JPH05120738A - Polishing method for stamper for optical disk - Google Patents

Polishing method for stamper for optical disk

Info

Publication number
JPH05120738A
JPH05120738A JP30819891A JP30819891A JPH05120738A JP H05120738 A JPH05120738 A JP H05120738A JP 30819891 A JP30819891 A JP 30819891A JP 30819891 A JP30819891 A JP 30819891A JP H05120738 A JPH05120738 A JP H05120738A
Authority
JP
Japan
Prior art keywords
stamper
sheet
polishing
polishing jig
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30819891A
Other languages
Japanese (ja)
Inventor
Kazuyuki Chiba
和幸 千葉
Yasusuke Tanaka
庸介 田中
Yuko Yokomizo
祐幸 横溝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Tosoh Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Corp filed Critical Tosoh Corp
Priority to JP30819891A priority Critical patent/JPH05120738A/en
Publication of JPH05120738A publication Critical patent/JPH05120738A/en
Pending legal-status Critical Current

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  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To facilitate mounting of a stamper to a polishing jig and to obtain the stamper having a uniform and good rear surface by putting a sheet-like elastic material between the polishing jig and a double-coated tacky adhesive sheet and polishing the sheet. CONSTITUTION:The stamper 1 constituted by coating its signal surface with a high-polymer film by a method, such as spin coating method or press coating method is stuck onto the double-coated tape stuck to the polishing jig via the sheet-like elastic material formed to a suitable size so as to be superposed on the sheet-like elastic material. There is no particular need for jigs for sticking, etc., in such a case. The signal surface of, for example, the stamper sized 0.3mm is protected with the high-polymer film by the spin coating method and such stamper is mounted to the double-coated tape surface stuck to the polishing jig via the sheet-like elastic material having 0.1mm thickness. The stamper having the good rear surface of <=0.2S rear surface roughness free from a local dent is obtd. if such stamper is polished.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、光学ディスク用スタン
パの研磨方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of polishing a stamper for an optical disc.

【０００２】[0002]

【従来の技術】一般に、光学ディスク用の基板は、大量
生産が可能なように射出成形によって生産されている。
従って、基板にピットあるいはグルーブを転写させるた
めのスタンパには、原盤としての高度な精度、裏面（非
信号面）の平滑性、射出成形の際の耐久性が要求され
る。これらの特性のうち、特に、スタンパ裏面の平滑性
は、得られる基板の特性に大きく影響する。2. Description of the Related Art Generally, substrates for optical discs are manufactured by injection molding so that they can be mass-produced.
Therefore, the stamper for transferring the pits or grooves to the substrate is required to have high precision as a master, smoothness on the back surface (non-signal surface), and durability during injection molding. Among these characteristics, especially the smoothness of the back surface of the stamper greatly affects the characteristics of the obtained substrate.

【０００３】従来、光学ディスク用スタンパの裏面研磨
方法は、例えば、電鋳により得たスタンパの信号面を、
適当な高分子膜で被覆、保護した後、両面粘着性シート
を、剥離補助シートを挟んで研磨治具へ取り付け、ポリ
ッシング法あるいはラッピング法により研磨する方法
（特開昭６０−２１６９１５号公報参照）が提案されて
いる。Conventionally, a back surface polishing method for an optical disk stamper is, for example, a method of polishing a signal surface of a stamper obtained by electroforming.
After coating and protecting with a suitable polymer film, the double-sided pressure-sensitive adhesive sheet is attached to a polishing jig with a release assisting sheet sandwiched therebetween and polished by a polishing method or a lapping method (see JP-A-60-216915). Is proposed.

【０００４】この方法は、スタンパと研磨治具との固定
が容易であり、スタンパの信号面の保護に効果があると
されている。又、同公報には、剥離補助シートとして、
剥離性の高いフツ化樹脂又はパラフィンなどが例示され
ており、研磨後のスタンパを容易に研磨治具から剥離す
ることが開示されている。This method is said to be effective in protecting the signal surface of the stamper because it is easy to fix the stamper and the polishing jig. Further, in the publication, as a peeling auxiliary sheet,
A fluorinated resin or paraffin having high releasability is exemplified, and it is disclosed that the stamper after polishing is easily released from the polishing jig.

