JPH05198353A - Heating device for gas passage forming equipment - Google Patents
Heating device for gas passage forming equipmentInfo
- Publication number
- JPH05198353A JPH05198353A JP4008825A JP882592A JPH05198353A JP H05198353 A JPH05198353 A JP H05198353A JP 4008825 A JP4008825 A JP 4008825A JP 882592 A JP882592 A JP 882592A JP H05198353 A JPH05198353 A JP H05198353A
- Authority
- JP
- Japan
- Prior art keywords
- main body
- flow path
- gas flow
- path forming
- insulating member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ガス配管，バルブ，フ
ィルタ等のガス流路形成機器を加熱するガス流路形成機
器用加熱装置に関する。特に、半導体製造のための半導
体材料用ガス配管等に適用するのに好適なガス流路形成
機器用加熱装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas flow path forming device heating apparatus for heating gas flow path forming devices such as gas pipes, valves and filters. In particular, the present invention relates to a gas flow path forming device heating apparatus suitable for application to semiconductor material gas pipes for semiconductor manufacturing.
【０００２】[0002]
【従来の技術】従来、半導体材料用ガス等を搬送するた
めのガス流路形成機器（例えばガス配管）には、焼きだ
し（ベーキング）やガスの液化防止等を図るためにガス
流路形成機器用加熱装置が取り付けられているのが一般
的である。2. Description of the Related Art Conventionally, a gas flow path forming device (for example, a gas pipe) for conveying a gas for semiconductor materials has a gas flow path forming device for preventing baking (baking) and liquefaction of gas. A heating device is generally attached.
【０００３】かかるガス流路形成機器用加熱装置は、配
管の外径部に螺旋状に巻かれたニクロム線と，このニク
ロム線に電流を供給するための電流供給手段と，熱電対
を有し配管の温度を検出して当該温度が設定温度となる
ように電流供給手段をＯＮ−ＯＦＦ制御する温度制御手
段とを含み構成されているのが一般的である。Such a heating device for a gas flow path forming device has a nichrome wire spirally wound around an outer diameter portion of a pipe, a current supply means for supplying a current to the nichrome wire, and a thermocouple. It is generally configured to include a temperature control means for detecting the temperature of the pipe and controlling ON / OFF of the current supply means so that the temperature becomes a set temperature.
【０００４】より具体的には、上記ニクロム線は、耐熱
粘着テープ等により配管外径部に固定され，保温材によ
って被覆される構成とされている。また、配管の被加熱
部分の何箇所かが熱電対によって温度検出される構成と
されている。More specifically, the nichrome wire is fixed to the outer diameter portion of the pipe with a heat-resistant adhesive tape or the like and covered with a heat insulating material. Moreover, the temperature of some portions of the heated portion of the pipe is detected by the thermocouple.
【０００５】しかして、上記ガス流路形成機器用加熱装
置を用いて配管を所定温度に加熱することにより，配管
内面の不純物成分の焼きだし（ベーキング）を行って超
高純度ガスの純度の低下を防いだり，ガスの液化を防い
でガスの安定搬送を図っている。However, by heating the pipe to a predetermined temperature by using the heating device for the gas flow path forming device, the impurity components on the inner surface of the pipe are baked (baking) to lower the purity of the ultra-high purity gas. To prevent the gas from liquefying and to ensure stable gas transport.
【０００６】[0006]
【発明が解決しようとする課題】ところで、上記した従
来のガス流路形成機器用加熱装置は、次のような問題点
を有している。By the way, the above-mentioned conventional heating device for a gas flow path forming device has the following problems.
【０００７】 熱電対による温度検出精度は、設置条
件の相違等により大きく変化するため，配管の被加熱部
分の温度状態を正確に検出することは困難である。その
ため、かかる熱電対の温度検出に基づき電流供給手段を
ＯＮ−ＯＦＦ制御したのでは、加熱が不十分な部分が発
生してガスの液化を完全に防止することができないこと
がある。Since the temperature detection accuracy of the thermocouple greatly changes due to differences in installation conditions and the like, it is difficult to accurately detect the temperature state of the heated portion of the pipe. Therefore, if the current supply means is controlled to be turned on and off based on such temperature detection of the thermocouple, there are cases where insufficient heating occurs to completely prevent liquefaction of gas.
