JPH05198283A - Ultraviolet lamp - Google Patents
Ultraviolet lampInfo
- Publication number
- JPH05198283A JPH05198283A JP2584792A JP2584792A JPH05198283A JP H05198283 A JPH05198283 A JP H05198283A JP 2584792 A JP2584792 A JP 2584792A JP 2584792 A JP2584792 A JP 2584792A JP H05198283 A JPH05198283 A JP H05198283A
- Authority
- JP
- Japan
- Prior art keywords
- ultraviolet
- lamp
- selenium
- tube
- rare gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052711 selenium Inorganic materials 0.000 claims abstract description 12
- 239000011669 selenium Substances 0.000 claims abstract description 12
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052740 iodine Inorganic materials 0.000 claims abstract description 11
- 239000011630 iodine Substances 0.000 claims abstract description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000010453 quartz Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 abstract description 18
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052786 argon Inorganic materials 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 21
- 229910052753 mercury Inorganic materials 0.000 description 16
- 238000009826 distribution Methods 0.000 description 6
- 238000000295 emission spectrum Methods 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- 238000000354 decomposition reaction Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000006552 photochemical reaction Methods 0.000 description 3
- 229910052724 xenon Inorganic materials 0.000 description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 239000005446 dissolved organic matter Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229940008718 metallic mercury Drugs 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000001223 reverse osmosis Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Discharge Lamp (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、短波長の紫外線を発生
する紫外線ランプに関し、特に、光化学反応、例えばガ
ス中の揮発性溶媒の分解や、水中の溶存有機物の分解、
さらに固体の塗布有機物の固化・分解除去などに用いら
れる短波長の紫外線を発生する紫外線ランプに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultraviolet lamp which emits ultraviolet rays of a short wavelength, and more particularly to a photochemical reaction such as decomposition of volatile solvent in gas or decomposition of dissolved organic matter in water,
Further, the present invention relates to an ultraviolet lamp that emits ultraviolet rays of a short wavelength used for solidifying, decomposing and removing solid coating organic matter.
【０００２】[0002]
【従来の技術】従来使用されている紫外線ランプは、金
属水銀を封入した水銀蒸気圧放電ランプが一般的で、そ
れには低圧水銀蒸気圧放電ランプ（以下、「低圧水銀ラ
ンプ」という。）と高圧水銀蒸気圧放電ランプ（以下、
「高圧水銀ランプ」という。）の２種類が使用されてい
る。高圧水銀ランプは、可視領域及び紫外領域に強い光
線を放射するので、照明に使用される外、紫外線を利用
する光化学反応用ランプとして使用されている。これに
対して、低圧水銀ランプは、可視領域の光線の放射が少
なく、相対的に紫外領域の光線の放射量が多いので、主
として光化学反応用ランプとして使用されている。2. Description of the Related Art Conventionally used ultraviolet lamps are generally mercury vapor pressure discharge lamps in which metallic mercury is sealed, and they include a low pressure mercury vapor pressure discharge lamp (hereinafter referred to as "low pressure mercury lamp") and a high pressure. Mercury vapor pressure discharge lamp (hereinafter,
It is called a "high pressure mercury lamp". ) Are used. Since the high-pressure mercury lamp emits a strong light ray in the visible region and the ultraviolet region, it is used not only for illumination but also as a photochemical reaction lamp utilizing ultraviolet rays. On the other hand, the low-pressure mercury lamp emits a small amount of light in the visible region and relatively emits a large amount of light in the ultraviolet region, and is therefore mainly used as a photochemical reaction lamp.
【０００３】紫外線の利用において、３３０〜２００ｎ
ｍの波長領域の紫外線は、化合物の合成、単量体の重合
や縮合反応に用いられ、電子部品の微細加工のために使
用するフォトレジストの露光や印刷用刷版の露光用の光
源として利用されている。２５４ｎｍ以下の短波長領域
の紫外線は、有機化合物の分解反応や微生物の殺菌の目
的などに使用されており、特に有機物を分解する目的に
は、分解線と呼ばれる強力なエネルギーを持つ２００ｎ
ｍ付近及びそれ以下の短波長の紫外線を必要とするの
で、水銀ランプが放射する全放射線中２００ｎｍ付近及
びそれ以下の波長をもつ紫外線が多く含まれる低圧水銀
ランプが使用される。In the use of ultraviolet rays, 330 to 200n
Ultraviolet rays in the wavelength range of m are used for compound synthesis, monomer polymerization and condensation reaction, and are used as a light source for exposure of photoresists used for fine processing of electronic parts and exposure of printing plates for printing. Has been done. Ultraviolet rays in the short wavelength region of 254 nm or less are used for the purpose of decomposition reaction of organic compounds and sterilization of microorganisms, and especially for the purpose of decomposing organic substances, 200n having a strong energy called decomposition line
Since a short-wavelength ultraviolet ray having a wavelength of about m or less is required, a low-pressure mercury lamp containing a large amount of ultraviolet rays having a wavelength of about 200 nm or less in the total radiation emitted by the mercury lamp is used.
