JPH0538647A - Suction table - Google Patents
Suction tableInfo
- Publication number
- JPH0538647A JPH0538647A JP22815491A JP22815491A JPH0538647A JP H0538647 A JPH0538647 A JP H0538647A JP 22815491 A JP22815491 A JP 22815491A JP 22815491 A JP22815491 A JP 22815491A JP H0538647 A JPH0538647 A JP H0538647A
- Authority
- JP
- Japan
- Prior art keywords
- suction
- workpiece
- spring
- suction table
- sphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jigs For Machine Tools (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は，被加工物を吸引固定す
る吸着テーブルに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction table for fixing a workpiece by suction.
【０００２】[0002]
【従来の技術】一般に加工機械で被加工物の加工を行う
場合，被加工物をテーブル上に固定する方法として被加
工物を真空吸引により固定する方法がよく知られてい
る。従来被加工物吸着方法として，加工すべき被加工物
の大きさや形状に合せて専用の吸着用治具を作製し，テ
ーブル上に吸着用治具をセットし，吸引ポンプに接続す
ることにより，この吸引ポンプの吸引力により，吸着治
具上に載置された被加工物を真空吸引により固定して，
被加工物の加工を行っている。その他被加工物が吸着テ
ーブルに接している部分以外の吸引孔を人為的にマスキ
ングし，テーブルと接続された吸引ポンプ吸引ポンプに
よる吸引力により，吸着テーブル上に載置された被加工
物を真空吸引により固定して，被加工物の加工を行って
いるのが実情である。2. Description of the Related Art Generally, when a workpiece is processed by a processing machine, a method of fixing the workpiece by vacuum suction is well known as a method of fixing the workpiece on a table. As a conventional work piece suction method, a dedicated suction jig is manufactured according to the size and shape of the work piece to be processed, and the suction jig is set on the table and connected to the suction pump. By the suction force of this suction pump, the workpiece placed on the suction jig is fixed by vacuum suction,
Processing the work piece. Other than the part where the work piece is in contact with the suction table, the suction holes are artificially masked, and the work piece placed on the suction table is vacuumed by the suction force of the suction pump connected to the table. The reality is that the workpiece is processed by fixing it by suction.
【０００３】[0003]
【発明の解決しようとする課題】従来の加工機械におけ
る被加工物の吸着手段として，加工機械による被加工物
の加工に対して，ロット加工が終了するたびに，被加工
物の大きさや形状に合せた専用の吸着治具を作製しなけ
ればならなかった。そのため，大きさや形状の違った吸
着治具が現場に溜まり場所を専有することと新製品の加
工のたびに吸着治具を作製する必要が生じるため問題点
となっていた。吸引固定の確実性を高めるために，ある
先行技術では，厚さ方向に多数の吸引孔をあけた基板を
吸着テーブルの真空室上に固定し，吸引孔のうち吸引力
を必要としない部分の吸引孔には閉じ蓋を嵌合して閉
じ，吸引力を必要とする部分の吸引孔上に被加工物を載
置して吸引固定することを特徴とする吸着テーブルであ
る。このような先行技術の問題点は，被加工物を載置し
て吸引固定する場合に吸引力を必要としない部分の吸引
孔には人為的に閉じ蓋を嵌合して閉じる必要があるその
ため加工機械の被加工物のサイズが変更したり被加工物
を載置して吸引固定する場所が変更するたびに人為的に
閉じ蓋を嵌合して閉じる必要がおこるため前後の生産ラ
インが自動化されても旧来の吸着テーブルが自動化され
てないため省力化のネックとなったり，サーボモーター
とコンピューターの連動による吸着機構などもあるが，
しかしあまりにも構造が複雑となりコストも高いためて
産業として使用するには解決すべき課題があった。As a means for adsorbing a work piece in a conventional processing machine, the size and shape of the work piece is changed every time lot processing is completed, with respect to the processing of the work piece by the processing machine. It was necessary to produce a dedicated suction jig that was combined. Therefore, the suction jigs with different sizes and shapes are occupied at the site, and it is necessary to manufacture the suction jig every time a new product is processed, which is a problem. In order to increase the reliability of suction fixation, in a certain prior art, a substrate having a large number of suction holes in the thickness direction is fixed on a vacuum chamber of a suction table, and a portion of the suction holes that does not require suction force is fixed. The suction table is characterized in that a closing lid is fitted and closed in the suction hole, and a workpiece is placed on the suction hole of a portion requiring suction force and suction-fixed. Such a problem of the prior art is that when a work piece is placed and suction-fixed, it is necessary to artificially fit and close a suction hole in a portion that does not require suction force. The front and rear production lines are automated because it is necessary to artificially close and close the lid every time the size of the work piece of the processing machine changes or the place where the work piece is placed and fixed by suction changes. Even if it is done, the old suction table is not automated, which is a bottleneck for labor saving, and there is a suction mechanism by interlocking the servo motor and the computer.
However, the structure was too complicated and the cost was high, so there was a problem to be solved for industrial use.
【０００４】[0004]
【課題を解決するための手段】前記問題点を解決するた
めのこの発明における手段は、図４に示すように吸着テ
ーブル６の厚さ方向に複数の吸引孔７を形成し，吸引孔
７の下方に連設し真空室９を形成し，真空室９の下端に
連設し絞りＢを形成し，絞りＢの下端に連設し筒Ｃを形
成し，筒Ｃ内にスプリング１０を設け，筒Ｃ下部にスプ
リング受け１１を設け，スプリング１０の上端に球体１
２を設け，筒Ｃ下端に吸引口１４を形成し，吸引孔７へ
の空気の流入の有無によりスプリング１０と球体１２が
連結屈伸し，球体１２と絞りＢの面と接離する弁座１３
を形成することから構成されている。次に図５に示すよ
うに上記吸着テーブル６の厚さ方向に複数の吸引孔７の
外周に対し，弾性体８を設けたことから構成されてい
る。次に図６に示すように上記吸着テーブル６の上に載
置し，これと同位置に吸引孔７をあけた非金属板１５を
設けたことから構成されている。次に図７に示すように
吸着テーブル６の厚さ方向に複数の吸引孔７を設け，吸
引孔７の下方に連設し，上下両端部に段部Ｄを持つ筒状
を設け，段部Ｄのうち上部に弁座１３を設け，筒Ｃ内に
真空室９を設け，もう一方の下部の段部Ｄにスプリング
受け１１を設け，スプリング受け１１の下方に吸引口１
４を設け，スプリング受け１１と連結し上方にスプリン
グ１０と球体１２を設けたことから構成されている。As shown in FIG. 4, a means for solving the above-mentioned problems is to form a plurality of suction holes 7 in the thickness direction of a suction table 6 as shown in FIG. A vacuum chamber 9 is formed continuously below, a lower end of the vacuum chamber 9 is formed continuously to form a diaphragm B, a lower end of the diaphragm B is continuously formed to form a cylinder C, and a spring 10 is provided in the cylinder C. A spring receiver 11 is provided at the bottom of the cylinder C, and a sphere 1 is provided at the upper end of the spring 10.
