JPH052846Y2 - - Google Patents
Info
- Publication number
- JPH052846Y2 JPH052846Y2 JP1985025304U JP2530485U JPH052846Y2 JP H052846 Y2 JPH052846 Y2 JP H052846Y2 JP 1985025304 U JP1985025304 U JP 1985025304U JP 2530485 U JP2530485 U JP 2530485U JP H052846 Y2 JPH052846 Y2 JP H052846Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- flow rate
- control means
- sample
- rate control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 59
- 239000012159 carrier gas Substances 0.000 claims description 22
- 238000001514 detection method Methods 0.000 claims description 9
- 238000002798 spectrophotometry method Methods 0.000 claims description 5
- 238000005375 photometry Methods 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000004451 qualitative analysis Methods 0.000 description 3
- 238000004445 quantitative analysis Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000006199 nebulizer Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985025304U JPH052846Y2 (zh) | 1985-02-22 | 1985-02-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985025304U JPH052846Y2 (zh) | 1985-02-22 | 1985-02-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61140950U JPS61140950U (zh) | 1986-09-01 |
JPH052846Y2 true JPH052846Y2 (zh) | 1993-01-25 |
Family
ID=30520255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985025304U Expired - Lifetime JPH052846Y2 (zh) | 1985-02-22 | 1985-02-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH052846Y2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007129513A1 (ja) * | 2006-05-09 | 2007-11-15 | Sumitomo Seika Chemicals Co., Ltd. | 試料導入システム |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5660334A (en) * | 1979-10-20 | 1981-05-25 | Shimadzu Corp | Spectral analyzer for plasma light source light emission |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58167450U (ja) * | 1982-04-30 | 1983-11-08 | 株式会社島津製作所 | 高周波プラズマ分析装置 |
-
1985
- 1985-02-22 JP JP1985025304U patent/JPH052846Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5660334A (en) * | 1979-10-20 | 1981-05-25 | Shimadzu Corp | Spectral analyzer for plasma light source light emission |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007129513A1 (ja) * | 2006-05-09 | 2007-11-15 | Sumitomo Seika Chemicals Co., Ltd. | 試料導入システム |
Also Published As
Publication number | Publication date |
---|---|
JPS61140950U (zh) | 1986-09-01 |
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