JPH0460061B2 - - Google Patents

Info

Publication number: JPH0460061B2
Authority: JP; Japan
Prior art keywords: layer; thickness; tio; tinx; film
Prior art date: 1987-01-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP62018579A

Other languages

English (en)

Japanese (ja)

Other versions

JPS63190742A (ja

Inventor

Koichi Suzuki

Masashi Tada

Hiroyasu Kojima

Mamoru Mizuhashi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

AGC Inc

Original Assignee

Asahi Glass Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-01-30

Filing date

1987-01-30

Publication date

1992-09-25

1987-01-30 Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd

1987-01-30 Priority to JP1857987A priority Critical patent/JPS63190742A/ja

1988-08-08 Publication of JPS63190742A publication Critical patent/JPS63190742A/ja

1992-09-25 Publication of JPH0460061B2 publication Critical patent/JPH0460061B2/ja

Status Granted legal-status Critical Current

Links

239000011521 glass Substances 0.000 claims description 42
239000000758 substrate Substances 0.000 claims description 26
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 25
229910010421 TiNx Inorganic materials 0.000 claims description 24
NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 15
238000000034 method Methods 0.000 claims description 14
238000004544 sputter deposition Methods 0.000 claims description 14
238000002834 transmittance Methods 0.000 claims description 11
238000004519 manufacturing process Methods 0.000 claims description 9
238000005240 physical vapour deposition Methods 0.000 claims description 7
239000012298 atmosphere Substances 0.000 claims description 6
238000001429 visible spectrum Methods 0.000 claims description 6
229910052760 oxygen Inorganic materials 0.000 claims description 5
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
230000015572 biosynthetic process Effects 0.000 claims description 4
239000001301 oxygen Substances 0.000 claims description 4
239000012299 nitrogen atmosphere Substances 0.000 claims description 3
239000010410 layer Substances 0.000 description 80
229910010413 TiO 2 Inorganic materials 0.000 description 21
235000019646 color tone Nutrition 0.000 description 19
229910052751 metal Inorganic materials 0.000 description 13
239000002184 metal Substances 0.000 description 13
230000003595 spectral effect Effects 0.000 description 11
239000007789 gas Substances 0.000 description 9
229910000510 noble metal Inorganic materials 0.000 description 6
238000001228 spectrum Methods 0.000 description 6
239000010936 titanium Substances 0.000 description 6
230000008859 change Effects 0.000 description 5
230000000694 effects Effects 0.000 description 5
239000000463 material Substances 0.000 description 5
239000011241 protective layer Substances 0.000 description 5
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
229910052719 titanium Inorganic materials 0.000 description 4
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 4
239000003086 colorant Substances 0.000 description 3
230000007935 neutral effect Effects 0.000 description 3
239000004065 semiconductor Substances 0.000 description 3
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
230000008901 benefit Effects 0.000 description 2
229910052804 chromium Inorganic materials 0.000 description 2
239000011651 chromium Substances 0.000 description 2
229910052802 copper Inorganic materials 0.000 description 2
239000010949 copper Substances 0.000 description 2
239000003989 dielectric material Substances 0.000 description 2
AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
239000012528 membrane Substances 0.000 description 2
238000005546 reactive sputtering Methods 0.000 description 2
239000002356 single layer Substances 0.000 description 2
239000005361 soda-lime glass Substances 0.000 description 2
239000000126 substance Substances 0.000 description 2
FFRBMBIXVSCUFS-UHFFFAOYSA-N 2,4-dinitro-1-naphthol Chemical compound C1=CC=C2C(O)=C([N+]([O-])=O)C=C([N+]([O-])=O)C2=C1 FFRBMBIXVSCUFS-UHFFFAOYSA-N 0.000 description 1
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
238000004140 cleaning Methods 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
238000000576 coating method Methods 0.000 description 1
230000000052 comparative effect Effects 0.000 description 1
239000000470 constituent Substances 0.000 description 1
238000010276 construction Methods 0.000 description 1
238000005034 decoration Methods 0.000 description 1
238000000151 deposition Methods 0.000 description 1
238000010586 diagram Methods 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
229910001873 dinitrogen Inorganic materials 0.000 description 1
229910001882 dioxygen Inorganic materials 0.000 description 1
238000001035 drying Methods 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
239000010931 gold Substances 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
229910001009 interstitial alloy Inorganic materials 0.000 description 1
238000007733 ion plating Methods 0.000 description 1
238000001659 ion-beam spectroscopy Methods 0.000 description 1
230000007794 irritation Effects 0.000 description 1
239000005340 laminated glass Substances 0.000 description 1
239000011159 matrix material Substances 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
238000012544 monitoring process Methods 0.000 description 1
125000004433 nitrogen atom Chemical group N* 0.000 description 1
230000003287 optical effect Effects 0.000 description 1
238000005498 polishing Methods 0.000 description 1
239000010970 precious metal Substances 0.000 description 1
230000008569 process Effects 0.000 description 1
230000001681 protective effect Effects 0.000 description 1
238000002310 reflectometry Methods 0.000 description 1
230000004044 response Effects 0.000 description 1
125000005372 silanol group Chemical group 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000004332 silver Substances 0.000 description 1
230000000638 stimulation Effects 0.000 description 1
229910052723 transition metal Inorganic materials 0.000 description 1
150000003624 transition metals Chemical class 0.000 description 1
238000001771 vacuum deposition Methods 0.000 description 1

