JPH0510606B2 - - Google Patents
Info
- Publication number
- JPH0510606B2 JPH0510606B2 JP59067359A JP6735984A JPH0510606B2 JP H0510606 B2 JPH0510606 B2 JP H0510606B2 JP 59067359 A JP59067359 A JP 59067359A JP 6735984 A JP6735984 A JP 6735984A JP H0510606 B2 JPH0510606 B2 JP H0510606B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- probe
- vehicle
- movable part
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 claims description 43
- 238000007689 inspection Methods 0.000 claims description 38
- 239000000523 sample Substances 0.000 claims description 35
- 239000000428 dust Substances 0.000 claims description 8
- 238000005070 sampling Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 description 10
- 238000005259 measurement Methods 0.000 description 9
- 230000005856 abnormality Effects 0.000 description 7
- 230000003028 elevating effect Effects 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004092 self-diagnosis Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Navigation (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59067359A JPS60211315A (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ムの検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59067359A JPS60211315A (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ムの検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60211315A JPS60211315A (ja) | 1985-10-23 |
JPH0510606B2 true JPH0510606B2 (ko) | 1993-02-10 |
Family
ID=13342736
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59067359A Granted JPS60211315A (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ムの検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60211315A (ko) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62203017A (ja) * | 1986-03-04 | 1987-09-07 | Toshiba Eng Co Ltd | 移動式室内環境監視装置 |
JPS62162626U (ko) * | 1986-04-04 | 1987-10-16 | ||
JPS637820A (ja) * | 1986-06-27 | 1988-01-13 | Komatsu Ltd | クリ−ンル−ムの防塵フイルタ検査装置 |
JPS6379188A (ja) * | 1986-09-23 | 1988-04-09 | Yamatake Honeywell Co Ltd | 環境測定デ−タ処理システム |
JPH01128540A (ja) * | 1987-11-13 | 1989-05-22 | Nec Corp | ウェハー搬送車 |
EP2092265B1 (en) * | 2006-11-13 | 2013-04-10 | Raytheon Company | Unmanned ground robotic vehicle having an alternatively extendible and retractable sensing appendage |
CN105388034B (zh) * | 2015-12-30 | 2018-06-08 | 东旭科技集团有限公司 | 基板颗粒物的取样装置和玻璃基板颗粒物的取样方法 |
WO2023162038A1 (ja) * | 2022-02-22 | 2023-08-31 | 株式会社Fuji | 基板生産システム及び基板作業機の検査方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58142499A (ja) * | 1982-02-18 | 1983-08-24 | 株式会社東芝 | 移動式点検監視システム |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58186889U (ja) * | 1982-06-08 | 1983-12-12 | 三菱電機株式会社 | エア−シヤワ−室 |
-
1984
- 1984-04-06 JP JP59067359A patent/JPS60211315A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58142499A (ja) * | 1982-02-18 | 1983-08-24 | 株式会社東芝 | 移動式点検監視システム |
Also Published As
Publication number | Publication date |
---|---|
JPS60211315A (ja) | 1985-10-23 |
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