JPH05234514A - Manufacture of plasma display panel - Google Patents
Manufacture of plasma display panelInfo
- Publication number
- JPH05234514A JPH05234514A JP4033831A JP3383192A JPH05234514A JP H05234514 A JPH05234514 A JP H05234514A JP 4033831 A JP4033831 A JP 4033831A JP 3383192 A JP3383192 A JP 3383192A JP H05234514 A JPH05234514 A JP H05234514A
- Authority
- JP
- Japan
- Prior art keywords
- partition wall
- paste
- glass
- plasma display
- display panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- Gas-Filled Discharge Tubes (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、近年進展が著しいパー
ソナルコンピュータやオフィスワークステーション、な
いしは将来の発展が期待されている壁掛けテレビ等に用
いられる、プラズマディスプレイパネルにおける、画素
と画素を区切る隔壁の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a partition wall for separating pixels from each other in a plasma display panel used in personal computers, office workstations, or wall-mounted televisions, which are expected to develop in the future. It relates to a manufacturing method.
【0002】[0002]
【従来の技術】従来のプラズマディスプレイパネルとし
ては多数の種類があるが、ここでは図3(A)、(B)
に示した構造のものを例に取り説明する。図3におい
て、(A)は平面図、(B)は(A)のa−a′断面図
である、このプラズマディスプレイパネルは、ガラスよ
りなる第1絶縁基板11、同じくガラスよりなる第2絶
縁基板12、行電極13、行電極13を覆う絶縁体1
4、絶縁体14を放電より保護するMgO等によりなる
保護膜15、列電極16、列電極16を覆う絶縁体1
7、放電ガスの放電により発生する紫外光を可視光に変
換する蛍光体膜18、He,Xe等の放電ガスが充填さ
れる放電ガス空間19、放電ガス空間19を確保すると
ともに画素を区切る隔壁20、で構成されている。な
お、図3(A)において、参照番号21は画素を示して
いる。2. Description of the Related Art There are many types of conventional plasma display panels. Here, FIGS. 3A and 3B are used.
An example of the structure shown in FIG. 3, (A) is a plan view and (B) is a sectional view taken along the line aa 'in (A). This plasma display panel includes a first insulating substrate 11 made of glass and a second insulating substrate made of glass. Substrate 12, row electrode 13, insulator 1 covering row electrode 13
4. Protective film 15 made of MgO or the like for protecting insulator 14 from discharge, column electrode 16, insulator 1 covering column electrode 16
7. Phosphor film 18 for converting ultraviolet light generated by discharge of discharge gas into visible light, discharge gas space 19 filled with discharge gas such as He and Xe, partition wall for securing discharge gas space 19 and partitioning pixels 20. Note that in FIG. 3A, reference numeral 21 indicates a pixel.
【0003】図3で示した構造のプラズマディスプレイ
パネルの隔壁を製造するには、スクリーン印刷法による
多数回の繰り返し印刷による方法、厚い感光性フィルム
を用いた、いわゆるアディティブ法、等がある。図4で
アディティブ法について簡単に説明する。まず、感光性
のフィルム31を適当な基板30の上に貼り付け、隔壁
パターンを露光マスクを用いて焼き付け、現像する(図
4(A))。次に溝32に隔壁用のアルミナ等の固形分
とガラスが混ざった隔壁ペースト33を埋め込み(図4
(B))、隔壁ペースト33を乾燥させた後、不要とな
る感光性フィルム31を薬液により剥離させる。その
後、焼成を行い、図4(C)に示す隔壁34を得る。ま
たは、隔壁ペースト33を乾燥させた後、感光性フィル
ム31を付けたままペースト33の焼成を行い、焼成工
程で感光性フィルム31を焼き飛ばす方法を用いる事も
ある。In order to manufacture the barrier ribs of the plasma display panel having the structure shown in FIG. 3, there are a method of repeating printing many times by a screen printing method, a so-called additive method using a thick photosensitive film, and the like. The additive method will be briefly described with reference to FIG. First, a photosensitive film 31 is attached onto an appropriate substrate 30, a partition pattern is printed using an exposure mask, and developed (FIG. 4A). Next, a partition wall paste 33 in which a solid content such as alumina for partition walls and glass are mixed is embedded in the groove 32 (see FIG. 4).
