JPH053481Y2 - - Google Patents
Info
- Publication number
- JPH053481Y2 JPH053481Y2 JP10635387U JP10635387U JPH053481Y2 JP H053481 Y2 JPH053481 Y2 JP H053481Y2 JP 10635387 U JP10635387 U JP 10635387U JP 10635387 U JP10635387 U JP 10635387U JP H053481 Y2 JPH053481 Y2 JP H053481Y2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- chuck plate
- suction chuck
- hole
- wire rods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011148 porous material Substances 0.000 description 6
- 238000005245 sintering Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000003670 easy-to-clean Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案は、シリコンウエハー、薄膜、その他の
物品を吸着固定したり、吸着搬送するために使用
する吸引チヤツクプレートに関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a suction chuck plate used to suction-fix or suction-transfer silicon wafers, thin films, and other articles.
従来、シリコンウエハー、薄膜、線材、網等の
物品に適当な加工を施す際に該物品を固定する手
段として、或いは該物品を搬送するための手段と
して、該物品（以下、被吸着物という）を吸引保
持する吸引チヤツクプレートが使用されており、
この吸引チヤツクプレートには金属焼結体、セラ
ミツク焼結体等が使用されている。これらの焼結
体は、第４図に断面を示すように、異形粉体１を
焼結したものであり、焼結後、その焼結体の表面
２をフラツトに加工し、被吸着物１０の吸着面と
している。
Conventionally, articles such as silicon wafers, thin films, wires, nets, etc. have been used as means for fixing the articles when they are subjected to appropriate processing, or as means for transporting the articles (hereinafter referred to as objects to be attracted). A suction chuck plate is used to hold the
A metal sintered body, a ceramic sintered body, or the like is used for this suction chuck plate. These sintered bodies, as shown in cross section in FIG. It is used as an adsorption surface.
ところが、従来の吸引チヤツクプレートは空孔
が横方向にも連通しているため、第４図に示すよ
うに吸着面２よりも被吸着物１０が小さい場合に
は、リーク漏れが生じ易く、吸着固定、吸着搬送
等が行えないという問題があつた。また、吸着保
持した被吸着物１０に切断加工を施す場合のよう
に、被吸着物１０に押圧力を作用させた時に、吸
着面に圧縮変形が生じ易いという問題もあつた。
更に、従来のものは空孔が複雑な形状であるの
で、ゴミやほこりが詰まり易く、また洗浄が困難
であるという問題もあつた。
However, since the holes in the conventional suction chuck plate are connected in the lateral direction, leakage is likely to occur when the object 10 to be sucked is smaller than the suction surface 2 as shown in FIG. There was a problem that suction fixation, suction transportation, etc. could not be performed. Furthermore, when a pressing force is applied to the suctioned object 10, such as when cutting the suctioned and held object 10, there is a problem in that compressive deformation tends to occur on the suction surface.
Furthermore, since the pores of conventional filters have a complicated shape, they tend to become clogged with dirt and dust, and are difficult to clean.
本考案はかかる問題点を解決すべく為されたも
ので、被吸着物が吸着面より小さい場合でも良好
に吸着固定、吸着搬送することができ、且つ吸着
面に縦方向の力が加わつても変形しにくく、洗浄
の容易な吸引チヤツクプレートを提供することを
目的とする。 The present invention was developed to solve these problems, and even if the object to be attracted is smaller than the suction surface, it can be suction-fixed and suction-transferred well, and even if vertical force is applied to the suction surface. It is an object of the present invention to provide a suction chuck plate that is hard to deform and easy to clean.
上記目的を達成すべくなされた本考案は、多数
の線材を平行に並べて焼結し、該線材にほぼ直角
なフラツト面を形成して吸着面としたことを特徴
とする吸引チヤツクプレートを要旨とする。
To achieve the above object, the present invention provides a suction chuck plate characterized by sintering a large number of wire rods arranged in parallel and forming a flat surface substantially perpendicular to the wire rods as a suction surface. shall be.
以下、図面に示す本考案の実施例を参照して本
考案を更に詳細に説明する。
Hereinafter, the present invention will be described in more detail with reference to embodiments of the present invention shown in the drawings.
