JPH0514571U - High vacuum exhaust device - Google Patents

High vacuum exhaust device

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Publication number
JPH0514571U
JPH0514571U JP6925991U JP6925991U JPH0514571U JP H0514571 U JPH0514571 U JP H0514571U JP 6925991 U JP6925991 U JP 6925991U JP 6925991 U JP6925991 U JP 6925991U JP H0514571 U JPH0514571 U JP H0514571U
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JP
Japan
Prior art keywords
granular material
wire mesh
powdery
mesh member
gas adsorption
Prior art date
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Granted
Application number
JP6925991U
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Japanese (ja)
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JP2561570Y2 (en
Inventor
晴信 竹田
邦雄 手代木
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Japan Steel Works Ltd
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Japan Steel Works Ltd
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Priority to JP6925991U priority Critical patent/JP2561570Y2/en
Publication of JPH0514571U publication Critical patent/JPH0514571U/en
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Abstract

(57)【要約】 【目的】 気体吸着性に優れる高真空排気装置の提供。 【構成】 金網状部材1によつて対向2側面部1a,1
bを形成し、この対向2側面部1a,1b間に、気体吸
着性を良好に有する粉粒状体物質3を粉粒状体のままで
保持させると共に、細管4g内に発熱線4c,4dを通
したパイプヒータ4を収容する。 【効果】 (1)粉粒状体物質を粉粒状体のままで保持
できるので、多量の空隙を確保でき、気体の吸着性能が
著しく向上する。(2)金網状部材及びパイプヒータは
適度の可撓性を有するので、金網状部材に各種の形状を
与えることが可能である。その結果、コンパクトな構造
にて気体の吸着性能を向上させることができる。(3)
製造が容易である。
(57) [Summary] [Purpose] To provide a high vacuum exhaust device with excellent gas adsorption. [Structure] Opposed two side surface portions 1a, 1 by a wire mesh member 1
b is formed, and the granular material 3 having a good gas adsorption property is retained as it is between the two opposing side surface portions 1a and 1b, and the heating wires 4c and 4d are passed through the thin tube 4g. The pipe heater 4 is housed. (Effects) (1) Since the powder or granular material can be retained as the powder or granular material, a large amount of voids can be secured and the gas adsorption performance is significantly improved. (2) Since the wire mesh member and the pipe heater have appropriate flexibility, it is possible to give the wire mesh member various shapes. As a result, the gas adsorption performance can be improved with a compact structure. (3)
Easy to manufacture.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial applications]

本考案は、気体吸着性に優れる高真空排気装置に関するものである。 The present invention relates to a high vacuum exhaust device having excellent gas adsorption.

【0002】[0002]

【従来の技術】[Prior Art]

従来の高真空排気装置として、ゲツター材などの粉粒状体物質を常温又は30 0〜450℃程度にまで加熱して使用するものが知られている。この種の粉粒状 体物質は、通常所定の形状に焼結加工し、有形化させて使用され、これによつて 真空配管内への粉粒状体物質の飛散を防止している。そして、この焼結加工に際 しては、ヒータを付属させると共に、可及的に通気性を付与し、気体吸着性を高 めるように考慮している。 As a conventional high vacuum evacuation device, there is known a device in which a powdery or granular material such as getter material is used at room temperature or heated to about 300 to 450 ° C. This kind of powdery or granular material is usually used after being sintered into a predetermined shape and made into a shape to prevent scattering of the powdery or granular material into the vacuum pipe. At the time of this sintering process, it is considered that a heater is attached and the air permeability is given as much as possible to enhance the gas adsorption property.

