JPS62139372A - Discharge excitation type short pulse laser device - Google Patents

Discharge excitation type short pulse laser device

Info

Publication number
JPS62139372A
JPS62139372A JP27931085A JP27931085A JPS62139372A JP S62139372 A JPS62139372 A JP S62139372A JP 27931085 A JP27931085 A JP 27931085A JP 27931085 A JP27931085 A JP 27931085A JP S62139372 A JPS62139372 A JP S62139372A
Authority
JP
Japan
Prior art keywords
auxiliary
discharge
main
electrode
main electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27931085A
Other languages
Japanese (ja)
Inventor
Hitoshi Wakata
若田　仁志
Mitsuo Inoue
満夫 井上
Yukio Sato
行雄 佐藤
Takeo Haruta
春田　健雄
Haruhiko Nagai
治彦 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP27931085A priority Critical patent/JPS62139372A/en
Publication of JPS62139372A publication Critical patent/JPS62139372A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To make preliminary ionization uniform and to obtain a uniform main discharge by arranging a plurality of auxiliary electrodes covered with dielectrics in the dielectrics in contact with the back side of a main electrode comprising plural openings. CONSTITUTION:A high voltage from a high-voltage power source 1 is applied between first and second main electrodes 2 and 3 of a pulse laser device. A laser medium is excited by a uniform main discharge 8 to emit laser beams in a direction of an optical axis 9. Dielectrics 4 are so arranged that they are in contact with the back side of said main electrode 3. Plural auxiliary electrodes 5 covered with the dielectrics 4 are arranged corresponding to openings 7 of the main electrode 3 to compose an auxiliary electrode group 5A. Between this electrode group 5A and the main electrode 3, a high voltage from an auxiliary power source 6 is applied to generate an auxiliary discharge. Then, auxiliary discharges generated by the auxiliary electrodes 5 make electrons in the vicinity of the main electrode 3 uniform and the uniform main discharge 8 is generated.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は気体レーザのうち短パルスレーザ光を発生す
る放電励起型短パルスレーザ装置、特にその電極構造に
関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a discharge-excited short-pulse laser device that generates short-pulse laser light among gas lasers, and particularly to its electrode structure.

〔従来の技術〕[Conventional technology]

一般に、レーザ発振を得るためには、レーザ媒質中での
空間的に均一な放電の発生を必要とする。ところで、Ｔ
ＥＡＣＯ２レーザやエキシマレーザ等の短パルスレーザ
光を発生させる短パルスレーザ装置では、その動作圧力
が数気圧もの高圧であるため、上記の放電は収束してア
ークになり易い。Generally, in order to obtain laser oscillation, it is necessary to generate a spatially uniform discharge in the laser medium. By the way, T
In short-pulse laser devices that generate short-pulse laser light, such as EACO2 lasers and excimer lasers, the operating pressure is as high as several atmospheres, so the above-mentioned discharge tends to converge and become an arc.

これを防止するために、主放電励起型短に先立って予め
主放電空間に均一に電子をばらまいておくための予備電
離を行なうのが普通である。To prevent this, it is common practice to perform preliminary ionization to uniformly disperse electrons in the main discharge space before the main discharge excitation type short circuit.

第３図は従来の放電励起型短パルスレーザ装置における
予備電離と主放電の関係を説明するための図であり、こ
の装置における放電領域に垂直な断面の概略を示してい
る。図において、符号（１）は主放電のための高電圧電
源、■はレーザ媒質中に配置され、レーザ光軸方向を長
手方向とする第１の主電極、■は第２の主電極であり、
この電極は複数の開孔部（Ｄを有する。　（４ａ）は第
２の主電極に直接接触している誘電体、（５ａ）は補助
電極で、（θは補助電極（５ａ）と第２の主電極０間に
高電圧を印加するための補助電源である。（８）は主放
電で、（９はレーザの光軸を示すものである。FIG. 3 is a diagram for explaining the relationship between pre-ionization and main discharge in a conventional discharge-excited short-pulse laser device, and schematically shows a cross section perpendicular to the discharge region in this device. In the figure, symbol (1) is a high voltage power supply for main discharge, ■ is a first main electrode placed in the laser medium and whose longitudinal direction is in the direction of the laser optical axis, and ■ is a second main electrode. ,
This electrode has a plurality of openings (D). (4a) is the dielectric in direct contact with the second main electrode, (5a) is the auxiliary electrode, and (θ is the auxiliary electrode This is an auxiliary power source for applying a high voltage between the main electrodes 0 of .(8) is the main discharge, and (9 is the optical axis of the laser).

