JPH0510606B2 - - Google Patents

Info

Publication number: JPH0510606B2
Authority: JP; Japan
Prior art keywords: filter; probe; vehicle; movable part; attached
Prior art date: 1984-04-06
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP59067359A

Other languages

English (en)

Japanese (ja)

Other versions

JPS60211315A (ja

Inventor

Yasuo Inoe

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Obayashi Corp

Original Assignee

Obayashi Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-04-06

Filing date

1984-04-06

Publication date

1993-02-10

1984-04-06 Application filed by Obayashi Corp filed Critical Obayashi Corp

1984-04-06 Priority to JP59067359A priority Critical patent/JPS60211315A/ja

1985-10-23 Publication of JPS60211315A publication Critical patent/JPS60211315A/ja

1993-02-10 Publication of JPH0510606B2 publication Critical patent/JPH0510606B2/ja

Status Granted legal-status Critical Current

Links

230000007246 mechanism Effects 0.000 claims description 43
238000007689 inspection Methods 0.000 claims description 38
239000000523 sample Substances 0.000 claims description 35
239000000428 dust Substances 0.000 claims description 8
238000005070 sampling Methods 0.000 claims description 5
238000000034 method Methods 0.000 description 10
238000005259 measurement Methods 0.000 description 9
230000005856 abnormality Effects 0.000 description 7
230000003028 elevating effect Effects 0.000 description 7
238000006073 displacement reaction Methods 0.000 description 4
238000012360 testing method Methods 0.000 description 4
230000003749 cleanliness Effects 0.000 description 3
238000010586 diagram Methods 0.000 description 3
230000005540 biological transmission Effects 0.000 description 2
238000001514 detection method Methods 0.000 description 2
230000002159 abnormal effect Effects 0.000 description 1
230000002411 adverse Effects 0.000 description 1
238000013459 approach Methods 0.000 description 1
230000008602 contraction Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
230000005674 electromagnetic induction Effects 0.000 description 1
238000003384 imaging method Methods 0.000 description 1
239000000463 material Substances 0.000 description 1
238000012544 monitoring process Methods 0.000 description 1
230000003287 optical effect Effects 0.000 description 1
230000002093 peripheral effect Effects 0.000 description 1
238000004092 self-diagnosis Methods 0.000 description 1

Landscapes

Ventilation (AREA)
Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
Testing Or Calibration Of Command Recording Devices (AREA)
Navigation (AREA)
Sampling And Sample Adjustment (AREA)

JP59067359A 1984-04-06 1984-04-06 クリ−ンル−ムの検査装置 Granted JPS60211315A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP59067359A JPS60211315A (ja)	1984-04-06	1984-04-06	クリ−ンル−ムの検査装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP59067359A JPS60211315A (ja)	1984-04-06	1984-04-06	クリ−ンル−ムの検査装置

Publications (2)

Publication Number	Publication Date
JPS60211315A JPS60211315A (ja)	1985-10-23
JPH0510606B2 true JPH0510606B2 (ko)	1993-02-10

Family

ID=13342736

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP59067359A Granted JPS60211315A (ja)	1984-04-06	1984-04-06	クリ−ンル−ムの検査装置

Country Status (1)

Country	Link
JP (1)	JPS60211315A (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS62203017A (ja) *	1986-03-04	1987-09-07	Toshiba Eng Co Ltd	移動式室内環境監視装置
JPS62162626U (ko) *	1986-04-04	1987-10-16
JPS637820A (ja) *	1986-06-27	1988-01-13	Komatsu Ltd	クリ−ンル−ムの防塵フイルタ検査装置
JPS6379188A (ja) *	1986-09-23	1988-04-09	Yamatake Honeywell Co Ltd	環境測定デ−タ処理システム
JPH01128540A (ja) *	1987-11-13	1989-05-22	Nec Corp	ウェハー搬送車
EP2092265B1 (en) *	2006-11-13	2013-04-10	Raytheon Company	Unmanned ground robotic vehicle having an alternatively extendible and retractable sensing appendage
CN105388034B (zh) *	2015-12-30	2018-06-08	东旭科技集团有限公司	基板颗粒物的取样装置和玻璃基板颗粒物的取样方法
WO2023162038A1 (ja) *	2022-02-22	2023-08-31	株式会社Fuji	基板生産システム及び基板作業機の検査方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58142499A (ja) *	1982-02-18	1983-08-24	株式会社東芝	移動式点検監視システム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58186889U (ja) *	1982-06-08	1983-12-12	三菱電機株式会社	エア−シヤワ−室

1984
- 1984-04-06 JP JP59067359A patent/JPS60211315A/ja active Granted

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58142499A (ja) *	1982-02-18	1983-08-24	株式会社東芝	移動式点検監視システム

Also Published As

Publication number	Publication date
JPS60211315A (ja)	1985-10-23

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