JPH0469552A - Nondestructive inspecting method for ceramic member - Google Patents
Nondestructive inspecting method for ceramic memberInfo
- Publication number
- JPH0469552A JPH0469552A JP18229890A JP18229890A JPH0469552A JP H0469552 A JPH0469552 A JP H0469552A JP 18229890 A JP18229890 A JP 18229890A JP 18229890 A JP18229890 A JP 18229890A JP H0469552 A JPH0469552 A JP H0469552A
- Authority
- JP
- Japan
- Prior art keywords
- light
- defect
- ceramic member
- inspection
- defects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims description 16
- 230000007547 defect Effects 0.000 claims abstract description 41
- 239000011148 porous material Substances 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 4
- 238000009659 non-destructive testing Methods 0.000 claims description 4
- 238000007689 inspection Methods 0.000 abstract description 17
- 238000011179 visual inspection Methods 0.000 abstract description 11
- 230000001678 irradiating effect Effects 0.000 abstract description 3
- 239000013307 optical fiber Substances 0.000 abstract description 2
- 239000000835 fiber Substances 0.000 abstract 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910000873 Beta-alumina solid electrolyte Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、セラミック部材の非破壊検査方法に関し、詳
しくは、透光性を有するセラミック部材（被検査物とも
いう）に存在する、不純物（異物）、気孔（ボア）、割
れ（クラック）あるいは表面の傷等の欠陥を非破壊的に
検査する方法に関する。Detailed Description of the Invention (Industrial Application Field) The present invention relates to a method for non-destructive testing of ceramic members, and more specifically, the present invention relates to a method for non-destructive testing of ceramic members. The present invention relates to a method for non-destructively inspecting defects such as foreign objects, pores, cracks, and surface flaws.
（従来の技術）
従来、この種の欠陥の検査は、超音波やＸ線等の放射線
による方法、あるいは目視による方法（目視検査）が一
般に使用されている。(Prior Art) Conventionally, to inspect this type of defect, a method using radiation such as ultrasonic waves or X-rays, or a method using visual observation (visual inspection) is generally used.
このうち、超音波等を使用する方法は、大掛かりな検査
装置や設備を要する上、その取り扱いも比較的高度のた
め、一般の検査作業としては必ずしも適さない。また、
これらの方法は、被検査物の特定部分の検査には好適と
いえるが、検査部位が大きかったり、被検査物が多量で
ある場合には、多くの時間や手数を要することとなるた
め、コスト面で問題４（あり、また、微小な欠陥の発見
は困難な場合が多く実用的でない。Among these methods, methods using ultrasonic waves or the like require large-scale inspection equipment and equipment, and require relatively sophisticated handling, so they are not necessarily suitable for general inspection work. Also,
These methods can be said to be suitable for inspecting a specific part of the object to be inspected, but if the inspection area is large or the number of objects to be inspected is large, it requires a lot of time and effort, so it is costly. Problem 4 (Furthermore, finding minute defects is often difficult and impractical.
一方、目視検査は、格別の装置等を必要とせず、簡便に
実施することができる。こうした理由により、実際には
目視検査の方が広く行われている。On the other hand, visual inspection does not require any special equipment and can be carried out easily. For these reasons, visual inspection is more widely used in practice.
（発明が解決しようとする課題） 従来の目視検査には次のような欠点がある。(Problem to be solved by the invention) Traditional visual inspection has the following drawbacks:
まず、目視によるのであるから、微小な欠陥の発見は困
難であるということである。発見できる欠陥の大きさは
、通常の熟練度の作業者の場合で約５０μｍ以上である
が、見落としも多く、検査精度が低いという問題がある
。First, since it is done visually, it is difficult to discover minute defects. The size of the defects that can be detected is approximately 50 μm or more in the case of a worker of ordinary skill level, but there are problems in that the defects are often overlooked and the inspection accuracy is low.
