JPH05237787A - Two-dimensional positioning stage - Google Patents

Two-dimensional positioning stage

Info

Publication number
JPH05237787A
JPH05237787A JP2633892A JP2633892A JPH05237787A JP H05237787 A JPH05237787 A JP H05237787A JP 2633892 A JP2633892 A JP 2633892A JP 2633892 A JP2633892 A JP 2633892A JP H05237787 A JPH05237787 A JP H05237787A
Authority
JP
Japan
Prior art keywords
moving table
base
dimensional
plane
dimensional positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2633892A
Other languages
Japanese (ja)
Other versions
JP2833321B2 (en
Inventor
Noriyuki Kubota
紀行 久保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
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Application filed by NEC Corp filed Critical NEC Corp
Priority to JP4026338A priority Critical patent/JP2833321B2/en
Publication of JPH05237787A publication Critical patent/JPH05237787A/en
Application granted granted Critical
Publication of JP2833321B2 publication Critical patent/JP2833321B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Machine Tool Units (AREA)
  • Manipulator (AREA)

Abstract

PURPOSE:To make a two-axis stage light, highly rigid and at high speed by driving a guideless plane stage by three actuators. CONSTITUTION:A two-dimensional stage is composed of a base, a moving table 3 supported by a two dimensional air bearing 2 so that an arbitrary position and posture can be taken up in a plane in parallel with the base 1 surface on the base 1, three voice coil motors 4.5.6 arranged on the moving table 3 so that the combination of an arbitrary force acting in an orthogonally crossing two directions and a rotary direction around the gravity center whose resultant can pass the gravity center of the moving table 3 in a plane in parallel with the base surface can be generated, two two-dimensional position detection elements 7.8 measuring the position and the posture of the moving table 3 and a controller driving the three voice coil motors 4.5.6 based on the information from the two dimensional position detection elements 7.8.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は２次元位置決めステー
ジ、特に、高速性を重視した２次元位置決めステージに
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-dimensional positioning stage, and more particularly to a two-dimensional positioning stage that emphasizes high speed.

【０００２】[0002]

【従来の技術】図２は従来の一例を示す斜視図である。
図２に示す２次元位置決めステージは、ベース１と、ベ
ース１上に一次元ベアリング１０を介して指示された下
軸テーブル１１と、下軸テーブル１１を駆動するホイス
コイルモータ１２と、下軸テーブル１１の位置を測定す
るリニアエンコーダ１３と、下軸テーブル１１上に一次
元ベアリング１４を介して指示された上軸テーブル１５
と、上軸テーブル１５を駆動するホイスコイルモータ１
６と、上軸テーブル１５の位置を測定するリニアエンコ
ーダ１７と各リニアエンコーダ１３・１７からの情報を
基に各ボイスコイルモータ１２・１６を駆動する制御部
９を含んで構成される。2. Description of the Related Art FIG. 2 is a perspective view showing a conventional example.
The two-dimensional positioning stage shown in FIG. 2 includes a base 1, a lower shaft table 11 designated on the base 1 via a one-dimensional bearing 10, a whistle coil motor 12 for driving the lower shaft table 11, and a lower shaft table. 11, a linear encoder 13 for measuring the position of the shaft 11, and an upper shaft table 15 specified on the lower shaft table 11 via a one-dimensional bearing 14.
And a whistle coil motor 1 that drives the upper shaft table 15.
6, a linear encoder 17 for measuring the position of the upper shaft table 15, and a control unit 9 for driving each voice coil motor 12, 16 based on information from each linear encoder 13, 17.

【０００３】従来の２次元位置決めテーブルは、与えら
れたステージの２次元移動目標座標（下軸方向、上軸方
向）に対し、下軸方向には下軸ボイスコイルモータ１２
を、上軸方向には上軸ボイスコイルモータ１６を各リニ
アエンコーダ１３・１７の情報に基づいて制御部９（詳
細省略）により独立にフィードバック制御することによ
り、動作を行う。The conventional two-dimensional positioning table has a lower axis voice coil motor 12 in the lower axis direction with respect to a given two-dimensional movement target coordinate (lower axis direction, upper axis direction) of the stage.
In the upper axis direction, the upper axis voice coil motor 16 is independently feedback-controlled by the control unit 9 (details omitted) based on the information of the linear encoders 13 and 17 to perform the operation.