【０００８】 通常、ニクロム線は配管外径部に手巻
きされるが，巻き方にばらつきが出やすく配管を均等に
加熱することが困難である。[0008] Normally, the nichrome wire is manually wound around the outer diameter portion of the pipe, but it is difficult to uniformly heat the pipe because the winding method tends to vary.
【０００９】 上記した如く，ニクロム線を配管外径
部に手巻きするなど，取付に膨大な時間が掛かる。As described above, it takes an enormous amount of time to mount the Nichrome wire around the outer diameter portion of the pipe by hand.
【００１０】 ニクロム線が切れたりして信頼性に乏
しい。The nichrome wire is cut off, resulting in poor reliability.
【００１１】本発明の目的は、上記事情に鑑み，信頼性
の向上および取付時間の短縮を図りつつガス流路形成機
器を均等に加熱することができるガス流路形成機器用加
熱装置を提供することにある。In view of the above circumstances, an object of the present invention is to provide a heating apparatus for a gas flow path forming device, which can uniformly heat the gas flow path forming device while improving the reliability and shortening the mounting time. Especially.
【００１２】[0012]
【課題を解決するための手段】本発明に係るガス流路形
成機器用加熱装置は、ガス流路形成機器の外側部に応じ
た内側部を有しかつ切込部を広げて当該機器外側部に密
着した状態で取付可能な本体を備え、前記本体を、その
内側部が絶縁部材で形成され，内側部より外側の中間層
がメッシュ状の面発熱体で形成され，さらに最外層が保
温部材で形成された３層構造とし、前記本体の面発熱体
に電流を供給するための電流供給手段を設けたことを特
徴とする。A heating device for a gas flow path forming device according to the present invention has an inner part corresponding to an outer part of the gas flow path forming device and widens a notch to form an outer part of the device. A main body that can be mounted in close contact with the main body, the inner portion of which is formed of an insulating member, the intermediate layer outside the inner portion is formed of a mesh-shaped surface heating element, and the outermost layer is a heat insulating member. And a current supply means for supplying a current to the surface heating element of the main body.
【００１３】[0013]
【作用】上記構成の本発明では、本体を、その切込部を
広げ，その状態で当該切込部を介してガス流路形成機器
（例えば配管）に嵌め込む。これにより、本体は、その
内側部がガス流路形成機器の外側部と密着するように取
り付けられる。このように、本体の取付が従来に比し大
幅に簡単化される。According to the present invention having the above-described structure, the main body is fitted with a gas flow path forming device (for example, a pipe) through the cut portion while widening the cut portion. As a result, the main body is attached so that the inner portion thereof is in close contact with the outer portion of the gas flow path forming device. In this way, the mounting of the main body is greatly simplified as compared with the conventional case.
【００１４】ここで、本体の中間層を構成する面発熱体
は、表面積が一定で抵抗値がガス流路形成機器の外側部
に対して一様となるので、内側部（電気的絶縁部材）を
介して機器全体を片寄ることなく加熱することができ
る。Here, since the surface heating element forming the intermediate layer of the main body has a constant surface area and a uniform resistance value with respect to the outer portion of the gas flow path forming device, the inner portion (electrically insulating member) is formed. It is possible to heat the entire device via the via without biasing.
【００１５】したがって、ガス流路形成機器は均一に加
熱される。また、このようにガス流路形成機器を均一加
熱することができるので，熱電対によって機器温度を検
出しなくても，発熱体に供給する電流値を増減すること
により精度よく温度管理することができる。さらに、ま
た、メッシュ状の面発熱体は、その一部が切れたとして
も加熱を停止してしまうようなことはない。その結果、
信頼性の向上および取付時間の短縮を図りつつガス流路
形成機器を均等に加熱することができる。Therefore, the gas flow path forming device is heated uniformly. Further, since the gas flow path forming device can be uniformly heated in this manner, it is possible to accurately control the temperature by increasing or decreasing the current value supplied to the heating element without detecting the device temperature by the thermocouple. it can. Furthermore, the mesh-shaped surface heating element does not stop heating even if a part thereof is cut. as a result,
It is possible to uniformly heat the gas flow path forming device while improving reliability and shortening installation time.
【００１６】[0016]
【実施例】本発明の一実施例を図面に基づき説明する。
本実施例に係るガス流路形成機器用加熱装置は、図１お
よび図２に示す如く，バルブ９を介して連結された半導
体材料用ガス配管（ステンレス製配管）５，５に適用さ
れており、電気加熱要素である円筒状で３層構造の本体
１０，１０と，この本体１０，１０の各面発熱体１２に
電流を供給するための電流供給手段２０とを含み構成さ
れている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings.