2, the suction port 14 is formed at the lower end of the cylinder C, and the spring 10 and the sphere 12 are connected and stretched by the presence or absence of air flowing into the suction hole 7, and the valve seat 13 is brought into contact with and separated from the sphere 12 and the surface of the throttle B.
Is formed. Next, as shown in FIG. 5, an elastic body 8 is provided on the outer circumference of a plurality of suction holes 7 in the thickness direction of the suction table 6. Next, as shown in FIG. 6, the non-metal plate 15 is placed on the suction table 6 and a non-metal plate 15 having a suction hole 7 is provided at the same position as the suction table 6. Next, as shown in FIG. 7, a plurality of suction holes 7 are provided in the thickness direction of the suction table 6, are continuously provided below the suction holes 7, and a cylindrical shape having step portions D at both upper and lower ends is provided. A valve seat 13 is provided in the upper part of D, a vacuum chamber 9 is provided in the cylinder C, a spring receiver 11 is provided in the step D of the other lower part, and the suction port 1 is provided below the spring receiver 11.
4 is provided and is connected to the spring receiver 11, and the spring 10 and the sphere 12 are provided above.
【０００５】[0005]
【作用】次に，上記構成よりなるこの実施例の吸着テー
ブルの作用について説明する。図４の左側の図は，吸引
孔７が被加工物Ａにより塞がれていないために吸引口１
４からの吸引力により球体１２がスプリング１０を押し
下げて弁座１３に接して吸引孔７からの外部の空気の流
れを止める。図４の右側の図は，吸引孔７が被加工物Ａ
により塞がれるため吸引口１４からの吸引力の作用に対
して真空室９が真空状態となるため球体１２はスプリン
グ１０を押し下げることができないため吸引孔７に載置
されている被加工物Ａを吸引固定できる。図７の左側の
図は，吸引孔７が被加工物Ａにより載置されていないた
めにスプリング１０の力が吸引口１４からの吸引力に対
して勝ため，スプリング１０が球体１２を押上げている
ため球体１２の一部が弁座１３に接するために吸引孔７
への外部の空気の流れを止める。図７の右半分の図は，
被加工物Ａ重さにより球体１２が押し下げられて球体１
２と弁座１３が離れるため，吸引口１４からの吸引力が
真空室９を真空にして載置されている被加工物Ａを吸引
固定できる。Next, the operation of the suction table of this embodiment having the above construction will be described. The drawing on the left side of FIG. 4 shows that the suction port 7 is not blocked by the workpiece A, and thus the suction port 1
The spherical body 12 pushes down the spring 10 by the suction force from 4, and contacts the valve seat 13 to stop the flow of external air from the suction hole 7. In the drawing on the right side of FIG. 4, the suction hole 7 is the work piece A.
Since the vacuum chamber 9 is in a vacuum state against the action of the suction force from the suction port 14 because it is blocked by the sphere 12, the spherical body 12 cannot push down the spring 10 and thus the workpiece A placed in the suction hole 7 Can be fixed by suction. In the drawing on the left side of FIG. 7, since the suction hole 7 is not placed by the workpiece A, the force of the spring 10 overcomes the suction force from the suction port 14, so the spring 10 pushes up the sphere 12. Therefore, a part of the sphere 12 comes into contact with the valve seat 13 so that the suction hole 7
Stop the flow of external air to. The right half of Figure 7 is
Sphere 12 is pushed down by the weight of work piece A and sphere 1
Since 2 and the valve seat 13 are separated from each other, the suction force from the suction port 14 can vacuum the vacuum chamber 9 to fix the workpiece A placed thereon.
【０００６】[0006]
【実施例】以下に本発明の実施例を図面に基づいて説明
する。図１は木工用ルータの概略的な正面図，図２は，
木工用ルータの吸着テーブルの平面図，図３は同側面図
である。図４〜図７は，吸着テーブルの拡大動作図。図
８は，被加工物底面が非連続面での吸着テーブルの拡大
動作図。図９は，被加工物底面側から見て中央部分が凹
の形状をした被加工物が吸着テーブルに載置された平面
図。図１０は，被加工物底面側から見た非連続凹形状を
した被加工物が吸着テーブルに載置された平面図。図１
において、１は木工用ルータ，２は木工用ルータ１のヘ
ッドで，このヘッド２はモータ３で回転駆動される主軸
スピンドル４を備え，この主軸スピンドル４の下端に切
削刃５が着脱可能に取付けられている。なお，上記ヘッ
ド２はＮＣ制御により昇降駆動されると共に，平面Ｘ−
Ｙ方向に駆動されるようになっている。この木工用ルー
タ１は，被加工物載置用に吸着テーブル６を備えてい
る。この吸着テーブル６上には，図２に示すように複数
の吸引孔７が縦横に配列されている。図３は，図２の吸
着テーブル６の概略断面図である。図４の左側は，吸着
テーブル６の拡大動作図で吸引口１４から吸引されると
球体１２は，吸引力により弁座１３と接し空気の流入の
止められるため吸引孔７からの空気の流入は止められ
る。右側側の球体１２は吸引孔７の上に被加工物Ａが載
置されることにより吸引孔７からの空気の流入は無いた
め真空室９が真空となり球体１２はスプリング受け１１
とスプリング１０の弾性により弁座１３に接することが
なく被加工物Ａに対して吸引力を働かせる。この場合に
は，吸着テーブル６の面と被加工物Ａとは密着状態であ
るため空気が外部から吸着テーブル６の面と被加工物Ａ
の面には隙間がないということから吸引固定される。図
５の吸着テーブル６の拡大動作図の動作は図４と同じで
あるが被加工物の底面が平滑でない材質であるものや表
面をキズつけることが困るものなどに対し吸引固定が使
用される。図６の吸着テーブル６の拡大動作図の動作は
図４と同じであるが切削刃物などが直接テーブルを破損
することを未然に防ぐために弾性体８を吸着テーブル６
の面の上に設けて被加工物Ａの底面が平滑でない材質の
ものに対する吸着性能を上げたり，切削加工による吸着
テーブル６の破損を防ぐために設けられた。図７の右側
は，吸着テーブル６の拡大動作図の動作は、吸引孔７の
上に被加工物Ａを載置すると被加工物Ａの重さにより球
体１２を押し下げて吸引固定し，左測の図の場合には，
被加工物Ａが載置されない吸引孔７に対してはスプリン
グ１０が球体１２を押し上げているため弁座１３と球体
１２の一部が接して外部から吸引孔７への空気の流入が
止められる。図８の吸着テーブル６の拡大動作図の動作
は吸引固定する被加工物Ａの底面測からみて非連続凹形
状の場合である。図９の吸着テーブル６に載置された被
加工物Ａの中央側が底面側から見て凹である形状で使用
した場合である。図１０の吸着テーブル６に載置された
被加工物Ａ底面側から見て非連続凹形状で使用した場合
である。なおこの発明は前記実施例の構成に限定される
ものではなく，空気室９，球体１２，弁座１３の形状を
任意に変更しても同じ効果があるなど，この発明の趣旨
を逸脱しない範囲内で各部の構成を任意に変更して具体
化することも可能である。Embodiments of the present invention will be described below with reference to the drawings. Fig. 1 is a schematic front view of a woodworking router, and Fig. 2 is
FIG. 3 is a plan view of the suction table of the woodworking router, and FIG. 3 is a side view of the same. 4 to 7 are enlarged operation diagrams of the suction table. FIG. 8 is an enlarged operation diagram of the suction table when the bottom surface of the workpiece is a discontinuous surface. FIG. 9 is a plan view in which a workpiece having a concave central portion when viewed from the bottom surface side of the workpiece is placed on the suction table. FIG. 10 is a plan view in which a workpiece having a discontinuous concave shape as viewed from the bottom surface side of the workpiece is placed on the suction table. Figure 1
In FIG. 1, 1 is a router for woodworking, 2 is a head of the router for woodworking, and this head 2 is provided with a spindle spindle 4 which is rotationally driven by a motor 3, and a cutting blade 5 is detachably attached to the lower end of the spindle spindle 4. Has been. The head 2 is driven up and down by NC control, and the plane X-
It is designed to be driven in the Y direction. This woodworking router 1 is equipped with a suction table 6 for placing a workpiece. On the suction table 6, a plurality of suction holes 7 are arranged vertically and horizontally as shown in FIG. FIG. 3 is a schematic sectional view of the suction table 6 of FIG. The left side of FIG. 4 is an enlarged operation diagram of the suction table 6, and when sucked from the suction port 14, the sphere 12 comes into contact with the valve seat 13 by suction force to stop the inflow of air, so that the inflow of air from the suction hole 7 does not occur. Can be stopped. Since the workpiece A is placed on the suction hole 7 of the sphere 12 on the right side, air does not flow from the suction hole 7, so that the vacuum chamber 9 becomes a vacuum and the sphere 12 receives the spring receiver 11
With the elasticity of the spring 10, a suction force is exerted on the workpiece A without coming into contact with the valve seat 13. In this case, since the surface of the suction table 6 and the workpiece A are in close contact with each other, air is externally applied to the surface of the suction table 6 and the workpiece A.
Since there is no gap on the surface, it is fixed by suction. The operation of the suction table 6 of FIG. 5 is the same as that of FIG. 4, but the suction fixing is used for a workpiece having a non-smooth bottom surface or having a scratched surface. .. The operation of the suction table 6 of FIG. 6 is the same as that of FIG. 4, but the elastic body 8 is attached to the suction table 6 in order to prevent the cutting blade or the like from directly damaging the table.
Is provided on the surface of the workpiece A to improve the suction performance for the material of which the bottom surface of the workpiece A is not smooth, and to prevent the suction table 6 from being damaged by cutting. On the right side of FIG. 7, the operation of the enlarged operation diagram of the suction table 6 is as follows. When the work piece A is placed on the suction hole 7, the weight of the work piece A pushes down the sphere 12 to fix it by suction. In the case of
Since the spring 10 pushes up the sphere 12 with respect to the suction hole 7 in which the workpiece A is not placed, the valve seat 13 and a part of the sphere 12 come into contact with each other to stop the inflow of air from the outside into the suction hole 7. .. The operation in the enlarged operation diagram of the suction table 6 in FIG. 8 is a case where the workpiece A to be fixed by suction has a discontinuous concave shape when viewed from the bottom surface measurement. This is a case where the workpiece A placed on the suction table 6 in FIG. 9 is used in a shape in which the center side is concave when viewed from the bottom side. This is the case where the workpiece A placed on the suction table 6 in FIG. 10 is used in a discontinuous concave shape when viewed from the bottom side of the workpiece A. Note that the present invention is not limited to the configuration of the above-described embodiment, and the same effect can be obtained even if the shapes of the air chamber 9, the sphere 12, and the valve seat 13 are arbitrarily changed. It is also possible to embody by arbitrarily changing the configuration of each unit within.
【０００７】[0007]
【発明の効果】以上のように，この発明によれば，吸着
テーブルの吸引孔下方に連設して絞り，真空室，スプリ
ング受けを設け，スプリング受け上部にスプリングを設
け，スプリングと連動し球体を設け，絞りと球体との接
離による弁座から構成ともうひとつは，吸着テーブルの
吸引孔下方に連設して上下両端部の筒内に真空室と段部
を持ち，段部のうち上部に弁座を設け，下部の段部にス
プリング受けを設け，スプリング受け下方に吸引口を設
け，スプリング受けと連結し上方にスプリングと球体を
設けたことから構成したため，つぎの効果が生ずる。 （１）吸着テーブルに被加工物を載置すると同時に吸引
部分と非吸引部分を自動的に設けるため，主として被加
工物の形状に応じて吸引部分と非吸引部分を簡単に確実
に得られる。このため，従来の捨て板のように被加工物
の形状がかわるたびに，これに対応するものを準備しな
くても，一枚の吸着テーブルで各種形状の被加工物に対
応でき，きわめて効果的でコストダウンが図れる。 （２）従来の捨て板を使用しないで代わりに球体と弁座
とスプリングを使用することで確実に被加工物と吸引孔
が載置していない部分の吸引孔に対し確実に吸引孔への
空気の流入を防ぐため大型のファンを使用しないで済む
ため電力消費量の軽減が可能となり経費の節減と騒音の
低減もあわせて可能とする。 （３）ガラスやプラスチックなどの木工用の用途以外の
被加工物に対してもキズにせず簡単に確実に固定するこ
とを可能とした。 （４）吸着テーブルの同一平面上に載置する被加工物を
底面側からみて中央部などが非連続面の形状や中央部が
凹形状しているなどに対しても吸着テーブル上にあれば
どこの場所に被加工物を載置しても確実に簡単に固定が
可能である。 （５）被加工物の厚さとか材質強度の違いがあり吸着固
定が困難な被加工物に対しても吸着固定を可能とした。As described above, according to the present invention, a diaphragm, a vacuum chamber, and a spring receiver are continuously provided below the suction hole of the suction table, and a spring is provided above the spring receiver. And a valve seat by contacting and separating the throttle and the sphere, and the other is that it is connected to the lower part of the suction hole of the suction table and has a vacuum chamber and a step inside the cylinder at both upper and lower ends. Since the valve seat is provided on the upper part, the spring receiver is provided on the lower step part, the suction port is provided on the lower part of the spring receiver, and the spring and the sphere are provided on the upper part in connection with the spring receiver, the following effects are brought about. (1) Since the workpiece is placed on the suction table and the suction portion and the non-suction portion are automatically provided at the same time, the suction portion and the non-suction portion can be easily and surely obtained mainly according to the shape of the workpiece. For this reason, each time the shape of the work piece changes like a conventional waste plate, it is possible to handle work pieces of various shapes with a single suction table without having to prepare a corresponding piece. And cost reduction can be achieved. (2) By using a spherical body, a valve seat, and a spring instead of using a conventional discarding plate, the workpiece and the suction hole of the portion where the suction hole is not mounted are surely connected to the suction hole. Since a large fan is not used to prevent the inflow of air, it is possible to reduce the amount of power consumption, thereby reducing costs and noise. (3) It is possible to easily and securely fix workpieces such as glass and plastic other than woodworking applications without causing scratches. (4) If the workpiece placed on the same plane of the suction table is viewed from the bottom side and the central portion has a discontinuous surface shape or the central portion has a concave shape No matter where the work piece is placed, it can be securely and easily fixed. (5) Adsorption can be fixed even on a workpiece that is difficult to adsorb and fix due to differences in the thickness and material strength of the object.
