JPH0529133U - Assembled wafer boat with legs - Google Patents
Assembled wafer boat with legsInfo
- Publication number
- JPH0529133U JPH0529133U JP8626391U JP8626391U JPH0529133U JP H0529133 U JPH0529133 U JP H0529133U JP 8626391 U JP8626391 U JP 8626391U JP 8626391 U JP8626391 U JP 8626391U JP H0529133 U JPH0529133 U JP H0529133U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- wafer
- legs
- support shaft
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】
【目的】 組立式ウェーハボートの機能を損なわずに、
部品点数を減らして組立、分解を簡単に行えるようにし
た、脚付き組立式ウェーハボートを提供する。
【構成】 半導体ウェーハを複数載置して所定の熱処理
を施すウェーハボートであって、ウェーハを支持する２
以上の支持軸と、この支持軸の両端部を保持する側板と
から構成する。ウェーハを支持する支持軸には、それ自
体のたわみを抑止するための脚を形成する。この脚に支
持軸の中間支持部材の機能を持たせる。
(57) [Abstract] [Purpose] Without impairing the function of the assembly type wafer boat,
(EN) Provided is an assembling type wafer boat with legs, in which the number of parts is reduced and the assembling and disassembling can be easily performed. [Structure] A wafer boat for mounting a plurality of semiconductor wafers and subjecting them to a predetermined heat treatment.
The support shaft is composed of the above support shafts and side plates holding both ends of the support shaft. The supporting shaft for supporting the wafer is formed with legs for suppressing the bending of itself. This leg is made to have the function of an intermediate support member for the support shaft.
Description
【０００１】[0001]
本考案は、脚付き組立式ウェーハボートに関するものである。 The present invention relates to an assembled wafer boat with legs.
【０００２】[0002]
半導体ウェーハを拡散炉内において熱処理する時に用いられる支持具があり、 これは複数枚のウェーハを一定の間隔で並置して拡散炉内に収納できるようにし てある。 この種の支持具は、ウェーハボートとも称されて組立式のものがあり、例えば 図３に示すように一対の側板ａと、この側板に着脱自在に支持される複数のウェ ーハ支持軸ｂと、このウェーハ支持軸の中間部を支持する複数の中間支持部材ｃ とから構成されている（実開平２−７３７３１号公報）。 There is a supporting tool used for heat-treating semiconductor wafers in a diffusion furnace, which allows a plurality of wafers to be housed in the diffusion furnace side by side at regular intervals. This type of support is also called a wafer boat and is of an assembly type. For example, as shown in FIG. 3, a pair of side plates a and a plurality of wafer support shafts b that are detachably supported by the side plates. And a plurality of intermediate support members c which support the intermediate portion of the wafer support shaft (Japanese Utility Model Laid-Open No. 2-73731).
【０００３】[0003]
しかしながら、前記組立式ウェーハボートにおいては、比較的部品点数が多い ため、組立及び分解に相当時間が掛かり、部品の交換等メンテナンス面でも厄介 であり、部品点数の削減に解決すべき問題点を有している。 However, since the assembly type wafer boat has a relatively large number of parts, it takes a considerable amount of time to assemble and disassemble, and it is troublesome in terms of maintenance such as replacement of parts, and there is a problem to be solved to reduce the number of parts. is doing.
【０００４】 本考案は、このような従来の問題点を解決するためになされ、組立式ウェーハ ボートの機能を損なわずに部品点数を減らして組立、分解を簡単に行えるように した、脚付き組立式ウェーハボートを提供することを課題としたものである。The present invention has been made in order to solve the above-mentioned conventional problems, and is an assembly with legs, which can be easily assembled and disassembled by reducing the number of parts without impairing the function of the assembly type wafer boat. It is an object to provide a type wafer boat.
【０００５】[0005]
前記課題を技術的に解決するための手段として、本考案は、半導体ウェーハを 複数載置して所定の熱処理を施すウェーハボートであって、ウェーハを支持する ２以上の支持軸と、この支持軸の両端部を保持する側板とから構成され、前記ウ ェーハを支持する支持軸には、それ自体のたわみを抑止するための脚が形成され たことを要旨とするものである。 MEANS TO SOLVE THE PROBLEM As a means for technically solving the above-mentioned problems, the present invention is a wafer boat for mounting a plurality of semiconductor wafers and performing a predetermined heat treatment, the support boat supporting two or more wafers, and the support shafts. The gist of the present invention is that the support shaft, which is composed of side plates that hold both ends of the wafer, and that supports the wafer is formed with legs for suppressing the deflection of the wafer itself.
【０００６】[0006]
脚が支持軸と一体に形成されているので、従来例のような複数の中間支持部材 が不要となって部品点数の削減が図れ、中間支持部材の機能は支持軸に持たせる ことができる。 Since the legs are formed integrally with the support shaft, a plurality of intermediate support members as in the conventional example are not required, and the number of parts can be reduced, and the function of the intermediate support member can be given to the support shaft.
