JPH05339710A - Method for vacuum vapor deposition and device therefor - Google Patents
Method for vacuum vapor deposition and device thereforInfo
- Publication number
- JPH05339710A JPH05339710A JP4170198A JP17019892A JPH05339710A JP H05339710 A JPH05339710 A JP H05339710A JP 4170198 A JP4170198 A JP 4170198A JP 17019892 A JP17019892 A JP 17019892A JP H05339710 A JPH05339710 A JP H05339710A
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- boat
- vacuum
- shield plate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、高融点物質の真空加熱
蒸着において不純物の蒸着を防止する真空蒸着方法に関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum vapor deposition method for preventing vapor deposition of impurities in vacuum vapor deposition of high melting point substances.
【０００２】[0002]
【従来の技術】従来の真空加熱蒸着方法で一般的な方法
は、蒸着物質をタングステンまたはモリブデン等の材質
で加工したボートに入れて、このボートを通電加熱して
蒸着する。ボートは、通電用の端子部に固定されてい
る。この状態で、蒸着面は、ボート全体と固定端子部に
対面している。この方法は、蒸着物質の融点が低い物質
の場合はボート部分中央が高温になるだけであり、事前
に高温処理して使用するボートでは、蒸着する物質以外
の不純物の蒸着は発生しない。しかし、高融点物質例え
ば酸化セリウム等の酸化物の蒸着では、ボートが高温に
なるだけではなく、ボート固定端子部分まで高温にな
る。この固定端子部分は、ステンレス等の板と固定ビス
でボート両端を固定するものである。また、蒸着毎にボ
ート取り替え作業があり、そのときに不純物が付着しや
すい。また、蒸着作業前にボートを通電加熱で高温処理
するがこの処理は、蒸着条件まで加熱することは、ボー
ト材質が劣化するためできない。以上から蒸着時には、
ボート固定端子部分も高温になりボート全体も処理条件
以上の高温になることから不純物の蒸着が発生する。こ
の不純物は、蒸着した膜に微細欠陥を発生させる問題が
あった。2. Description of the Related Art In a conventional vacuum heating vapor deposition method, a vapor deposition material is placed in a boat made of a material such as tungsten or molybdenum, and the boat is electrically heated for vapor deposition. The boat is fixed to a terminal portion for energization. In this state, the vapor deposition surface faces the entire boat and the fixed terminal portion. In this method, when the vapor deposition material has a low melting point, only the center of the boat is heated to a high temperature, and in a boat which is used after being subjected to a high temperature treatment in advance, vapor deposition of impurities other than the vapor deposition material does not occur. However, in vapor deposition of a refractory substance, for example, an oxide such as cerium oxide, not only the temperature of the boat becomes high, but also the temperature of the boat fixed terminal portion becomes high. This fixed terminal portion is for fixing both ends of the boat with a plate such as stainless steel and fixing screws. Further, there is a boat replacement work every vapor deposition, and at that time, impurities are easily attached. Further, the boat is subjected to high temperature treatment by electric heating before the vapor deposition work, but this treatment cannot be performed up to the vapor deposition condition because the material of the boat deteriorates. From the above, during vapor deposition,
Since the boat fixed terminal portion also becomes high in temperature and the entire boat also becomes high temperature higher than the processing condition, the deposition of impurities occurs. This impurity has a problem of generating fine defects in the deposited film.
【０００３】[0003]
【発明が解決しようとする課題】前述のように、ボート
固定端子部分まで、蒸着面に対応しているボート構造で
は、高融点物質の真空蒸着では蒸着膜に不純物を混入す
る問題がある。この問題点を改善しようとしたのが本発
明の目的である。As described above, in the boat structure in which even the boat fixed terminal portion corresponds to the vapor deposition surface, there is a problem that impurities are mixed in the vapor deposition film in vacuum vapor deposition of the high melting point substance. It is an object of the present invention to try to remedy this problem.
【０００４】[0004]
【課題を解決するための手段】本発明は、この問題点を
解決するために、ボート固定端子部、および蒸着前のボ
ート熱処理で高温処理ができないボートの両端が蒸着面
に対応しないように遮蔽板を設けて不純物の蒸着を防止
したものである。SUMMARY OF THE INVENTION In order to solve this problem, the present invention shields a boat fixed terminal portion and both ends of a boat that cannot be subjected to high temperature heat treatment by boat heat treatment before vapor deposition so as not to correspond to the vapor deposition surface. A plate is provided to prevent the vapor deposition of impurities.