【0003】[0003]

【考案が解決しようとする課題】[Problems to be solved by the device]

しかしながら、このような従来の高真空排気装置にあつては、焼結加工によつ て粉粒状体物質に有形性を与え、かつ、専用のヒータを付属させていた。しかし て、焼結材に対する通気性の付与及び形状の任意性には加工上から一定の限度が あると共に、一次的には極表面にしか気体が吸着されず、個々の粉粒状体物質が 本来具有する気体吸着能力を充分に発揮させることができなかつた。その結果、 従来の高真空排気装置にあつては、構造が複雑で製造に手数を有するのみならず 、所定の真空排気能力を確保するために高真空排気装置が大形化せざるを得ず高 価なものとなつていた。 However, in such a conventional high-vacuum exhaust device, the powder-granular substance is made tangible by sintering and a dedicated heater is attached. However, there is a certain limit in terms of processing to give air permeability to the sintered material and the arbitrariness of the shape. It was not possible to fully exert the gas adsorption capacity of the equipment. As a result, in the conventional high vacuum exhaust device, not only the structure is complicated and manufacturing is troublesome, but also the high vacuum exhaust device has to be upsized in order to ensure a predetermined vacuum exhaust capability. It was expensive.

【0004】[0004]

【課題を解決するための手段】[Means for Solving the Problems]

本考案は、このような従来の技術的課題に鑑みてなされたもので、その構成は 、金網状部材によつて対向2側面部を形成し、この対向2側面部間に、気体吸着 性を良好に有する粉粒状体物質を粉粒状体のままで保持させると共に、細管内に 発熱線を通したパイプヒータを収容する高真空排気装置である。 The present invention has been made in view of such a conventional technical problem, and has a structure in which two opposing side surface portions are formed by a wire mesh member, and a gas adsorbing property is provided between the opposing two side surface portions. It is a high-vacuum exhaust device that holds a good powdery granular material as a powdery granular material as it is, and accommodates a pipe heater through a heating wire in a thin tube.

【0005】[0005]

【作用】[Action]

このような構成の高真空排気装置は、金網状部材を真空容器側に位置させて気 密に取り付ける。先ず、粗引き用ポンプ等によつて真空容器を可及的に真空状態 にすると共に、パイプヒータを電源に接続する。 In the high vacuum evacuation device having such a structure, the wire mesh member is positioned on the vacuum container side and airtightly attached. First, the vacuum vessel is made as vacuum as possible by a roughing pump or the like, and the pipe heater is connected to a power source.

【0006】 これにより、金網状部材の対向2側面部間の粉粒状体物質が昇温し、粉粒状体 物質に吸着している気体が放出又は粉粒状体物質内へ拡散されるので、粉粒状体 物質が活性化又は再活性化する。活性化又は再活性化した粉粒状体物質は、加熱 状態又は常温において気体吸着性を良好に有する物質であるから、粗引き用ポン プ等によつて真空引き後に真空容器内に残存するわずかの気体を良好に吸着する 。しかして、この高真空排気装置によつて、水素、一酸化炭素等の吸着排気がな される。As a result, the temperature of the powder / granular material between the two opposing side surfaces of the wire mesh member increases, and the gas adsorbed to the powder / granular material is released or diffused into the powder / granular material. Granular material Activates or reactivates. Since the activated or reactivated powdery or granular material has a good gas adsorption property in a heated state or at room temperature, a small amount of it remains in the vacuum container after evacuation by a rough evacuation pump or the like. Adsorbs gas well. Then, by this high vacuum exhaust device, hydrogen, carbon monoxide and the like are adsorbed and exhausted.

【0007】 粉粒状体物質は、金網状部材の対向2側面部間に粉粒状体のままで保持されて 多量の空隙を有するので、対向2側面部の間隔を比較的大きく設定した場合であ つても粉粒状体物質が本来有する気体吸着性能が良好に発揮され、粉粒状体物質 の表層のみならず深層内部にまで気体が良好に吸着される。 このようにして、真空容器内を高度の真空状態となすことができる。また、対 向2側面部を有する金網状部材が粉粒状体物質を保持しているので、粉粒状体が 真空容器内に飛散することが良好に防止される。Since the powdery granular material is held as the powdery granular material between the opposite two side surfaces of the wire mesh member and has a large amount of voids, it is possible to set a relatively large distance between the opposite two side surfaces. Even in this case, the gas adsorption performance originally possessed by the powder / granular material is satisfactorily exhibited, and the gas is adsorbed well not only on the surface layer of the powder / granular material but also inside the deep layer. In this way, the inside of the vacuum container can be made to have a high degree of vacuum. Further, since the wire mesh member having the two side surfaces facing each other holds the powder / granular substance, the powder / granular substance is well prevented from scattering in the vacuum container.