【０００４】また、高圧水銀ランプは、２００ｎｍ以下
の紫外線も放射するが、主に放射するのはより波長の長
い可視光線及び２５４ｎｍ以上の紫外線であり、２００
ｎｍ以下の紫外線の放射はごく一部で、しかもこの領域
の紫外線は発光管内に高密度に充満している水銀蒸気に
吸収されてしまって、不必要な可視光線や熱に変換され
るので、有機物分解の目的に使用するにはエネルギー効
率が非常に悪い。The high-pressure mercury lamp also radiates ultraviolet rays having a wavelength of 200 nm or less, but mainly radiates visible light having a longer wavelength and ultraviolet rays having a wavelength of 254 nm or more.
Radiation of ultraviolet rays of nm or less is a very small amount, and the ultraviolet rays in this region are absorbed by the mercury vapor that is densely filled in the arc tube and are converted into unnecessary visible light and heat. It is very energy inefficient for use in the decomposition of organic matter.
【０００５】半導体・電子工業の洗浄工程で使用する超
純水を製造するには、水中に数百から千数百ｍｇ／リッ
トル含まれる全有機炭素（ＴＯＣ）を逆浸透膜（Ｒ
Ｏ）、イオン交換樹脂などで粗処理して数十ｍｇ／リッ
トルのレベル迄低減した後、紫外線反応槽とイオン交換
処理を経てＴＯＣをさらに５μｇ／リットル以下に分解
除去している。In order to produce ultrapure water used in the cleaning process of the semiconductor / electronics industry, total organic carbon (TOC) contained in water in the range of several hundreds to several thousand to several hundreds mg / liter is used as a reverse osmosis membrane (R).
O) and ion exchange resin are roughly treated to reduce the level to several tens of mg / liter, and then TOC is further decomposed and removed to 5 μg / liter or less through an ultraviolet reaction tank and an ion exchange treatment.
【０００６】上記超純水の製造におけるＴＯＣ低減のた
めの紫外線反応槽には、上記した紫外線ランプの特性に
基づいて、２００ｎｍ付近及びそれ以下の短波長の紫外
線を効率良く放射する低圧水銀ランプを使用するが、従
来常用されている低圧水銀ランプでは、例えば１８５ｎ
ｍの水銀輝線スペクトルの放射を例にとれば、この放射
線の出力は入力電力のわずか３％にすぎないのが実情で
あって、その効率はかなり低いものである。A low-pressure mercury lamp that efficiently radiates short-wavelength ultraviolet rays of around 200 nm and shorter wavelengths is used as an ultraviolet reaction tank for reducing TOC in the production of ultrapure water, based on the characteristics of the above-mentioned ultraviolet lamp. It is used, but in the conventional low pressure mercury lamp, for example, 185n
Taking the emission of the mercury emission line spectrum of m as an example, the output of this radiation is actually only 3% of the input power, and its efficiency is considerably low.
【０００７】[0007]
【発明が解決しようとする課題】本発明の課題は、短波
長紫外線、特に２００ｎｍ付近及びそれ以下の紫外線の
放射量を著しく増加させる紫外線ランプを提供すること
にある。SUMMARY OF THE INVENTION It is an object of the present invention to provide an ultraviolet lamp which significantly increases the radiation amount of short wavelength ultraviolet light, particularly ultraviolet light near 200 nm and below.
【０００８】[0008]
【課題を解決するための手段】本発明は、発光管内部に
従来の水銀に代えてセレン又はヨウ素の少なくとも１種
を稀ガスと共に封入すると、２００ｎｍ付近及びそれ以
下の短波長紫外線を効率良く発生することを見いだすこ
とによりなされたものである。すなわち、本発明は、次
の手段により前記の課題を解決した。 （１） 両端に電極を封着した紫外線透過性の石英管内
に、セレン又はヨウ素の少なくとも１種及び希ガスが封
入されていることを特徴とする紫外線ランプ。According to the present invention, when at least one kind of selenium or iodine is enclosed together with a rare gas in the arc tube in place of conventional mercury, a short-wavelength ultraviolet ray of about 200 nm or less is efficiently generated. It was done by finding out what to do. That is, the present invention has solved the above problems by the following means. (1) An ultraviolet lamp characterized in that at least one kind of selenium or iodine and a rare gas are enclosed in an ultraviolet-transparent quartz tube having electrodes sealed at both ends.
