JPH05133997A - Method for calibrating ic testing device - Google Patents
Method for calibrating ic testing deviceInfo
- Publication number
- JPH05133997A JPH05133997A JP3294711A JP29471191A JPH05133997A JP H05133997 A JPH05133997 A JP H05133997A JP 3294711 A JP3294711 A JP 3294711A JP 29471191 A JP29471191 A JP 29471191A JP H05133997 A JPH05133997 A JP H05133997A
- Authority
- JP
- Japan
- Prior art keywords
- standard
- voltage
- standard device
- current
- calibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明はＩＣ試験装置の較正方
法に関し、特に較正の作業性の向上と較正確度の向上と
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of calibrating an IC tester, and more particularly to improving the workability of calibration and improving the accuracy of calibration.
【０００２】[0002]
【従来の技術】ＩＣ試験装置１には図２に示すように、
電圧、電流、抵抗測定機能を有する標準器２を有し、電
圧、電流、抵抗の測定機能をもった２次標準器３，被試
験ＩＣ４の各端子に所定の電圧または電流を印加する複
数の電圧、電流発生器５及び各部の動作を制御するコン
トローラ６等が搭載される。2. Description of the Related Art As shown in FIG.
It has a standard device 2 having a voltage, current, and resistance measuring function, and a plurality of secondary standard devices 3 having a voltage, current, and resistance measuring function, and a plurality of applying a predetermined voltage or current to each terminal of the IC under test 4. A voltage and current generator 5 and a controller 6 for controlling the operation of each part are mounted.
【０００３】ＩＣ試験装置１のトレサビリティの保障、
つまり国家標準を基準とした確度を保障するには標準器
２を装置１より取外して、室温が一定に保たれた較正室
において、外部標準器を用いて較正し、その較正された
標準器２を装置１に取付け、その標準器２で２次標準器
３を測定して、２次標準器を較正する。それらの較正に
は、例えば公称１０００Ωの基準抵抗は実際には１００
１Ωであるとする所謂値付けや、例えば公称１Ｖの基準
電圧の誤差が所定範囲になるように調整するなど種々の
場合が含まれる。Guaranteeing the traceability of the IC test apparatus 1,
That is, in order to guarantee the accuracy based on the national standard, the standard device 2 is removed from the device 1, calibrated using an external standard device in a calibration room where the room temperature is kept constant, and the calibrated standard device 2 is calibrated. Is attached to the device 1, and the secondary standard 3 is measured by the standard 2 to calibrate the secondary standard. For those calibrations, for example, a nominal resistance of nominally 1000Ω is actually 100
There are various cases such as so-called value setting of 1Ω and adjustment such that an error of a reference voltage of nominally 1 V falls within a predetermined range.
【０００４】このようにして較正された２次標準器３を
用いて、電圧、電流発生器５を較正する。トレサビリテ
ィを保障するためには前記の一連の較正を定期的に行う
必要がある。The voltage and current generator 5 is calibrated using the secondary standard device 3 thus calibrated. In order to guarantee traceability, it is necessary to periodically perform the above series of calibrations.
【０００５】[0005]
【発明が解決しようとする課題】従来のＩＣ試験装置１
の定期的な較正には、標準器２の取外し、取付けを必要
とするため、作業性がよくない欠点があった。また、取
外した標準器２が置かれる較正室の周囲温度と、ＩＣ試
験装置内の周囲温度との間に差があるため、標準器２の
有する温度依存性によってＩＣ試験装置１に取付けた場
合に較正誤差が発生し、トレサビリティの保障が不充分
となる恐れがあった。A conventional IC test apparatus 1
The periodical calibration of 1 requires the standard device 2 to be removed and attached, which has a drawback that workability is not good. In addition, since there is a difference between the ambient temperature of the calibration room in which the removed standard device 2 is placed and the ambient temperature in the IC test device, the temperature dependence of the standard device 2 causes the standard device 2 to be mounted on the IC test device 1. There was a possibility that a calibration error would occur and the guarantee of traceability would be insufficient.
【０００６】この発明の目的は、これら従来の欠点を解
決して、較正の作業性を向上させると共に、較正室内と
ＩＣ試験装置内の温度差によって標準器２に較正誤差が
発生しないようにすることである。An object of the present invention is to solve these conventional drawbacks, improve the workability of calibration, and prevent the standard 2 from causing a calibration error due to the temperature difference between the calibration chamber and the IC test apparatus. That is.