【０００４】[0004]

【発明が解決しようとする課題】従来の２次元位置決め
ステージでは、１次元位置決めステージを２段積みにし
た構成となっているため、軽量化が困難で高速化に限界
があるという問題点があった。Since the conventional two-dimensional positioning stage has a structure in which the one-dimensional positioning stages are stacked in two stages, there is a problem that it is difficult to reduce the weight and the speed is limited. It was

【０００５】[0005]

【課題を解決するための手段】本発明の２次元位置決め
テーブルは、ベースと、ベース上にベース面と平行な平
面内で任意の位置及び姿勢がとれるように指示された移
動テーブルと、前記移動テーブルに作用しその合力がベ
ース面と平行な平面内で移動テーブル重心を通過する直
行２方向及び重心回りの回転方向に働く任意の力の組み
合わせを発生できるように配置したＮ個（Ｎ≧３）のア
クチュエータと、前記移動テーブルの位置及び姿勢を測
定する計測手段と、前記計測手段からの情報を基にＮ個
のアクチュエータを駆動する制御部とを含んで構成され
る。A two-dimensional positioning table of the present invention includes a base, a moving table instructed to take an arbitrary position and posture on a base in a plane parallel to the base surface, and the moving table. N pieces (N ≧ 3) arranged so as to generate a combination of arbitrary forces acting on the table and acting in the two orthogonal directions passing through the moving table center of gravity and the rotation direction around the center of gravity in the plane parallel to the base surface ) Actuator, measuring means for measuring the position and orientation of the moving table, and a control section for driving N actuators based on information from the measuring means.

【０００６】[0006]

【実施例】次に本発明に付いて図面を参照して説明す
る。図１は本発明の一実施例の２次元位置決めステージ
の斜視図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a two-dimensional positioning stage according to an embodiment of the present invention.

【０００７】図１に示す二次元位置決めステージは、ベ
ース１と、ベース１上にベース１面と平行な平面内で任
意の位置及び姿勢がとれるように２次元空気軸受け２に
て指示された移動テーブル３と、前記移動テーブル３に
その合力がベース面と平行な平面内で移動テーブル３重
心を通過する直行２方向及び重心回りの回転方向に働く
任意の力の組み合せを発生できるように配置した３個の
ボイスコイルモータ４・５・６と、前記移動テーブル３
の位置及び姿勢を測定する二つの２次元位置検出素子７
・８と、二次元位置検出素子７・８からの情報を基に三
つのボイスコイルモータ４・５・６を駆動する制御部９
を含んで構成される。The two-dimensional positioning stage shown in FIG. 1 is moved by a base 1 and a two-dimensional air bearing 2 so as to take an arbitrary position and posture on the base 1 in a plane parallel to the surface of the base 1. The table 3 and the moving table 3 are arranged so that the resultant force can generate a combination of arbitrary forces acting in two orthogonal directions passing through the center of gravity of the moving table 3 in the plane parallel to the base surface and in the rotation directions around the center of gravity. Three voice coil motors 4, 5 and 6 and the moving table 3
Two-dimensional position detecting element 7 for measuring the position and orientation of the robot
8 and a control unit 9 for driving the three voice coil motors 4, 5 and 6 based on the information from the two-dimensional position detecting elements 7 and 8.
It is configured to include.

【０００８】本発明の２次元位置決めテーブルは、与え
られたステージの２次元移動目標座標に対し、各２次元
位置検出素子７・８の情報に基づいて制御部９（詳細省
略）によりボイスコイルモータ４・５・６を同時にフィ
ードバック制御することにより、動作を行う。The two-dimensional positioning table of the present invention is such that the voice coil motor is controlled by the controller 9 (details omitted) based on the information of the two-dimensional position detecting elements 7 and 8 with respect to the given two-dimensional movement target coordinates of the stage. The operation is performed by simultaneously feedback controlling 4/5/6.

【０００９】[0009]

【発明の効果】以上説明したように本発明の２次元位置
決めステージは、１次元位置決めステージの段積み構成
とする代わりに、２次元ベアリング，２次元位置姿勢セ
ンサを採用して、平面構成とし、３つのアクチュエータ
で駆動することにより、軽量化・高剛性化による高速化
が容易という効果を有する。As described above, the two-dimensional positioning stage of the present invention has a two-dimensional bearing and a two-dimensional position / orientation sensor in a plane configuration instead of the one-dimensional positioning stage stacked configuration. By driving with three actuators, there is an effect that speeding up is facilitated by weight reduction and high rigidity.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の一実施例の斜視図である。FIG. 1 is a perspective view of an embodiment of the present invention.

【図２】従来例の一例を示す斜視図である。FIG. 2 is a perspective view showing an example of a conventional example.

