JPH0528754Y2 - - Google Patents

Info

Publication number: JPH0528754Y2
Authority: JP; Japan
Prior art keywords: substrate; spinner device; center; spindle; resist film
Prior art date: 1987-12-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP18625687U

Other languages

English (en)

Japanese (ja)

Other versions

JPH0189735U (es

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-12-07

Filing date

1987-12-07

Publication date

1993-07-23

1987-12-07 Application filed filed Critical

1987-12-07 Priority to JP18625687U priority Critical patent/JPH0528754Y2/ja

1989-06-13 Publication of JPH0189735U publication Critical patent/JPH0189735U/ja

1993-07-23 Application granted granted Critical

1993-07-23 Publication of JPH0528754Y2 publication Critical patent/JPH0528754Y2/ja

2002-12-07 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

239000000463 material Substances 0.000 claims description 9
229920003051 synthetic elastomer Polymers 0.000 claims 1
229920003002 synthetic resin Polymers 0.000 claims 1
239000000057 synthetic resin Substances 0.000 claims 1
239000005061 synthetic rubber Substances 0.000 claims 1
239000000758 substrate Substances 0.000 description 36
238000000034 method Methods 0.000 description 7
238000004528 spin coating Methods 0.000 description 6
238000010586 diagram Methods 0.000 description 4
230000002093 peripheral effect Effects 0.000 description 4
239000011248 coating agent Substances 0.000 description 3
238000000576 coating method Methods 0.000 description 3
230000018109 developmental process Effects 0.000 description 3
239000004696 Poly ether ether ketone Substances 0.000 description 2
JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 2
229920002530 polyetherether ketone Polymers 0.000 description 2
230000007261 regionalization Effects 0.000 description 2
239000004065 semiconductor Substances 0.000 description 2
229920002379 silicone rubber Polymers 0.000 description 2
239000004945 silicone rubber Substances 0.000 description 2
239000004925 Acrylic resin Substances 0.000 description 1
229920000178 Acrylic resin Polymers 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
230000007423 decrease Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
239000011521 glass Substances 0.000 description 1
239000007788 liquid Substances 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
239000011347 resin Substances 0.000 description 1
229920005989 resin Polymers 0.000 description 1
239000007921 spray Substances 0.000 description 1

Landscapes

Coating Apparatus (AREA)

JP18625687U 1987-12-07 1987-12-07 Expired - Lifetime JPH0528754Y2 (es)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP18625687U JPH0528754Y2 (es)	1987-12-07	1987-12-07

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP18625687U JPH0528754Y2 (es)	1987-12-07	1987-12-07

Publications (2)

Publication Number	Publication Date
JPH0189735U JPH0189735U (es)	1989-06-13
JPH0528754Y2 true JPH0528754Y2 (es)	1993-07-23

Family

ID=31477489

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP18625687U Expired - Lifetime JPH0528754Y2 (es)	1987-12-07	1987-12-07

Country Status (1)

Country	Link
JP (1)	JPH0528754Y2 (es)

1987
- 1987-12-07 JP JP18625687U patent/JPH0528754Y2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPH0189735U (es)	1989-06-13

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