【０００５】[0005]
【作用】ボート穴近辺以外のボート部分およびボート固
定端子部分が高温になり付着不純物が蒸発しても、真空
蒸着であるため、蒸着物質は直進し、この遮蔽板により
蒸着面に達しないことになる。[Effect] Even if the boat portion and the boat fixing terminal portion other than the vicinity of the boat hole become hot and the adhered impurities evaporate, since the vapor deposition is vacuum vapor deposition, the vapor deposition material goes straight and does not reach the vapor deposition surface by the shielding plate. Become.
【０００６】[0006]
【実施例】以下、本発明の一実施例を図１で説明する。
図１は、撮像管の面板を作成する工程における本発明の
実施例を示す図でボートと遮蔽板の位置関係を説明する
ものである。本発明の遮蔽板とボートの関係を説明する
と、図１のように遮蔽板の穴６がボートから蒸着物質が
出る穴５に近接して設置される。遮蔽板とボートの距離
と遮蔽板の穴６の寸法は必要蒸着面積で決める。たとえ
ば、このために、ボート部分およびボート固定端子部分
から付着不純物が蒸発しても、遮蔽板１により蒸着面７
に達しないことになる。したがって蒸着面には蒸着物質
のみが蒸着されることになる。１は本発明の遮蔽板であ
る。材質は例えば、洗浄、処理がしやすいステンレス材
で作成する。場合によっては石英板でも可能である。２
は通電加熱ボートである。このボートは、蒸着物質の微
粉末およびスプラッシュを防止するために、穴加工した
ボートカバーを使用する構造のボートである。また、蒸
着物質が出る穴をボートカバーの中央に一つ開けた物が
最上部に来る組み合わせのボートを使用する。３がボー
トに加熱用電流を通電するためとボートの固定を兼ねた
端子部分である。４は側面のカバーで遮蔽板１を保持す
るためと蒸着装置内に広く蒸着物質が付着しないように
カバーする目的の金属円筒治具である。７は撮像管面板
の蒸着面である。なお、ボート２の蒸着物質が出る穴の
径と遮蔽板１の穴の径およびボート遮蔽板の距離は必要
な蒸着面積から決める。この構成でボートを加熱して行
くと、ボート内の蒸着物が蒸気状になり、ボートカバー
を通過して穴５から上部に蒸着されて行く。この蒸着物
質は遮蔽板１の穴６の大きさで制限をうける。この穴６
の径と、ボート２と遮蔽板１の距離は、蒸着面７の面積
で決める。この面積は図１の矢印の範囲を考えて決めて
行く。本発明は、高融点物質の真空蒸着における不純物
混入防止改善を主体としているが、低融点物質の真空加
熱蒸着において、蒸着面の温度上昇が制限される場合の
ボート温度を遮蔽する手段にも使用が可能である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG.
FIG. 1 is a diagram showing an embodiment of the present invention in a process of forming a face plate of an image pickup tube, and is for explaining a positional relationship between a boat and a shield plate. The relationship between the shield plate and the boat of the present invention will be described. As shown in FIG. 1, the hole 6 of the shield plate is installed in the vicinity of the hole 5 through which the vapor deposition material is discharged from the boat. The distance between the shielding plate and the boat and the size of the hole 6 in the shielding plate are determined by the required vapor deposition area. For example, for this reason, even if adhered impurities evaporate from the boat portion and the boat fixed terminal portion, the vapor deposition surface 7 is covered by the shield plate 1.