As shown in FIGS. 1 and 2, the heating device for a gas flow path forming device according to this embodiment is applied to semiconductor material gas pipes (stainless steel pipes) 5 and 5 connected via a valve 9. The main body 10 has a cylindrical three-layer structure, which is an electric heating element, and a current supply unit 20 for supplying a current to each surface heating element 12 of the main body 10, 10.
【００１７】ここで、本体１０は、配管５の外側部（す
なわち外径部）６に応じた内側部（すなわち内径部）を
有しかつ軸心方向に形成された切込部１５を広げて当該
配管外径部６に密着した状態で取付可能に形成されてい
る。Here, the main body 10 has an inside portion (that is, an inside diameter portion) corresponding to an outside portion (that is, an outside diameter portion) 6 of the pipe 5 and widens a cut portion 15 formed in the axial direction. It is formed so that it can be attached in close contact with the pipe outer diameter portion 6.
【００１８】そして、本体１０は、その内径部が電気絶
縁部材１１で形成され，また内径部より外側の中間層が
メッシュ状の面発熱体１２で形成され，さらに最外層が
保温部材１３で形成されている。本実施例においては、
電気絶縁部材１１は、高電気絶縁性および高クリーン性
を有するシリコンラバーより形成されている。また、面
発熱体１２は、多数の金属細線（本実施例ではステンレ
ス細線）を網目状に織り込んで形成されており，当該金
属細線によって形成される面は可撓性を有し表面積が一
定とされている。また、保温部材１３は、高保温性およ
び高クリーン性を有するシリコンスポンジより形成され
ている。The body 10 has an inner diameter portion formed of an electrically insulating member 11, an intermediate layer outside the inner diameter portion formed of a mesh-shaped surface heating element 12, and an outermost layer formed of a heat insulating member 13. Has been done. In this embodiment,
The electric insulating member 11 is made of silicon rubber having high electric insulation and high cleanliness. Further, the surface heating element 12 is formed by weaving a large number of fine metal wires (stainless steel fine wires in this embodiment) in a mesh shape, and the surface formed by the fine metal wires is flexible and has a constant surface area. Has been done. The heat insulating member 13 is made of a silicon sponge having high heat insulating properties and high cleanliness.
【００１９】また、電流供給手段２０は、本体１０の面
発熱体１２に電流を供給する手段である。なお、本実施
例では、各本体１０の面発熱体１２は、互いにコネクタ
１８，１９を介して分離可能に電気接続されている。The current supplying means 20 is means for supplying a current to the surface heating element 12 of the main body 10. In this embodiment, the surface heating element 12 of each main body 10 is electrically connected to each other so as to be separable via the connectors 18 and 19.
【００２０】次に、作用について説明する。本体１０
を、その切込部１５を広げ，その状態で当該切込部１５
を介して配管５に嵌め込む。これにより、本体１０は、
図２に示す如く，その内径部（電気的絶縁部材１１）が
配管５の外径部６と密着するように取り付けられる。Next, the operation will be described. Body 10
The cut portion 15 is expanded, and the cut portion 15 is
Fit into the pipe 5 via. Thereby, the main body 10 is
As shown in FIG. 2, the inner diameter portion (electrically insulating member 11) is attached so as to be in close contact with the outer diameter portion 6 of the pipe 5.
【００２１】こうして、配管５に取り付けられた本体１
０の面発熱体１２に、電流供給手段２０から電流を供給
すると、面発熱体１２が電流値に応じた熱量をもって発
熱し配管５を加熱する。ここで、本体１０の面発熱体１
２は、表面積が一定で抵抗値が配管外径部６に対して一
様となるので、内径部（電気的絶縁部材１１）を介して
配管５の被加熱部分全体を片寄ることなく加熱すること
ができる。Thus, the main body 1 attached to the pipe 5
When current is supplied from the current supply means 20 to the surface heating element 12 of 0, the surface heating element 12 generates heat with a heat quantity according to the current value and heats the pipe 5. Here, the surface heating element 1 of the main body 10
In No. 2, since the surface area is constant and the resistance value is uniform with respect to the pipe outer diameter portion 6, it is possible to heat the entire heated portion of the pipe 5 through the inner diameter portion (electrically insulating member 11) without deviation. You can
【００２２】したがって、配管５は均一加熱される。ま
た、このように配管５を均一加熱することができるの
で，熱電対によって配管温度を検出しなくても面発熱体
１２に供給する電流値で配管５の温度を精度よく管理す
ることができる。Therefore, the pipe 5 is uniformly heated. Further, since the pipe 5 can be uniformly heated in this manner, the temperature of the pipe 5 can be accurately controlled by the current value supplied to the surface heating element 12 without detecting the pipe temperature by the thermocouple.