【０００９】本発明では、石英管内にはセレン、ヨウ
素、又はセレンとヨウ素との併用物のいずれかと稀ガス
とが封入される。その発光管に封入するセレン、ヨウ素
と稀ガスの量は、安定な放電状態を維持するのに必要な
量であればよい。特に、セレン又はヨウ素の封入量は、
安定な放電状態を維持することができる範囲で少ないほ
ど、２００ｎｍ付近及びそれ以下の短波長紫外線の発生
効率が向上する。しかし、これらの封入量は併用する稀
ガスの種類、稀ガスの封入量、及び発光管に付与する管
電圧、管電流などにも影響される。In the present invention, a rare gas and either selenium, iodine, or a combination of selenium and iodine are enclosed in the quartz tube. The amount of selenium, iodine and rare gas sealed in the arc tube may be any amount required to maintain a stable discharge state. In particular, the amount of selenium or iodine enclosed is
The smaller the range in which a stable discharge state can be maintained, the higher the efficiency of generation of short-wavelength ultraviolet light around 200 nm and below. However, the filling amount of these is also influenced by the type of rare gas used together, the filling amount of the rare gas, the tube voltage applied to the arc tube, the tube current, and the like.
【００１０】封入する稀ガスとしては、良く知られてい
るキセノン、アルゴン、ネオンなどを用い、その封入量
は数ｔｏｒｒ〜１００ｔｏｒｒ程度でよい。図面により
本発明を具体的に説明すると、図１は、本発明の紫外線
ランプを示し、両端を閉じた、紫外線を透過する石英ガ
ラス管１内に一対の電極２１、２２が対向する位置に配
置されている。これらの電極２１及び２２はそれぞれ導
線３１及び３２によって点灯装置４を介して電源５に接
続されている。そして、この石英ガラス管１内は減圧状
態に保たれ、それにセレン又はヨウ素の少なくとも１種
と稀ガスとが封入されている。As the rare gas to be sealed, well-known xenon, argon, neon, etc. are used, and the sealed amount may be several torr to 100 torr. The present invention will be described in detail with reference to the drawings. FIG. 1 shows an ultraviolet lamp of the present invention, in which a pair of electrodes 21 and 22 are arranged in a quartz glass tube 1 having both ends closed and transmitting ultraviolet rays so as to face each other. Has been done. These electrodes 21 and 22 are connected to the power source 5 via the lighting device 4 by the conducting wires 31 and 32, respectively. The inside of the quartz glass tube 1 is kept under reduced pressure, and at least one of selenium or iodine and a rare gas are enclosed therein.
【００１１】[0011]
【実施例】以下、実施例により本発明を具体的に説明す
る。ただし、本発明はこれらの実施例のみに限定される
ものではない。 実施例１ 電極間距離２５０ｍｍ、管内径１５．５ｍｍの石英ガラ
ス管１内にセレン４．０ｍｇと９０ｔｏｒｒのキセノン
ガスを封入したランプＡを電流値２．９Ａ、電圧値９０
Ｖで点灯して、窒素雰囲気下で発光スペクトル分布を測
定した。その測定結果を図２に示す。 実施例２ 実施例１と同じ石英管１内にヨウ素３．３ｍｇと９０ｔ
ｏｒｒのキセノンガスを封入したランプＢを電流値２．
０５Ａ、電圧値１０８Ｖで点灯して、同じく窒素雰囲気
下で発光スペクトル分布を測定した。その測定結果を図
３に示す。 参考例 実施例１と同じ石英管１に水銀２０ｍｇ、２．５ｔｏｒ
ｒのアルゴンガスを封入した低圧水銀ランプを点灯し
て、その発光スペクトル分布を測定した。その測定結果
を図４に示す。なお、その時の点灯条件は電流値０．３
Ａ、電圧値５５Ｖである。EXAMPLES The present invention will be specifically described below with reference to examples. However, the present invention is not limited to these examples. Example 1 A lamp A in which 4.0 mg of selenium and 90 torr of xenon gas were enclosed in a quartz glass tube 1 having an electrode distance of 250 mm and a tube inner diameter of 15.5 mm had a current value of 2.9 A and a voltage value of 90.
It was turned on at V and the emission spectrum distribution was measured under a nitrogen atmosphere. The measurement result is shown in FIG. Example 2 3.3 mg of iodine and 90 t were placed in the same quartz tube 1 as in Example 1.
A lamp B filled with xenon gas of orr has a current value of 2.
Lighting was performed at 05 A and a voltage value of 108 V, and the emission spectrum distribution was measured in the same nitrogen atmosphere. The measurement result is shown in FIG. Reference Example Mercury 20 mg, 2.5 torr in the same quartz tube 1 as in Example 1.
