JPH05129678A - Laser marking device - Google Patents
Laser marking deviceInfo
- Publication number
- JPH05129678A JPH05129678A JP3313650A JP31365091A JPH05129678A JP H05129678 A JPH05129678 A JP H05129678A JP 3313650 A JP3313650 A JP 3313650A JP 31365091 A JP31365091 A JP 31365091A JP H05129678 A JPH05129678 A JP H05129678A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- electrode
- discharge space
- gas chamber
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
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- Laser Beam Processing (AREA)
- Lasers (AREA)
Abstract
Description
【産業上の利用分野】本発明はレーザ装置に関し、より
詳しくはレーザマーキング装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser device, and more particularly to a laser marking device.
【従来の技術】レーザ装置として、混合ガスが充満され
るガスチャンバと、このガスチャンバ内に対向させて配
設した第１電極と第２電極と、上記第１電極と第２電極
との対向面間に形成した放電空間の両側に配設したフロ
ントミラーとリヤミラーと、上記両電極に接続した放電
回路とを備えたレーザ装置は、従来既に周知である。そ
して従来、このようなレーザ装置を７台並設し、個々の
レーザ装置からのレーザビームによってそれぞれ物品に
ドットを印字するようにし、かつ個々のレーザ装置の発
振の有無と物品に対する照射位置との制御により、複数
のドットで１つの文字を形成するようにしたレーザマー
キング装置が提案されている（特開昭６０−２２７９８
８号公報）。2. Description of the Related Art As a laser device, a gas chamber filled with a mixed gas, a first electrode and a second electrode which are arranged in the gas chamber so as to face each other, and the first electrode and the second electrode face each other. A laser device including a front mirror and a rear mirror arranged on both sides of a discharge space formed between surfaces and a discharge circuit connected to both electrodes is well known in the art. Conventionally, seven such laser devices are arranged side by side so that dots can be printed on each article by a laser beam from each laser apparatus, and whether or not each laser apparatus oscillates and the irradiation position on the article. A laser marking device has been proposed in which one character is formed by a plurality of dots under control (Japanese Patent Laid-Open No. 60-22798).
No. 8).
【発明が解決しようとする課題】しかしながら上記構成
を有するレーザ装置を複数台、一般的には７台以上を並
設すると装置全体が大きくなるばかりか製造コストも高
くなり、また保守点検も煩雑となる。本発明はそのよう
な事情に鑑み、１つのガスチャンバ内に複数の放電電極
を設け、各放電電極により独立してレーザ光線を放射さ
せることができるようにしたものである。However, arranging a plurality of laser devices having the above-mentioned configuration in parallel, generally 7 or more, not only increases the size of the entire device but also increases the manufacturing cost and makes maintenance and inspection complicated. Become. In view of such a situation, the present invention provides a plurality of discharge electrodes in one gas chamber, and allows each discharge electrode to independently emit a laser beam.
【課題を解決するための手段】すなわち本発明は、混合
ガスが充満されるガスチャンバと、このガスチャンバ内
に対向させて配設した第１電極と第２電極と、上記第１
電極と第２電極との対向面間に形成した放電空間の両側
に配設したフロントミラーとリヤミラーと、上記両電極
に接続した放電回路とを備えたレーザ装置において、上
記ガスチャンバ内に、少なくとも上記第２電極を絶縁材
を介して複数個積層配置して、各第２電極と第１電極と
の間に複数個の放電空間を形成し、上記フロントミラー
とリヤミラーとを、各第２電極と第１電極との対向面間
に形成した複数の放電空間に共通に配設し、さらに各第
２電極のそれぞれをスイッチ手段を介して放電回路に接
続したものである。That is, the present invention provides a gas chamber filled with a mixed gas, a first electrode and a second electrode arranged in the gas chamber so as to face each other, and
In a laser device including a front mirror and a rear mirror arranged on both sides of a discharge space formed between opposing surfaces of an electrode and a second electrode, and a discharge circuit connected to the both electrodes, at least in the gas chamber, A plurality of the second electrodes are stacked and arranged via an insulating material to form a plurality of discharge spaces between the second electrodes and the first electrodes, and the front mirror and the rear mirror are connected to the second electrodes. And the first electrodes are commonly arranged in a plurality of discharge spaces formed between the opposing surfaces, and each of the second electrodes is connected to a discharge circuit via a switch means.