Will not be reached. Therefore, only the deposition material is deposited on the deposition surface. 1 is a shield plate of the present invention. The material is, for example, a stainless material that is easy to wash and process. In some cases, a quartz plate is also possible. Two
Is an electric heating boat. This boat has a structure in which a holed boat cover is used to prevent fine powder of the vapor deposition material and splash. In addition, a boat is used in which one hole is formed in the center of the boat cover, through which the vapor deposition material is released, and the top of the boat is the one that is opened. Reference numeral 3 is a terminal portion for supplying a heating current to the boat and also for fixing the boat. Reference numeral 4 denotes a metal cylindrical jig for holding the shield plate 1 by a side cover and for covering the vapor deposition apparatus widely so as not to deposit the vapor deposition material. 7 is a vapor deposition surface of the imaging tube face plate. The diameter of the hole through which the vapor deposition material of the boat 2 exits, the diameter of the hole of the shield plate 1 and the distance between the boat shield plate are determined from the required vapor deposition area. When the boat is heated with this configuration, the vapor deposition in the boat becomes vaporized, passes through the boat cover, and is vaporized from the hole 5 to the upper portion. This vapor deposition material is limited by the size of the holes 6 in the shield plate 1. This hole 6
And the distance between the boat 2 and the shield plate 1 are determined by the area of the vapor deposition surface 7. This area is decided by considering the range of the arrow in FIG. The present invention is mainly intended to improve the prevention of impurities from being mixed in the vacuum deposition of the high melting point substance, but is also used as a means for shielding the boat temperature when the temperature rise of the deposition surface is limited in the vacuum heating deposition of the low melting point substance. Is possible.
【０００７】[0007]
【考案の効果】本発明を用いると、ボートを使用前に通
電加熱熱処理をした部分のみが蒸着面に対応することか
ら蒸着物質以外の不純物の混入が防止できて蒸着膜の微
細欠陥が減少して良品率を向上することができる。特に
撮像管の面板作成に応用すると大きな効果を有する。EFFECTS OF THE INVENTION According to the present invention, since only the portion of the boat that has been heat-treated by heating before use corresponds to the vapor deposition surface, it is possible to prevent impurities other than the vapor deposition material from entering and reduce fine defects in the vapor deposition film. The rate of non-defective products can be improved. In particular, it has a great effect when applied to the production of a face plate of an image pickup tube.
【図１】本発明の実施例説明図。FIG. 1 is an explanatory diagram of an embodiment of the present invention.
１ 本発明の遮蔽板 ２ ボート ３ 固定端子部分 ５ ボート穴 ６ 遮蔽板穴 1 Shield Plate of the Present Invention 2 Boat 3 Fixed Terminal Part 5 Boat Hole 6 Shield Plate Hole
Claims (2)
接させて、必要蒸着面積を得る最少限の穴加工をした遮
蔽板を使用することを特徴とした真空蒸着方法。1. A vacuum vapor deposition method characterized in that, in the vacuum heating vapor deposition, a shielding plate having a minimum number of holes for obtaining a required vapor deposition area is used in the vicinity of a vapor deposition boat.
れ、これを加熱する蒸着ボートと、前記蒸着物質が通過
するための穴を有し、前記蒸着ボートの上部に設けた遮
蔽板と、該遮蔽板を保持するカバーより成る真空蒸着装
置。2. In vacuum heating vapor deposition, a vapor deposition boat for containing a vapor deposition substance and heating the vapor deposition substance, a shield plate having a hole for allowing the vapor deposition substance to pass therethrough, and a shield plate provided on the vapor deposition boat, and the shield. A vacuum deposition device consisting of a cover that holds a plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4170198A JPH05339710A (en) | 1992-06-04 | 1992-06-04 | Method for vacuum vapor deposition and device therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4170198A JPH05339710A (en) | 1992-06-04 | 1992-06-04 | Method for vacuum vapor deposition and device therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05339710A true JPH05339710A (en) | 1993-12-21 |
Family
ID=15900492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4170198A Pending JPH05339710A (en) | 1992-06-04 | 1992-06-04 | Method for vacuum vapor deposition and device therefor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05339710A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100889761B1 (en) * | 2002-09-30 | 2009-03-24 | 삼성모바일디스플레이주식회사 | Heating crucible for forming apparatus of organic thin film |
| KR101451082B1 (en) * | 2012-10-30 | 2014-10-15 | 주식회사 선익시스템 | Nozzle Shield to minimize the Thermal Deformation |
-
1992
- 1992-06-04 JP JP4170198A patent/JPH05339710A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100889761B1 (en) * | 2002-09-30 | 2009-03-24 | 삼성모바일디스플레이주식회사 | Heating crucible for forming apparatus of organic thin film |
| KR101451082B1 (en) * | 2012-10-30 | 2014-10-15 | 주식회사 선익시스템 | Nozzle Shield to minimize the Thermal Deformation |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |