JPH05272456A - Rapid exhaust preventing device in vacuum device - Google Patents
Rapid exhaust preventing device in vacuum deviceInfo
- Publication number
- JPH05272456A JPH05272456A JP10167692A JP10167692A JPH05272456A JP H05272456 A JPH05272456 A JP H05272456A JP 10167692 A JP10167692 A JP 10167692A JP 10167692 A JP10167692 A JP 10167692A JP H05272456 A JPH05272456 A JP H05272456A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- chamber
- pressure
- port
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、真空ポンプにより真空
チャンバ内の流体を吸引して排出させる真空装置に関す
るものであり、特に詳しくは、真空チャンバ内の流体の
急速排出によるトラブルを防止した真空装置に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum device for sucking and discharging a fluid in a vacuum chamber by means of a vacuum pump, and more particularly to a vacuum system which prevents troubles due to rapid discharge of fluid in the vacuum chamber. It relates to the device.
【０００２】[0002]
【従来の技術】真空ポンプにより真空チャンバ内の空気
を吸引して排出させる真空装置は、特に例示するまでも
なく周知である。しかしながら、上記周知の真空装置
は、真空チャンバ内に大量の空気がある真空ポンプの運
転当初においては、真空ポンプにより一時的に大量の空
気が排出されるために、真空チャンバ内の空気が撹乱さ
れ、該チャンバ内における反応生成物等の塵埃が舞い上
がって、爾後の作業に支障を来すという問題がある。2. Description of the Related Art A vacuum device for sucking and exhausting air in a vacuum chamber with a vacuum pump is well known without particular exemplification. However, in the above-described known vacuum device, at the beginning of operation of the vacuum pump in which a large amount of air is present in the vacuum chamber, a large amount of air is temporarily discharged by the vacuum pump, so that the air in the vacuum chamber is disturbed. However, there is a problem that dust such as reaction products in the chamber rises up, which hinders the subsequent work.
【０００３】[0003]
【発明が解決しようとする課題】本発明が解決しようと
する課題は、流体の急速排出によるトラブルを防止した
真空装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum device which prevents troubles due to rapid discharge of fluid.
【０００４】[0004]
【課題を解決するための手段】上記課題を解決するた
め、本発明の真空装置における急速排気防止装置は、真
空ポンプに接続される吸引ポートと、真空チャンバに接
続される真空ポートとを備えた真空装置において、上記
真空装置が、真空ポートと吸引ポートを連通させる主流
路及びバイパス流路と、上記主流路を真空ポート側から
閉鎖する弁体と、上記バイパス流路中の真空作用室及び
受圧体で該真空作用室と区画された大気室と、受圧体と
弁体を連結する弁棒と、真空作用室に縮設され上記弁体
を主流路の閉鎖方向に付勢する調圧ばねと、該調圧ばね
の付勢力を調整するための調圧機構と、バイパス流路の
流量を調整するための可変絞りとを備えていることを特
徴としている。また、同様の課題を解決するため、真空
作用室を、弁棒に設けた流路によって吸引ポートに連通
させたことを特徴としている。In order to solve the above-mentioned problems, a quick exhaust prevention device in a vacuum device of the present invention comprises a suction port connected to a vacuum pump and a vacuum port connected to a vacuum chamber. In the vacuum device, the vacuum device includes a main flow path and a bypass flow path that connect the vacuum port and the suction port, a valve body that closes the main flow path from the vacuum port side, a vacuum action chamber and a pressure receiving in the bypass flow path. An atmosphere chamber that is partitioned from the vacuum action chamber by a body, a valve rod that connects the pressure receiving body and the valve body, and a pressure adjusting spring that is compressed in the vacuum action chamber and urges the valve element in the closing direction of the main flow path. A pressure adjusting mechanism for adjusting the urging force of the pressure adjusting spring and a variable throttle for adjusting the flow rate of the bypass passage are provided. Further, in order to solve the same problem, it is characterized in that the vacuum action chamber is communicated with the suction port by a flow path provided in the valve rod.
【０００５】[0005]
【作用】吸引ポートと真空ポートを真空ポンプと真空チ
ャンバに接続して真空ポンプを運転すると、真空チャン
バ内の流体量が多い真空ポンプの運転当初においては、
調圧ばねの付勢力によって弁体が主流路を閉鎖している
ために、真空チャンバ内の流体はバイパス流路を通って
真空ポンプに吸引される。この場合、バイパス流路を通
る流体の排出量は、可変絞りによって調整することがで
きる。また、調圧ばねの付勢力が弁体に対して弁座の閉
鎖方向に作用していることと、弁体が流体圧が高い真空
ポート側から主流路を閉鎖していることとによって、主
流路から流体がリークすることはない。真空チャンバ内
の流体の排出によりバイパス流路の流体圧が低下して、
真空作用室における流体圧の作用力と調圧ばねの付勢力
との和が大気室における大気圧の作用力より小さくなる
と、受圧体が駆動して弁体が主流路を開放するので、真
空チャンバ内の流体は主として主流路から排出される。
したがって、バイパス流路のみから流体を排出する場合
に比べて、所望の真空圧に到達する時間を短縮すること
ができる。この場合は、真空チャンバ内の真空圧が低く
なってチャンバ内流体の密度が低いために、主流路から
流体を排出しても真空チャンバ内の空気が撹乱されるこ
とはない。また、主流路を開放させる真空圧は、調圧ば
ねの付勢力によって調整することができる。[Function] When the vacuum pump is operated by connecting the suction port and the vacuum port to the vacuum pump and the vacuum chamber, when the vacuum pump with a large amount of fluid in the vacuum chamber is operated,
Since the valve body closes the main flow path by the biasing force of the pressure adjusting spring, the fluid in the vacuum chamber is sucked by the vacuum pump through the bypass flow path. In this case, the discharge amount of the fluid passing through the bypass passage can be adjusted by the variable throttle. Further, the urging force of the pressure regulating spring acts on the valve body in the direction of closing the valve seat, and the valve body closes the main flow path from the vacuum port side where the fluid pressure is high. No fluid leaks from the passage. The fluid pressure in the bypass channel decreases due to the discharge of the fluid in the vacuum chamber,
When the sum of the acting force of the fluid pressure in the vacuum working chamber and the urging force of the pressure adjusting spring becomes smaller than the acting force of the atmospheric pressure in the atmospheric chamber, the pressure receiving body is driven and the valve body opens the main flow path. The fluid inside is mainly discharged from the main flow path.
Therefore, the time required to reach the desired vacuum pressure can be shortened as compared with the case where the fluid is discharged only from the bypass flow passage. In this case, since the vacuum pressure in the vacuum chamber is low and the density of the fluid in the chamber is low, the air in the vacuum chamber is not disturbed even if the fluid is discharged from the main flow path. Further, the vacuum pressure for opening the main flow path can be adjusted by the urging force of the pressure adjusting spring.
【０００６】[0006]
【実施例】図は本発明の実施例を示し、この真空装置は
ボディ１とボンネット２を備え、ボディ１に吸引ポート
３が、該ボディの外周に放射方向に取付けたポート部材
４に真空ポート５がそれぞれ形成されており、これらの
ポート３と５を直接連通させる主流路６の真空ポート側
に弁座７が形成されている。ボディ１とボンネット２の
間はプレート９で気密に区画され、ボンネット２内は、
受圧体の一例であるピストン１０によって、ボンネット
側の真空作用室１１とプレート側の大気室１２とに区画
され、真空作用室１１は、後記するバイパス流路１３に
よってポート３と５に連通し、大気室１２は外部に開口
している。上記真空圧作用１１には、ピストン１０をプ
レート９に向けて付勢する調圧ばね１４が縮設され、該
調圧ばね１４の付勢力は、ボンネット２に気密に螺着さ
せた調圧機構１５を構成する調圧ねじの回転によって調
整することができる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The drawings show an embodiment of the present invention, in which a vacuum device comprises a body 1 and a bonnet 2, a suction port 3 is provided in the body 1, and a vacuum port is provided in a port member 4 radially attached to the outer periphery of the body. 5 are formed respectively, and a valve seat 7 is formed on the vacuum port side of the main flow path 6 which directly communicates these ports 3 and 5. The plate 9 is airtightly divided between the body 1 and the bonnet 2, and the inside of the bonnet 2 is
A piston 10, which is an example of a pressure receiving body, divides the bonnet-side vacuum working chamber 11 and the plate-side atmospheric chamber 12 into a vacuum working chamber 11 that communicates with the ports 3 and 5 by a bypass flow passage 13 described below. The atmosphere chamber 12 is open to the outside. A pressure adjusting spring 14 for urging the piston 10 toward the plate 9 is contracted to the vacuum pressure action 11, and the urging force of the pressure adjusting spring 14 is hermetically screwed to the bonnet 2. It can be adjusted by the rotation of the pressure adjusting screw constituting 15.
