JPH04654U - - Google Patents
Info
- Publication number
- JPH04654U JPH04654U JP3988490U JP3988490U JPH04654U JP H04654 U JPH04654 U JP H04654U JP 3988490 U JP3988490 U JP 3988490U JP 3988490 U JP3988490 U JP 3988490U JP H04654 U JPH04654 U JP H04654U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- hole
- diameter
- holes
- plasma cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3988490U JPH04654U (ko) | 1990-04-13 | 1990-04-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3988490U JPH04654U (ko) | 1990-04-13 | 1990-04-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04654U true JPH04654U (ko) | 1992-01-07 |
Family
ID=31549185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3988490U Pending JPH04654U (ko) | 1990-04-13 | 1990-04-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04654U (ko) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH076961A (ja) * | 1993-06-16 | 1995-01-10 | Nec Yamaguchi Ltd | プラズマ気相成長装置 |
JPH11307454A (ja) * | 1998-04-17 | 1999-11-05 | Nec Kyushu Ltd | ガス整流機構 |
US9679725B2 (en) | 2015-04-23 | 2017-06-13 | Lsis Co., Ltd. | Magnetic switch |
-
1990
- 1990-04-13 JP JP3988490U patent/JPH04654U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH076961A (ja) * | 1993-06-16 | 1995-01-10 | Nec Yamaguchi Ltd | プラズマ気相成長装置 |
JPH11307454A (ja) * | 1998-04-17 | 1999-11-05 | Nec Kyushu Ltd | ガス整流機構 |
US9679725B2 (en) | 2015-04-23 | 2017-06-13 | Lsis Co., Ltd. | Magnetic switch |
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