JPH051900B2 - - Google Patents

Info

Publication number: JPH051900B2
Authority: JP; Japan
Prior art keywords: ceramic; particles; thick film; substrate; particle size
Prior art date: 1984-09-04
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP59183818A

Other languages

English (en)

Japanese (ja)

Other versions

JPS6162854A (ja

Inventor

Takao Kojima

Akira Nakano

Toshitaka Matsura

Akio Takami

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Niterra Co Ltd

Original Assignee

NGK Spark Plug Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-09-04

Filing date

1984-09-04

Publication date

1993-01-11

1984-09-04 Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd

1984-09-04 Priority to JP18381884A priority Critical patent/JPS6162854A/ja

1984-10-25 Priority to DE8484112859T priority patent/DE3479053D1/de

1984-10-25 Priority to US06/664,872 priority patent/US4688015A/en

1984-10-25 Priority to EP84112859A priority patent/EP0140340B1/en

1986-03-31 Publication of JPS6162854A publication Critical patent/JPS6162854A/ja

1986-06-30 Priority to US06/880,013 priority patent/US4720394A/en

1993-01-11 Publication of JPH051900B2 publication Critical patent/JPH051900B2/ja

Status Granted legal-status Critical Current

Links

239000000919 ceramic Substances 0.000 claims description 61
239000002245 particle Substances 0.000 claims description 52
239000000758 substrate Substances 0.000 claims description 44
229910044991 metal oxide Inorganic materials 0.000 claims description 11
150000004706 metal oxides Chemical class 0.000 claims description 11
238000000034 method Methods 0.000 claims description 7
229910052751 metal Inorganic materials 0.000 claims description 4
239000002184 metal Substances 0.000 claims description 4
230000003647 oxidation Effects 0.000 claims description 2
238000007254 oxidation reaction Methods 0.000 claims description 2
239000010410 layer Substances 0.000 description 13
239000000463 material Substances 0.000 description 10
239000004065 semiconductor Substances 0.000 description 9
239000008187 granular material Substances 0.000 description 8
239000011361 granulated particle Substances 0.000 description 7
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 7
239000000843 powder Substances 0.000 description 6
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
238000000151 deposition Methods 0.000 description 4
238000001514 detection method Methods 0.000 description 4
238000007788 roughening Methods 0.000 description 4
238000005245 sintering Methods 0.000 description 4
229910010413 TiO 2 Inorganic materials 0.000 description 3
238000009933 burial Methods 0.000 description 3
238000010586 diagram Methods 0.000 description 3
239000006185 dispersion Substances 0.000 description 3
230000000694 effects Effects 0.000 description 3
239000010419 fine particle Substances 0.000 description 3
229910052697 platinum Inorganic materials 0.000 description 3
238000007639 printing Methods 0.000 description 3
229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
239000000654 additive Substances 0.000 description 2
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
230000000052 comparative effect Effects 0.000 description 2
238000007796 conventional method Methods 0.000 description 2
239000013078 crystal Substances 0.000 description 2
238000009413 insulation Methods 0.000 description 2
238000004519 manufacturing process Methods 0.000 description 2
239000012528 membrane Substances 0.000 description 2
239000011812 mixed powder Substances 0.000 description 2
239000000203 mixture Substances 0.000 description 2
239000003960 organic solvent Substances 0.000 description 2
230000035939 shock Effects 0.000 description 2
239000002002 slurry Substances 0.000 description 2
239000007921 spray Substances 0.000 description 2
238000012360 testing method Methods 0.000 description 2
OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
239000001856 Ethyl cellulose Substances 0.000 description 1
ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
239000004372 Polyvinyl alcohol Substances 0.000 description 1
229910052581 Si3N4 Inorganic materials 0.000 description 1
229910004298 SiO 2 Inorganic materials 0.000 description 1
239000000853 adhesive Substances 0.000 description 1
230000001070 adhesive effect Effects 0.000 description 1
239000000956 alloy Substances 0.000 description 1
229910045601 alloy Inorganic materials 0.000 description 1
-1 alumina Chemical class 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
239000011230 binding agent Substances 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
239000003990 capacitor Substances 0.000 description 1
238000005266 casting Methods 0.000 description 1
239000003985 ceramic capacitor Substances 0.000 description 1
238000005524 ceramic coating Methods 0.000 description 1
239000011247 coating layer Substances 0.000 description 1
PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
230000007797 corrosion Effects 0.000 description 1
238000005260 corrosion Methods 0.000 description 1
230000008021 deposition Effects 0.000 description 1
238000011161 development Methods 0.000 description 1
KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
238000007606 doctor blade method Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
229920001249 ethyl cellulose Polymers 0.000 description 1
235000019325 ethyl cellulose Nutrition 0.000 description 1
238000010304 firing Methods 0.000 description 1
229910052839 forsterite Inorganic materials 0.000 description 1
239000000446 fuel Substances 0.000 description 1
239000011521 glass Substances 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
238000005469 granulation Methods 0.000 description 1
230000003179 granulation Effects 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
238000009863 impact test Methods 0.000 description 1
230000001771 impaired effect Effects 0.000 description 1
239000007788 liquid Substances 0.000 description 1
HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
238000005259 measurement Methods 0.000 description 1
238000004377 microelectronic Methods 0.000 description 1
238000002156 mixing Methods 0.000 description 1
229910052863 mullite Inorganic materials 0.000 description 1
229910052763 palladium Inorganic materials 0.000 description 1
229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
229920002451 polyvinyl alcohol Polymers 0.000 description 1
238000003825 pressing Methods 0.000 description 1
239000001294 propane Substances 0.000 description 1
239000011253 protective coating Substances 0.000 description 1
230000001681 protective effect Effects 0.000 description 1
238000004080 punching Methods 0.000 description 1
229910052703 rhodium Inorganic materials 0.000 description 1
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
239000002904 solvent Substances 0.000 description 1
229910052596 spinel Inorganic materials 0.000 description 1
239000011029 spinel Substances 0.000 description 1
238000005507 spraying Methods 0.000 description 1
239000000126 substance Substances 0.000 description 1
230000003746 surface roughness Effects 0.000 description 1
239000000725 suspension Substances 0.000 description 1
229910000859 α-Fe Inorganic materials 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Electrochemistry (AREA)
Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

