JPH05175568A - Production of piezoelectric bimorph - Google Patents
Production of piezoelectric bimorphInfo
- Publication number
- JPH05175568A JPH05175568A JP3354534A JP35453491A JPH05175568A JP H05175568 A JPH05175568 A JP H05175568A JP 3354534 A JP3354534 A JP 3354534A JP 35453491 A JP35453491 A JP 35453491A JP H05175568 A JPH05175568 A JP H05175568A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- adhesive
- ceramics
- cured
- piezoelectric bimorph
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Adhesives Or Adhesive Processes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はアクチュエータ、振動子
として用いられる圧電バイモルフの製造法に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a piezoelectric bimorph used as an actuator or a vibrator.
【０００２】[0002]
【従来の技術】一般に圧電バイモルフは、両面に電極を
付与した２枚の圧電セラミックスを、中間電極材として
かつ機械的な補強材として作用する金属板であるシム板
を介在させて貼り合わせた構造を有している。シム板と
圧電セラミックスに付与された電極との間には接着剤の
層が存在するが、シム板の表面は予めサンドペーパー等
により荒らされており、シム板と電極とは部分的に点接
触することによって電気的に短絡している（図１参
照）。通常、接着剤としてはエポキシ、エポキシ−フェ
ノール系といった有機系接着剤が用いられているが、接
着剤層における電圧降下をより小さくして圧電セラミッ
クスにかかる電圧を大きくするために、銀粉末などの導
電性フィラーを含有する導電性有機接着剤を使用する場
合もある。2. Description of the Related Art Generally, a piezoelectric bimorph has a structure in which two piezoelectric ceramics having electrodes provided on both surfaces are bonded together with a shim plate which is a metal plate acting as an intermediate electrode material and acting as a mechanical reinforcing material. have. An adhesive layer exists between the shim plate and the electrode applied to the piezoelectric ceramics, but the surface of the shim plate has been roughened beforehand with sandpaper, etc., and the shim plate and the electrode are partially in point contact. By doing so, they are electrically short-circuited (see FIG. 1). Usually, an organic adhesive such as epoxy or epoxy-phenol is used as the adhesive, but in order to reduce the voltage drop in the adhesive layer and increase the voltage applied to the piezoelectric ceramics, silver powder or the like is used. In some cases, a conductive organic adhesive containing a conductive filler is used.
【０００３】圧電バイモルフの設計においては圧電セラ
ミックスの横方向の伸縮をいかに有効に屈曲変位に変換
するかが大切であり、接着剤の選択は非常に重要である
が、接着剤の硬化物硬度と圧電バイモルフの屈曲変位量
との関係はその詳細は明らかでない。しかし、圧電セラ
ミックスの伸縮を効率よく屈曲変位に変換するには比較
的硬い接着剤が有効であると考えられており、例えばジ
ュロメーターでＤ８０程度のものが広く使用されてい
る。In designing a piezoelectric bimorph, it is important to effectively convert lateral expansion and contraction of piezoelectric ceramics into bending displacement, and selection of an adhesive is very important. The details of the relationship with the bending displacement of the piezoelectric bimorph are not clear. However, it is considered that a relatively hard adhesive is effective for efficiently converting the expansion and contraction of the piezoelectric ceramics into a bending displacement, and for example, a durometer of about D80 is widely used.
【０００４】また、圧電バイモルフの屈曲変位量を大き
なものにする場合、優れた圧電特性を示す圧電セラミッ
クスを用いることは当然であり、特に静電容量の大きな
ものを用いることは非常に有効である。圧電バイモルフ
の静電容量は、例えばパラレル型の場合（図２参照）、
単純には、貼り合わせた２枚の圧電セラミックスの静電
容量の和になる。しかしながら、前記の観点に基づき選
択、使用している硬度の高い接着剤を用いた場合、接着
剤の硬化に伴い２枚の圧電セラミックスの静電容量の和
に比べ実際に得られる圧電バイモルフの静電容量は２０
〜３０％減少した値となり、優れた特性を示す圧電セラ
ミックスを使用しても屈曲変位量は期待される値に比べ
て小さなものになってしまう。When the flexural displacement of the piezoelectric bimorph is increased, it is natural to use piezoelectric ceramics having excellent piezoelectric characteristics, and it is very effective to use piezoelectric ceramics having a large capacitance. .. The capacitance of the piezoelectric bimorph is, for example, in the case of the parallel type (see FIG. 2),
Simply, it is the sum of the electrostatic capacities of the two bonded piezoelectric ceramics. However, when an adhesive having high hardness, which is selected and used based on the above viewpoint, is used, as the adhesive hardens, the static capacitance of the piezoelectric bimorph that is actually obtained is higher than the sum of the electrostatic capacitances of the two piezoelectric ceramics. The electric capacity is 20
The value is reduced by -30%, and the bending displacement amount becomes smaller than the expected value even if the piezoelectric ceramic having excellent characteristics is used.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、従来の前記
問題点を解決し、大きな屈曲変位量を示す圧電バイモル
フの製造法を提供するものである。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the prior art and provides a method for manufacturing a piezoelectric bimorph exhibiting a large amount of bending displacement.
【０００６】[0006]
【課題を解決するための手段】本発明者らは鋭意検討を
行った結果、本発明に到達した。すなわち本発明は、シ
ム板と圧電セラミックスの接合において硬化した接着剤
の硬度がジュロメーターでＤ５０以下、Ａ２０以上であ
る接着剤を使用することによって、接着剤の硬化に伴う
圧電セラミックスの静電容量の低下を抑制し、接合後の
圧電バイモルフの静電容量を大きくすることを特徴とす
る圧電バイモルフの製造法に関するものである。The present inventors have arrived at the present invention as a result of intensive studies. That is, according to the present invention, by using an adhesive which has a hardness of D50 or less and A20 or more as measured by a durometer in the bonding of the shim plate and the piezoelectric ceramic, the capacitance of the piezoelectric ceramic due to the curing of the adhesive is increased. The present invention relates to a method for manufacturing a piezoelectric bimorph, which is characterized in that the capacitance of the piezoelectric bimorph after joining is increased and the capacitance of the piezoelectric bimorph is increased.
【０００７】圧電バイモルフの変位量を大きなものにす
るためには、圧電セラミックスの横方向の伸縮が効率よ
く屈曲変位に変換されることと同時に、接着剤の硬化に
伴う静電容量の低下を最小限に抑えて圧電セラミックス
の特性を十分に生かすことが可能となる接着剤の選択が
重要となる。屈曲変位への高効率化を達成するには硬化
した接着剤の硬度が大きいものが有効であることは知ら
れているが、本発明者らは接着剤の硬化したときの硬度
と硬化に伴う静電容量の低下の大きさの関係を詳細に検
討した結果、硬化したときの硬度の小さいものほど静電
容量の低下を抑制するのに有効であることを見出した。
しかしながら極端に接着剤の硬度が小さい場合は、屈曲
変位への変換効率が著しく低下するため、変位量の大き
な圧電バイモルフを得るには、ある一定範囲の硬度を有
する接着剤に限り有効となる。In order to make the displacement amount of the piezoelectric bimorph large, the expansion and contraction of the piezoelectric ceramic in the lateral direction can be efficiently converted into the bending displacement, and at the same time, the decrease of the electrostatic capacitance due to the curing of the adhesive agent must be minimized. It is important to select an adhesive that can limit the use of the characteristics of piezoelectric ceramics to the full. It is known that a cured adhesive having a high hardness is effective in achieving high efficiency in bending displacement, but the present inventors have found that the hardness of the adhesive when cured and the curing As a result of detailed examination of the relationship between the magnitude of the decrease in capacitance, it was found that the one having a smaller hardness when cured is more effective in suppressing the decrease in capacitance.
However, when the hardness of the adhesive is extremely small, the conversion efficiency into bending displacement is significantly reduced, and therefore, in order to obtain a piezoelectric bimorph having a large amount of displacement, only an adhesive having a certain range of hardness is effective.
【０００８】[0008]
【実施例】次に本発明を実施例により説明する。尚、接
着剤の硬化時の硬度は、ＪＩＳＫ ７２１５ に従い、
直径５０ｍｍ、厚さ１５ｍｍのペレットを成型し、タイ
プＤの場合は、荷重１０ｋｇｆで、タイプＡの場合は、
荷重１ｋｇｆで測定した。EXAMPLES Next, the present invention will be described with reference to examples. The hardness of the adhesive when cured is in accordance with JIS K7215.
A pellet having a diameter of 50 mm and a thickness of 15 mm is molded. In the case of type D, the load is 10 kgf, and in the case of type A,
The load was measured at 1 kgf.
【０００９】実施例１ 鉛、チタン、ジルコニウム、ニッケル、亜鉛、ニオブを
主成分とする複酸化物粉末に、有機溶剤、バインダー、
分散剤、可塑剤を添加してスラリー化し、ドクターブレ
ード法によりシート成形し、グリーンシートを得た。円
盤状に切り出したグリーンシートを大気中にて１２００
℃に２時間保持して焼結させた。この焼結体を直径４５
ｍｍ、厚さ０．２５ｍｍの円盤状に機械加工し、銀電極
を付与し、さらに分極処理を施して圧電セラミックスを
得た。ベクトルインピーダンスメーターを用いて、１ｋ
Ｈｚでの静電容量、および電気機械結合係数ｋｐ値を測
定した結果、各々２５０ｎＦ、５８％であった。Example 1 A double oxide powder containing lead, titanium, zirconium, nickel, zinc, and niobium as main components, an organic solvent, a binder,
A dispersant and a plasticizer were added to form a slurry, which was formed into a sheet by the doctor blade method to obtain a green sheet. A green sheet cut into a disc is 1200 in the air.