A low-pressure mercury lamp filled with argon gas of r was turned on and its emission spectrum distribution was measured. The measurement result is shown in FIG. The lighting condition at that time is 0.3
A, the voltage value is 55V.
【００１２】前記の測定結果を示す図２、図３及び図４
は、図４の低圧水銀ランプの２５４ｎｍの波長における
強度を１００としたときの相対強度で示しているが、図
２及び図３を図４と比較すれば、セレン又はヨウ素と稀
ガスとを封入した本発明の紫外線ランプは、従来の低圧
水銀ランプに比較して２００ｎｍ付近及びそれ以下の短
波長紫外線の放射量が著しく増加したことがわかる。FIG. 2, FIG. 3 and FIG. 4 showing the above measurement results.
Shows the relative intensity when the intensity at the wavelength of 254 nm of the low-pressure mercury lamp in FIG. 4 is 100, but comparing FIGS. 2 and 3 with FIG. 4, selenium or iodine and a rare gas are enclosed. It can be seen that the ultraviolet lamp of the present invention markedly increased the radiation amount of short-wave ultraviolet light having a wavelength of about 200 nm or less as compared with the conventional low-pressure mercury lamp.
【００１３】[0013]
【発明の効果】本発明によれば、２００ｎｍ付近及びそ
れ以下の短波長紫外線の放射量を著しく増加させること
ができる。このため、２００ｎｍ付近及びそれ以下の短
波長紫外線を照射する必要がある各種反応などの種々の
用途に対して非常に有用である。EFFECTS OF THE INVENTION According to the present invention, it is possible to remarkably increase the radiation amount of short wavelength ultraviolet light having a wavelength of about 200 nm or less. Therefore, it is very useful for various applications such as various reactions that require irradiation with short wavelength ultraviolet rays of around 200 nm or less.
【図１】本発明の紫外線ランプの構造を表す模式図を示
す。FIG. 1 is a schematic view showing the structure of an ultraviolet lamp of the present invention.
【図２】実施例１のランプＡの発光スペクトル分布図を
示す。2 shows an emission spectrum distribution chart of the lamp A of Example 1. FIG.
【図３】実施例２のランプＢの発光スペクトル分布図を
示す。FIG. 3 shows an emission spectrum distribution chart of a lamp B of Example 2.
【図４】従来の低圧水銀ランプの発光スペクトル分布図
を示す。FIG. 4 shows an emission spectrum distribution chart of a conventional low-pressure mercury lamp.
１ 石英ガラス管 ２１ 電極 ２２ 電極 ３１ 導線 ３２ 導線 ４ 点灯装置 ５ 電源 1 Quartz glass tube 21 Electrode 22 Electrode 31 Conductor 32 Conductor 4 Lighting device 5 Power supply
Claims (1)
英管内に、セレン又はヨウ素の少なくとも１種及び希ガ
スが封入されていることを特徴とする紫外線ランプ。1. An ultraviolet lamp, characterized in that at least one kind of selenium or iodine and a rare gas are enclosed in an ultraviolet-transparent quartz tube having electrodes sealed at both ends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2584792A JPH05198283A (en) | 1992-01-17 | 1992-01-17 | Ultraviolet lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2584792A JPH05198283A (en) | 1992-01-17 | 1992-01-17 | Ultraviolet lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05198283A true JPH05198283A (en) | 1993-08-06 |
Family
ID=12177238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2584792A Pending JPH05198283A (en) | 1992-01-17 | 1992-01-17 | Ultraviolet lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05198283A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6528946B2 (en) | 1997-06-06 | 2003-03-04 | Harison Toshiba Lighting Corp. | Compact-type metal halide discharge lamp |
| EP1463091A2 (en) * | 2003-02-17 | 2004-09-29 | KAAS, Povl | UV-optimised discharge lamp with electrodes |
-
1992
- 1992-01-17 JP JP2584792A patent/JPH05198283A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6528946B2 (en) | 1997-06-06 | 2003-03-04 | Harison Toshiba Lighting Corp. | Compact-type metal halide discharge lamp |
| US6873109B2 (en) | 1997-06-06 | 2005-03-29 | Harison Toshiba Lighting Corporation | Metal halide discharge lamp, lighting device for metal halide discharge lamp, and illuminating apparatus using metal halide discharge lamp |
| US7057349B2 (en) | 1997-06-06 | 2006-06-06 | Harison Toshiba Lighting Corporation | Lightening device for metal halide discharge lamp |
| EP1463091A2 (en) * | 2003-02-17 | 2004-09-29 | KAAS, Povl | UV-optimised discharge lamp with electrodes |
| EP1463091A3 (en) * | 2003-02-17 | 2008-01-09 | KAAS, Povl | UV-optimised discharge lamp with electrodes |
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