(B)) After drying the partition paste 33, the unnecessary photosensitive film 31 is peeled off with a chemical solution. After that, firing is performed to obtain the partition wall 34 illustrated in FIG. Alternatively, a method may be used in which after the partition paste 33 is dried, the paste 33 is baked with the photosensitive film 31 attached, and the photosensitive film 31 is burned off in the baking step.
【0004】[0004]
【発明が解決しようとする課題】ところで、プラズマデ
ィスプレイパネルにおいては、高い発光輝度を得るため
に、放電ガス空間19はできるだけ広く取り、隔壁20
はできるだけ狭くする必要がある。しかしながら、縦横
比の大きな、幅が狭く背の高い隔壁をつくるためには、
どのような製法を取るにせよ、隔壁ペースト内のガラス
成分を高くとることはできない。これは、図5(A)に
示したように、乾燥後の隔壁材35は、切り立った側面
を有していても、これを焼成すると、ガラス分が多い場
合は、図5(B)の様にガラスが流れてしまい、側面が
だれた形状36となり、充分な縦横比を保てないからで
ある。このような理由から、隔壁ペーストのガラス成分
は高くする事が出来ないが、このために、隔壁の強度が
弱くなってしまう問題があった。この強度不足は、特
に、反対側の基板と接触する、隔壁上面において顕著で
あり、隔壁上面がプラズマディスプレイパネルの組立時
に破壊されてしまうという問題があった。By the way, in the plasma display panel, in order to obtain high emission brightness, the discharge gas space 19 is made as wide as possible, and the barrier ribs 20 are provided.
Should be as narrow as possible. However, in order to create a bulky wall with a large aspect ratio and a narrow width and a high height,
Whatever manufacturing method is used, the glass component in the barrier rib paste cannot be made high. As shown in FIG. 5 (A), this means that even if the partition wall material 35 after drying has a steep side surface, if this is fired and a large amount of glass is present, it is as shown in FIG. 5 (B). This is because the glass flows like this and the side face has a sloping shape 36, and a sufficient aspect ratio cannot be maintained. For this reason, the glass component of the barrier rib paste cannot be increased, but this causes a problem that the barrier rib becomes weak in strength. This lack of strength is particularly remarkable on the upper surface of the partition wall, which comes into contact with the substrate on the opposite side, and there is a problem that the upper surface of the partition wall is destroyed during the assembly of the plasma display panel.
【0005】また、アディティブ法による場合は、溝3
2に塗り込む隔壁ペーストのガラス成分が、感光性フィ
ルム31を剥離させる工程(図4(C))で用いる苛性
ソーダによって溶け出し、このため焼成後の隔壁中のガ
ラス成分がさらに少なくなり、特に隔壁強度が不充分と
なる問題があった。In the case of the additive method, the groove 3 is used.
The glass component of the partition paste applied to 2 is melted out by the caustic soda used in the step of peeling the photosensitive film 31 (FIG. 4 (C)), so that the glass component in the partition after firing is further reduced, There was a problem that the strength was insufficient.
【0006】本発明の目的は、このような強度の不十分
な隔壁の強度を高め、実用上充分な強度を有する、プラ
ズマディスプレイパネル用の隔壁を形成する事にある。An object of the present invention is to increase the strength of such a partition having insufficient strength and form a partition for a plasma display panel having a practically sufficient strength.
【0007】[0007]
【課題を解決するための手段】本発明によれば、放電ガ
スを封入する二枚の基板と、基板上に配置された放電用
電極と、画素を区切る厚膜隔壁とを少なくとも有するプ
ラズマディスプレイパネルの製造方法において、厚膜隔
壁形成プロセスの途中、または最後に、隔壁上面にガラ
スペーストを塗布し、焼成する事を特徴とするプラズマ
ディスプレイパネルの製造方法が得られる。According to the present invention, there is provided a plasma display panel having at least two substrates for enclosing a discharge gas, discharge electrodes arranged on the substrates, and thick film barrier ribs for partitioning pixels. In the manufacturing method of (1), there is obtained a manufacturing method of a plasma display panel, characterized in that glass paste is applied to the upper surface of the partition wall and baked during or after the thick film partition wall forming process.