【０００７】[0007]
以下、本考案の実施例を添付図面に基づいて詳説する。 図１において、１は一対の側板であり、この側板に複数の角柱状支持軸２、３を 差し渡してその両端部を着脱自在に取り付け、最外側の両支持軸２の下部には一 定の間隔をあけてたわみ抑止用の脚４が支持軸と一体に形成されている。 Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In FIG. 1, reference numeral 1 denotes a pair of side plates. A plurality of prismatic support shafts 2 and 3 are arranged on the side plates, and both ends of the support shafts are detachably attached. Deflection suppressing legs 4 are formed integrally with the support shaft at intervals.
【０００８】 前記支持軸２は、上面の内側縁から内面の上側縁にかけて支持軸の長手方向に 沿って一定のピッチでウェーハ装着溝２ａが設けられ、前記内側に取り付ける支 持軸３の上面にも同様にウェーハ装着溝３ａが設けられている。The supporting shaft 2 is provided with wafer mounting grooves 2a at a constant pitch along the longitudinal direction of the supporting shaft from the inner edge of the upper surface to the upper edge of the inner surface. Similarly, a wafer mounting groove 3a is provided.
【０００９】 前記側板１は、図２に示すように上部の両肩部に切り込み溝１ａが対設され、 この切り込み溝１ａに前記支持軸２の端部に形成された切り込み溝（図示せず） を嵌め込むことにより支持軸２を着脱自在に取り付けられるようにしてある。 又、側板１の内面側には図１に見えるように斜めの嵌め込み用凹部１ｂが形成 され、この凹部に前記支持軸３の端部を嵌合することにより側板１の下部に支持 軸３を着脱自在に取り付けられるようにしてある。 つまり、一対の側板１間に２本の支持軸２、３が合計４本着脱自在に取り付け られ、これらの支持軸２、３のウェーハ装着溝２ａ、３ａはウェーハを安定良く 保持できるように円周方向に沿って整合するようにしてある。As shown in FIG. 2, the side plate 1 is provided with cut grooves 1a at both upper shoulders, and the cut grooves 1a are formed at the end of the support shaft 2 (not shown). ) Is attached so that the support shaft 2 can be detachably attached. Further, as shown in FIG. 1, an oblique fitting recess 1b is formed on the inner surface side of the side plate 1, and the end of the support shaft 3 is fitted into this recess so that the support shaft 3 is attached to the lower part of the side plate 1. It is designed to be detachable. That is, a total of four support shafts 2 and 3 are detachably mounted between the pair of side plates 1, and the wafer mounting grooves 2a and 3a of these support shafts 2 and 3 are circular so that the wafer can be stably held. It is adapted to be aligned along the circumferential direction.
【００１０】 前記側板１の上部には、取っ手５を装着するための孔１ｃが所定の間隔をあけ て対設され、この装着用孔１ｃに取っ手５の下部に設けられた係合部５ａを挿入 して取っ手５を側板１の外面に密接させ、係合部５ａの先端部に設けられた溝５ ｂにストッパー６の下部に設けられた切り欠き６ａを嵌合係止することにより、 取っ手５を着脱自在に取り付けられるようにしてある。この時、ストッパー６の 上部に設けられた鉤状の係止部６ｂは、取っ手５の下枠５ｃに引っ掛かるように なっている。On the upper part of the side plate 1, holes 1c for mounting the handles 5 are provided at predetermined intervals, and an engaging portion 5a provided on the lower part of the handles 5 is provided in the mounting holes 1c. By inserting the handle 5 into close contact with the outer surface of the side plate 1 and fitting and locking the notch 6a provided in the lower portion of the stopper 6 in the groove 5b provided at the tip of the engaging portion 5a, 5 is detachably attached. At this time, the hook-shaped engaging portion 6b provided on the upper portion of the stopper 6 is adapted to be hooked on the lower frame 5c of the handle 5.
【００１１】 このようにして形成されたウェーハボート７は、前記支持軸２、３のウェーハ 装着溝２ａ、３ａに複数のウェーハ（図示せず）を装着して載置し、拡散炉内に 収納してウェーハの熱処理が行われる。前記取っ手５はこのウェーハボート７を 搬送する際に有効に利用される。The wafer boat 7 formed in this way is mounted by mounting a plurality of wafers (not shown) in the wafer mounting grooves 2a, 3a of the support shafts 2, 3 and storing them in a diffusion furnace. Then, the heat treatment of the wafer is performed. The handle 5 is effectively used when the wafer boat 7 is transported.
【００１２】 前記ウェーハの熱処理において、ウェーハボート７はかなりの高温に曝され、 或は相当な温度変化を受けるが損傷乃至変形することはない。特に、最外側の支 持軸２の下部には脚４が形成されているので、これが補強作用をなし支持軸２自 体のたわみを未然に防止することができると共に、ウェーハボート７の安定性を 保持することができる。これにより、従来の中間支持部材が不要となる。In the heat treatment of the wafer, the wafer boat 7 is exposed to a considerably high temperature or undergoes a considerable temperature change but is not damaged or deformed. In particular, since the leg 4 is formed in the lower part of the outermost support shaft 2, this has a reinforcing effect and can prevent the deflection of the support shaft 2 itself, and the stability of the wafer boat 7. Can hold. This eliminates the need for a conventional intermediate support member.
【００１３】 尚、ウェーハボートの構成部材は全てシリコン製であることが望ましいが、取 っ手とストッパーは石英ガラス製にすることも可能である。It is desirable that all the constituent members of the wafer boat are made of silicon, but the handle and the stopper can be made of quartz glass.
【００１４】[0014]
以上説明したように、本考案によれば、ウェーハボートの脚が支持軸と一体に 形成されているので、従来例のような複数の中間支持部材が不要となり、部品点 数の削減が図れ、組立及び分解が容易にできると共に、部品交換も簡単にできる 等の優れた効果を奏する。 As described above, according to the present invention, since the legs of the wafer boat are formed integrally with the support shaft, a plurality of intermediate support members as in the conventional example are unnecessary, and the number of parts can be reduced. It has excellent effects such as easy assembly and disassembly, and easy parts replacement.
【図面の簡単な説明】[Brief description of drawings]
【図１】 本考案の実施例を示すウェーハボートの斜視
図である。FIG. 1 is a perspective view of a wafer boat according to an embodiment of the present invention.
【図２】 その側板部分の分解斜視図である。FIG. 2 is an exploded perspective view of a side plate portion thereof.
【図３】 従来例の説明図である。FIG. 3 is an explanatory diagram of a conventional example.
１…側板 １ａ…切り込み溝 １ｂ…嵌め込み用凹
部 １ｃ…装着用孔２、３…支持軸 ２ａ、３ａ…
ウェーハ装着溝 ４…脚 ５…取っ手５ａ…係合部
５ｂ…溝 ５ｃ…下枠 ６…ストッパー ６
ａ…切り欠き ６ｂ…係止部 ７…ウェーハボートDESCRIPTION OF SYMBOLS 1 ... Side plate 1a ... Notch groove 1b ... Fitting recess 1c ... Mounting hole 2, 3 ... Support shafts 2a, 3a ...
Wafer mounting groove 4 Leg 5 Handle 5a Engagement portion 5b Groove 5c Lower frame 6 Stopper 6
a ... Notch 6b ... Locking part 7 ... Wafer boat
Claims (2)
処理を施すウェーハボートであって、ウェーハを支持す
る２以上の支持軸と、この支持軸の両端部を保持する側
板とから構成され、前記ウェーハを支持する支持軸に
は、それ自体のたわみを抑止するための脚が形成された
ことを特徴とする、脚付き組立式ウェーハボート。1. A wafer boat for mounting a plurality of semiconductor wafers and subjecting the wafer to a predetermined heat treatment, comprising two or more support shafts for supporting the wafers and side plates for holding both end portions of the support shafts. A legged assembly type wafer boat, characterized in that a leg for restraining the bending of itself is formed on a support shaft for supporting the wafer.
る、請求項１記載の脚付き組立式ウェーハボート。2. The assembled wafer boat with legs according to claim 1, wherein legs are formed on both outermost support shafts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8626391U JP2549407Y2 (en) | 1991-09-26 | 1991-09-26 | Assembled wafer boat with legs |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8626391U JP2549407Y2 (en) | 1991-09-26 | 1991-09-26 | Assembled wafer boat with legs |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0529133U true JPH0529133U (en) | 1993-04-16 |
| JP2549407Y2 JP2549407Y2 (en) | 1997-09-30 |
Family
ID=13881935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8626391U Expired - Lifetime JP2549407Y2 (en) | 1991-09-26 | 1991-09-26 | Assembled wafer boat with legs |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2549407Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019173589A1 (en) * | 2018-03-07 | 2019-09-12 | Tokyo Electron Limited | Horizontal substrate boat |
-
1991
- 1991-09-26 JP JP8626391U patent/JP2549407Y2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019173589A1 (en) * | 2018-03-07 | 2019-09-12 | Tokyo Electron Limited | Horizontal substrate boat |
| CN111868907A (en) * | 2018-03-07 | 2020-10-30 | 东京毅力科创株式会社 | Horizontal substrate boat |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2549407Y2 (en) | 1997-09-30 |
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Legal Events
| Date | Code | Title | Description |
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| R250 | Receipt of annual fees |
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| EXPY | Cancellation because of completion of term |