【図１】木工用ＮＣルーターを示した正面図である。FIG. 1 is a front view showing an NC router for woodworking.
【図２】木工用ＮＣルーターの吸着テーブルを示した平
面図である。FIG. 2 is a plan view showing an adsorption table of an NC router for woodworking.
【図３】木工用ＮＣルーターの吸着テーブル示した同断
面図である。FIG. 3 is a sectional view showing an adsorption table of an NC router for woodworking.
【図４】本発明の効果を示した説明図である。FIG. 4 is an explanatory diagram showing the effect of the present invention.
【図５】本発明の効果を示した説明図である。FIG. 5 is an explanatory diagram showing the effect of the present invention.
【図６】本発明の効果を示した説明図である。FIG. 6 is an explanatory diagram showing the effect of the present invention.
【図７】本発明の効果を示した説明図である。FIG. 7 is an explanatory diagram showing an effect of the present invention.
【図８】本発明の効果を示した説明図である。FIG. 8 is an explanatory diagram showing an effect of the present invention.
【図９】図８の効果を平面図として示した説明図であ
る。FIG. 9 is an explanatory view showing the effect of FIG. 8 as a plan view.
【図１０】図８の効果を平面図として示した説明図であ
る。FIG. 10 is an explanatory view showing the effect of FIG. 8 as a plan view.
１ 木工用ルータ ２ ヘッド ３ モータ ４ 主軸スピンドル ５ 切削刃 ６ 吸着テーブル ７ 吸引孔 ８ 弾性体 ９ 真空室 １０ スプリング １１ スプリング受け １２ 球体 １３ 弁座 １４ 吸引口 １５ 非金属板 Ａ 被加工物 Ｂ 絞り Ｃ 筒 Ｄ 段部 1 Router for Woodworking 2 Head 3 Motor 4 Spindle Spindle 5 Cutting Blade 6 Suction Table 7 Suction Hole 8 Elastic Body 9 Vacuum Chamber 10 Spring 11 Spring Receiver 12 Sphere 13 Valve Seat 14 Suction Port 15 Non-Metal Plate A Workpiece B Aperture C Cylinder D step
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成４年３月３日[Submission date] March 3, 1992
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】特許請求の範囲[Name of item to be amended] Claims
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【特許請求の範囲】[Claims]
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００１[Correction target item name] 0001
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００１】 本発明は、被加工物を吸引固定する吸着
テーブルに関するものである。[0001] The present invention relates to a suction table for sucking fixing the workpiece.
【手続補正３】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００２[Name of item to be corrected] 0002
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００２】 一般に加工機械で被加工物の加工を行う
場合、被加工物をテーブル上に固定する方法として被加
工物を真空吸引により固定する方法がよく知られてい
る。従来被加工物吸着方法として、加工すべき被加工物
の大きさや形状に合わせて専用の吸着用治具を作製し、
テーブル上に吸着用治具をセットし、吸引ポンプに接続
することにより、この吸引ポンプの吸引力により、吸着
治具上に載置された被加工物を真空吸引により固定し
て、被加工物の加工を行っている。その他被加工物が吸
着テーブルに接している部分以外の吸引孔を人為的にマ
スキングし、テーブルと接続された吸引ポンプによる吸
引力により、吸着テーブル上に載置された被加工物を真
空吸引により固定して、被加工物の加工を行っているの
が実情である。[0002] Generally the case of processing a workpiece in the processing machine, it is well known how to fix the vacuum suction of the workpiece as a method for fixing a workpiece on the table. As a conventional work piece suction method , a dedicated suction jig is manufactured according to the size and shape of the work piece to be processed .
By setting the suction jig on the table and connecting it to the suction pump, the suction force of this suction pump fixes the workpiece placed on the suction jig by vacuum suction , and the workpiece is fixed. Is being processed. Other workpiece artificially mask the suction holes other than the portion in contact with the suction table, the suction <br/> attraction by the suction pump connected to the table, the workpiece placed on the suction table fixed by vacuum suction to a reality is doing machining of a workpiece.
【手続補正４】[Procedure amendment 4]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００３[Name of item to be corrected] 0003
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００３】 従来の加工機械における被加工物の吸着
手段として、加工機械による被加工物の加工に対して、
ロット加工が終了するたびに、被加工物の大きさや形状
に合わせた専用の吸着治具を作製しなければならなかっ
た。そのため、大きさや形状の違った吸着治具が現場に
溜まり場所を専有することと新製品の加工のたびに吸着
治具を作製する必要が生じるため問題点となっていた。
吸引固定の確実性を高めるために、ある先行技術では、
厚さ方向に多数の吸引孔をあけた基板を吸着テーブルの
真空室上に固定し、吸引孔のうち吸引力を必要としない
部分の吸引孔には閉じ蓋を嵌合して閉じ、吸引力を必要
とする部分の吸引孔上に被加工物を載置して吸引固定す
ることを特徴とする吸着テーブルである。このような先
行技術の問題点は、被加工物を載置して吸引固定する場
合に吸引力を必要としない部分の吸引孔には人為的に閉
じ蓋を嵌合して閉じる必要がある。そのため加工機械の
被加工物のサイズが変更したり被加工物を載置して吸引
固定する場所が変更するたびに人為的に閉じ蓋を嵌合し
て閉じる必要がおこるため前後の生産ラインが自動化さ
れても旧来の吸着テーブルが自動化されてないため省力
化のネックとなっている。その他サーボモーターとコン
ピューターの連動による吸着機構などもあるが、しかし
あまりにも構造が複雑となりコストも高いために産業と
して使用するには解決すべき課題があった。As a means for adsorbing a work piece in a conventional processing machine, for processing the work piece by the processing machine ,
Each time the lot processing is ended, had to produce a suction jig dedicated to suit the size and shape of the workpiece. Therefore , the suction jigs having different sizes and shapes are occupied at the site, and it is necessary to manufacture the suction jig every time a new product is processed, which is a problem.
In order to increase the certainty of suction fixation , in one prior art ,
The substrate spaced a large number of suction holes in the thickness direction is fixed on the vacuum chamber of the suction table, closed fitted closed lid to the suction hole portions that does not require the suction force of the suction holes, the suction force The suction table is characterized in that a workpiece is placed on a suction hole of a portion requiring the suction and fixed by suction. The problems of such prior art, it is necessary to close fitted artificially closed lid to the suction hole portions that does not require the suction force when the suction fixing placing the workpiece. Therefore, every time the size of the work piece of the processing machine is changed or the place where the work piece is placed and fixed by suction is changed, it is necessary to artificially close the lid by fitting the lid, so that the front and rear production lines are Even if it is automated, the old suction table is not automated, which is a bottleneck for labor saving . There is also such other servo motors and computer suction mechanism by interlocking, but for use as an industrial for too structure is higher cost becomes complicated a problem to be solved.
【手続補正５】[Procedure Amendment 5]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００４[Correction target item name] 0004
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００４】 前記問題点を解決するためのこの発明に
おける手段は、図４に示すように吸着テーブル６の厚さ
方向に複数の吸引孔７を設け、吸引孔７の下方に連設し
真空室９を設け、真空室９の下端に連設し絞りＢを設
け、絞りＢの下端に連設し筒Ｃを設け、筒Ｃ内にスプリ
ング１０を設け、筒Ｃ下部にスプリング受け１１を設
け、スプリング１０の上端に弁１２を設け、筒Ｃ下端に
吸引口１４を設け、吸引孔７への空気の流入の有無によ
りスプリング１０と弁１２が連結屈伸し、弁１２と絞り
Ｂの面と接離する弁座１３を設けることから構成されて
いる。次に図５に示すように上記吸着テーブル６の厚さ
方向に複数の吸引孔７の外周に対し、弾性体８を設ける
ことから構成されている。次に図６に示すように上記吸
着テーブル６上に載置し、これと同位置に吸引孔７をあ
けた非金属板１５を設けることから構成されている。次
に図７に示すように吸着テーブル６の厚さ方向に複数の
吸引孔７を設け、吸引孔７の下方に連設し、上下両端部
に段部Ｄを持つ筒を設け、段部Ｄのうち上部に弁座１３
を設け、筒Ｃ内に真空室９を設け、もう一方の下部の段
部Ｄにスプリング受け１１を設け、スプリング受け１１
の下方に吸引口１４を設け、スプリング受け１１と連結
し上方にスプリング１０と弁１２を設けることから構成
されている。[0004] means in the present invention for solving the problem, a plurality of suction holes 7 in the thickness direction of the suction table 6 as shown in FIG. 4 provided contiguously to the vacuum chamber below the suction holes 7 9 is provided, and a diaphragm B is provided continuously at the lower end of the vacuum chamber 9.
Only the aperture bottom provided contiguously to tube C to the B, and a spring 10 provided in the cylinder C, the provided spring receiver 11 in the cylinder C lower, the valve 12 provided at the upper end of the spring 10, the suction port to the cylinder C bottom 14 is provided, and the spring 10 and the valve 12 are connected and stretched by the presence or absence of the inflow of air into the suction hole 7, and the valve seat 13 is provided which comes in contact with and separates from the valve 12 and the surface of the throttle B. Next, as shown in FIG. 5 , elastic bodies 8 are provided on the outer circumference of the plurality of suction holes 7 in the thickness direction of the suction table 6.
It is made up of things . Next, as shown in FIG. 6, the suction table 6 is placed on the suction table 6, and a non-metal plate 15 having suction holes 7 is provided at the same position as the suction table 6. Then a plurality of suction holes 7 in the thickness direction of the suction table 6 as shown in FIG. 7 is provided, and continuously provided below the suction holes 7, provided with a cylinder having a stepped portion D in upper and lower end portions, stepped portions D Valve seat 13 on top of
The provided vacuum chamber 9 provided in the cylinder C, and the spring receiving 11 provided in the stepped portion D of the other lower, spring receiving 11
Of the suction port 14 provided below, and a providing a spring 10 and a valve 12 upwardly connected to the spring receiver 11.
【手続補正６】[Procedure Amendment 6]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００５[Correction target item name] 0005
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００５】 次に、上記構成よりなるこの実施例の吸
着テーブルの作用について説明する。図４の左側の図
は、吸引孔７が被加工物Ａにより塞がれていないために
吸引口１４からの吸引力により弁１２がスプリング１０
を押し下げて弁座１３に接して吸引孔７からの外部の空
気の流れを止める。図４の右側の図は、吸引孔７が被加
工物Ａにより塞がれるため吸引口１４からの吸引力の作
用に対して真空室９が真空状態となるため弁１２はスプ
リング１０を押し下げることができないため吸引孔７に
載置されている被加工物Ａを吸引固定できる。図７の左
側の図は、吸引孔７が被加工物Ａにより載置されていな
いためにスプリング１０の力が吸引口１４からの吸引力
に対して勝つため、スプリング１０が弁１２を押し上げ
ているため弁１２の一部が弁座１３に接するために吸引
孔７への外部の空気の流れを止める。図７の右側の図
は、被加工物Ａの自重により弁１２が押し下げられて弁
１２と弁座１３が離れるため、吸引口１４からの吸引力
が真空室９を真空にして載置されている被加工物Ａを吸
引固定できる。Next , the operation of the suction table of this embodiment having the above structure will be described. In the drawing on the left side of FIG. 4, since the suction hole 7 is not blocked by the work piece A, the valve 12 moves the spring 10 by the suction force from the suction port 14.
Is pressed down to come into contact with the valve seat 13 to stop the flow of external air from the suction hole 7. In the drawing on the right side of FIG. 4, since the suction hole 7 is closed by the workpiece A, the vacuum chamber 9 is in a vacuum state against the action of the suction force from the suction port 14, so the valve 12 pushes down the spring 10. Therefore, the work A placed on the suction hole 7 can be fixed by suction. In the drawing on the left side of FIG. 7, since the suction hole 7 is not placed by the workpiece A, the force of the spring 10 overcomes the suction force from the suction port 14, so the spring 10 pushes up the valve 12.
Part of the valve 12 for that stops the flow of external air to the suction holes 7 in order to contact the valve seat 13. Right side of FIG. 7, since the workpiece valve 12 and the valve seat 13 by the valve 12 is pushed down by the weight of A is separated, the suction force from the suction port 14 is placed in the vacuum chamber 9 to a vacuum The workpiece A present can be fixed by suction.
【手続補正７】[Procedure Amendment 7]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００６[Correction target item name] 0006
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００６】 以下に本発明の実施例を図面に基づいて
説明する。図１は木工用ルータの概略的な正面図、図２
は、木工用ルータの吸着テーブルの平面図、図３は同側
面図である。図４〜図７は、吸着テーブルの拡大動作
図。図８は、被加工物底面が非連続面での吸着テーブル
の拡大動作図。図９は、被加工物底面側から見て中央部
分が凹の形状をした被加工物が吸着テーブルに載置され
た平面図。図１０は、被加工物底面側から見た非連続面
凹形状をした被加工物が吸着テーブルに載置された平面
図。図１において、１は木工用ルータ、２は木工用ルー
タ１のヘッドで、このヘッド２はモータ３で回転駆動さ
れる主軸スピンドル４を備え、この主軸スピンドル４の
下端に切削刃５が着脱可能に取付けられている。なお、
上記ヘッド２はＮＣ制御により昇降駆動されると共に、
平面Ｘ−Ｙ方向に駆動されるようになっている。この木
工用ルータ１は、被加工物載置用に吸着テーブル６を備
えている。この吸着テーブル６上には、図２に示すよう
に複数の吸引孔７が縦横に配列されている。図３は、図
２の吸着テーブル６の概略断面図である。図４の左側
は、吸着テーブル６の拡大動作図で吸引口１４から吸引
されると弁１２は、吸引力により弁座１３と接し空気の
流入が止められるため吸引孔７からの空気の流入は止め
られる。右側の弁１２は吸引孔７の上に被加工物Ａが載
置されることにより吸引孔７からの空気の流入は無いた
め真空室９が真空となり弁１２はスプリング受け１１と
スプリング１０の弾性により弁座１３に接することがな
く被加工物Ａに対して吸引力を働かせる。この場合に
は、吸着テーブル６の面と被加工物Ａとは密着状態であ
るため空気が外部から吸着テーブル６の面と被加工物Ａ
の面には隙間がないということから吸引固定される。図
５の吸着テーブル６の拡大動作図の動作は図４と同じで
あるが被加工物の底面が平滑でない材質であるものや表
面をキズつけることが困るものなどに対し吸引固定が使
用される。図６の吸着テーブル６の拡大動作図の動作は
図４と同じであるが切削刃物などが直接テーブルを破損
することを未然に防ぐために弾性体８を吸着テーブル６
の面の上に設けて被加工物Ａの底面が平滑でない材質の
ものに対する吸着性能を上げたり、切削加工による吸着
テーブル６の破損を防ぐために設けられた。図７の右側
は、吸着テーブル６の拡大動作図の動作は、吸引孔７の
上に被加工物Ａを載置すると被加工物Ａの自重により弁
１２を押し下げて吸引固定し、左側の図の場合は、被加
工物Ａが載置されない吸引孔７に対してはスプリング１
０が弁１２を押し上げているため弁座１３と弁１２の一
部が接して外部から吸引孔７への空気の流入が止められ
る。図８の吸着テーブル６の拡大動作図の動作は吸引固
定する被加工物Ａの底面側からみて非連続凹形状の場合
である。図９の吸着テーブル６に載置された被加工物Ａ
の中央側が底面側から見て凹である形状で使用した場合
である。図１０の吸着テーブル６に載置された被加工物
Ａ底面側から見て非連続凹形状で使用した場合である。
なおこの発明は前記実施例の構成に限定されるものでな
く、真空室９、弁１２、、弁座１３の形状を任意に変更
しても同じ効果があるなど、この発明の趣旨を逸脱しな
い範囲内で各部の構成を任意に変更して具体化すること
も可能である。Embodiments of the present invention will be described below with reference to the drawings. 1 is a schematic front view of a woodworking router , FIG.
[Fig. 3] is a plan view of a suction table of a woodworking router , and Fig. 3 is a side view of the same. 4 to 7, enlarged operation view of the suction table. FIG. 8 is an enlarged operation diagram of the suction table in which the bottom surface of the workpiece is a discontinuous surface. Figure 9 is a plan view workpieces central portion has a concave shape as viewed from the workpiece bottom is placed on the suction table. Figure 10 is a plan view the workpiece in which the non-continuous surface concave shape as viewed from the workpiece bottom is placed on the suction table. In Figure 1, 1 is wood working router 2 in the head of the wood working router 1, the head 2 is provided with a main spindle 4 which is rotated by the motor 3, the cutting edge 5 at the lower end of the main spindle 4 detachable Installed on. In addition ,
The head 2 is driven up and down by NC control ,
It is adapted to be driven in the plane XY direction. This woodworking router 1 is provided with a suction table 6 for mounting a workpiece. As shown in FIG. 2, a plurality of suction holes 7 are vertically and horizontally arranged on the suction table 6. Figure 3 is a schematic cross-sectional view of a suction table 6 in FIG. Left side of FIG. 4 of which is when the valve 12 sucked from the suction port 14 in the enlarged operation view of the suction table 6, the air in contact with the valve seat 13 by the suction force
Since the inflow is stopped, the inflow of air from the suction hole 7 is stopped. Since the work piece A is placed on the suction hole 7 of the valve 12 on the right side, air does not flow from the suction hole 7 so that the vacuum chamber 9 becomes a vacuum and the valve 12 has elasticity of the spring receiver 11 and the spring 10. By this, the suction force is exerted on the workpiece A without coming into contact with the valve seat 13. In this case, since the surface of the suction table 6 and the workpiece A are in close contact with each other, air is externally applied to the surface of the suction table 6 and the workpiece A.
Since there is no gap on the surface, it is fixed by suction. The operation of the suction table 6 of FIG. 5 is the same as that of FIG. 4, but the suction fixing is used for a workpiece having a non-smooth bottom surface or having a scratched surface. .. The operation of the suction table 6 of FIG. 6 is the same as that of FIG. 4, but the elastic body 8 is attached to the suction table 6 in order to prevent the cutting blade or the like from directly damaging the table.