【００２３】また、面発熱体１２は、多数の金属細線を
網目状に織り込んで形成されており，当該金属細線によ
って形成される面は可撓性を有し表面積が一定とされて
いるので、当該面発熱体１２の一部が切れたとしても加
熱を停止してしまうことはない。Further, the surface heating element 12 is formed by weaving a large number of fine metal wires in a mesh shape, and the surface formed by the fine metal wires is flexible and has a constant surface area. Even if a part of the surface heating element 12 is cut off, the heating is not stopped.
【００２４】その結果、信頼性の向上および施工時間の
短縮を図りつつ配管５を均等に加熱することができる。As a result, the pipe 5 can be heated uniformly while improving the reliability and shortening the construction time.
【００２５】また、この実施例では、本体１０の電気絶
縁部材１１をシリコンラバーより形成したので、ステン
レス製の配管５との電気絶縁が図られ，効率よく面発熱
体１２を発熱することができる。また、高クリーン化を
図ることができる。Further, in this embodiment, since the electric insulating member 11 of the main body 10 is formed of silicon rubber, it is electrically insulated from the stainless steel pipe 5, and the surface heating element 12 can efficiently generate heat. .. Further, high cleanliness can be achieved.
【００２６】また、保温部材１３をシリコンスポンジよ
り形成したので、高保温性および高クリーン性を保持す
ることができる。Further, since the heat retaining member 13 is made of silicon sponge, high heat retaining property and high cleanliness can be maintained.
【００２７】さらに、配管５に取り付けた複数の本体１
０をコネクタ１８，１９を用いて分離可能に電気接続す
ることができるので、取付・取外しが簡単となりメンテ
ナンス等を容易に行うことができる。Further, a plurality of main bodies 1 attached to the pipe 5
Since 0 can be separably electrically connected by using the connectors 18 and 19, attachment / detachment is easy and maintenance or the like can be easily performed.
【００２８】なお、より一層の安全性の向上を図るため
に，配管５の温度の異常上昇を電流値制御により防止す
るとともに、熱電対（図示省略）を付設し当該熱電対に
よる温度監視により二重に防止する構成としてもよい。In order to further improve safety, abnormal temperature rise of the pipe 5 is prevented by current value control, and a thermocouple (not shown) is attached to monitor the temperature by the thermocouple. It may be configured to prevent it seriously.
【００２９】なお、上記した実施例においては、本発明
をガス流路形成機器の代表的例である配管に適用した
が、他のガス流路形成機器（例えばバルブ，フィルタ
等）に対しても勿論適用できる。In the above-mentioned embodiments, the present invention is applied to the piping which is a typical example of the gas flow path forming device, but it can be applied to other gas flow path forming devices (for example, valves, filters, etc.). Of course applicable.
【００３０】[0030]
【発明の効果】本発明によれば、ガス流路形成機器の外
側部に応じた内側部を有しかつ切込部を広げて当該機器
外側部に密着した状態で取付可能な本体を備え、この本
体を、その内側部が絶縁部材で形成され，内側部より外
側の中間層がメッシュ状の面発熱体で形成され，さらに
最外層が保温部材で形成された３層構造とし、本体の面
発熱体に電流を供給するための電流供給手段を設けた構
成としたので、本体のガス流路形成機器への取付が従来
に比し大幅に簡単化される。また、本体の面発熱体は、
表面積が一定で抵抗値がガス流路形成機器外側部に対し
て一様となるので当該ガス流路形成機器を片寄ることな
く加熱することができる。また、このようにガス流路形
成機器を均一加熱することができるので，熱電対によっ
て配管温度を検出しなくても，発熱体に供給する電流値
を増減することにより機器温度を精度よく管理すること
ができる。さらに、メッシュ状の面発熱体は、その一部
が切れたとしても加熱を停止してしまうようなことはな
い。その結果、信頼性の向上および取付時間の短縮を図
りつつガス流路形成機器を均等に加熱することができ
る。According to the present invention, there is provided a main body which has an inner portion corresponding to the outer portion of the gas flow path forming device and which can be attached in a state in which the notch is widened and in close contact with the outer portion of the device. This main body has a three-layer structure in which the inner portion is formed of an insulating member, the intermediate layer outside the inner portion is formed of a mesh-shaped surface heating element, and the outermost layer is formed of a heat retaining member. Since the current supply means for supplying a current to the heating element is provided, the attachment of the main body to the gas flow path forming device is greatly simplified as compared with the prior art. Also, the surface heating element of the main body,
Since the surface area is constant and the resistance value is uniform with respect to the outer portion of the gas flow path forming device, the gas flow path forming device can be heated without being biased. Further, since the gas flow path forming device can be uniformly heated in this manner, the device temperature can be accurately controlled by increasing or decreasing the current value supplied to the heating element without detecting the pipe temperature by the thermocouple. be able to. Further, the mesh-shaped surface heating element does not stop heating even if a part thereof is cut. As a result, the gas flow path forming device can be heated uniformly while improving the reliability and shortening the installation time.