【作用】上記構成によれば、上記スイッチ手段の制御に
よって各第２電極と第１電極との間の複数個の放電空間
のそれぞれから独立してレーザ光線を照射させることが
でき、それによって複数のドットで１つの文字を形成す
ることができる。そして少なくとも上記第２電極は、１
つのガスチャンバ内に絶縁材を介して複数個積層配置さ
れており、しかもフロントミラーとリヤミラーとが各第
２電極と第１電極との対向面間に形成した複数の放電空
間に共通に配設されているので、装置全体を小型に製造
することができる。According to the above construction, the laser beam can be irradiated independently from each of the plurality of discharge spaces between the respective second electrodes and the first electrode under the control of the above-mentioned switch means. One character can be formed by the dots. And at least the second electrode is 1
Plural layers are stacked in one gas chamber via an insulating material, and a front mirror and a rear mirror are commonly disposed in a plurality of discharge spaces formed between the facing surfaces of the second electrodes and the first electrodes. Therefore, the entire device can be manufactured in a small size.
【実施例】以下図示実施例について本発明を説明する
と、内部に混合ガスを密封したガスチャンバ１は、円筒
状部材２と、この円筒状部材の両端開口部を密封する円
板状のフロントブロック３とリヤブロック４とから構成
してある。上記ガスチャンバ１内には長方形状の電極モ
ジュール５を設けてあり、この電極モジュール５は、フ
ロントブロック３に取付けたフロントブラケット６とリ
ヤブロック４に取付けたリヤブラケット７とによってそ
の両端部を支持している。上記電極モジュール５のフロ
ント側端部はフロントブラケット６に一体に連結固定し
ているが、リヤ側端部は、このリヤ側端部両側に設けた
２本の連結ロッド８を上記リヤブラケット７に穿設した
係合孔内に摺動自在に嵌合させることにより、電極モジ
ュール５の熱膨張をその嵌合部分で吸収できるようにし
ている。上記電極モジュール５は、図３に示すように、
平板状に形成して上方に水平に配置した１つの第１電極
１１と、この第１電極１１の下方に所要の間隙を開けて
配設した８つの第２電極１２とを備えており、各第２電
極１２と上記第１電極１１との対向面間をそれぞれ放電
空間１３としている。上記各第２電極１２の下面にはそ
れぞれセラミック製の絶縁ブロック１４を一体に取付け
るとともに、隣接する第２電極１２の間にそれぞれセラ
ミック製の絶縁板１５を介在させることにより、各第２
電極１２をそれぞれ絶縁している。上記各絶縁板１５の
上端部はそれぞれ第１電極１１の下面に形成したスリッ
ト内に嵌着してあり、また下端部は各第２電極１２の下
面に設けた絶縁ブロック１４でそれぞれ挟持している。
そして最外側の絶縁ブロック１４と第１電極１１の両端
部とに渡ってそれぞれセラミック製の絶縁板１６を重合
させ、各絶縁板１６の上部を短いボルト１７で第１電極
１１の両端部にそれぞれ固定している。他方、各絶縁板
１６の下部と８つの絶縁ブロック１４間には貫通ボルト
１８を貫通させることにより、それらを一体に連結して
いる。上記第１電極１１には、８つの第２電極１２の間
に介在させた絶縁板１５の上方位置にそれぞれ冷却水通
路２１を形成するとともに、各第２電極１２にもそれぞ
れ冷却水通路２２を形成している。これら冷却水通路２
１、２２は、上記各ブラケット６、７および各ブロック
３、４に形成した図示しない冷却水通路を介して外部の
冷却手段に接続している。また上記第１電極１１には、
これに形成した各冷却水通路２１の中間位置に、各放電
空間１３に連通するガス循環用の冷却孔２３を多数穿設
している。上記ガスチャンバ１を構成するフロントブロ
ック３にはフロントミラー２４を、またリヤブロック４
にはリヤミラー２５をそれぞれ設けてあり、各ミラー２
４、２５は、図４に示すように、上記複数の放電空間１
３の両側位置にそれらに対して共通に設けている。上記
フロントミラー２４はハーフミラーからなり、かつ放電
空間１３の積層方向に凹面を有するコンケイブミラーと
なっている。他方、上記リヤミラー２５は全反射ミラー
からなり、かつ放電空間１３の積層方向と直交する方向
に凹面を有するシリンドリカルミラーとなっている。さ
らに、上記８つの第２電極１２は、それぞれ放電回路２
８を構成するマッチングユニット２９、およびスイッチ
手段３０を介してＲＦ電源３１に接続してあり、また第
１電極１１はＲＦ電源３１のグランド側に接続してい
る。以上の構成において、上記スイッチ手段３０は図示
しないコンピュータを含む制御装置によって開閉制御さ