また、発見できる欠陥は、通常、直接目視できる部位に
限られ、表面ないし外部に現れない内部の欠陥の発見は
事実上不可能である。さらに、被検査物が筒ないし管状
体である場合には、その内側の検査には内視鏡等の特別
の道具を必要とし、検査効率上問題があるばかりか、検
査の水準の低下を招きやすいという問題がある。Additionally, defects that can be discovered are usually limited to areas that can be directly seen, and it is virtually impossible to discover internal defects that do not appear on the surface or outside. Furthermore, if the object to be inspected is a cylinder or tube, special tools such as an endoscope are required to inspect the inside of the object, which not only poses problems in terms of inspection efficiency but also leads to a decline in the standard of inspection. The problem is that it is easy.
したがって、従来の目視検査では、検査で不良品として
排除されるべき製品でも、合格品と判定されているもの
も少なくない。このことは、高純度ないし高度の緻密性
の要求されるセラミック製品の場合に大きな問題である
。Therefore, in conventional visual inspection, there are many products that are determined to be acceptable products even though they should be rejected as defective products. This is a big problem in the case of ceramic products that require high purity or high density.
本発明は、上記の点に鑑み、目視検査の簡便さ等のメリ
ットを損なうこと無く、透光性を有するセラミック部材
の表面や内部の欠陥を容品がっ高精度で検出しうる方法
を提供することにある。In view of the above points, the present invention provides a method for detecting defects on the surface or inside of a translucent ceramic member with high precision without sacrificing advantages such as the simplicity of visual inspection. It's about doing.
（課題を解決するための手段）
上記の目的を達成するために、本発明のセラミック部材
の非破壊検査方法は、透光性を有するセラミック部材に
存在する不純物、気孔、割れ等の欠陥を目視によって検
査する方法において、そのセラミック部材の一方の面に
光を照射し、目視側であるその他方の面に前記欠陥を顕
在化させることである。(Means for Solving the Problems) In order to achieve the above object, the non-destructive inspection method for ceramic members of the present invention visually inspects defects such as impurities, pores, and cracks existing in a translucent ceramic member. In this method, one surface of the ceramic member is irradiated with light, and the defect is exposed on the other surface, which is the viewing side.
（作用）
被検査物であるセラミック部材の一方の面に光を照射す
る。このとき、不純物や気孔等の欠陥の存在する部位で
入射光は吸収や散乱される。したがって、目視側である
その他方の面における透過光や色調は、欠陥の存在する
部位とその周囲とては相対的に異なり、これにより欠陥
が顕在化される。(Operation) Light is irradiated onto one surface of the ceramic member that is the object to be inspected. At this time, the incident light is absorbed or scattered at sites where defects such as impurities and pores exist. Therefore, the transmitted light and color tone on the other surface, which is the viewing side, are relatively different between the area where the defect exists and the surrounding area, and this makes the defect more obvious.
つまり、光の減衰の差や色調の差として顕在化された箇
所を目視で検出し、その部位を欠陥としてとらえること
でセラミック部材の良否を判定するのである。In other words, the quality of the ceramic member is determined by visually detecting areas that have become apparent as differences in light attenuation or differences in color tone, and identifying these areas as defects.
（実施例）
本発明の一実施例について、図面を参照して、詳細に説
明する。(Example) An example of the present invention will be described in detail with reference to the drawings.
本例における被検査物であるセラミック部材１は、β−
アルミナでつくったセラミックの管で、有底筒状に形成
されている。因みに、これは固体電解質（イオン導電材
料）で、用途、機能上、高純度および高度の緻密性の要
求されるものの一例である。本例のものは外径が約４５
ｍｍで肉厚が３．５龍であり、白色のほぼ半透明を呈し
ている。なお、本例で使用する照明装置について説明す
ると、光源は、８０００’ Ｋ程度のハロゲンランプ（
図示しない）で、この光を集光し、光ファイバＨを通し
て先端の集光レンズＩＮＳより１万ルクスから３０万ル
クス程度の照度が保持される構成とされている。The ceramic member 1, which is the object to be inspected in this example, is β-
It is a ceramic tube made of alumina and is shaped like a cylinder with a bottom. Incidentally, this is an example of a solid electrolyte (ion-conductive material) that requires high purity and high density in terms of usage and functionality. The outer diameter of this example is approximately 45
It has a wall thickness of 3.5 mm and is white and almost translucent. In addition, to explain the lighting device used in this example, the light source is a halogen lamp (about 8000'K).
(not shown) condenses this light and passes it through an optical fiber H through a condensing lens INS at the tip to maintain an illuminance of about 10,000 lux to 300,000 lux.
なお集光レンズ部Ｓによる照射方向は、フレキシブルチ
ューブ製のライトガイドＬによって自在とされている。Note that the direction of irradiation by the condenser lens section S is made freely adjustable by a light guide L made of a flexible tube.
さて本例での検査に際しては、セラミック部材１（被検
査物）の内面に約３万ルクスの照度を達成するよう、上
記照明装置の集光レンズ部ＳをライトガイドＬを介して
挿入し、適宜の検査部位を照射する。Now, during the inspection in this example, the condenser lens section S of the illumination device is inserted through the light guide L so as to achieve an illuminance of about 30,000 lux on the inner surface of the ceramic member 1 (object to be inspected). Irradiate the appropriate test area.
すると、欠陥２（ただし、本例におけるこの欠陥は従来
の単なる目視検査では確認できないものである）は、照
射された光りをバックライトとして黒っぽく浮び上がっ
て顕在化される。この現象は、欠陥２の存在に起因し入
射光が吸収や散乱されるため、目視側である外周面では
、欠陥２の存在する部位とその周囲とで色調等が相対的
に異なることによる。Then, defect 2 (however, this defect in this example cannot be confirmed by mere visual inspection in the past) becomes apparent as it stands out blackishly using the irradiated light as a backlight. This phenomenon occurs because the incident light is absorbed or scattered due to the presence of the defect 2, so that on the outer circumferential surface on the viewing side, the color tone etc. are relatively different between the area where the defect 2 exists and the surrounding area.
したがって検査作業者としては検査において、この顕在
化されたものの有無を識別し、それがあれば欠陥が存在
すると判断し、あるいは存在すると推定し、その製品を
不良品と判定することができる。Therefore, during the inspection, an inspection worker can identify the presence or absence of this manifested item, and if it is found, determine that a defect exists or presume that a defect exists, and determine that the product is defective.
なお、こうして顕在化されるものの態様は欠陥の種類に
より少しづつ異なる。内部の微小な気孔のようなものの
場合には、必ずしも鮮明に現れるものではないが、それ
でもある程度の慣れにより多くは目視で観察できる程度
の像ないし影様のものとして把握できる。一方、不純物
の混入やクラックは、照射量次第でかなり鮮明に顕在化
できるものが多い。It should be noted that the manner in which defects are manifested in this way differs slightly depending on the type of defect. In the case of small internal pores, they do not necessarily appear clearly, but with a certain amount of practice, they can often be grasped as images or shadows that can be observed with the naked eye. On the other hand, in many cases, contamination with impurities and cracks can become quite obvious depending on the amount of irradiation.
本例において欠陥２は、表面に約２ｍ１１の径の大きさ
の黒っぽい影様のものとして観察できたので研削して顕
微鏡で確認してみた。この結果、表面下約１■ｍのとこ
ろに２０〜３０μｍの気孔（クローズドボア）の存在が
確認できた。In this example, defect 2 could be observed on the surface as a dark shadow-like object with a diameter of about 2 m11, so it was ground and confirmed under a microscope. As a result, the presence of 20 to 30 μm pores (closed pores) approximately 1 μm below the surface was confirmed.