次に上記の従来の放電励起型短パルスレーザ装置の動作
を説明する。補助電源（○により第２の主電極■と補助
電極（５ａ）との間に高電圧が印加される、これにより
、第２の主電極■に設けられた開孔部（７）の近傍にお
ける誘電体（４ａ）の表面に補助放電（沿面放電）が生
じる。この補助放電により第２の主電極■の近傍に電子
がばらまかれ、これが後述する主放電をグロー状の均一
な放電とするための種となる。次いで、第１及び第２の
主電極（ｚ、０間に高電圧電源（１）からの高電圧が印
加されることにより、グロー状の均一な主放電■を生じ
る。そして、これによりレーザ媒質が励起され、その結
果光軸■の方向にレーザ光が取り出される。Next, the operation of the above-mentioned conventional discharge-excited short pulse laser device will be explained. A high voltage is applied between the second main electrode (■) and the auxiliary electrode (5a) by the auxiliary power source (○). An auxiliary discharge (creeping discharge) occurs on the surface of the dielectric (4a). Due to this auxiliary discharge, electrons are scattered near the second main electrode (2), which makes the main discharge described later a glow-like uniform discharge. Then, by applying a high voltage from the high voltage power supply (1) between the first and second main electrodes (z, 0), a glow-like uniform main discharge (2) is generated. , This excites the laser medium, and as a result, laser light is extracted in the direction of the optical axis (2).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来の放電励起型短パルスレーザ装置は以上のように構
成されているので、第２の主電極０に設けられた多数の
開孔（７）のいずれにおいても一様な沿面放電を発生さ
せるためには、第２の主電極■の開孔（７）の形状をそ
ろえたり、誘電体（４ａ）の厚みを一様にしたり、ある
いは補助電極（５ａ）を丸める等により、電界が特定の
開孔（７）附近に集中しないようにする必要があった。Since the conventional discharge-excited short pulse laser device is configured as described above, it is possible to generate a uniform creeping discharge in any of the many openings (7) provided in the second main electrode 0. To avoid this, the electric field can be adjusted to a specific aperture by aligning the shapes of the apertures (7) in the second main electrode (2), making the thickness of the dielectric (4a) uniform, or rounding the auxiliary electrode (5a). It was necessary to avoid concentrating near hole (7).

この発明は上記のような問題点を解消するためになされ
たもので、第２の主電極極に多数設けられたすべての開
孔に一様に沿面放電を飛ばし、レーザビームの強度分布
が滑らかな放電励起型短パルスレーザ装置を得ることを
目的妬する。This invention was made in order to solve the above-mentioned problems, and the creeping discharge is uniformly spread across all the holes provided in the second main electrode, so that the intensity distribution of the laser beam is smooth. The aim is to obtain a discharge-excited short-pulse laser device.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係る放電励起型短パルスレーザ装置は、複数
の開孔部を有する第２の主電極の背面に接するように配
置された誘電体に各々おおわれた複数の補助電極を備え
たことに特徴がある。The discharge-excited short pulse laser device according to the present invention is characterized in that it includes a plurality of auxiliary electrodes each covered with a dielectric material arranged so as to be in contact with the back surface of a second main electrode having a plurality of openings. There is.

〔作用〕[Effect]

この発明においては、補助電極を複数個に分割したため
、各補助電極に電界が集中し、放電しやすい状態となる
。従って、補助放電は片よることなく、第２の主電極に
沿って一様に発生することになる。In this invention, since the auxiliary electrode is divided into a plurality of parts, the electric field is concentrated on each auxiliary electrode, making it easy to discharge. Therefore, the auxiliary discharge is generated uniformly along the second main electrode without any deviation.