れるようになっており、各スイッチ手段３０の開閉制御
に応じて各放電空間１３からレーザ光線をフロントミラ
ー２４を介して外部に放射することができる。このと
き、上記各スイッチ手段３０に対してＲＦ電源３１は共
通となっているので、上記制御装置は、印字すべき文字
のドットパターンに応じて全ての放電空間１３からレー
ザ光線を放射する必要がある場合であっても、各スイッ
チ手段３０を順に制御し、それによって各放電空間１３
から順に時分割にてレーザ光線を放射させるようにな
る。すなわち上記制御装置は、１つの放電空間からレー
ザ光線を放射させたら、図示しないセンサによってそれ
を確認し、その確認後、次の放電空間からレーザ光線を
放射させるようになる。このようなレーザ光線の放射に
より上記各電極１１、１２が加熱され、また各放電空間
１３内のガスも劣化するが、上記各電極１１、１２は冷
却水通路２１、２２を流れる冷却水によって良好に冷却
される。これと同時に、各放電空間１３内の高温のガス
と各電極１１、１２との間に大きな温度勾配が生じるの
で、各放電空間１３内に小さな高速の対流が生じて拡散
冷却を行ない、それにより上記冷却孔２３を介してブロ
アなしでガスチャンバ１内の未劣化ガスを各放電空間１
３内に供給することができる。なお、上記実施例ではガ
スチャンバ１内に混合ガスは密封しているが、外部から
ガスチャンバ１内に混合ガスを供給するようにしてもよ
い。また上記ＲＦ電源３１は各スイッチ手段３０毎に設
けてもよい。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the illustrated embodiments. A gas chamber 1 in which a mixed gas is sealed is a cylindrical member 2 and a disk-shaped front block for sealing the openings at both ends of the cylindrical member. 3 and a rear block 4. A rectangular electrode module 5 is provided in the gas chamber 1, and the electrode module 5 is supported at both ends by a front bracket 6 attached to the front block 3 and a rear bracket 7 attached to the rear block 4. is doing. The front end of the electrode module 5 is integrally connected and fixed to the front bracket 6, but the rear end has two connecting rods 8 provided on both sides of the rear end to the rear bracket 7. By slidingly fitting into the drilled engagement hole, thermal expansion of the electrode module 5 can be absorbed by the fitting portion. The electrode module 5, as shown in FIG.
It is provided with one first electrode 11 formed in a flat plate shape and horizontally arranged above, and eight second electrodes 12 arranged below the first electrode 11 with a required gap therebetween. The discharge space 13 is defined between the facing surfaces of the second electrode 12 and the first electrode 11. A ceramic insulating block 14 is integrally attached to the lower surface of each of the second electrodes 12, and a ceramic insulating plate 15 is interposed between the adjacent second electrodes 12, so that each second
The electrodes 12 are insulated from each other. The upper end of each insulating plate 15 is fitted in the slit formed on the lower surface of the first electrode 11, and the lower end is sandwiched by the insulating block 14 provided on the lower surface of each second electrode 12. There is.