【０００５】更に、研磨治具からのスタンパの剥離を容
易にする方法として、溝を持った研磨治具の表面と、ス
タンパを保持する粘着シートとの間に、剥離性の高い薄
膜層を設けることが提案されている（特開昭６３−２７
５０５４号公報参照）。この方法で用いる剥離性の高い
薄膜として同公報には、具体的な性状、形態についての
開示はないが、弗素樹脂やシリコーン系の薄膜が用いら
れることが開示されている。Further, as a method of facilitating the peeling of the stamper from the polishing jig, a thin film layer having high peelability is provided between the surface of the polishing jig having the groove and the adhesive sheet holding the stamper. Has been proposed (Japanese Patent Laid-Open No. 63-27).
No. 5054). As a thin film having high releasability used in this method, the publication does not disclose specific properties or forms, but discloses that a fluororesin or silicone thin film is used.

【０００６】しかしながら、上記した方法は、スタンパ
と研磨治具との剥離の面では確かに効果があるが、この
方法ではスタンパを研磨治具に取付ける際に、夫々の積
層面に気泡の混入が避けられず、特に、粘着シートと研
磨治具面との間に気泡が混入した状態で研磨を行うと、
均一なスタンパ研磨面を得ることがしばしば困難になる
ことがある。However, although the above-mentioned method is certainly effective in terms of separation between the stamper and the polishing jig, in this method, when the stamper is attached to the polishing jig, air bubbles are not mixed in the respective laminated surfaces. It is unavoidable, especially when polishing with air bubbles mixed between the adhesive sheet and the polishing jig surface,
Obtaining a uniform stamper polished surface can often be difficult.

【０００７】[0007]

【発明が解決しようとする課題】本発明の目的は、上記
した問題点のない、従って再現性の良好な光学ディスク
用スタンパを提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a stamper for an optical disc which does not have the above-mentioned problems and therefore has good reproducibility.

【０００８】[0008]

【課題を解決するための手段】本発明者らは、上記問題
点を解決するために、スタンパの研磨について鋭意検討
を行った結果、スタンパ研磨の際のスタンパとその研磨
治具をある条件で構成することにより効率良く研磨が可
能となることを見出だし本発明を完成した。In order to solve the above problems, the inventors of the present invention have earnestly studied polishing of a stamper, and as a result, the stamper and the polishing jig for polishing the stamper under certain conditions. The present invention has been completed by discovering that the structure enables efficient polishing.

【０００９】すなわち本発明は、光学ディスク用スタン
パの、高分子膜で被覆した信号面を両面粘着性シートを
介して研磨治具に固定しスタンパを研磨するにあたり、
前記、研磨治具と両面粘着性シートとの間にシート状弾
性体を挟持させてこれを行うことを特徴とする光学ディ
スク用スタンパの研磨方法に関する。以下、本発明をさ
らに詳細に説明する。That is, according to the present invention, when the signal surface of the stamper for an optical disc coated with a polymer film is fixed to a polishing jig through a double-sided adhesive sheet, the stamper is polished.
The present invention relates to a method of polishing an optical disk stamper, which is characterized in that a sheet-shaped elastic body is sandwiched between a polishing jig and a double-sided adhesive sheet. Hereinafter, the present invention will be described in more detail.

【００１０】本発明は、研磨治具と両面粘着性シートと
の間にシート状弾性体を挟持させることが特徴である
が、ここで用いるシート状弾性体は、その引っ張り強度
が５０〜９０ｋｇｆ／ｃｍ２、伸びが１００〜４００
％、引裂強度が５〜し２５ｋｇｆ／ｃｍ２の範囲のもの
が望ましい。弾性体の物性がこれらの範囲を外れると、
研磨を実施するに当たり構成する各層への混入気泡の除
去効果が小さくなる。又、必要以上に高い弾性を持つも
のを使用すると、研磨治具とスタンパを固定する上で好
ましくない。The present invention is characterized in that the sheet-like elastic body is sandwiched between the polishing jig and the double-sided adhesive sheet. The sheet-like elastic body used here has a tensile strength of 50 to 90 kgf /. cm 2 , elongation 100-400
%, The tear strength is preferably 5 to 25 kgf / cm 2 . If the physical properties of the elastic body deviate from these ranges,
When polishing is carried out, the effect of removing air bubbles from the constituent layers is reduced. Further, it is not preferable to fix the polishing jig and the stamper by using a material having elasticity higher than necessary.