【０００７】[0007]
【課題を解決するための手段】この発明は、電圧、電
流、抵抗測定機能を有する標準器と、基準抵抗、基準電
圧群を有する２次標準器と、被試験ＩＣに印加するため
の電圧、電流発生器と、各部を制御するコントローラと
を具備するＩＣ試験装置の較正方法に関する。この発明
では、最初に、電圧、電流、抵抗測定機能を有する外部
標準器を前記２次標準器に接続して、その２次標準器の
基準となる電圧、電流、抵抗を測定する。次に、前記標
準器を前記２次標準器に接続し、前記外部標準器で測定
された２次標準器の測定値を真値として前記標準器を較
正する。The present invention is directed to a standard having a voltage, current and resistance measuring function, a secondary standard having a reference resistance and a group of reference voltages, and a voltage applied to an IC under test. The present invention relates to a method of calibrating an IC test apparatus including a current generator and a controller that controls each unit. In the present invention, first, an external standard device having a voltage, current, and resistance measuring function is connected to the secondary standard device, and the voltage, current, and resistance serving as the reference of the secondary standard device are measured. Next, the standard device is connected to the secondary standard device, and the standard device is calibrated by using the measured value of the secondary standard device measured by the external standard device as a true value.
【０００８】[0008]
【実施例】この発明では、図１示すように、はじめに電
圧電流、抵抗測定機能を有する外部標準器７をＩＣ試験
装置１の２次標準器３に接続して、その２次標準器の基
準となる電圧、電流、抵抗を測定する。外部標準器７と
しては従来、較正室で使用していたものを用いてもよ
い。DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, as shown in FIG. 1, first, an external standard device 7 having a voltage / current and resistance measuring function is connected to a secondary standard device 3 of an IC test apparatus 1 and the reference of the secondary standard device is connected. Measure the voltage, current and resistance. As the external standard device 7, the one used in the calibration room in the past may be used.
【０００９】次に、標準器２を２次標準器３に接続し、
先に外部標準器７で測定した２次標準器３の測定値を真
値として、標準器２を較正する。また、電圧、電流発生
器５は従来と同様に、較正された２次標準器３を用いて
較正される。標準器２としては、外部標準器７で測定し
た２次標準器３の測定値（真値）を較正値として標準器
２に書き込めば、標準器内で自動的に自己較正動作が行
われるタイプのものが便利である。しかし、標準器２で
２次標準器３を測定した測定値が、前記真値に一致する
ようにコントローラ６より標準器２を較正するようなタ
イプであってもよい。Next, the standard device 2 is connected to the secondary standard device 3,
The standard 2 is calibrated by using the measured value of the secondary standard 3 previously measured by the external standard 7 as a true value. The voltage / current generator 5 is calibrated by using the calibrated secondary standard device 3 as in the conventional case. As the standard device 2, if the measured value (true value) of the secondary standard device 3 measured by the external standard device 7 is written in the standard device 2 as a calibration value, the self-calibration operation is automatically performed in the standard device. The ones are convenient. However, the controller 6 may calibrate the standard device 2 so that the measured value of the secondary standard device 3 measured by the standard device 2 matches the true value.
【００１０】なお、スイッチＳ1 〜Ｓ7 は装置の較正時
及び被試験ＩＣ４を試験する時に使用するものである
が、詳しい説明は省略する。The switches S 1 to S 7 are used for calibrating the apparatus and for testing the IC under test 4, but detailed description thereof will be omitted.
【００１１】[0011]
【発明の効果】この発明によれば、ＩＣ試験装置１の較
正の際に、従来のように標準器２を取外したり、取付け
たりする必要はなく、各部を装置に実装したまゝ較正す
ることができるので、作業性がきわめてよい。また、較
正室内の温度とＩＣ試験装置内の標準器２の周囲温度と
の間に温度差があるために較正誤差が発生すると言った
従来の欠点も自動的に除去される。According to the present invention, when the IC test apparatus 1 is calibrated, it is not necessary to remove or attach the standard unit 2 as in the conventional case, and each unit is mounted in the apparatus and calibrated. The workability is extremely good. Further, the conventional defect that a calibration error occurs due to a temperature difference between the temperature in the calibration chamber and the ambient temperature of the standard 2 in the IC test apparatus is automatically eliminated.
【００１２】２次標準器３は定期的に行われる一連の較
正作業中の安定度があればよく、絶対精度や長期安定性
は不要であるので、従来より安価に得られる。The secondary standard 3 is required to have stability during a series of calibration operations that are regularly performed, and absolute accuracy and long-term stability are not required, so that it can be obtained at a lower cost than before.
【図１】この発明の実施例を説明するためのブロック
図。FIG. 1 is a block diagram for explaining an embodiment of the present invention.
【図２】従来のＩＣ試験装置のブロック図。FIG. 2 is a block diagram of a conventional IC test device.