【０００７】一端がピストン１０に螺着された中空の弁
棒１８は、プレート９を気密に貫通した先端に、上記弁
座７を開閉する弁体１９が取付けられており、ピストン
側の先端に大径のオリフィス２３が取付けられている。
上記バイパス流路１３は、ボディ１とボンネット２に形
成した流路２０と、弁棒１８の中空部で形成された流路
１８ａよりなり、流路２０中に、バイパス流路１３を流
れる空気の流量を調整するための、可変絞り２１の一例
としてのニードル弁が設置されており、該ニードル弁の
開度は、弁体２２を回転させてボンネット２に対して進
退させることによって調整することができる。A hollow valve rod 18 having one end screwed to the piston 10 has a valve body 19 which opens and closes the valve seat 7 attached to the tip which penetrates the plate 9 in an airtight manner, and which is attached to the tip on the piston side. A large diameter orifice 23 is attached.
The bypass flow passage 13 includes a flow passage 20 formed in the body 1 and the bonnet 2 and a flow passage 18a formed in the hollow portion of the valve rod 18, and the air flowing through the bypass flow passage 13 is contained in the flow passage 20. A needle valve as an example of the variable throttle 21 for adjusting the flow rate is installed, and the opening degree of the needle valve can be adjusted by rotating the valve body 22 and moving the valve body 22 back and forth with respect to the bonnet 2. it can.
【０００８】上記真空装置は、吸引ポート３と真空ポー
ト５を、真空ポンプと真空チャンバ（いずれも図示省
略）にそれぞれ接続することによって使用されるもの
で、真空ポンプの運転が停止し、かつ真空チャンバ内が
大気圧またはそれに近いときは、ピストン１０に作用す
る調圧ばね１４の付勢力によって弁体１９が主流路６を
閉鎖し、ポート３と５はバイパス流路１３によって連通
している。この状態において真空ポンプを運転をする
と、主流路６が閉鎖されているために、真空ポンプの運
転当初は、真空チャンバ内の空気はバイパス流路１３の
可変絞り２１により排出量を制御されて、徐々に真空ポ
ンプに吸引され、単位時間当りの排出量は、可変絞り２
１によって調整することができる。したがって、真空チ
ャンバ内の空気が大きく撹乱されないので、塵埃の舞い
上がり等のトラブルを防止することができる。この場
合、真空ポート側の空気圧が常に吸引ポート側の空気圧
より高いので、主流路６を真空ポート側から閉鎖する弁
体１９のシールは確実で、空気がリークすることはな
い。The above-mentioned vacuum device is used by connecting the suction port 3 and the vacuum port 5 to a vacuum pump and a vacuum chamber (both not shown), respectively. When the inside of the chamber is at or near atmospheric pressure, the valve body 19 closes the main passage 6 by the urging force of the pressure adjusting spring 14 acting on the piston 10, and the ports 3 and 5 are communicated by the bypass passage 13. When the vacuum pump is operated in this state, since the main flow path 6 is closed, the discharge amount of the air in the vacuum chamber is controlled by the variable throttle 21 of the bypass flow path 13 at the beginning of the operation of the vacuum pump. It is gradually sucked by the vacuum pump, and the discharge amount per unit time is 2
It can be adjusted by 1. Therefore, since the air in the vacuum chamber is not greatly disturbed, it is possible to prevent troubles such as dust rising. In this case, since the air pressure on the vacuum port side is always higher than the air pressure on the suction port side, the valve body 19 that closes the main flow path 6 from the vacuum port side is reliably sealed and air does not leak.