【0008】[0008]
【作用】本発明では、上述の構成をとることにより、従
来の課題を解決した。すなわち、厚膜隔壁形成プロセス
の途中、または最後に、隔壁上面にガラスペーストを塗
布し、その後焼成する工程を挿入した。これによって、
焼成時にガラス成分が隔壁内にしみこみ、隔壁のガラス
成分を高め、よって隔壁の強度、特に隔壁上面の強度を
高める事が出来るようになった。また、ガラスペースト
を上塗りした場合は、隔壁ペースト中のガラス成分を多
くした場合と異なり、固いが脆い隔壁の中にガラスが上
からしみこんでいく為、隔壁の形状が図5のようにだれ
る事無く、側壁が切り立った、充分な縦横比を有する隔
壁を製造する事が出来た。以下、実施例により更に詳し
く説明する。The present invention has solved the conventional problems by adopting the above-mentioned configuration. That is, a step of applying a glass paste on the upper surface of the partition wall and then firing it was inserted during or at the end of the thick film partition wall forming process. by this,
The glass component permeates into the partition walls during firing, and the glass component of the partition walls is increased, and thus the strength of the partition walls, especially the strength of the upper surfaces of the partition walls can be increased. Further, when the glass paste is overcoated, unlike the case where the glass component in the partition paste is increased, the glass penetrates into the hard but brittle partition from above, so that the shape of the partition is sagging as shown in FIG. Without difficulty, it was possible to manufacture a partition wall with a sharp side wall and a sufficient aspect ratio. Hereinafter, it will be described in more detail with reference to examples.
【0009】[0009]
【実施例】プラズマディスプレイパネルとしては図3に
示した断面構造のものを作製した。第1絶縁基板11及
び第2絶縁基板12にはソーダガラス板を用い、行電極
13には透明ネサ膜(SnO2 を主成分とする透明導電
材料)を、列電極16には薄膜とアルミ電極を、放電ガ
ス空間19に充填するガスとしては、Xeを2%含有す
るHeを250Torrの圧力で用いた。隔壁20は幅
100μm、高さ100μmとして、列電極16が形成
された第2絶縁基板12の上に形成した。蛍光体膜18
を構成する蛍光体としては、プラズマディスプレイパネ
ルによく用いられる赤、青、緑の3種の蛍光体を用い
て、画素毎に塗り分けた。更に第1絶縁基板11上の絶
縁体14に重ねてMgOよりなる保護膜15を真空蒸着
で形成した。EXAMPLE A plasma display panel having the cross-sectional structure shown in FIG. 3 was produced. A soda glass plate is used for the first insulating substrate 11 and the second insulating substrate 12, a transparent nesa film (a transparent conductive material containing SnO 2 as a main component) is used for the row electrodes 13, and a thin film and an aluminum electrode are used for the column electrodes 16. Was used as a gas with which the discharge gas space 19 was filled with He containing 2% of Xe at a pressure of 250 Torr. The partition wall 20 has a width of 100 μm and a height of 100 μm, and is formed on the second insulating substrate 12 on which the column electrodes 16 are formed. Phosphor film 18
As the phosphor constituting the above, three kinds of phosphors of red, blue, and green, which are often used in plasma display panels, were used, and they were separately coated for each pixel. Further, a protective film 15 made of MgO was formed on the insulator 14 on the first insulating substrate 11 by vacuum vapor deposition.