【００１１】又、用いるシート状弾性体の材質は特に限
定されるものではないが、研磨雰囲気に於ける化学的安
定性、発塵の少なさなどの理由からシリコーンで構成さ
れたものが好ましい。上記シート状弾性体の厚さは、
０．０５〜０．５ｍｍが望ましく、厚さが０．５ｍｍを
越えると、高分子膜で保護されたスタンパと研磨治具と
の段差が大きくなり、均一な研磨が困難となることがあ
り、０．０５ｍｍ未満では、仮に気泡が混入した場合に
それが分散しにくくなり、均一な研磨面が得られない。The material of the sheet-like elastic material to be used is not particularly limited, but a material made of silicone is preferable for reasons such as chemical stability in a polishing atmosphere and low dust generation. The thickness of the elastic sheet is
0.05 to 0.5 mm is desirable, and when the thickness exceeds 0.5 mm, the step difference between the stamper protected by the polymer film and the polishing jig becomes large, which may make uniform polishing difficult. If it is less than 0.05 mm, it becomes difficult to disperse air bubbles if they are mixed, and a uniform polished surface cannot be obtained.

【００１２】本発明で用いるシート状弾性体の大きさ
は、研磨治具からスタンパを剥がす時に容易にするた
め、スタンパ外径とほぼ同じかそれよりやや大きい方が
よい。シート状弾性体の大きさがスタンパ外径より小さ
いと、スタンパが不均一に研磨されたり、スタンパを剥
がす際にスタンパにキズをつけるなどの問題が生じる場
合がある。The size of the sheet-like elastic body used in the present invention is preferably approximately the same as or slightly larger than the outer diameter of the stamper in order to facilitate the peeling of the stamper from the polishing jig. If the size of the sheet-like elastic body is smaller than the outer diameter of the stamper, problems such as uneven polishing of the stamper and scratches on the stamper when peeling the stamper may occur.

【００１３】本発明によるスタンパの研磨治具への取付
け方法は、第１図に示すように、その表面上にスピンコ
ート法、スプレーコート法などの方法で信号面上に高分
子膜を被覆したスタンパを、研磨治具に適当な大きさに
したシート状弾性体を介して粘着させた両面テープ表面
上にシート状弾性体に重なるように張り付けるだけでよ
く、特に張り付け用の治具などは必要としない。The method of attaching the stamper to the polishing jig according to the present invention is, as shown in FIG. 1, coated on its surface with a polymer film by a method such as spin coating or spray coating. The stamper only needs to be attached to the surface of the double-sided tape adhered to the polishing jig through the sheet-shaped elastic body of an appropriate size so as to overlap the sheet-shaped elastic body. do not need.

【００１４】[0014]

【実施例】以下、本発明を実施例をもって更に詳細に説
明するが、本発明はこれらに限定されるものではない． 実施例１ 厚さ約０．３ｍｍのスタンパの信号面をスピンコート法
により高分子膜で保護した後、シリコーン製の引っ張り
強度７０ｋｇｆ／ｃｍ２、伸び２７０％、引裂強度１３
ｋｇｆ／ｃｍ２、厚さ約０．１ｍｍのシート状弾性体を
介して研磨治具に張り付けた両面テープ表面に取付け
た。これをポリッシングし、局所的なへこみのない裏面
粗さ０．２Ｓ以下である、良好な裏面を有するスタンパ
を得た。EXAMPLES The present invention will be described in more detail with reference to examples, but the present invention is not limited thereto. Example 1 After the signal surface of a stamper having a thickness of about 0.3 mm was protected by a polymer film by a spin coating method, the tensile strength was 70 kgf / cm 2 made of silicone, the elongation was 270%, and the tear strength was 13
It was attached to the surface of the double-sided tape stuck to a polishing jig through a sheet-like elastic body having a kgf / cm 2 and a thickness of about 0.1 mm. This was polished to obtain a stamper having a good back surface having a back surface roughness of 0.2 S or less without any local dent.

【００１５】実施例２ シート状弾性体として引っ張り強度５０ｋｇｆ／ｃ
ｍ２、伸び１５０％、厚さ約０．３ｍｍのものを用いた
以外は実施例１と同様にスタンパを研磨治具に取付け
た。これをポリッシングし、局所的なへこみのない裏面
粗さ０．２Ｓ以下である、良好な裏面を有するスタンパ
を得た。Example 2 Tensile strength as a sheet-like elastic body 50 kgf / c
The stamper was attached to the polishing jig in the same manner as in Example 1 except that the one having m 2 , elongation of 150% and thickness of about 0.3 mm was used. This was polished to obtain a stamper having a good back surface having a back surface roughness of 0.2 S or less without any local dent.