【０００９】真空チャンバ内の空気圧の低下により、真
空作用室１１における真空圧の作用力と調圧ばね１４の
設定付勢力との和が大気室１２の大気圧の作用力より小
さくなると、ピストン１０が図１において上動して弁体
１９が主流路６を開放するので、真空チャンバ内の空気
は主として主流路６を通って排出される。この場合、真
空チャンバ内の空気の密度が低くなっているので、真空
チャンバ内の空気が撹乱されることはない。また、主流
路６を開放する真空圧は、調圧機構１５で調圧ばね１４
の付勢力を調整することによって、調整することができ
る。When the sum of the acting force of the vacuum pressure in the vacuum working chamber 11 and the set biasing force of the pressure adjusting spring 14 becomes smaller than the acting force of the atmospheric pressure in the atmosphere chamber 12 due to the decrease in the air pressure in the vacuum chamber, the piston 10 1, the valve element 19 opens the main flow path 6 and the air in the vacuum chamber is mainly discharged through the main flow path 6. In this case, since the air density in the vacuum chamber is low, the air in the vacuum chamber is not disturbed. Further, the vacuum pressure for opening the main flow path 6 is adjusted by the pressure adjusting mechanism 15 by the pressure adjusting spring 14.
It can be adjusted by adjusting the biasing force of.
【００１０】[0010]
【発明の効果】本発明の真空装置における急速排気防止
装置は、真空チャンバ内の流体量が多いときはバイパス
流路から流体を排出させるために、流体の一時的な大量
排出に伴う真空チャンバ内の空気の撹乱に起因する塵埃
の舞い上がり等のトラブルを防止することができる。ま
た、真空チャンバ内の流体の密度が低くなって真空作用
室の真空圧が低くなると、主流路から流体を排出させる
ので、所望の真空圧に到達するまでの時間を短縮でき、
かつ大きなコンダクタンスを得ることができる。さら
に、可変絞り及び調圧機構によって、真空ポンプの運転
当初の排出流体量及び主流路の開放に必要な真空圧を調
整することができ、また弁棒に中空部を設けたので、バ
イパス流路の構成が簡単になる。The rapid evacuation prevention device in the vacuum device of the present invention discharges the fluid from the bypass passage when the amount of the fluid in the vacuum chamber is large. It is possible to prevent troubles such as dust flying up due to the air disturbance. Also, when the density of the fluid in the vacuum chamber becomes low and the vacuum pressure in the vacuum working chamber becomes low, the fluid is discharged from the main flow path, so the time to reach the desired vacuum pressure can be shortened
And a large conductance can be obtained. Furthermore, the variable throttle and pressure regulating mechanism can adjust the amount of discharged fluid at the beginning of the vacuum pump operation and the vacuum pressure required to open the main flow path. Simplifies the configuration of.
【図１】図２のＡ−Ａ断面図である。1 is a cross-sectional view taken along the line AA of FIG.
【図２】実施例の平面図である。FIG. 2 is a plan view of the embodiment.