【0008】[0008]

【実施例】【Example】

以下、本考案の実施例について図面を参照して説明する。 図1〜図5は本考案の第1実施例を示す。図1,図2中において符号1は金網 状部材を示し、平板状をなす金網状部材1を偏平をなすように中央部を折り曲げ て対向2側面部1a,1bを形成させ、長手方向に延在する一側縁はステンレス 鋼製の線状部材1cをろう付け、又は金網状部材1と一緒に折り曲げて閉塞する 。金網状部材1は、後記する粉粒状体物質3を保持する容器としての機能を有し 、ステンレス、タングステン等の線材を編んで形成され、粉粒状体物質3を通過 させ得ない大きさの無数の通孔を有する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 to 5 show a first embodiment of the present invention. In FIGS. 1 and 2, reference numeral 1 denotes a wire mesh member, and the flat wire mesh member 1 is bent at its central portion so as to be flat to form two opposing side surface portions 1a and 1b, which are extended in the longitudinal direction. The existing one side edge is closed by brazing the linear member 1c made of stainless steel or by bending together with the wire mesh member 1. The wire net-like member 1 has a function as a container for holding the powdery or granular material 3 described later, is formed by braiding a wire material such as stainless steel or tungsten, and has an innumerable size that does not allow the powdery or granular material 3 to pass through. It has a through hole.

【0009】 この金網状部材1は、一端開口からパイプヒータ4を挿入し、一端開口をビス 止めする締具5によつて締付けて閉塞する。パイプヒータ4は、図3,図4に示 すように外部に露出するリード線4a、無機絶縁物(MgO)4bにて包んだリ ード線4aを収容するアダプター4e及び発熱体シース4fからなる。発熱体シ ース4fは、アダプター4e内でリード線4aに接続する発熱線4c,4dを無 機絶縁物(MgO)4bにて保持した状態で細管4g内に収容して構成される。 細管4gはステンレス鋼製であり、その外径Dは1.5〜5.0mm程度である 。また、発熱線4c,4dの線径dは0.2〜1mm程度である。 このようなパイプヒータ4の発熱体シース4fは、適度の可撓性を有し、金網 状部材1内を均一に加熱するのに適する任意の形に折り曲げて金網状部材1内に 入れてある。The wire mesh member 1 is closed by inserting the pipe heater 4 from one end opening and tightening it with a fastener 5 that fastens the one end opening with a screw. As shown in FIGS. 3 and 4, the pipe heater 4 includes a lead wire 4a exposed to the outside, an adapter 4e for accommodating a lead wire 4a wrapped with an inorganic insulator (MgO) 4b, and a heating element sheath 4f. Become. The heating element case 4f is formed by accommodating the heating wires 4c and 4d connected to the lead wire 4a in the adapter 4e in the thin tube 4g while being held by the inorganic insulator (MgO) 4b. The thin tube 4g is made of stainless steel, and its outer diameter D is about 1.5 to 5.0 mm. The wire diameter d of the heating wires 4c and 4d is about 0.2 to 1 mm. The heating element sheath 4f of such a pipe heater 4 has appropriate flexibility, and is bent into an arbitrary shape suitable for uniformly heating the inside of the wire net-like member 1 and placed in the wire net-like member 1. ..

【0010】 更に、パイプヒータ4を挿入した金網状部材1の他端開口から、粉粒状体物質 3を粉粒状体のままで入れる。粉粒状体物質3は、加熱状態又は常温にて気体吸 着性を良好に有する物質であり、具体的にはゲツター材(水素貯蔵合金を含む) 、活性炭等である。粉粒状体物質3を収容させた金網状部材1の他端開口は、ビ ス止めする締具6によつて締付けて閉塞する。Further, the powder / granular material 3 is put in the powder / granular material as it is from the other end opening of the wire netting member 1 into which the pipe heater 4 is inserted. The powdery or granular material 3 is a material having a good gas adsorbing property in a heated state or at room temperature, and specifically, a getter material (including a hydrogen storage alloy), activated carbon, or the like. The other end opening of the wire net-like member 1 containing the powdery or granular material 3 is tightened and closed by a fastener 6 for fixing with a screw.