Then, the ceramic insulating plates 16 are polymerized over the outermost insulating block 14 and both ends of the first electrode 11, and the upper portions of the insulating plates 16 are respectively attached to both ends of the first electrode 11 by short bolts 17. It is fixed. On the other hand, a through bolt 18 is inserted between the lower part of each insulating plate 16 and the eight insulating blocks 14 to integrally connect them. A cooling water passage 21 is formed in the first electrode 11 above the insulating plate 15 interposed between the eight second electrodes 12, and a cooling water passage 22 is also formed in each second electrode 12. Is forming. These cooling water passages 2
1, 22 are connected to external cooling means via cooling water passages (not shown) formed in the brackets 6, 7 and the blocks 3, 4. Further, the first electrode 11 includes
A large number of cooling holes 23 for gas circulation, which communicate with the respective discharge spaces 13, are formed at intermediate positions of the respective cooling water passages 21 formed therein. A front mirror 24 is provided on the front block 3 constituting the gas chamber 1, and a rear block 4 is provided.
Rear mirrors 25 are provided in each, and each mirror 2
As shown in FIG. 4, the reference numerals 4, 25 denote the plurality of discharge spaces 1
3 are provided in common on both sides. The front mirror 24 is a half mirror and is a concave mirror having a concave surface in the stacking direction of the discharge space 13. On the other hand, the rear mirror 25 is a total reflection mirror and is a cylindrical mirror having a concave surface in a direction orthogonal to the stacking direction of the discharge spaces 13. Further, the eight second electrodes 12 are respectively connected to the discharge circuit 2
8 is connected to the RF power source 31 via the matching unit 29 and the switch means 30, and the first electrode 11 is connected to the ground side of the RF power source 31. In the above configuration, the switch means 30 is controlled to be opened and closed by a control device including a computer (not shown), and the laser beam is emitted from each discharge space 13 to the front mirror 24 according to the open / close control of each switch means 30. It can be radiated to the outside via. At this time, since the RF power source 31 is common to the switch means 30, the control device needs to emit laser beams from all the discharge spaces 13 according to the dot pattern of the character to be printed. Even in some cases, each switch means 30 is controlled in turn, whereby each discharge space 13
Then, the laser beam is emitted in a time-division manner sequentially from. That is, the control device causes a laser beam to be emitted from one discharge space, confirms it with a sensor (not shown), and after the confirmation, emits a laser beam from the next discharge space. The radiation of the laser beam heats the electrodes 11 and 12 and also deteriorates the gas in the discharge spaces 13. However, the electrodes 11 and 12 are favorably supplied by the cooling water flowing through the cooling water passages 21 and 22. Is cooled to. At the same time, since a large temperature gradient is generated between the high temperature gas in each discharge space 13 and each electrode 11, 12, a small high-speed convection is generated in each discharge space 13 to perform diffusion cooling, thereby The non-deteriorated gas in the gas chamber 1 is passed through the cooling holes 23 without a blower to each discharge space 1
3 can be supplied. Although the mixed gas is sealed in the gas chamber 1 in the above embodiment, the mixed gas may be supplied into the gas chamber 1 from the outside. Further, the RF power source 31 may be provided for each switch means 30.
【発明の効果】以上のように、本発明によれば、レーザ
マーキング装置全体を従来に比較して小型に製造するこ
とができるという効果が得られる。As described above, according to the present invention, it is possible to obtain the effect that the entire laser marking device can be manufactured in a smaller size than the conventional one.
【図１】本発明の一実施例を示す断面図。FIG. 1 is a sectional view showing an embodiment of the present invention.
【図２】第１図の部分断面平面図。FIG. 2 is a partial cross-sectional plan view of FIG.
【図３】第１図のＩＩＩ−ＩＩＩ線に沿う拡大断面図。3 is an enlarged cross-sectional view taken along the line III-III in FIG.