The temperature was kept at 2 ° C. for 2 hours for sintering. This sintered body has a diameter of 45
mm, and a thickness of 0.25 mm was machined into a disk shape, a silver electrode was provided, and polarization treatment was performed to obtain a piezoelectric ceramics. 1k using a vector impedance meter
As a result of measuring the electrostatic capacity at Hz and the electromechanical coupling coefficient kp value, they were 250 nF and 58%, respectively.
【００１０】直径４４ｍｍ、厚さ０．１ｍｍで一部リー
ド線の取り付け部があるリン青銅板の両面を＃１００の
サンドペーパーで荒らしたものをシム板として用いた。
圧電セラミックスの一方の面に、硬化したときの硬度が
ジュロメーターでＤ４０のエポキシ接着剤を印刷したも
の２枚用意した。この時、２枚の圧電セラミックスには
圧電バイモルフがパラレル型として作動するように接着
剤を塗布した。シム板の両面に圧電セラミックスを貼り
合わせ、１００℃に２時間保持して硬化させた。なお、
接着剤の塗布量は４ｍｇ／ｃｍ２とした。As a shim plate, a phosphor bronze plate having a diameter of 44 mm, a thickness of 0.1 mm and a part to which lead wires were attached was roughened with # 100 sandpaper on both sides and used as a shim plate.
Two sheets were prepared by printing an epoxy adhesive having a hardness of D40 on one surface of the piezoelectric ceramic with a durometer. At this time, an adhesive was applied to the two piezoelectric ceramics so that the piezoelectric bimorph could operate in parallel. Piezoelectric ceramics were adhered to both sides of the shim plate and held at 100 ° C. for 2 hours to cure. In addition,
The amount of adhesive applied was 4 mg / cm 2.
【００１１】実施例２ 実施例１において使用した接着剤の代わりに硬化したと
きの硬度がＡ６０のエポキシ接着剤を用いた。Example 2 Instead of the adhesive used in Example 1, an epoxy adhesive having a hardness of A60 when cured was used.
【００１２】実施例３ 実施例１において使用した接着剤の代わりに硬化したと
きの硬度がＡ３０のエポキシ接着剤を用いた。Example 3 Instead of the adhesive used in Example 1, an epoxy adhesive having a hardness of A30 when cured was used.
【００１３】実施例１〜３で得た圧電セラミックスとシ
ム板の一体物にリード線をはんだ付けして圧電バイモル
フを得た。これを図３に示す位置で固定し、＋１００Ｖ
及び−１００Ｖの直流電圧を印加した時の中央部のそれ
ぞれの変位の差を、渦電流方式の非接触変位測定器を用
いて測定した。又、このものの１ｋＨｚにおける静電容
量をベクトルインピーダンスメーターを用いて測定し
た。この測定結果を表１に示す。Lead wires were soldered to the integrated body of the piezoelectric ceramics and shim plates obtained in Examples 1 to 3 to obtain piezoelectric bimorphs. Fix this at the position shown in Fig. 3, and add + 100V.
And a difference in displacement between the central portions when a DC voltage of −100 V was applied was measured using an eddy current type non-contact displacement measuring instrument. The capacitance of this product at 1 kHz was measured using a vector impedance meter. The measurement results are shown in Table 1.
【００１４】比較例１ 実施例１で使用した接着剤の代わりに硬化したときの硬
度がＤ８０のエポキシ接着剤を用いて圧電バイモルフを
製造した。Comparative Example 1 A piezoelectric bimorph was produced using an epoxy adhesive having a hardness of D80 when cured instead of the adhesive used in Example 1.
【００１５】比較例２ 実施例１で使用した接着剤の代わりに硬化したときの硬
度がＤ６０のエポキシ接着剤を用いて圧電バイモルフを
製造した。Comparative Example 2 A piezoelectric bimorph was produced using an epoxy adhesive having a hardness of D60 when cured instead of the adhesive used in Example 1.
【００１６】比較例３ 実施例１で使用した接着剤の代わりに硬化したときの硬
度がＡ１０のエポキシ接着剤を用いて圧電バイモルフを
製造した。Comparative Example 3 A piezoelectric bimorph was produced using an epoxy adhesive having a hardness of A10 when cured instead of the adhesive used in Example 1.