【0011】 粉粒状体物質3及びパイプヒータ4を収容した金網状部材1は、この実施例に あつては一対組み合わせて使用される。すなわち、金網状部材1の一端開口を閉 塞する締具5同士を一対の連結部材7によつて連結し、各連結部材7に通したボ ルト8によつて蓋部材10に固着する。10aは、蓋部材10の凹所であり、8 aはボルト8に外装したスペーサである。The wire mesh member 1 containing the powdery granular material 3 and the pipe heater 4 is used in combination in a pair in this embodiment. That is, the fasteners 5 that close one end opening of the wire mesh member 1 are connected by a pair of connecting members 7, and are fixed to the lid member 10 by the bolts 8 that pass through each connecting member 7. Reference numeral 10a is a recess of the lid member 10, and 8a is a spacer that is mounted on the bolt 8.

【0012】 パイプヒータ4の発熱体シース4fは、締具5、連結部材7及び蓋部材10の 凹所10aを順次に挿通させ、アダプター4eを蓋部材10の外部に配置して発 熱線4c,4dに接続するリード線4aが図外のスイツチを介して電源に接続し ている。発熱体シース4fと蓋部材10との間は、ろう付けによつて気密に封止 する。18は、粉粒状体物質3の温度を検出する熱電対である。The heating element sheath 4f of the pipe heater 4 is inserted through the fastener 5, the connecting member 7 and the recess 10a of the lid member 10 in order, and the adapter 4e is disposed outside the lid member 10 to generate the heating wire 4c, The lead wire 4a connected to 4d is connected to the power source through a switch (not shown). The space between the heating element sheath 4f and the lid member 10 is hermetically sealed by brazing. Reference numeral 18 is a thermocouple for detecting the temperature of the powdery or granular material 3.

【0013】 このような構成の高真空排気装置は、筒状容器11の開口11aから挿入し、 開口11a周縁のフランジ部11bに複数個のボルト12によつて蓋部材10を 気密に取付ける。13はメタルパツキンである。そして、筒状容器11の端部の フランジ部11cが図5に示す真空容器15に気密に結合される。 このようにして、非蒸発型の高真空排気装置14が真空容器15に組み込まれ る。The high-vacuum exhaust device having such a configuration is inserted from the opening 11a of the tubular container 11, and the lid member 10 is airtightly attached to the flange portion 11b around the opening 11a with a plurality of bolts 12. 13 is a metal packing. Then, the flange portion 11c at the end of the cylindrical container 11 is airtightly coupled to the vacuum container 15 shown in FIG. In this way, the non-evaporating type high vacuum evacuation device 14 is incorporated in the vacuum container 15.

【0014】 次に作用について説明する。 図5に示す真空容器15には、通常、粗引き用ポンプ16及びターボ分子ポン プ等の真空ポンプ17が高真空排気装置14と共に接続されている。先ず、粗引 き用ポンプ16及びターボ分子ポンプ17によつて真空容器15内を可及的に真 空状態にすると共に、電源からの電流をパイプヒータ4の発熱線4c,4dに供 給し、内部に保持させた粉粒状体物質3を加熱し、粉粒状体物質3に吸着してい る気体を放出又は粉粒状体物質3内へ拡散させ、粉粒状体物質3を活性化させる 。この温度は、通常400℃程度である。Next, the operation will be described. A vacuum pump 15 such as a roughing pump 16 and a turbo molecular pump is usually connected to the vacuum container 15 shown in FIG. First, the inside of the vacuum vessel 15 is made as empty as possible by the roughing pump 16 and the turbo molecular pump 17, and the current from the power source is supplied to the heating wires 4c and 4d of the pipe heater 4. The powdery or granular material 3 held inside is heated, and the gas adsorbed to the powdery or granular material 3 is released or diffused into the powdery or granular material 3 to activate the powdery or granular material 3. This temperature is usually about 400 ° C.