Claims (1)
器と、基準抵抗、基準電圧群を有する２次標準器と、被
試験ＩＣに印加するための電圧、電流発生器と、各部を
制御するコントローラとを具備するＩＣ試験装置の較正
方法であって、 最初に、電圧、電流、抵抗測定機能を有する外部標準器
を前記２次標準器に接続して、その２次標準器の基準と
なる電圧、電流、抵抗を測定し、 次に、前記標準器を前記２次標準器に接続し、前記外部
標準器で測定された２次標準器の測定値を真値として前
記標準器を較正することを特徴とする、 ＩＣ試験装置の較正方法。1. A standard device having a voltage, current and resistance measuring function, a secondary standard device having a reference resistance and a reference voltage group, a voltage and current generator for applying to an IC under test, and each part are controlled. A method for calibrating an IC test apparatus including a controller, wherein an external standard having voltage, current and resistance measuring functions is first connected to the secondary standard, and a reference of the secondary standard is established. Then, the standard device is connected to the secondary standard device, and the standard device is calibrated by using the measured value of the secondary standard device measured by the external standard device as a true value. A method for calibrating an IC test apparatus, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29471191A JP3216171B2 (en) | 1991-11-12 | 1991-11-12 | IC test equipment calibration method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29471191A JP3216171B2 (en) | 1991-11-12 | 1991-11-12 | IC test equipment calibration method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05133997A true JPH05133997A (en) | 1993-05-28 |
| JP3216171B2 JP3216171B2 (en) | 2001-10-09 |
Family
ID=17811323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29471191A Expired - Fee Related JP3216171B2 (en) | 1991-11-12 | 1991-11-12 | IC test equipment calibration method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3216171B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006029844A (en) * | 2004-07-13 | 2006-02-02 | Yokogawa Electric Corp | Measurement device and calibration system using it |
| JP2009047690A (en) * | 2007-08-14 | 2009-03-05 | Agilent Technol Inc | Testing device for testing device under test, having switch for selecting different paths |
| JP4874419B1 (en) * | 2010-12-03 | 2012-02-15 | 株式会社アドバンテスト | Switch device and test device |
| JP2016138776A (en) * | 2015-01-27 | 2016-08-04 | 国立研究開発法人産業技術総合研究所 | Reference source module, electrical and electric apparatus, remote calibration method |
| CN109375126A (en) * | 2018-09-30 | 2019-02-22 | 中国船舶重工集团公司第七0九研究所 | Integrated circuit test system self-checking device and method based on digital analog converter |
| CN113552525A (en) * | 2021-07-23 | 2021-10-26 | 南方科技大学 | Error estimation method, device and equipment of voltage transformer and storage medium |
| CN116609642A (en) * | 2023-07-18 | 2023-08-18 | 上海孤波科技有限公司 | Chip test error compensation method and device, electronic equipment and storage medium |
-
1991
- 1991-11-12 JP JP29471191A patent/JP3216171B2/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006029844A (en) * | 2004-07-13 | 2006-02-02 | Yokogawa Electric Corp | Measurement device and calibration system using it |
| JP4645083B2 (en) * | 2004-07-13 | 2011-03-09 | 横河電機株式会社 | Calibration system |
| JP2009047690A (en) * | 2007-08-14 | 2009-03-05 | Agilent Technol Inc | Testing device for testing device under test, having switch for selecting different paths |
| JP4874419B1 (en) * | 2010-12-03 | 2012-02-15 | 株式会社アドバンテスト | Switch device and test device |
| US8779751B2 (en) | 2010-12-03 | 2014-07-15 | Advantest Corporation | Switching apparatus and test apparatus |
| JP2016138776A (en) * | 2015-01-27 | 2016-08-04 | 国立研究開発法人産業技術総合研究所 | Reference source module, electrical and electric apparatus, remote calibration method |
| CN109375126A (en) * | 2018-09-30 | 2019-02-22 | 中国船舶重工集团公司第七0九研究所 | Integrated circuit test system self-checking device and method based on digital analog converter |
| CN113552525A (en) * | 2021-07-23 | 2021-10-26 | 南方科技大学 | Error estimation method, device and equipment of voltage transformer and storage medium |
| CN113552525B (en) * | 2021-07-23 | 2024-04-02 | 南方科技大学 | Error estimation method, device and equipment of voltage transformer and storage medium |
| CN116609642A (en) * | 2023-07-18 | 2023-08-18 | 上海孤波科技有限公司 | Chip test error compensation method and device, electronic equipment and storage medium |
| CN116609642B (en) * | 2023-07-18 | 2023-09-19 | 上海孤波科技有限公司 | Chip test error compensation method and device, electronic equipment and storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3216171B2 (en) | 2001-10-09 |
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