【図４】フロントミラー２４およびリヤミラー２５と放
電空間１３との関係を示す斜視図。FIG. 4 is a perspective view showing a relationship between a front mirror 24 and a rear mirror 25 and a discharge space 13.
１…ガスチャンバ ５…電極モジュール
１１…第１電極 １２…第２電極 １３…放電電極
１６…絶縁板 ２３…冷却孔 ２１、２２…冷却水通路 ２４…フロントミラー ２５…リヤミラー
２８…放電回路 ３０…スイッチ手段 ３１…ＲＦ電源1 ... Gas chamber 5 ... Electrode module
11 ... 1st electrode 12 ... 2nd electrode 13 ... Discharge electrode
16 ... Insulating plate 23 ... Cooling holes 21, 22 ... Cooling water passage 24 ... Front mirror 25 ... Rear mirror
28 ... Discharge circuit 30 ... Switch means 31 ... RF power source
Claims (1)
このガスチャンバ内に対向させて配設した第１電極と第
２電極と、上記第１電極と第２電極との対向面間に形成
した放電空間の両側に配設したフロントミラーとリヤミ
ラーと、上記両電極に接続した放電回路とを備えたレー
ザ装置において、 上記ガスチャンバ内に、少なくとも上記第２電極を絶縁
材を介して複数個積層配置して、各第２電極と第１電極
との間に複数個の放電空間を形成し、上記フロントミラ
ーとリヤミラーとを、各第２電極と第１電極との対向面
間に形成した複数の放電空間に共通に配設し、さらに各
第２電極のそれぞれをスイッチ手段を介して放電回路に
接続したことを特徴とするレーザマーキング装置。1. A gas chamber filled with a mixed gas,
A first electrode and a second electrode arranged to face each other in the gas chamber, a front mirror and a rear mirror arranged on both sides of a discharge space formed between the facing surfaces of the first electrode and the second electrode, In a laser device provided with a discharge circuit connected to both electrodes, a plurality of at least the second electrodes are stacked in the gas chamber with an insulating material interposed between the second electrode and the first electrode. A plurality of discharge spaces are formed between them, and the front mirror and the rear mirror are arranged in common in a plurality of discharge spaces formed between the facing surfaces of the second electrodes and the first electrodes. A laser marking device in which each of the electrodes is connected to a discharge circuit via a switch means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3313650A JPH05129678A (en) | 1991-10-31 | 1991-10-31 | Laser marking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3313650A JPH05129678A (en) | 1991-10-31 | 1991-10-31 | Laser marking device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05129678A true JPH05129678A (en) | 1993-05-25 |
Family
ID=18043864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3313650A Withdrawn JPH05129678A (en) | 1991-10-31 | 1991-10-31 | Laser marking device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05129678A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2564976A1 (en) * | 2011-09-05 | 2013-03-06 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Marking apparatus with at least one gas laser and heat dissipator |
| US9071034B2 (en) | 2011-09-05 | 2015-06-30 | Alltec Angewandte Laserlicht Technologie Gmbh | Laser device |
| US9077140B2 (en) | 2011-09-05 | 2015-07-07 | Alltec Angewandte Laserlight Technologie GmbH | Laser device and method for generating laser light |
| US9073349B2 (en) | 2011-09-05 | 2015-07-07 | Alltec Angewandte Laserlicht Technologie Gmbh | Marking apparatus |
| US9077141B2 (en) | 2011-09-05 | 2015-07-07 | Alltec Angewandte Laserlicht Technologie Gmbh | Gas laser device and gas reservoir |
| US9139019B2 (en) | 2011-09-05 | 2015-09-22 | Alltec Angewandte Laserlicht Technologie Gmbh | Marking device for marking an object with marking light |
| US9577399B2 (en) | 2011-09-05 | 2017-02-21 | Alltec Angew Andte Laserlicht Technologie Gmbh | Marking apparatus with a plurality of lasers and individually adjustable sets of deflection means |