【符号の説明】[Explanation of symbols]

１ ベース ２ ２次元ベアリング ３ 移動テーブル ４〜６ ボイスコイルモータ ７，８ ２次元位置検出素子 ９ 制御部 1 base 2 two-dimensional bearing 3 moving table 4-6 voice coil motor 7,8 two-dimensional position detecting element 9 control unit

Claims (1)

【特許請求の範囲】[Claims] 【請求項１】 ベースと、ベース上にベース面と平行な
平面内で任意の位置及び姿勢がとれるように指示された
移動テーブルと、前記移動テーブルに作用しその合力が
ベース面と平行な平面内で移動テーブル重心を通過する
直行２方向及び重心回りの回転方向に働く任意の力の組
み合わせを発生できるように配置したＮ個（Ｎ≧３）の
アクチュエータと、前記移動テーブルの位置及び姿勢を
測定する計測手段と、前記計測手段からの情報を基にＮ
個のアクチュエータを駆動する制御部とを含むことを特
徴とする２次元位置決めテーブル。1. A base, a moving table instructed on the base to take an arbitrary position and posture in a plane parallel to the base surface, and a plane whose resultant force acts on the moving table and is parallel to the base surface. The N (N ≧ 3) actuators arranged so as to generate a combination of arbitrary forces acting in two orthogonal directions passing through the center of gravity of the moving table and in the rotation direction around the center of gravity, and the position and orientation of the moving table are N based on the measuring means to measure and the information from said measuring means
A two-dimensional positioning table including a control unit for driving a plurality of actuators.
JP4026338A 1992-02-13 1992-02-13 2D positioning stage Expired - Lifetime JP2833321B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4026338A JP2833321B2 (en) 1992-02-13 1992-02-13 2D positioning stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4026338A JP2833321B2 (en) 1992-02-13 1992-02-13 2D positioning stage

Publications (2)

Publication Number Publication Date
JPH05237787A true JPH05237787A (en) 1993-09-17
JP2833321B2 JP2833321B2 (en) 1998-12-09

Family

ID=12190657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4026338A Expired - Lifetime JP2833321B2 (en) 1992-02-13 1992-02-13 2D positioning stage

Country Status (1)

Country Link
JP (1) JP2833321B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0647788A1 (en) * 1993-10-12 1995-04-12 Canon Kabushiki Kaisha Tare supporting apparatus
JP2004223641A (en) * 2003-01-22 2004-08-12 Iai:Kk Positioning device
KR100462388B1 (en) * 2002-01-12 2004-12-17 한국과학기술원 A Stage Device Of X-Y Precision Drive Using VCM
KR100682957B1 (en) * 2006-01-09 2007-02-15 삼성전자주식회사 Xy stage module, storage system employing the same and method for fabricating the xy stage module
US7508098B2 (en) 2004-02-19 2009-03-24 Samsung Electronics Co., Ltd. Transfer apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0193976U (en) * 1987-12-16 1989-06-21
JP3027051U (en) * 1995-11-13 1996-07-30 株式会社ジャパンプラスチックス Guide piece
JP3120339U (en) * 2006-01-12 2006-03-30 株式会社あさひ鮨 Food heating container for microwave oven and frozen sushi in container that can be thawed in microwave oven

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0193976U (en) * 1987-12-16 1989-06-21
JP3027051U (en) * 1995-11-13 1996-07-30 株式会社ジャパンプラスチックス Guide piece
JP3120339U (en) * 2006-01-12 2006-03-30 株式会社あさひ鮨 Food heating container for microwave oven and frozen sushi in container that can be thawed in microwave oven

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0647788A1 (en) * 1993-10-12 1995-04-12 Canon Kabushiki Kaisha Tare supporting apparatus
KR100462388B1 (en) * 2002-01-12 2004-12-17 한국과학기술원 A Stage Device Of X-Y Precision Drive Using VCM
JP2004223641A (en) * 2003-01-22 2004-08-12 Iai:Kk Positioning device
JP4493919B2 (en) * 2003-01-22 2010-06-30 株式会社アイエイアイ Positioning device
US7508098B2 (en) 2004-02-19 2009-03-24 Samsung Electronics Co., Ltd. Transfer apparatus
KR100682957B1 (en) * 2006-01-09 2007-02-15 삼성전자주식회사 Xy stage module, storage system employing the same and method for fabricating the xy stage module

Also Published As

Publication number Publication date
JP2833321B2 (en) 1998-12-09

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