JP18381884A 1983-10-28 1984-09-04 金属酸化物厚膜を担持した、セラミツク基板 Granted JPS6162854A (ja)

Priority Applications (5)

Application Number	Priority Date	Filing Date	Title
JP18381884A JPS6162854A (ja)	1984-09-04	1984-09-04	金属酸化物厚膜を担持した、セラミツク基板
DE8484112859T DE3479053D1 (en)	1983-10-28	1984-10-25	Gas sensor with ceramics substrate and method for producing the same
US06/664,872 US4688015A (en)	1983-10-28	1984-10-25	Gas sensor with ceramics substrate having surface-carried ceramics particles
EP84112859A EP0140340B1 (en)	1983-10-28	1984-10-25	Gas sensor with ceramics substrate and method for producing the same
US06/880,013 US4720394A (en)	1983-10-28	1986-06-30	Gas sensor with ceramics substrate and method for producing the same

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP18381884A JPS6162854A (ja)	1984-09-04	1984-09-04	金属酸化物厚膜を担持した、セラミツク基板

Publications (2)

Publication Number	Publication Date
JPS6162854A JPS6162854A (ja)	1986-03-31
JPH051900B2 true JPH051900B2 (ko)	1993-01-11

Family

ID=16142393

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP18381884A Granted JPS6162854A (ja)	1983-10-28	1984-09-04	金属酸化物厚膜を担持した、セラミツク基板

Country Status (1)

Country	Link
JP (1)	JPS6162854A (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0542372Y2 (ko) *	1987-06-05	1993-10-26
JPH01132947A (ja) *	1987-11-18	1989-05-25	Toyota Motor Corp	金属酸化物半導体被膜付きセラミック基板とその製法
US8026787B2 (en) *	2006-03-10	2011-09-27	Joinset Co., Ltd.	Ceramic component element and ceramic component and method for the same
JP5021377B2 (ja) *	2006-06-16	2012-09-05	日本特殊陶業株式会社	ガスセンサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS50155293A (ko) *	1974-06-04	1975-12-15
JPS5288098A (en) *	1976-01-17	1977-07-22	Murata Manufacturing Co	Gas detecting element

1984
- 1984-09-04 JP JP18381884A patent/JPS6162854A/ja active Granted

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS50155293A (ko) *	1974-06-04	1975-12-15
JPS5288098A (en) *	1976-01-17	1977-07-22	Murata Manufacturing Co	Gas detecting element

Also Published As

Publication number	Publication date
JPS6162854A (ja)	1986-03-31

Publication	Publication Date	Title
US4688015A (en)	1987-08-18	Gas sensor with ceramics substrate having surface-carried ceramics particles
JP4758117B2 (ja)	2011-08-24	ガスセンサー素子およびその製造方法
JPH07270375A (ja)	1995-10-20	複合タイル製検出素子を含む排気ガスセンサーおよびその製造方法
JPS5845148B2 (ja)	1983-10-07	放電装置
US5110442A (en)	1992-05-05	Reinforced electrolyte function elements
US4340635A (en)	1982-07-20	Ceramic substrate for fine-line electrical circuitry
JPH051900B2 (ko)	1993-01-11
US5476003A (en)	1995-12-19	Measuring sensor for determining gas compositions
JPH0582550B2 (ko)	1993-11-19
EP0166445B1 (en)	1989-09-06	Reinforced zirconia-base sintered body, process for producing the same, and plate-like zirconia-base electrolyte function element
US6636142B2 (en)	2003-10-21	Sensor element, in particular a temperature sensor
JP4084626B2 (ja)	2008-04-30	電極形成用ペーストおよびそれを用いた酸素センサ
KR20220040634A (ko)	2022-03-31	일체형 가스센서 어셈블리 및 이의 제조방법
US4631160A (en)	1986-12-23	Method of manufacturing ceramic substrate for fine-line electrical circuitry
JPH0437939B2 (ko)	1992-06-22
JP2002365258A (ja)	2002-12-18	ガスセンサ素子及びその製造方法並びにガスセンサ
JP2898106B2 (ja)	1999-05-31	サーミスタセラミックスセンサ及びその製造方法
JP4113479B2 (ja)	2008-07-09	酸素センサ素子
JPH0417375B2 (ko)	1992-03-25
JP4822606B2 (ja)	2011-11-24	セラミックチップヒータ及びそれを用いた素子加熱型センサ
JP4700214B2 (ja)	2011-06-15	酸素センサ素子およびその製造方法
JP2591206B2 (ja)	1997-03-19	サーミスタ
JP4744043B2 (ja)	2011-08-10	空燃比センサ素子
JP4698041B2 (ja)	2011-06-08	空燃比センサ素子
JPH07167714A (ja)	1995-07-04	温度センサ及びその製造方法