| US9573223B2 (en) | 2011-09-05 | 2017-02-21 | Alltec Angewandte Laserlicht Technologie Gmbh | Marking apparatus with a plurality of gas lasers with resonator tubes and individually adjustable deflection means |
| US9573227B2 (en) | 2011-09-05 | 2017-02-21 | Alltec Angewandte Laserlight Technologie GmbH | Marking apparatus with a plurality of lasers, deflection means, and telescopic means for each laser beam |
| US9595801B2 (en) | 2011-09-05 | 2017-03-14 | Alltec Angewandte Laserlicht Technologie Gmbh | Marking apparatus with a plurality of lasers and a combining deflection device |
| US9664898B2 (en) | 2011-09-05 | 2017-05-30 | Alltec Angewandte Laserlicht Technologie Gmbh | Laser device and method for marking an object |
-
1991
- 1991-10-31 JP JP3313650A patent/JPH05129678A/en not_active Withdrawn
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2564976A1 (en) * | 2011-09-05 | 2013-03-06 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Marking apparatus with at least one gas laser and heat dissipator |
| WO2013034216A1 (en) | 2011-09-05 | 2013-03-14 | Alltec Angewandte Laserlicht Technologie Gmbh | Marking apparatus with at least one gas laser and heat dissipator |
| CN103764334A (en) * | 2011-09-05 | 2014-04-30 | 奥迪克激光应用技术股份有限公司 | Marking apparatus with at least one gas laser and heat dissipator |
| US9071034B2 (en) | 2011-09-05 | 2015-06-30 | Alltec Angewandte Laserlicht Technologie Gmbh | Laser device |
| US9077140B2 (en) | 2011-09-05 | 2015-07-07 | Alltec Angewandte Laserlight Technologie GmbH | Laser device and method for generating laser light |
| US9073349B2 (en) | 2011-09-05 | 2015-07-07 | Alltec Angewandte Laserlicht Technologie Gmbh | Marking apparatus |
| US9077141B2 (en) | 2011-09-05 | 2015-07-07 | Alltec Angewandte Laserlicht Technologie Gmbh | Gas laser device and gas reservoir |
| CN103764334B (en) * | 2011-09-05 | 2015-08-26 | 奥迪克激光应用技术股份有限公司 | There is the mark instrument of at least one gas laser and radiator |
| US9139019B2 (en) | 2011-09-05 | 2015-09-22 | Alltec Angewandte Laserlicht Technologie Gmbh | Marking device for marking an object with marking light |
| EA024428B1 (en) * | 2011-09-05 | 2016-09-30 | Алльтек Ангевандте Лазерлихт Технологи Гмбх | Apparatus for marking an object with at least one gas laser and heat dissipator |
| US9577399B2 (en) | 2011-09-05 | 2017-02-21 | Alltec Angew Andte Laserlicht Technologie Gmbh | Marking apparatus with a plurality of lasers and individually adjustable sets of deflection means |
| US9573223B2 (en) | 2011-09-05 | 2017-02-21 | Alltec Angewandte Laserlicht Technologie Gmbh | Marking apparatus with a plurality of gas lasers with resonator tubes and individually adjustable deflection means |
| US9573227B2 (en) | 2011-09-05 | 2017-02-21 | Alltec Angewandte Laserlight Technologie GmbH | Marking apparatus with a plurality of lasers, deflection means, and telescopic means for each laser beam |
| US9595801B2 (en) | 2011-09-05 | 2017-03-14 | Alltec Angewandte Laserlicht Technologie Gmbh | Marking apparatus with a plurality of lasers and a combining deflection device |
| US9664898B2 (en) | 2011-09-05 | 2017-05-30 | Alltec Angewandte Laserlicht Technologie Gmbh | Laser device and method for marking an object |
| US10236654B2 (en) | 2011-09-05 | 2019-03-19 | Alltec Angewandte Laserlight Technologie GmbH | Marking apparatus with at least one gas laser and heat dissipator |
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| A300 | Withdrawal of application because of no request for examination |
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