JPH0528754Y2 - - Google Patents
Info
- Publication number
- JPH0528754Y2 JPH0528754Y2 JP18625687U JP18625687U JPH0528754Y2 JP H0528754 Y2 JPH0528754 Y2 JP H0528754Y2 JP 18625687 U JP18625687 U JP 18625687U JP 18625687 U JP18625687 U JP 18625687U JP H0528754 Y2 JPH0528754 Y2 JP H0528754Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- spinner device
- center
- spindle
- resist film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 9
- 229920003051 synthetic elastomer Polymers 0.000 claims 1
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 239000005061 synthetic rubber Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 36
- 238000000034 method Methods 0.000 description 7
- 238000004528 spin coating Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18625687U JPH0528754Y2 (nl) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18625687U JPH0528754Y2 (nl) | 1987-12-07 | 1987-12-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0189735U JPH0189735U (nl) | 1989-06-13 |
JPH0528754Y2 true JPH0528754Y2 (nl) | 1993-07-23 |
Family
ID=31477489
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18625687U Expired - Lifetime JPH0528754Y2 (nl) | 1987-12-07 | 1987-12-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0528754Y2 (nl) |
-
1987
- 1987-12-07 JP JP18625687U patent/JPH0528754Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0189735U (nl) | 1989-06-13 |
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