【0010】隔壁の形成の第1例として、アディティブ
法を用いた場合を図1に示す。図1では、簡単のため、
基板側の電極や絶縁体などは省略されている。図1
(A),(B)に示した要領により、感光性フィルム2
を基板1上に形成し、フォトリソグラフィによりパター
ン化する(図1(A))。このパターン化した厚さ10
0μmの感光性フィルム2の溝3に、アルミナ、低融点
ガラス粉末を含む隔壁ペースト4を埋め込み(図1
(B))、ペーストの乾燥を行なった後、アルカリ性の
剥離液を用いて、感光性フィルム2を除去した(図1
(C))。その上に、アルミナを含まない低融点ガラス
のみのペースト6を印刷・乾燥して(図1(D))、最
後に焼成を行い、隔壁を作り上げた。ガラスペーストを
印刷する事で、ガラス成分が、焼成中に隔壁材の中にし
みこみ充分な強度の隔壁を得る事が出来た。また、ガラ
スペーストを上塗りした場合は、隔壁ペースト中のガラ
ス成分を多くした場合と異なり、固いが脆い隔壁の中に
ガラスが上からしみこんでいく為、隔壁の形状が図5の
ようにだれる事無く、側壁が切り立った、充分な縦横比
を有する隔壁を製造する事が出来た。なお、強度増大の
効果はガラス材6が塗布された隔壁上面においていちぢ
るしかったが、隔壁の上面から離れた基板側に近い部分
においても強度を増大させる効果があった。その結果、
この基板を反対側の基板と組み合わせて、プラズマディ
スプレイパネルを形成する場合でも、反対側の基板と接
触する隔壁上面が破壊される事無く、安定して組たてる
事が出来た。As a first example of the formation of partition walls, the case of using the additive method is shown in FIG. In Figure 1, for simplicity,
The electrodes and insulators on the substrate side are omitted. Figure 1
According to the procedure shown in (A) and (B), the photosensitive film 2
Are formed on the substrate 1 and patterned by photolithography (FIG. 1A). This patterned thickness 10
A partition paste 4 containing alumina and a low melting point glass powder is embedded in the groove 3 of the photosensitive film 2 of 0 μm (see FIG. 1).
(B)), after drying the paste, the photosensitive film 2 was removed using an alkaline stripping solution (FIG. 1).
(C)). A paste 6 containing only low melting point glass containing no alumina was printed thereon and dried (FIG. 1 (D)), and finally fired to form partition walls. By printing the glass paste, the glass component was able to permeate into the partition wall material during firing to obtain partition walls having sufficient strength. Further, when the glass paste is overcoated, unlike the case where the glass component in the barrier rib paste is increased, the glass penetrates into the hard but brittle barrier rib from above, so that the shape of the barrier rib is dull as shown in FIG. Without difficulty, it was possible to manufacture a partition wall with a sharp side wall and a sufficient aspect ratio. It should be noted that the effect of increasing the strength was small on the upper surface of the partition wall coated with the glass material 6, but the effect of increasing the strength was also obtained on the part near the substrate side away from the upper surface of the partition wall. as a result,
Even when this substrate was combined with the substrate on the opposite side to form a plasma display panel, the upper surface of the partition wall in contact with the substrate on the opposite side was not destroyed, and stable assembly was possible.
【0011】これに対して、ガラスペーストの印刷を行
わず、図1(C)の状態でそのまま焼成した場合は、元
々少ない隔壁中のガラス成分が苛性ソーダ液中に溶解し
てしまっているため、焼成後の隔壁中のガラス成分がさ
らに少なくなる。このため、隔壁をパネル組立のために
反対側の基板に接触させて固定しようとすると、容易に
破壊されてしまった。なお、この場合に、隔壁材のみを
焼成した後にガラスペーストの印刷・乾燥・焼成を行う
事によっても隔壁の強度を増す事が出来た。On the other hand, when the glass paste is not printed and is baked as it is in the state of FIG. 1 (C), the glass component in the partition wall is originally small and is dissolved in the caustic soda solution. The glass component in the partition walls after firing is further reduced. For this reason, when the partition wall is brought into contact with and fixed to the opposite substrate for panel assembly, the partition wall is easily broken. In this case, the strength of the partition wall could be increased by printing, drying and baking the glass paste after firing only the partition wall material.