Raising the suction performance for those materials bottom surface of the workpiece A is provided on the surface is not smooth, were provided to prevent damage to the suction table 6 by cutting. Right side of FIG. 7, the operation of the expansion operation diagram of suction table 6, suction and fixed by pressing down the valve 12 when placing the workpiece A by the weight of the workpiece A on the suction holes 7, the left side Fig. In the case of , the spring 1 is provided for the suction hole 7 in which the workpiece A is not placed.
Since 0 pushes up the valve 12, the valve seat 13 and a part of the valve 12 come into contact with each other, and the inflow of air from the outside into the suction hole 7 is stopped. The operation in the enlarged operation diagram of the suction table 6 in FIG. 8 is a case where the workpiece A to be suction-fixed has a discontinuous concave shape when viewed from the bottom surface side. Workpiece A placed on the suction table 6 in FIG.
This is the case where the center side of is used in a concave shape when viewed from the bottom side. This is the case where the workpiece A placed on the suction table 6 in FIG. 10 is used in a discontinuous concave shape when viewed from the bottom side of the workpiece A.
The present invention is not limited to the configuration of the above embodiment, and the same effect can be obtained even if the shapes of the vacuum chamber 9, the valve 12, and the valve seat 13 are arbitrarily changed without departing from the gist of the present invention. It is also possible to embody by arbitrarily changing the configuration of each part within the range.
【手続補正８】[Procedure Amendment 8]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００７[Correction target item name] 0007
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００７】 以上のように，この発明によれば，吸着
テーブルに吸引孔下方に連設して絞り、真空室、スプリ
ング受けを設け、スプリング受け上部にスプリングを設
け、スプリングと連動し弁を設け、絞りと弁との接離に
よる弁座から構成ともうひとつは、吸着テーブルの吸引
孔下方に連設して上下両端部の筒内に真空室と段部を持
ち、段部のうち上部に弁座を設け、下部の段部にスプリ
ング受けを設け、スプリング受け下方に吸引口を設け、
スプリング受けと連結し上方にスプリングと弁を設けた
ことから構成したため、つぎの効果が生ずる。 （１）吸着テーブルに被加工物を載置すると同時に吸引
部分と非吸引部分を自動的に設けるため、主として被加
工物の形状に応じて吸引部分と非吸引部分を簡単に確実
に得られる。このため、従来の捨て板のように被加工物
の形状がかわるたびに、これに対応するものを準備しな
くても、一枚の吸着テーブルで各種形状の被加工物に対
応でき、きわめて効果的にコストダウンが図れる。 （２）従来の捨て板を使用しないで代わりに弁と弁座と
スプリングを使用することで確実に被加工物と吸引孔が
載置していない部分の吸引孔に対し確実に吸引孔への空
気の流入を防ぎ、大型のファンを使用しないで済むため
に電力消費量の軽減が可能となり経費の節減と騒音の低
減もあわせて可能とする。 （３）ガラスやプラスチックなどの木工用の用途以外の
被加工物に対してもキズにせず簡単に確実に固定するこ
とを可能とした。 （４）吸着テーブルの同一平面上に載置する被加工物を
底面側からみて中央部などが非連続面の形状や中央部が
凹形状しているなどに対しても吸着テーブル上にあれば
どこの場所に被加工物を載置しても確実に簡単に固定が
可能である。 （５）被加工物の厚さとか材質強度の違いがあり吸着固
定が困難な被加工物に対しても吸着固定を可能とした。 （６）磁力の吸着力を使用した加工機械で薄金属板を加
工すると十分な吸着力がないため加工途中で外れたりし
危険であった。この問題に対し確実に固定できる。 （７）磁石の吸着力を使用した加工機械があるが，これ
が大形になると高価となる。 そのためコストダウンが図
れなかったがこの課題を解決した。 （８）被加工物を磁力により固定の場合，被加工物が磁
性体のヒステリシスによる残留磁気のため加工クズなど
が被加工物などに付着し後処理に手数がかかっていたが
解決した。 （９）磁性体の被加工物に対し磁力の影響を受けず，被
加工物に傷を付けないで確実に吸引固定でき，連続的加
工が可能となった。 （１０）被磁性体で加工精度を高く要求される分野の半
導体の加工過程のウェハーの工程では、従来ロウ状で熱
により液体状態の上にウェハーを載置して加工時に外部
に出し加工する。この場合ロウが冷却されて基板とウェ
ハーを密着固定する機能をもっている。この機能のため
ウェハーの加工が終了するともう一度熱をロウにあたえ
て液体状態にして基板がウェハーを剥がすという被加工
物の固定をくりかえすため時間と労力を多く必要として
きた。しかし本発明の吸着テーブルにより上記の工程を
不要にすることができるため大幅なコストダウンが可能
となる。 As described above, according to the present invention, the suction table is continuously provided below the suction holes, the throttle , the vacuum chamber and the spring receiver are provided , the spring is provided above the spring receiver , and the valve is provided in conjunction with the spring. The structure of the valve seat is based on the contact between the throttle and the valve, and the other is that it is connected to the lower part of the suction hole of the adsorption table and has a vacuum chamber and a step inside the cylinder at both upper and lower ends. A valve seat is provided , a spring receiver is provided on the lower step, and a suction port is provided below the spring receiver .
Since consisted providing the spring and the valve upwardly connected to the receiving spring, the effect of the following occurs. (1) for automatically providing to the suction portion and the non-suction portion simultaneously placing the workpiece suction table, it is easily and reliably obtain a suction portion and a non-suction portion according to the shape of mainly the workpiece. Therefore, each time the alternative shape of the workpiece as in the conventional discard plate, without preparing those corresponding thereto, can accommodate workpieces of various shapes in one piece of the suction table, very effective Cost can be reduced. (2) By using a valve , a valve seat and a spring instead of using a conventional discarding plate, the workpiece and the suction hole can be reliably connected to the suction hole in a portion where the suction hole is not placed. Since it prevents the inflow of air and eliminates the need for using a large fan, it is possible to reduce the amount of power consumption, thus reducing costs and noise. (3) It is possible to easily and securely fix workpieces such as glass and plastic other than woodworking applications without causing scratches. (4) If the workpiece placed on the same plane of the suction table is viewed from the bottom side and the central portion has a discontinuous surface shape or the central portion has a concave shape No matter where the work piece is placed, it can be securely and easily fixed. (5) Adsorption can be fixed even on a workpiece that is difficult to adsorb and fix due to differences in the thickness and material strength of the object. (6 ) Add a thin metal plate with a processing machine that uses the attractive force of magnetic force.