（実施例） 以下、この発明の一実施例を図について説明する。第１
図において、■は誘電体（セラミック、ガラス）ででき
た管で、第２の主電極■に接するように配置されている
。（ωは誘電体管（６）内に配置された導体の棒からな
る補助電極である。この補助電極（５）は第２の電極■
に沿って複数個配置されており、これらを総称するとき
補助電極群（５Ａ）と称する。その他の符号は第３図に
示した従来例と同等かぞれに相当する部分を示す。(Example) Hereinafter, an example of the present invention will be described with reference to the drawings. 1st
In the figure, ``■'' is a tube made of dielectric material (ceramic, glass), and is placed so as to be in contact with the second main electrode ``■''. (ω is an auxiliary electrode made of a conductor rod placed inside the dielectric tube (6). This auxiliary electrode (5) is the second electrode
A plurality of electrodes are arranged along the same line, and these are collectively referred to as an auxiliary electrode group (5A). Other symbols indicate parts that are the same as those in the conventional example shown in FIG.

次に動作について説明する。補助電源（６）により第２
の主電極■と補助電極群（５Ａ）の間に高電圧が印加さ
れると、両者の間で誘電体■を介した補助放電が発生す
る。高電圧が印加された際に発生する電界は補助電極を
小さく分割したために、各々の補助電極（５）において
高くなり、充分補助放電が生ずるようになる。従って、
多数配置された補助電極群（５Ａ）の全てで補助放電が
発生し、その結果第２の主電極■の近傍に一様に電子が
ばらま力ぐれる。Next, the operation will be explained. The auxiliary power supply (6)
When a high voltage is applied between the main electrode (2) and the auxiliary electrode group (5A), an auxiliary discharge occurs between the two through the dielectric (2). Since the auxiliary electrodes are divided into small pieces, the electric field generated when a high voltage is applied becomes high at each auxiliary electrode (5), so that sufficient auxiliary discharge occurs. Therefore,
Auxiliary discharge occurs in all of the many auxiliary electrode groups (5A), and as a result, electrons are uniformly scattered in the vicinity of the second main electrode (2).

次いで第１１び第２の主電極の、■の間に高電圧電源（
１）からの高電圧が印加されると、上記の電子を種とし
て一様なグロー状の主放電■が生じ、これにより、レー
ザ媒質が励起され、その結果光軸■の方向にレーザ光が
取り出される。Next, a high voltage power supply (
When a high voltage from 1) is applied, a uniform glow-like main discharge (■) is generated using the above electrons as seeds, which excites the laser medium, and as a result, laser light is emitted in the direction of the optical axis (■). taken out.

なお、上記実施例では誘電体の管■を用いたが、補助電
極（５）に誘電体をコーティングしたものを多数用いて
もよい。また、上記実施例ではレーザの光軸方向■に補
助電極（ωをならべたが、光軸と直交させ、はしご状に
多数並べてもよい。Although the dielectric tube (2) was used in the above embodiment, a large number of auxiliary electrodes (5) coated with a dielectric may be used. Further, in the above embodiment, the auxiliary electrodes (ω) are arranged in the optical axis direction (1) of the laser, but they may be arranged perpendicularly to the optical axis and in a large number in the form of a ladder.

また、上記実施例では補助電極（■を等間隔に並べたが
、第２図の実施例に示す様に間隔を変えることにより、
予備電離された電子の空間分布を調整することができる
。In addition, in the above embodiment, the auxiliary electrodes (■) were arranged at equal intervals, but by changing the intervals as shown in the embodiment of Fig. 2,
The spatial distribution of preionized electrons can be adjusted.