第１図は本考案の実施例による吸引チヤツクプ
レートを備えた吸引保持具を示す断面図であり、
３は吸引チヤツクプレート、３Ａは吸着面、４は
この吸引チヤツクプレート３を装着するホルダ
ー、５は吸引源（図示せず）に接続された吸引
穴、６は吸引チヤツクプレート３の裏面のほぼ全
域に位置する吸引室である。吸引チヤツクプレー
ト３は、第２図に拡大上面図を、第３図にその
−矢視断面図を示すように、ほぼ同じ径の線材
８を平行に並べて焼結し、その焼結体を線材８に
対してほぼ直角に所望の厚さに切断し、少なくと
も上面３Ａをその表面の空孔を回復しながら、研
削、ラツプ加工等で精密にフラツト加工し、線材
８にほぼ直角な吸着面としたものである。この構
成により、上下のフラツト面３Ａ，３Ｂを連通さ
せる多数の真直ぐな空孔９が形成され、且つ各空
孔９は線材８で囲まれ、一つ一つが独立したもの
となつている。 FIG. 1 is a sectional view showing a suction holder equipped with a suction chuck plate according to an embodiment of the present invention;
3 is a suction chuck plate, 3A is a suction surface, 4 is a holder for attaching this suction chuck plate 3, 5 is a suction hole connected to a suction source (not shown), and 6 is the back side of the suction chuck plate 3 This is a suction chamber located in almost the entire area. The suction chuck plate 3 is made by sintering wire rods 8 having approximately the same diameter in parallel and sintering them, as shown in FIG. 2 as an enlarged top view and as shown in FIG. It is cut to a desired thickness almost perpendicularly to the wire 8, and at least the upper surface 3A is precisely flat-processed by grinding, lapping, etc. while restoring the pores on the surface to form a suction surface almost perpendicular to the wire 8. That is. With this configuration, a large number of straight holes 9 are formed which communicate the upper and lower flat surfaces 3A, 3B, and each hole 9 is surrounded by a wire rod 8, so that each hole is independent.
かくして、第１図において、ホルダー４の吸引
穴５を介して吸引室６を吸引することにより、吸
引チヤツクプレート３の各空孔９が吸引され、第
２図に示すように、吸着面３Ａよりも小さい被吸
着物１０を吸着させても、その被吸着物１０で塞
がれた空孔９には、隣接の空孔からのリーク漏れ
が生じることがなく、良好に吸着保持することが
できる。また、上記構成の吸引チヤツクプレート
３は吸着面３Ａに対してほぼ直角方向に線材８を
並べて焼結した構造であるので、圧縮方向の強度
に優れ、吸着面に、縦方向の力が加わつても変形
が生じにくい。更に、空孔９は真直ぐな単純な形
状であるので、ゴミ、ほこり等が詰まりにくく、
また、詰まつたとしても容易に洗浄可能である。 Thus, in FIG. 1, by suctioning the suction chamber 6 through the suction hole 5 of the holder 4, each hole 9 of the suction chuck plate 3 is suctioned, and as shown in FIG. Even if a smaller object 10 is adsorbed, the hole 9 blocked by the object 10 will not leak from the adjacent hole, and it will be able to be held by adsorption well. can. In addition, the suction chuck plate 3 having the above structure has a structure in which the wire rods 8 are arranged and sintered in a direction substantially perpendicular to the suction surface 3A, so it has excellent strength in the compression direction, and the suction surface is not subjected to vertical force. Deformation does not easily occur even when applied. Furthermore, since the holes 9 have a straight and simple shape, they are less likely to be clogged with dirt, dust, etc.
Moreover, even if it becomes clogged, it can be easily cleaned.