また別の部位では、金属製の異物と推定される欠陥に基
づく色調の変化が現出されたので同様にして確認したと
ころ、やはり異物が検出された。In another area, a change in color tone due to a defect presumed to be a metal foreign object appeared, so when confirmation was made in the same manner, a foreign object was also detected.
本例では、照射する光の照度を３万ルクスと設定したが
、これについては、セラミック部材の光透過率や厚さ、
あるいは検査の水準などに基づき、より検査のし易い照
度を適宜調整したりして選定する。透明度が高くなれば
照度は小さくて済む。In this example, the illuminance of the irradiated light was set at 30,000 lux, but this depends on the light transmittance and thickness of the ceramic member,
Alternatively, the illuminance that makes inspection easier may be appropriately adjusted and selected based on the inspection level. The higher the transparency, the lower the illuminance.
要するに本発明においては、被検査物の欠陥が顕在化で
き、それが目視により判別できる程度の光の照度であれ
ばよい。被検査物がβ−アルミナでつくったセラミック
の場合には、肉厚がｌ Ｏｍｍ程度でも約３０万ルクス
の照度を与えることで、従来に比べかなりの高水準で欠
陥を発見できた。In short, in the present invention, the illuminance of light is sufficient as long as the defect of the object to be inspected is exposed and can be visually determined. When the object to be inspected is a ceramic made of β-alumina, defects can be detected at a much higher level than in the past by applying an illuminance of about 300,000 lux even if the thickness is about 10 mm.
なお、被検査物であるセラミック部材の形状については
、本例の管ないし筒状のもの以外、板材等にも広く適用
できるのはいうまでもない。It goes without saying that the shape of the ceramic member to be inspected is not limited to the tube or cylindrical shape of this example, but can also be widely applied to plate materials and the like.
また、照明装置は、本例のように照度（光量）の可変で
きるものを使用するとよい。こうしたものを使用すれば
室内の明るさ、あるいは被検査物の厚さや光透過率など
に応じて、より欠陥を判別しやすい条件を得ることがで
きるからである。なお、本発明方法による検査に際して
は、適宜、顕微鏡等の拡大手段を併用し、または、これ
らの拡大手段を組み合わせてもよい。こうすれば、より
微小な欠陥の発見に有効である。また被検査物としては
、ジルコニア、窒化アルミ、アルミナ等の透光性を有す
るセラミック部材に広く適用できる。Further, it is preferable to use a lighting device that can vary the illuminance (light amount) as in this example. This is because by using such a device, it is possible to obtain conditions that make it easier to identify defects depending on the brightness of the room or the thickness and light transmittance of the object to be inspected. In addition, when inspecting by the method of the present invention, a magnifying means such as a microscope may be used in combination, or these magnifying means may be combined as appropriate. This is effective in finding even smaller defects. Further, as the object to be inspected, it can be widely applied to ceramic members having translucency such as zirconia, aluminum nitride, and alumina.
（発明の効果）
本発明のセラミック部材の非破壊検査方法の効果は次の
ようである。(Effects of the Invention) The effects of the non-destructive testing method for ceramic members of the present invention are as follows.
目視する側と反対側から光を照射し、欠陥を顕在化させ
ることで、セラミック部材の良否を判別し易くしたので
、従来の目視検査の簡便さや容易さを損なうこと無く、
検査精度（水準）を向上させることかでき、製品の信頼
性の向上に資するところが極めて大きい。By irradiating light from the side opposite to the visual inspection side and exposing defects, we have made it easier to determine whether a ceramic member is good or bad, without sacrificing the simplicity and ease of conventional visual inspection.
It is possible to improve the inspection accuracy (level), which greatly contributes to improving the reliability of the product.
また、従来は事実上発見不可能とされていたセラミック
部材の内部に存在する欠陥を発見するのに効果的である
。Furthermore, it is effective in discovering defects existing inside ceramic members, which were conventionally considered virtually impossible to discover.