３ 吸引ポート ５ 真空ポート ６ 主流路 １０ ピストン １１ 真空作用室 １２ 大気室 １３ バイパス流路 １４ 調圧ばね １５ 調圧機構 １８ 弁棒 １８ａ 流路 １９ 弁体 ２１ 可変絞り 3 suction port 5 vacuum port 6 main channel 10 piston 11 vacuum working chamber 12 atmosphere chamber 13 bypass channel 14 pressure regulating spring 15 pressure regulating mechanism 18 valve rod 18a channel 19 valve disc 21 variable throttle
Claims (2)
真空チャンバに接続される真空ポートとを備えた真空装
置において、 上記真空装置が、真空ポートと吸引ポートを連通させる
主流路及びバイパス流路と、上記主流路を真空ポート側
から閉鎖する弁体と、上記バイパス流路中の真空作用室
及び受圧体で該真空作用室と区画された大気室と、受圧
体と弁体を連結する弁棒と、真空作用室に縮設され上記
弁体を主流路の閉鎖方向に付勢する調圧ばねと、該調圧
ばねの付勢力を調整するための調圧機構と、バイパス流
路の流量を調整するための可変絞りとを備えている、こ
とを特徴とする真空装置における急速排気防止装置。1. A suction port connected to a vacuum pump,
In a vacuum device provided with a vacuum port connected to a vacuum chamber, the vacuum device includes a main flow path and a bypass flow path that connect the vacuum port and the suction port, and a valve body that closes the main flow path from the vacuum port side. An atmosphere chamber partitioned from the vacuum working chamber by the vacuum working chamber and the pressure receiving body in the bypass flow path, a valve rod connecting the pressure receiving body and the valve body, and the valve body being compressed into the vacuum working chamber A pressure regulating spring for urging the passage in the closing direction; a pressure regulating mechanism for regulating the urging force of the pressure regulating spring; and a variable throttle for regulating the flow rate of the bypass flow passage. A quick exhaust prevention device for a vacuum device.
て吸引ポートに連通させたことを特徴とする請求項１に
記載した真空装置における急速排気防止装置。2. The rapid exhaust prevention device in a vacuum device according to claim 1, wherein the vacuum action chamber is connected to the suction port by a flow path provided in the valve rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10167692A JPH05272456A (en) | 1992-03-27 | 1992-03-27 | Rapid exhaust preventing device in vacuum device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10167692A JPH05272456A (en) | 1992-03-27 | 1992-03-27 | Rapid exhaust preventing device in vacuum device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05272456A true JPH05272456A (en) | 1993-10-19 |
Family
ID=14306963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10167692A Pending JPH05272456A (en) | 1992-03-27 | 1992-03-27 | Rapid exhaust preventing device in vacuum device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05272456A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100375842C (en) * | 2003-05-20 | 2008-03-19 | 乐金电子(天津)电器有限公司 | Piston initial position regulator for piston type compressor |
| JP2009085241A (en) * | 2007-09-27 | 2009-04-23 | Anest Iwata Corp | Vacuum valve |
| JP2009085242A (en) * | 2007-09-27 | 2009-04-23 | Anest Iwata Corp | Vacuum valve |
| JP2011094788A (en) * | 2009-11-01 | 2011-05-12 | Zhejiang Sanhua Climate & Appliance Controls Group Co Ltd | Flow path switch control device |
| CN108708855A (en) * | 2018-07-20 | 2018-10-26 | 上海优耐特斯压缩机有限公司 | One kind having oily screw vacuum pump intaking valve structure and its control method |
-
1992
- 1992-03-27 JP JP10167692A patent/JPH05272456A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100375842C (en) * | 2003-05-20 | 2008-03-19 | 乐金电子(天津)电器有限公司 | Piston initial position regulator for piston type compressor |
| JP2009085241A (en) * | 2007-09-27 | 2009-04-23 | Anest Iwata Corp | Vacuum valve |
| JP2009085242A (en) * | 2007-09-27 | 2009-04-23 | Anest Iwata Corp | Vacuum valve |
| JP2011094788A (en) * | 2009-11-01 | 2011-05-12 | Zhejiang Sanhua Climate & Appliance Controls Group Co Ltd | Flow path switch control device |
| CN108708855A (en) * | 2018-07-20 | 2018-10-26 | 上海优耐特斯压缩机有限公司 | One kind having oily screw vacuum pump intaking valve structure and its control method |
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