【００１６】実施例３ シート状弾性体として引っ張り強度９０ｋｇｆ／ｃ
ｍ２、伸び４００％、厚さ約０．０５ｍｍのものを用い
た以外は実施例１と同様にスタンパを研磨治具に取付け
た。これをポリッシングし、局所的なへこみのない裏面
粗さ０．２Ｓ以下である、良好な裏面を有するスタンパ
を得た。Example 3 Tensile strength as sheet-like elastic body 90 kgf / c
The stamper was attached to the polishing jig in the same manner as in Example 1 except that the one having m 2 , elongation of 400% and thickness of about 0.05 mm was used. This was polished to obtain a stamper having a good back surface having a back surface roughness of 0.2 S or less without any local dent.

【００１７】比較例１ シート状弾性体として引っ張り強度４０ｋｇｆ／ｃ
ｍ２、伸び５０％、厚さ約０．１ｍｍのものを用いた以
外は実施例１と同様にスタンパを研磨治具に取付けた。
これをポリッシングしたところ、スタンパの裏面に局所
的なへこみが生じた。Comparative Example 1 Tensile strength of 40 kgf / c as a sheet-like elastic body
The stamper was attached to the polishing jig in the same manner as in Example 1 except that the one having m 2 , elongation of 50% and thickness of about 0.1 mm was used.
When this was polished, a local dent was generated on the back surface of the stamper.

【００１８】比較例２ シート状弾性体として引っ張り強度１００ｋｇｆ／ｃｍ
２、伸び５００％、厚さ約０．１ｍｍのものを用いた以
外は実施例１と同様にスタンパを研磨治具に取付けた。
これをポリッシングしたところ、スタンパの裏面に局所
的なへこみが生じた。Comparative Example 2 Tensile strength as a sheet-like elastic body 100 kgf / cm
2. The stamper was attached to the polishing jig in the same manner as in Example 1 except that the one having the elongation of 500% and the thickness of about 0.1 mm was used.
When this was polished, a local dent was generated on the back surface of the stamper.

【００１９】[0019]

【発明の効果】本発明によれば、スタンパの研磨治具へ
の取付け方法が容易になるだけでなく、均一で良好な裏
面を有するスタンパを得る。According to the present invention, not only the method of attaching the stamper to the polishing jig is facilitated, but also a stamper having a uniform and good back surface is obtained.

【図面の簡単な説明】[Brief description of drawings]

【図１】スタンパを研磨治具へ取付けた際の断面を模式
的に示す図である。FIG. 1 is a diagram schematically showing a cross section when a stamper is attached to a polishing jig.

【符号の説明】[Explanation of symbols]

１：スタンパ ２：高分子膜 ３：両面テープ ４：シート状弾性体 ５：研磨治具 1: Stamper 2: Polymer film 3: Double-sided tape 4: Sheet-like elastic body 5: Polishing jig

Claims (2)

【特許請求の範囲】[Claims] 【請求項１】光学ディスク用スタンパの、高分子膜で被
覆した信号面を両面粘着性シートを介して研磨治具に固
定しスタンパを研磨するにあたり、前記、研磨治具と両
面粘着性シートとの間にシート状弾性体を挟持させてこ
れを行うことを特徴とする光学ディスク用スタンパの研
磨方法。1. A polishing jig and a double-sided adhesive sheet for fixing a signal surface of a stamper for an optical disc coated with a polymer film to a polishing jig via a double-sided adhesive sheet to polish the stamper. A method for polishing an optical disk stamper, which is characterized in that a sheet-like elastic body is sandwiched between them. 【請求項２】引っ張り強度が５０〜９０ｋｇｆ／ｃ
ｍ２、伸びが１００〜４００％であるシート状弾性体を
用いる請求項１記載の研磨方法。2. The tensile strength is 50 to 90 kgf / c.
The polishing method according to claim 1, wherein a sheet-shaped elastic body having m 2 and an elongation of 100 to 400% is used.
JP30819891A 1991-10-29 1991-10-29 Polishing method for stamper for optical disk Pending JPH05120738A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30819891A JPH05120738A (en) 1991-10-29 1991-10-29 Polishing method for stamper for optical disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30819891A JPH05120738A (en) 1991-10-29 1991-10-29 Polishing method for stamper for optical disk

Publications (1)

Publication Number Publication Date
JPH05120738A true JPH05120738A (en) 1993-05-18

Family

ID=17978100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30819891A Pending JPH05120738A (en) 1991-10-29 1991-10-29 Polishing method for stamper for optical disk

Country Status (1)

Country Link
JP (1) JPH05120738A (en)

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