ここで、吸引チヤツクプレート３を構成する線
材８の材料としては、特に限定されるものでな
く、鋼、ステンレス、銅、ニツケル、チタン等焼
結可能なものを任意に使用可能である。線材８の
径は空孔９のサイズ、ピツチ等を決めるものであ
り、所望の空孔サイズに応じて定められ、通常
50μm〜２mm程度が好ましい。この径が50μmより
小さいと、空孔９が小さすぎると共に線材８のコ
ストが高くなり、一方、２mmよりも大きくなる
と、空孔径が大きくなり過ぎ、焼結金属を用いる
ことにより、小さい空孔を無数に作るというメリ
ツトが少なくなる。 Here, the material of the wire rod 8 constituting the suction chuck plate 3 is not particularly limited, and any material that can be sintered such as steel, stainless steel, copper, nickel, and titanium can be used. The diameter of the wire rod 8 determines the size, pitch, etc. of the holes 9, and is determined according to the desired hole size.
The thickness is preferably about 50 μm to 2 mm. If this diameter is smaller than 50 μm, the pores 9 will be too small and the cost of the wire 8 will be high. On the other hand, if it is larger than 2 mm, the pore diameter will be too large, and small pores can be reduced by using sintered metal. The advantage of making countless copies is reduced.
以上の説明から明らかなように、本考案の吸引
チヤツクプレートは、多数の線材を平行に並べて
焼結し、該線材にほぼ直角なフラツト面を形成し
て吸着面としたことを特徴とするものであるの
で、吸着面から裏面に連通する独立した無数の空
孔を有しており、このため、吸着面よりも小さい
被吸着物、例えば小さい部品や線材、網等を良好
に吸引保持することができ、しかも圧縮変形に強
く、吸着面を押圧してもほとんど変形せず、また
空孔が単純な形状であるので、ゴミ、ほこり等が
詰まりにくく、洗浄が容易である等の効果を有し
ている。
As is clear from the above description, the suction chuck plate of the present invention is characterized by sintering a large number of wire rods arranged in parallel and forming a flat surface substantially perpendicular to the wire rods as a suction surface. It has numerous independent holes that communicate from the suction surface to the back surface, which allows it to suction and hold objects smaller than the suction surface, such as small parts, wires, nets, etc. Moreover, it is resistant to compressive deformation, hardly deforming even when the suction surface is pressed, and the pores have a simple shape, so it is difficult to get clogged with dirt and dust, and it is easy to clean. have.
第１図は本考案の一実施例による吸引チヤツク
プレートを備えた吸引保持具の断面図、第２図は
その吸引チヤツクプレートの拡大上面図、第３図
は第２図の−矢視断面図、第４図は従来の吸
引チヤツクプレートの拡大断面図である。
１……異形粉体、３……吸引チヤツクプレー
ト、３Ａ……吸着面、４……ホルダー、５……吸
引穴、６……吸引室、８……線材、９……空孔、
１０……被吸着物。
Fig. 1 is a sectional view of a suction holder equipped with a suction chuck plate according to an embodiment of the present invention, Fig. 2 is an enlarged top view of the suction chuck plate, and Fig. 3 is viewed from the - arrow in Fig. 2. 4 is an enlarged sectional view of a conventional suction chuck plate. 1... Unusual powder, 3... Suction chuck plate, 3A... Adsorption surface, 4... Holder, 5... Suction hole, 6... Suction chamber, 8... Wire rod, 9... Hole,
10...Substance to be adsorbed.
Claims (1)
ぼ直角なフラツト面を形成して吸着面としたこと
を特徴とする吸引チヤツクプレート。 A suction chuck plate characterized in that a large number of wire rods are arranged in parallel and sintered, and a flat surface substantially perpendicular to the wire rods is formed to serve as a suction surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10635387U JPH053481Y2 (en) | 1987-07-13 | 1987-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10635387U JPH053481Y2 (en) | 1987-07-13 | 1987-07-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6412039U JPS6412039U (en) | 1989-01-23 |
| JPH053481Y2 true JPH053481Y2 (en) | 1993-01-27 |
Family
ID=31339783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10635387U Expired - Lifetime JPH053481Y2 (en) | 1987-07-13 | 1987-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH053481Y2 (en) |
-
1987
- 1987-07-13 JP JP10635387U patent/JPH053481Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6412039U (en) | 1989-01-23 |
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