【0012】次に、アディティブ法により隔壁形成を行
った別の例を述べる。図1(A),(B)に示した要領
により、パターン化した感光性フィルム2の溝3に隔壁
ペースト4を埋め込み、ペーストの乾燥・焼成をそのま
ま行った。このプロセスで、感光性フィルムは焼き飛ば
され、隔壁が形成された。その後、ガラス成分のみのペ
ーストを用いて印刷・乾燥・焼成を行った。最初の実施
例と同様、ガラスペーストを印刷する事で、ガラス成分
が、焼成中に隔壁材の中にしみこみ充分な強度の隔壁を
得る事が出来た。特に、強度増大の効果は、ガラス材6
が塗布された隔壁上面においていちぢるしかった。Next, another example in which the partition wall is formed by the additive method will be described. According to the procedure shown in FIGS. 1A and 1B, the partition paste 4 was embedded in the groove 3 of the patterned photosensitive film 2, and the paste was dried and baked as it was. In this process, the photosensitive film was burned off and the barrier ribs were formed. Then, printing, drying, and firing were performed using a paste containing only the glass component. By printing a glass paste as in the first example, the glass component was able to penetrate into the partition wall material during firing and obtain a partition wall with sufficient strength. In particular, the effect of increasing the strength is that the glass material 6
It was good on the upper surface of the partition wall where was coated.
【0013】次に、スクリーン印刷の多数回印刷の場合
を図2に示す。まず、図2(A)、(B)に示すよう
に、隔壁用ペーストを用いて印刷、乾燥を繰り返し、基
板1上に必要な高さまで隔壁材7を積み上げ、次に図2
(C)に示すようにガラス成分のみのペーストを用いて
印刷、乾燥を行い、ガラス材8を積み上げ、最後に50
0℃で焼成を行って隔壁作り上げた。最後にガラスペー
ストを印刷する事で、ガラス成分が、焼成中に隔壁材の
中にしみこみ充分な強度の隔壁を得る事が出来た。ま
た、ガラスペーストの印刷は、必ずしも最後の印刷工程
とする必要はなく、隔壁の印刷の間に行う事もできる。
また、隔壁材のみを積み上げ焼成した後に、ガラスペー
ストの印刷・乾燥・焼成を行っても充分な効果を得る事
が出来る。Next, FIG. 2 shows the case of multiple screen printing. First, as shown in FIGS. 2 (A) and 2 (B), printing and drying are repeated using the partition wall paste to stack the partition wall material 7 on the substrate 1 to a required height, and then, as shown in FIG.
As shown in (C), printing and drying are performed using a paste containing only glass components, glass materials 8 are stacked, and finally 50
Firing was performed at 0 ° C. to form partition walls. Finally, by printing the glass paste, the glass component was able to penetrate into the partition wall material during firing and obtain a partition wall having sufficient strength. Further, the printing of the glass paste does not necessarily have to be the last printing step, and can be performed during the printing of the partition walls.
Further, it is possible to obtain a sufficient effect by printing, drying and firing the glass paste after stacking and firing only the partition wall material.
【0014】なお、ここでは図3に示した型のプラズマ
ディスプレイパネルを例に取って述べたが、これに限ら
ず、本発明のプラズマディスプレイパネルの製造方法
は、隔壁を用いる、いかなる種類のプラズマディスプレ
イパネルにも適用できることはいうまでもない。Although the plasma display panel of the type shown in FIG. 3 has been described here as an example, the plasma display panel manufacturing method of the present invention is not limited to this, and any type of plasma using partition walls can be used. It goes without saying that it can also be applied to display panels.
【0015】また、実施例においては、隔壁上面に塗布
するガラスペーストは、ガラス成分のみを含む場合を示
したが、本発明の要点は焼成によりガラス成分が浸み込
むことにあり、ガラスペーストとしてガラスを主成分と
し、これに少量のアルミナなどの添加材を含めたもので
もよい事はいうまでもない。Further, in the examples, the glass paste applied to the upper surface of the partition wall has shown the case where only the glass component is contained. However, the point of the present invention is that the glass component is soaked in by the firing, and the glass paste is used as the glass paste. It goes without saying that glass may be a main component and a small amount of an additive such as alumina may be added to this.