【図１】本発明の一実施例を示す横断面図である。FIG. 1 is a cross-sectional view showing an embodiment of the present invention.
【図２】一実施例に係るガス流路形成機器用加熱装置の
取付状況を説明するための図である。FIG. 2 is a diagram for explaining a mounting state of a heating device for a gas flow path forming device according to an embodiment.
１０ 本体 １１ 電気絶縁部材 １２ 面発熱体 １３ 保温部材 ２０ 電流供給手段 DESCRIPTION OF SYMBOLS 10 Main body 11 Electrical insulating member 12 Surface heating element 13 Heat insulating member 20 Current supply means
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 // Ｆ１６Ｋ 49/00 Ｂ 8311−3Ｈ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location // F16K 49/00 B 8311-3H
Claims (1)
部を有しかつ切込部を広げて当該機器外側部に密着した
状態で取付可能な本体を備え、 前記本体を、その内側部が絶縁部材で形成され，内側部
より外側の中間層がメッシュ状の面発熱体で形成され，
さらに最外層が保温部材で形成された３層構造とし、 前記本体の面発熱体に電流を供給するための電流供給手
段を設けたことを特徴とするガス流路形成機器用加熱装
置。1. A main body having an inner portion corresponding to an outer portion of a gas flow path forming device and being attachable in a state in which a cut portion is widened to be in close contact with the outer portion of the device, the main body being inside thereof. The part is formed of an insulating member, the intermediate layer outside the inner part is formed of a mesh-shaped surface heating element,
Further, the heating device for a gas flow path forming device is characterized in that the outermost layer has a three-layer structure in which a heat insulating member is formed, and a current supply means for supplying a current to the surface heating element of the main body is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4008825A JPH05198353A (en) | 1992-01-22 | 1992-01-22 | Heating device for gas passage forming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4008825A JPH05198353A (en) | 1992-01-22 | 1992-01-22 | Heating device for gas passage forming equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05198353A true JPH05198353A (en) | 1993-08-06 |
Family
ID=11703577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4008825A Pending JPH05198353A (en) | 1992-01-22 | 1992-01-22 | Heating device for gas passage forming equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05198353A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004353681A (en) * | 2003-05-26 | 2004-12-16 | Sumitomo Electric Ind Ltd | Baking method |
| JP2011112375A (en) * | 2009-11-24 | 2011-06-09 | Hitachi High-Technologies Corp | Thermostatic device and capillary electrophoretic apparatus |
| CN103704966A (en) * | 2013-12-29 | 2014-04-09 | 苏州市峰之火数码科技有限公司 | Insulating mobile phone case |
-
1992
- 1992-01-22 JP JP4008825A patent/JPH05198353A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004353681A (en) * | 2003-05-26 | 2004-12-16 | Sumitomo Electric Ind Ltd | Baking method |
| JP4528495B2 (en) * | 2003-05-26 | 2010-08-18 | 住友電気工業株式会社 | Baking method of heat insulation pipe for superconducting cable |
| JP2011112375A (en) * | 2009-11-24 | 2011-06-09 | Hitachi High-Technologies Corp | Thermostatic device and capillary electrophoretic apparatus |
| CN103704966A (en) * | 2013-12-29 | 2014-04-09 | 苏州市峰之火数码科技有限公司 | Insulating mobile phone case |
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