【００１７】比較例１〜３で得た圧電バイモルフを実施
例と同様の測定を行った。測定結果を表１に示す。The piezoelectric bimorphs obtained in Comparative Examples 1 to 3 were measured in the same manner as in the examples. The measurement results are shown in Table 1.
【００１８】[0018]
【表１】 [Table 1]
【００１９】[0019]
【発明の効果】以上のように本発明の製造法によれば、
接着剤の硬化に伴う圧電セラミックスの静電容量の低下
を抑制することができるので、圧電セラミックス本来の
圧電性能を圧電バイモルフの性能に十分反映することが
でき、圧電バイモルフの屈曲変位量を大きくする上で非
常に有効なものとなる。As described above, according to the production method of the present invention,
Since it is possible to suppress the decrease in the electrostatic capacitance of the piezoelectric ceramic due to the curing of the adhesive, the original piezoelectric performance of the piezoelectric ceramic can be sufficiently reflected in the performance of the piezoelectric bimorph, and the bending displacement amount of the piezoelectric bimorph can be increased. It will be very effective above.
【図１】 圧電バイモルフの概略を示した図である。FIG. 1 is a diagram showing an outline of a piezoelectric bimorph.
【図２】 圧電バイモルフの等価回路を示した図であ
る。FIG. 2 is a diagram showing an equivalent circuit of a piezoelectric bimorph.
【図３】 圧電バイモルフを上面より示した図である。FIG. 3 is a diagram showing a piezoelectric bimorph from above.
１：圧電セラミックス ２：電極 ３：外部リード線 ４：接続リード線 ５：シム板 ６：接着剤 ７：変位量測定時の固定位置 ８：変位量測定位置 1: Piezoelectric ceramics 2: Electrode 3: External lead wire 4: Connection lead wire 5: Shim plate 6: Adhesive 7: Fixed position when measuring displacement amount 8: Displacement amount measuring position
Claims (1)
クスとの接合において、硬化時の硬度がジュロメーター
でＤ５０以下、Ａ２０以上の接着剤を使用することを特
徴とする圧電バイモルフの製造法。1. A method for producing a piezoelectric bimorph, wherein an adhesive having a durometer hardness of D50 or less and A20 or more is used for joining a shim plate and a piezoelectric ceramic to which an electrode is applied.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3354534A JPH05175568A (en) | 1991-12-20 | 1991-12-20 | Production of piezoelectric bimorph |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3354534A JPH05175568A (en) | 1991-12-20 | 1991-12-20 | Production of piezoelectric bimorph |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05175568A true JPH05175568A (en) | 1993-07-13 |
Family
ID=18438198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3354534A Pending JPH05175568A (en) | 1991-12-20 | 1991-12-20 | Production of piezoelectric bimorph |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05175568A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5834882A (en) * | 1996-12-11 | 1998-11-10 | Face International Corp. | Multi-layer piezoelectric transformer |
| JP2000077734A (en) * | 1998-08-28 | 2000-03-14 | Sanki:Kk | Driving element of carrying device |
| JP2007287910A (en) * | 2006-04-17 | 2007-11-01 | Nec Tokin Corp | Laminated piezoelectric bimorph element |
| CN100411216C (en) * | 2003-12-31 | 2008-08-13 | 中国兵器工业集团第五三研究所 | Organic piezoelectric film polarization method |
| US9614553B2 (en) | 2000-05-24 | 2017-04-04 | Enocean Gmbh | Energy self-sufficient radiofrequency transmitter |
| USRE46499E1 (en) | 2001-07-03 | 2017-08-01 | Face International Corporation | Self-powered switch initiation system |
-
1991
- 1991-12-20 JP JP3354534A patent/JPH05175568A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5834882A (en) * | 1996-12-11 | 1998-11-10 | Face International Corp. | Multi-layer piezoelectric transformer |
| WO1998054766A1 (en) * | 1997-05-27 | 1998-12-03 | Richard Patten Bishop | Multi-layer piezoelectric transformer |
| JP2000077734A (en) * | 1998-08-28 | 2000-03-14 | Sanki:Kk | Driving element of carrying device |
| US9614553B2 (en) | 2000-05-24 | 2017-04-04 | Enocean Gmbh | Energy self-sufficient radiofrequency transmitter |
| US9887711B2 (en) | 2000-05-24 | 2018-02-06 | Enocean Gmbh | Energy self-sufficient radiofrequency transmitter |
| USRE46499E1 (en) | 2001-07-03 | 2017-08-01 | Face International Corporation | Self-powered switch initiation system |
| CN100411216C (en) * | 2003-12-31 | 2008-08-13 | 中国兵器工业集团第五三研究所 | Organic piezoelectric film polarization method |
| JP2007287910A (en) * | 2006-04-17 | 2007-11-01 | Nec Tokin Corp | Laminated piezoelectric bimorph element |
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