【0016】[0016]
【発明の効果】以上で述べたことから明らかなように、
本発明のプラズマディスプレイパネルの隔壁の製造方法
を用いることにより、隔壁の強度、特に対向側の基板と
接する隔壁上面の強度が充分なプラズマディスプレイパ
ネルを得る事が出来るのでプラズマディスプレイパネル
の製造歩留まりを上げる事が出来、工業上非常に有用で
ある。As is apparent from what has been described above,
By using the method of manufacturing the partition wall of the plasma display panel of the present invention, it is possible to obtain a plasma display panel having sufficient strength of the partition wall, especially the strength of the upper surface of the partition wall in contact with the substrate on the opposite side. It can be raised and is very useful industrially.
【図1】本発明の製造方法を示す図である。FIG. 1 is a diagram showing a manufacturing method of the present invention.
【図2】本発明の異なる実施例を説明する図である。FIG. 2 is a diagram illustrating another embodiment of the present invention.
【図3】従来のプラズマディスプレイパネルを示す図で
ある。FIG. 3 is a diagram showing a conventional plasma display panel.
【図4】従来のプラズマディスプレイパネルの隔壁を形
成する製造工程の図である。FIG. 4 is a diagram illustrating a manufacturing process of forming a partition wall of a conventional plasma display panel.
【図5】隔壁の焼成によるだれを説明するための図であ
る。FIG. 5 is a diagram for explaining sagging due to firing of partition walls.
1,30 基板 2,31 感光性フィルム 3,32 溝 4,33 隔壁ペースト 7 隔壁材 6,8 ガラス材 11 第1絶縁基板 12 第2絶縁基板 13 行電極 14,17 絶縁体 15 保護膜 16 列電極 18 蛍光体膜 19 放電ガス空間 20,34 隔壁 21 画素 35 乾燥後の隔壁材 36 焼成後の隔壁材 1,30 Substrate 2,31 Photosensitive Film 3,32 Groove 4,33 Partition Paste 7 Partition Material 6,8 Glass Material 11 First Insulating Substrate 12 Second Insulating Substrate 13 Row Electrode 14,17 Insulator 15 Protective Film 16 Columns Electrode 18 Phosphor film 19 Discharge gas space 20,34 Partition wall 21 Pixel 35 Partition wall material after drying 36 Partition material after firing
Claims (1)
を区切る厚膜隔壁とを形成し、この基板を2枚、間隔を
設けて貼り合せ、この基板間の空間に放電ガスを封入し
て成るプラズマディスプレイパネルの製造方法におい
て、厚膜隔壁形成プロセスの途中、または最後に、隔壁
上面にガラスペーストを塗布し、焼成する事を特徴とす
るプラズマディスプレイパネルの製造方法。1. A discharge electrode and a thick film partition for partitioning a pixel are formed on a substrate, two substrates are bonded together with a space therebetween, and a discharge gas is sealed in a space between the substrates. In the method for manufacturing a plasma display panel, the method for manufacturing a plasma display panel is characterized in that glass paste is applied to the upper surface of the partition wall and fired during or at the end of the thick film partition wall forming process.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4033831A JPH05234514A (en) | 1992-02-21 | 1992-02-21 | Manufacture of plasma display panel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4033831A JPH05234514A (en) | 1992-02-21 | 1992-02-21 | Manufacture of plasma display panel |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05234514A true JPH05234514A (en) | 1993-09-10 |
Family
ID=12397438
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4033831A Withdrawn JPH05234514A (en) | 1992-02-21 | 1992-02-21 | Manufacture of plasma display panel |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05234514A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5840465A (en) * | 1995-07-17 | 1998-11-24 | Taiyo Ink Manufacturing Co., Ltd. | Compositions and method for formation of barrier ribs of plasma display panel |
KR100366092B1 (en) * | 2000-09-18 | 2002-12-26 | 삼성에스디아이 주식회사 | Dry film resist and the fabrication method for plasma display panel using the same |
-
1992
- 1992-02-21 JP JP4033831A patent/JPH05234514A/en not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5840465A (en) * | 1995-07-17 | 1998-11-24 | Taiyo Ink Manufacturing Co., Ltd. | Compositions and method for formation of barrier ribs of plasma display panel |
KR100366092B1 (en) * | 2000-09-18 | 2002-12-26 | 삼성에스디아이 주식회사 | Dry film resist and the fabrication method for plasma display panel using the same |
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