さらに、従来の目視検査に比較すると表面に現れている
欠陥の発見を容易かつ迅速とし、したがって検査工数の
低減を図ることができるので、その分コストダウンを期
待できる。Furthermore, compared to conventional visual inspection, it is easier and faster to discover defects appearing on the surface, and therefore the number of inspection steps can be reduced, so costs can be reduced accordingly.
図面は本発明の一実施例の説明図であって、第１図はセ
ラミック部材の欠陥を検査している状態を示す一部省略
破断面図、第２図（イ）は第１図における■−■線拡大
断面図、同図（ロ）は第２図（イ）における照射時の平
面概念図である。
１・・・セラミック部材 ２・・・欠陥特許出願人
日本特殊陶業株式会社The drawings are explanatory diagrams of one embodiment of the present invention, in which FIG. 1 is a partially omitted cutaway view showing a state in which a ceramic member is inspected for defects, and FIG. -■ Line enlarged cross-sectional view; the same figure (b) is a conceptual plan view at the time of irradiation in FIG. 2 (a). 1...Ceramic member 2...Defect patent applicant NGK SPARK PLUG CO., LTD.
Claims (1)
、気孔、割れ等の欠陥を目視によって検査する方法にお
いて、そのセラミック部材の一方の面に光を照射し、目
視側であるその他方の面に前記欠陥を顕在化させること
を特徴とする、セラミック部材の非破壊検査方法。(1) In a method of visually inspecting defects such as impurities, pores, and cracks existing in a translucent ceramic member, one surface of the ceramic member is irradiated with light, and the other surface, which is the viewing side, is 1. A method for non-destructive testing of ceramic members, characterized in that the defects are brought to light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18229890A JPH0469552A (en) | 1990-07-10 | 1990-07-10 | Nondestructive inspecting method for ceramic member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18229890A JPH0469552A (en) | 1990-07-10 | 1990-07-10 | Nondestructive inspecting method for ceramic member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0469552A true JPH0469552A (en) | 1992-03-04 |
Family
ID=16115843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18229890A Pending JPH0469552A (en) | 1990-07-10 | 1990-07-10 | Nondestructive inspecting method for ceramic member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0469552A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102937592A (en) * | 2012-10-20 | 2013-02-20 | 山东理工大学 | Ceramic radome pore and material loosening defect automatic detection method |
| JP2015197316A (en) * | 2014-03-31 | 2015-11-09 | 古河電気工業株式会社 | Method and device for inspecting tape for wafer processing and method for manufacturing tape for wafer processing |
| JP2016020854A (en) * | 2014-07-15 | 2016-02-04 | 株式会社デンソー | Spark plug insulator defect inspection method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS623055B2 (en) * | 1980-12-26 | 1987-01-23 | Sharp Kk | |
| JPH0210256A (en) * | 1988-06-29 | 1990-01-16 | Ishikawajima Kensa Keisoku Kk | Method for detecting flaw in ceramic board |
-
1990
- 1990-07-10 JP JP18229890A patent/JPH0469552A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS623055B2 (en) * | 1980-12-26 | 1987-01-23 | Sharp Kk | |
| JPH0210256A (en) * | 1988-06-29 | 1990-01-16 | Ishikawajima Kensa Keisoku Kk | Method for detecting flaw in ceramic board |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102937592A (en) * | 2012-10-20 | 2013-02-20 | 山东理工大学 | Ceramic radome pore and material loosening defect automatic detection method |
| CN102937592B (en) * | 2012-10-20 | 2014-07-16 | 山东理工大学 | Ceramic radome pore and material loosening defect automatic detection method |
| JP2015197316A (en) * | 2014-03-31 | 2015-11-09 | 古河電気工業株式会社 | Method and device for inspecting tape for wafer processing and method for manufacturing tape for wafer processing |
| JP2016020854A (en) * | 2014-07-15 | 2016-02-04 | 株式会社デンソー | Spark plug insulator defect inspection method |
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