【0015】 活性化した粉粒状体物質3は、加熱状態又は常温において気体吸着性を良好に 有する物質であるから、粗引き用ポンプ16及びターボ分子ポンプ17によつて 真空引き後に真空容器15内に残存するわずかの気体が良好に吸着される。粉粒 状体物質3が、加熱状態において気体吸着性を良好に有する物質である場合の加 熱温度は、通常、300℃程度である。しかして、この高真空排気装置14によ つて、水素、一酸化炭素等(但し、不活性ガス及びメタンを除く。)の吸着排気 がなされる。Since the activated powdery or granular material 3 has a good gas adsorbing property in a heated state or at room temperature, it is evacuated by the roughing pump 16 and the turbo molecular pump 17 and then the vacuum container 15 is evacuated. The small amount of gas remaining in the is well adsorbed. The heating temperature is usually about 300 ° C. when the powdery substance 3 has a good gas adsorption property in the heated state. The high vacuum evacuation device 14 adsorbs and exhausts hydrogen, carbon monoxide and the like (excluding the inert gas and methane).

【0016】 粉粒状体物質3は、金網状部材1の対向2側面部1a,1b間に粉粒状体のま まで保持され、多量の空隙を有するので、対向2側面部1a,1bの間隔を比較 的大きく設定した場合であつても、粉粒状体物質3が本来有する気体吸着性能が 良好に発揮され、粉粒状体物質3の表層のみならず深層内部にまで気体が良好に 吸着される。Since the powder / granular substance 3 is held up to the powder / granular body between the opposing two side face portions 1a, 1b of the wire mesh member 1 and has a large amount of voids, the space between the facing two side face portions 1a, 1b is set. Even when set comparatively large, the gas adsorption performance originally possessed by the powdery granular material 3 is excellently exhibited, and the gas is well adsorbed not only on the surface layer of the powdery granular material 3 but also inside the deep layer.

【0017】 このようにして、真空容器15内を高真空状態となすことができる。また、対 向2側面部1a,1bを形成する金網状部材1の無数の通孔は、粉粒状体物質3 を通過させ得ない大きさを有するので、粉粒状体が真空容器15内に飛散するこ とが良好に防止される。In this way, the inside of the vacuum container 15 can be brought to a high vacuum state. Further, since the innumerable through holes of the wire net-like member 1 forming the facing two side surface portions 1a and 1b have a size that does not allow the powder-granular substance 3 to pass through, the powder-granular substance scatters in the vacuum container 15. This is well prevented.

【0018】 次いで、真空容器15の使用が終了したなら、粉粒状体物質3の再活性化処理 を行う。つまり、電源からの電流をパイプヒータ4の発熱線4c,4dに供給し 、粉粒状体物質3を前述の活性化処理よりも若干低い温度にて再度加熱し、粉粒 状体物質3が吸着した気体を放出又は内部拡散させ、粉粒状体物質3を再活性化 させる。再活性化処理の終了した高真空排気装置14は、再使用に供される。Next, when the use of the vacuum container 15 is completed, the powdery granular material 3 is reactivated. That is, the current from the power supply is supplied to the heating wires 4c and 4d of the pipe heater 4 to reheat the powdery granular material 3 at a temperature slightly lower than that of the activation treatment described above, so that the powdery granular material 3 is adsorbed. The generated gas is released or internally diffused to reactivate the powdery granular material 3. The high vacuum evacuation device 14 for which the reactivation process has been completed is provided for reuse.

【0019】[0019]

【考案の効果】[Effect of the device]

以上の説明によつて理解されるように、本考案によれば、下記の効果が得られ る。 (1)粉粒状体物質を粉粒状体のままで保持できるので、粉粒状体物質を焼結す るなどして有形化させるものと比較して、多量の空隙を確保でき、気体の吸着性 能が著しく向上する。 As can be understood from the above description, according to the present invention, the following effects can be obtained. (1) Since the granular material can be retained as it is, it is possible to secure a large amount of voids and to absorb gas, as compared with the case where the granular material is tangible by sintering. Noh is significantly improved.

