JPH0479522B2 - - Google Patents
Info
- Publication number
- JPH0479522B2 JPH0479522B2 JP14448584A JP14448584A JPH0479522B2 JP H0479522 B2 JPH0479522 B2 JP H0479522B2 JP 14448584 A JP14448584 A JP 14448584A JP 14448584 A JP14448584 A JP 14448584A JP H0479522 B2 JPH0479522 B2 JP H0479522B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- distance
- projection lens
- light source
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 21
- 238000005259 measurement Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14448584A JPS6125011A (ja) | 1984-07-13 | 1984-07-13 | 光学式距離測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14448584A JPS6125011A (ja) | 1984-07-13 | 1984-07-13 | 光学式距離測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6125011A JPS6125011A (ja) | 1986-02-03 |
| JPH0479522B2 true JPH0479522B2 (de) | 1992-12-16 |
Family
ID=15363413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14448584A Granted JPS6125011A (ja) | 1984-07-13 | 1984-07-13 | 光学式距離測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6125011A (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63256810A (ja) * | 1987-04-14 | 1988-10-24 | Nkk Corp | 自動距離検出装置 |
| JPH0194221A (ja) * | 1987-10-06 | 1989-04-12 | Hamamatsu Photonics Kk | 対象物状態検出器 |
| JP2637170B2 (ja) * | 1988-06-21 | 1997-08-06 | 株式会社日立製作所 | モータのブラシ摩耗量測定方法とその装置 |
| JP4133884B2 (ja) * | 2004-03-18 | 2008-08-13 | 株式会社ミツトヨ | 光学的変位測定器 |
| JP5248825B2 (ja) * | 2007-09-06 | 2013-07-31 | 株式会社ディスコ | チャックテーブルに保持された被加工物の高さ位置検出装置 |
| JP5118580B2 (ja) * | 2008-08-22 | 2013-01-16 | 株式会社ディスコ | 高さ位置検出装置および高さ位置検出方法 |
-
1984
- 1984-07-13 JP JP14448584A patent/JPS6125011A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6125011A (ja) | 1986-02-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |