JPH04654U - - Google Patents

Info

Publication number
JPH04654U
JPH04654U JP3988490U JP3988490U JPH04654U JP H04654 U JPH04654 U JP H04654U JP 3988490 U JP3988490 U JP 3988490U JP 3988490 U JP3988490 U JP 3988490U JP H04654 U JPH04654 U JP H04654U
Authority
JP
Japan
Prior art keywords
electrode
hole
diameter
holes
plasma cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3988490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3988490U priority Critical patent/JPH04654U/ja
Publication of JPH04654U publication Critical patent/JPH04654U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP3988490U 1990-04-13 1990-04-13 Pending JPH04654U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3988490U JPH04654U (ko) 1990-04-13 1990-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3988490U JPH04654U (ko) 1990-04-13 1990-04-13

Publications (1)

Publication Number Publication Date
JPH04654U true JPH04654U (ko) 1992-01-07

Family

ID=31549185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3988490U Pending JPH04654U (ko) 1990-04-13 1990-04-13

Country Status (1)

Country Link
JP (1) JPH04654U (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076961A (ja) * 1993-06-16 1995-01-10 Nec Yamaguchi Ltd プラズマ気相成長装置
JPH11307454A (ja) * 1998-04-17 1999-11-05 Nec Kyushu Ltd ガス整流機構
US9679725B2 (en) 2015-04-23 2017-06-13 Lsis Co., Ltd. Magnetic switch

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076961A (ja) * 1993-06-16 1995-01-10 Nec Yamaguchi Ltd プラズマ気相成長装置
JPH11307454A (ja) * 1998-04-17 1999-11-05 Nec Kyushu Ltd ガス整流機構
US9679725B2 (en) 2015-04-23 2017-06-13 Lsis Co., Ltd. Magnetic switch

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