、 該旋回用の回転軸上に固定され、水平方向にレ
ールを設けた水平移動部と、 内部を密閉シールされたころがり軸受製の車輪
を有し、前記レール上を移動可能に配設されたキ
ヤリツジと、 該キヤリツジの一部に取付けられたハンドリン
グプレートと、 前記回転駆動軸の先端に第１レバーが固着さ
れ、該第１レバーの先端に第２レバーが歯車と共
に、内部を密閉シールされたころがり軸受を介し
て軸支され、該回転駆動軸と同軸心上に固定歯車
が固定され、該第２レバーの軸支部分に位置する
該歯車と該固定歯車が第１レバー上に軸支された
別の歯車を介して連係され、該第２レバーの先端
が前記キヤリツジの一部に係合され、該回転駆動
軸の回転によつて該第１レバーと第２レバーを回
動させて該キヤリツジを前記レール上で往復動さ
せる往復動機構と、 を備えたことを特徴とする搬送装置。[Scope of Claims] 1. A transfer device that places a semiconductor material such as a silicon wafer on a handling plate and transfers it in a vacuum chamber, which includes a built-in motor and a rotating shaft driven by the motor; a drive unit with a rotational drive shaft for horizontal reciprocating protruding upward and a vacuum seal around it; a horizontal movement unit fixed on the rotational shaft for rotation and provided with a rail in the horizontal direction; a carriage having wheels made of rolling bearings hermetically sealed and disposed movably on the rail; a handling plate attached to a part of the carriage; A lever is fixed, a second lever is pivotally supported at the tip of the first lever together with a gear via a rolling bearing whose inside is hermetically sealed, and a fixed gear is fixed coaxially with the rotational drive shaft. The gear located on the pivot portion of the second lever and the fixed gear are linked via another gear pivoted on the first lever, and the tip of the second lever engages with a part of the carriage. and a reciprocating mechanism that rotates the first lever and the second lever by rotation of the rotary drive shaft to reciprocate the carriage on the rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62135849A JPS63300006A (en) | 1987-05-29 | 1987-05-29 | Carrying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62135849A JPS63300006A (en) | 1987-05-29 | 1987-05-29 | Carrying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63300006A JPS63300006A (en) | 1988-12-07 |
| JPH054287B2 true JPH054287B2 (en) | 1993-01-19 |
Family
ID=15161201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62135849A Granted JPS63300006A (en) | 1987-05-29 | 1987-05-29 | Carrying device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63300006A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5588789A (en) * | 1995-07-06 | 1996-12-31 | Brooks Automation | Load arm for load lock |
| US6120229A (en) * | 1999-02-01 | 2000-09-19 | Brooks Automation Inc. | Substrate carrier as batchloader |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6236212A (en) * | 1985-08-05 | 1987-02-17 | Taiyo Tekko Kk | Conveying device |
| JPS6293112A (en) * | 1985-10-18 | 1987-04-28 | Kazuo Kimata | Conveying device |
-
1987
- 1987-05-29 JP JP62135849A patent/JPS63300006A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6236212A (en) * | 1985-08-05 | 1987-02-17 | Taiyo Tekko Kk | Conveying device |
| JPS6293112A (en) * | 1985-10-18 | 1987-04-28 | Kazuo Kimata | Conveying device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63300006A (en) | 1988-12-07 |
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