【0020】 (2)金網状部材及びパイプヒータは適度の可撓性を有するので、内部に粉粒状 体物質を粉粒状体のままで保持する金網状部材に各種の形状を与えることが可能 である。その結果、真空容器の形状及び大きさに応じて気体の吸着性能が良好な 形状及び大きさを金網状部材に自由に与えることができることとも相まつて、コ ンパクトな構造にて気体の吸着性能を向上させることができる。更に、パイプヒ ータを、金網状部材の形状又は粉粒状体物質の量に応じて変形加工できるので、 粉粒状体物質の加熱効果が良好である。 (3)金網状部材内の粉粒状体をなす粉粒状体物質の間にパイプヒータを収容し て製造されるので、製造が容易である。(2) Since the wire net-like member and the pipe heater have appropriate flexibility, it is possible to give various shapes to the wire net-like member that holds the powdery granular material as a powdery granular material inside. is there. As a result, it is possible to freely give the wire mesh member a shape and size with good gas adsorption performance depending on the shape and size of the vacuum container, and at the same time, improve the gas adsorption performance with a compact structure. Can be improved. Furthermore, since the pipe heater can be deformed depending on the shape of the wire mesh member or the amount of the granular material, the heating effect of the granular material is good. (3) Since the pipe heater is housed between the granular materials forming the granular material in the wire mesh member, the manufacturing is easy.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本考案の1実施例に係る高真空排気装を一部
切開して示す平面図。
FIG. 1 is a partially cutaway plan view showing a high vacuum exhaust device according to an embodiment of the present invention.

【図2】 同じく側面図。FIG. 2 is a side view of the same.

【図3】 同じくパイプヒータを一部切開して示す図。FIG. 3 is a view similarly showing a pipe heater with a part thereof cut away.

【図4】 図3のIV−IV線断面図。4 is a sectional view taken along line IV-IV of FIG.

【図5】 同じく高真空排気装置を備える真空容器を示
す概略図。
FIG. 5 is a schematic view showing a vacuum container also equipped with a high vacuum exhaust device.

【符号の説明】[Explanation of symbols]

1:金網状部材、1a,1b:対向2側面部、3:粉粒
状体物質、4:パイプヒータ、4a:リード線、4b:
無機絶縁物、4c,4d:発熱線、4g:細管、5、
6:締具、7:連結部材、10:蓋部材、11:筒状容
器、14:高真空排気装置、15:真空容器。
1: Wire mesh member, 1a, 1b: Two side surfaces facing each other, 3: Powder-granular substance, 4: Pipe heater, 4a: Lead wire, 4b:
Inorganic insulator, 4c, 4d: heating wire, 4g: thin tube, 5,
6: Fastener, 7: Connection member, 10: Lid member, 11: Cylindrical container, 14: High vacuum exhaust device, 15: Vacuum container.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 金網状部材によつて対向2側面部を形成
し、この対向2側面部間に、気体吸着性を良好に有する
粉粒状体物質を粉粒状体のままで保持させると共に、細
管内に発熱線を通したパイプヒータを収容することを特
徴とする高真空排気装置。
1. A wire mesh member is used to form opposing two side surfaces, and a granular material having a good gas adsorbing property is retained as the granular material between the opposing two side surfaces, and a thin tube is provided. A high vacuum evacuation device, characterized in that a pipe heater having a heating wire inside is housed therein.
JP6925991U 1991-08-06 1991-08-06 High vacuum exhaust system Expired - Lifetime JP2561570Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6925991U JP2561570Y2 (en) 1991-08-06 1991-08-06 High vacuum exhaust system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6925991U JP2561570Y2 (en) 1991-08-06 1991-08-06 High vacuum exhaust system

Publications (2)

Publication Number Publication Date
JPH0514571U true JPH0514571U (en) 1993-02-26
JP2561570Y2 JP2561570Y2 (en) 1998-01-28

Family

ID=13397535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6925991U Expired - Lifetime JP2561570Y2 (en) 1991-08-06 1991-08-06 High vacuum exhaust system

Country Status (1)

Country Link
JP (1) JP2561570Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001503830A (en) * 1996-06-19 2001-03-21 オルガニザーション ユーロペーヌ プール ラ ルシェルシュ ニュークレール Pump device with non-evaporable getter and use of this getter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001503830A (en) * 1996-06-19 2001-03-21 オルガニザーション ユーロペーヌ プール ラ ルシェルシュ ニュークレール Pump device with non-evaporable getter and use of this getter

Also Published As

Publication number Publication date
JP2561570Y2 (en) 1998-01-28

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