There is not enough suction force when working, so it may come off during processing
It was dangerous. It can be fixed reliably against this problem. (7 ) There are processing machines that use the attractive force of magnets.
Becomes large and expensive. Therefore, cost reduction is possible
However, this problem was solved. (8 ) When the workpiece is fixed by magnetic force, the workpiece is magnetic.
Remnant magnetism due to hysteresis of the body causes processing scraps, etc.
Was attached to the work piece and the post-processing was troublesome.
Settled. (9 ) The magnetic work piece is not affected by the magnetic force and
It can be securely suction-fixed without damaging the work piece and can be applied continuously.
It became possible to work. (10) Half of the fields that require high processing accuracy for magnetic materials
In the process of wafers in the process of processing conductors, the conventional wax-like process
The wafer is placed on the liquid state by the
Processing out. In this case the wax is cooled and the substrate and wafer
It has the function of closely fixing the har. Because of this feature
When the wafer processing is completed, heat is given to the wax again.
To be processed into a liquid state and the substrate peels off the wafer
It takes a lot of time and effort to repeat fixing of objects
Came. However, the above-mentioned steps are performed by the adsorption table of the present invention.
Significant cost reduction is possible because it can be eliminated
Becomes
【手続補正９】[Procedure Amendment 9]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】符号の説明[Correction target item name] Explanation of code
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【符号の説明】 １ 木工用ルータ ２ ヘッド ３ モータ ４ 主軸スピンドル ５ 切削刃 ６ 吸着テーブル ７ 吸引孔 ８ 弾性体 ９ 真空室 １０ スプリング １１ スプリング受け １２ 弁 １３ 弁座 １４ 吸引口 １５ 非金属板 Ａ 被加工物 Ｂ 絞り Ｃ 筒 Ｄ 段部[Explanation of Codes] 1 Router for woodworking 2 Head 3 Motor 4 Spindle spindle 5 Cutting blade 6 Suction table 7 Suction hole 8 Elastic body 9 Vacuum chamber 10 Spring 11 Spring receiver 12 Valve 13 Valve seat 14 Suction port 15 Non-metal plate A Cover Workpiece B Drawing C Tube D Step
Claims (4)
を形成し，吸引孔下方に連設し真空室を形成し，真空室
下端に連設し絞りを形成し，絞り下端に連設し筒を形成
し，筒内にスプリングを設け，筒下部にスプリング受け
を設け，スプリング上端に球体を設け，筒下端に吸引口
を形成し，吸引孔への空気の流入の有無によりスプリン
グと球体が連結屈伸し，球体と絞り面と接離する弁座を
形成することから構成された吸着テーブル。1. A plurality of suction holes are formed in the thickness direction of a suction table, a vacuum chamber is formed by connecting the suction holes downwardly, and a vacuum chamber is continuously formed at the lower end of the vacuum chamber. A cylinder is formed, a spring is provided inside the cylinder, a spring receiver is provided at the bottom of the cylinder, a sphere is provided at the top of the spring, a suction port is formed at the bottom of the cylinder, and the spring and the sphere depend on whether air is flowing into the suction hole. Is a suction table constructed by forming a valve seat that bends and expands to form a valve seat that comes in contact with and separates from the sphere and the throttle surface.
対し，弾性体を設けたことから構成された請求項１の吸
着テーブル。2. The suction table according to claim 1, wherein an elastic body is provided on the outer circumference of the suction hole of the suction table according to claim 1.
れと同位置に吸引孔をあけた非金属板を設けたことから
構成された請求項１の吸着テーブル。3. The suction table according to claim 1, wherein the suction table is placed on the suction table according to claim 1, and a non-metal plate having a suction hole is provided at the same position as the suction table.
を設け，吸引孔下方に連設し，上下両端部に段部を持つ
筒状を設け，段部のうち上部に弁座を設け，筒内に真空
室を設け，もう一方の下部の段部にスプリング受けを設
け，スプリング受け下方に吸引口を設け，スプリング受
けと連結し上方にスプリングと球体を設けたことから構
成された吸着テーブル。4. A suction table is provided with a plurality of suction holes in a thickness direction, the suction holes are continuously provided below the suction holes, and a cylindrical shape having step portions at both upper and lower ends is provided, and a valve seat is provided at an upper portion of the step portions. , Adsorption consisting of a vacuum chamber in the cylinder, a spring receiver on the lower step of the other, a suction port below the spring receiver, and a spring and a sphere connected to the spring receiver and above. table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22815491A JPH0538647A (en) | 1991-05-29 | 1991-05-29 | Suction table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22815491A JPH0538647A (en) | 1991-05-29 | 1991-05-29 | Suction table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0538647A true JPH0538647A (en) | 1993-02-19 |
Family
ID=16872075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22815491A Pending JPH0538647A (en) | 1991-05-29 | 1991-05-29 | Suction table |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538647A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09160020A (en) * | 1995-12-14 | 1997-06-20 | Toray Ind Inc | Coating applicator and coating method as well as apparatus for producing color filter and production thereof |
| JP2000126959A (en) * | 1998-10-27 | 2000-05-09 | Tokyo Seimitsu Co Ltd | Chuck table for work piece material |
| KR100453629B1 (en) * | 2002-05-28 | 2004-10-22 | 한국항공우주산업 주식회사 | Apparatus for setting plate |
| JP2011212761A (en) * | 2010-03-31 | 2011-10-27 | Hitachi Via Mechanics Ltd | Fixing device of workpiece |
| JP2018079545A (en) * | 2016-11-17 | 2018-05-24 | 株式会社 動研 | Loading table having adsorption function |
| US11479030B2 (en) | 2018-10-04 | 2022-10-25 | Corning Incorporated | Apparatus for supporting debonding and debonding method using the same |
-
1991
- 1991-05-29 JP JP22815491A patent/JPH0538647A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09160020A (en) * | 1995-12-14 | 1997-06-20 | Toray Ind Inc | Coating applicator and coating method as well as apparatus for producing color filter and production thereof |
| JP2000126959A (en) * | 1998-10-27 | 2000-05-09 | Tokyo Seimitsu Co Ltd | Chuck table for work piece material |
| KR100453629B1 (en) * | 2002-05-28 | 2004-10-22 | 한국항공우주산업 주식회사 | Apparatus for setting plate |
| JP2011212761A (en) * | 2010-03-31 | 2011-10-27 | Hitachi Via Mechanics Ltd | Fixing device of workpiece |
| JP2018079545A (en) * | 2016-11-17 | 2018-05-24 | 株式会社 動研 | Loading table having adsorption function |
| US11479030B2 (en) | 2018-10-04 | 2022-10-25 | Corning Incorporated | Apparatus for supporting debonding and debonding method using the same |
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