更に上記実施例では、補助電極（ωとして同等のものを
多数並べたが、誘電体の厚さや、径、あるいは誘電体の
種類を変えることにより、第２の主電極■と補助電極（
ωとの間に作られる容量を変え、補助放電の大きさを調
整することにより、予備電離された電子の空間分布を変
えることもできる。Furthermore, in the above embodiment, a large number of equivalent auxiliary electrodes (ω) were arranged, but by changing the thickness, diameter, or type of dielectric, the second main electrode (2) and the auxiliary electrode (
By changing the capacitance created between ω and adjusting the size of the auxiliary discharge, the spatial distribution of pre-ionized electrons can also be changed.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば誘電体でおおわれた補
助電極を多数配置したので、予備電離が一様になり、従
ってより均一な主放電が得られるという効果がある。As described above, according to the present invention, since a large number of auxiliary electrodes covered with a dielectric material are arranged, preliminary ionization becomes uniform, and therefore, a more uniform main discharge can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの発明の一実施例による放電励起型短パルス
レーザ装置を示す断面図、第２図はこの発明の他の実施
例を示す断面図、第３図は従来の放電励起型短パルスレ
ーザ装置を示す断面図である。 図において、（１）は高電圧電源、■は第１の主電極、
■は第２の主電極、（４）は誘電体、（ωは補助電極、
（０は補助電源、（７）は開孔部である。 なお、図中同一符号は同一まは相当部分を示す。 代理人　弁理士　佐　藤　正　年 第１図 ＋：＆＊＊１ミ＆ ５ニオ牟゛拗電、ａ ６Ｉ亨卯ｔＬ稀 ９：光　軸 第２図 第３図FIG. 1 is a cross-sectional view showing a discharge-excited short pulse laser device according to one embodiment of the present invention, FIG. 2 is a cross-sectional view showing another embodiment of the present invention, and FIG. 3 is a conventional discharge-excited short pulse laser device. FIG. 2 is a cross-sectional view showing a laser device. In the figure, (1) is a high voltage power supply, ■ is the first main electrode,
■ is the second main electrode, (4) is the dielectric, (ω is the auxiliary electrode,
(0 is the auxiliary power supply, and (7) is the opening. In addition, the same symbols in the figures indicate the same or corresponding parts. Agent: Patent Attorney Masaru Sato Figure 1 +: &**1 Mi& 5Niomu゛Sudden,a 6IHyorutL rare9:Light axisFigure 2Figure 3

Claims (2)

【特許請求の範囲】[Claims] （１）レーザ媒質中に配置され、レーザ光軸方向を長手
方向とする第１の主電極と、複数個の開孔部を有し、上
記第１の主電極と対向して配置された第２の主電極と、
該第２の主電極の背面に接するように配置された誘電体
にそれぞれおおわれた複数の補助電極と、上記第１の主
電極と第２の主電極との間に高電圧を印加する高電圧電
源と、上記第２の主電極と上記補助電極との間に高電圧
を印加する補助電源とを備えたことを特徴とする放電励
起型短パルスレーザ装置。(1) A first main electrode disposed in a laser medium and having a longitudinal direction in the direction of the laser optical axis, and a first main electrode having a plurality of openings and disposed opposite to the first main electrode. 2 main electrodes,
A high voltage is applied between a plurality of auxiliary electrodes each covered with a dielectric material arranged so as to be in contact with the back surface of the second main electrode, and the first main electrode and the second main electrode. A discharge-excited short pulse laser device comprising: a power source; and an auxiliary power source that applies a high voltage between the second main electrode and the auxiliary electrode. （２）誘電体として、ガラス又はセラミックの管を用い
、その中に補助電極を配したことを特徴とする特許請求
の範囲第１項記載の放電励起型短パルスレーザ装置。(2) A discharge-excited short-pulse laser device according to claim 1, characterized in that a glass or ceramic tube is used as the dielectric material, and an auxiliary electrode is arranged inside the tube.
JP27931085A 1985-12-13 1985-12-13 Discharge excitation type short pulse laser device Pending JPS62139372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27931085A JPS62139372A (en) 1985-12-13 1985-12-13 Discharge excitation type short pulse laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27931085A JPS62139372A (en) 1985-12-13 1985-12-13 Discharge excitation type short pulse laser device

Publications (1)

Publication Number Publication Date
JPS62139372A true JPS62139372A (en) 1987-06-23

Family

ID=17609380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27931085A Pending JPS62139372A (en) 1985-12-13 1985-12-13 Discharge excitation type short pulse laser device

Country Status (1)

Country Link
JP (1) JPS62139372A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS647578A (en) * 1987-06-30 1989-01-11 Toshiba Corp Gas laser device
DE4102079A1 (en) * 1990-01-24 1991-08-01 Hitachi Ltd HIGH PRESSURE GAS LASER DEVICE

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS647578A (en) * 1987-06-30 1989-01-11 Toshiba Corp Gas laser device
DE4102079A1 (en) * 1990-01-24 1991-08-01 Hitachi Ltd HIGH PRESSURE GAS LASER DEVICE

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