Landscapes

Surface Treatment Of Glass (AREA)

JP1857987A 1987-01-30 1987-01-30 熱線反射ガラスの製法 Granted JPS63190742A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1857987A JPS63190742A (ja)	1987-01-30	1987-01-30	熱線反射ガラスの製法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1857987A JPS63190742A (ja)	1987-01-30	1987-01-30	熱線反射ガラスの製法

Publications (2)

Publication Number	Publication Date
JPS63190742A JPS63190742A (ja)	1988-08-08
JPH0460061B2 true JPH0460061B2 (el)	1992-09-25

Family

ID=11975538

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1857987A Granted JPS63190742A (ja)	1987-01-30	1987-01-30	熱線反射ガラスの製法

Country Status (1)

Country	Link
JP (1)	JPS63190742A (el)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS63252944A (ja) *	1987-04-10	1988-10-20	Nippon Sheet Glass Co Ltd	透明熱線反射板
JPH0243487A (ja) *	1988-04-19	1990-02-14	Nippon Sheet Glass Co Ltd	高い可視光透過率をもつ熱線遮蔽板
JPH0251693U (el) *	1988-10-06	1990-04-12
GB9414957D0 (en) *	1994-07-25	1994-09-14	Glaverbel	A pyrolytically coated glazing panel
US7588829B2 (en) *	2002-05-31	2009-09-15	Ppg Industries Ohio, Inc.	Article having an aesthetic coating
WO2014185026A1 (ja) *	2013-05-15	2014-11-20	株式会社ニコン	化合物膜の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6036355A (ja) *	1983-03-31	1985-02-25	ライボルト・アクチェンゲゼルシャフト	可視スペクトル帯域で５〜４０％の透過率および熱線に対する反射能を有する板の製法
JPS60187671A (ja) *	1984-03-06	1985-09-25	Asahi Glass Co Ltd	反応スパツタリング法による積層被膜の形成方法

1987
- 1987-01-30 JP JP1857987A patent/JPS63190742A/ja active Granted

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6036355A (ja) *	1983-03-31	1985-02-25	ライボルト・アクチェンゲゼルシャフト	可視スペクトル帯域で５〜４０％の透過率および熱線に対する反射能を有する板の製法
JPS60187671A (ja) *	1984-03-06	1985-09-25	Asahi Glass Co Ltd	反応スパツタリング法による積層被膜の形成方法

Also Published As

Publication number	Publication date
JPS63190742A (ja)	1988-08-08

Legal Events

Date	Code	Title	Description
2006-09-25	LAPS	Cancellation because of no payment of annual fees

Publication	Publication Date	Title
US4861669A (en)	1989-08-29	Sputtered titanium oxynitride films
CA1335887C (en)	1995-06-13	Neutral sputtered films of metal alloy oxides
US6040939A (en)	2000-03-21	Anti-solar and low emissivity functioning multi-layer coatings on transparent substrates
US4938857A (en)	1990-07-03	Method for making colored metal alloy/oxynitride coatings
EP0536607B1 (en)	1996-11-13	Heat processable metallic appearing coatings
JPS62148344A (ja)	1987-07-02	任意に１つ以上の薄膜金属層で被覆されたガラス基板に堆積される複合有機鉱物化合物フイルム
JPS63206333A (ja)	1988-08-25	単板熱線反射ガラス
JPS62196366A (ja)	1987-08-29	高透過率，低放射率物品
WO1999044080A1 (fr)	1999-09-02	Corps antireflecteur d'absorption de lumiere et procede de production de celui-ci
NZ230494A (en)	1992-04-28	Reflective coating: transparent metallic film on zinc/tin oxide film
JPH02160641A (ja)	1990-06-20	熱線反射ガラス
US4900630A (en)	1990-02-13	Glass plate with reflective multilayer coatings to give golden appearance
FI96507C (fi)	1996-07-10	Lasituote ja menetelmä titaania sisältävän päällysteen valmistamiseksi lasialustalle
JPH01206035A (ja)	1989-08-18	可視光透過性を有する熱線反射板
JPH0460061B2 (el)	1992-09-25
JPS5918134A (ja)	1984-01-30	酸化物膜を有する熱線反射積層体の形成方法
JPH0570580B2 (el)	1993-10-05
JPH0325506B2 (el)	1991-04-08
CA1323597C (en)	1993-10-26	Low reflectance, highly saturated colored coating for monolithic glazing
JPS63239043A (ja)	1988-10-05	赤外反射物品
JPH04300227A (ja)	1992-10-23	ＴｉＳｉＮ系薄膜被覆ガラス
JPH06293536A (ja)	1994-10-21	熱線反射物品の製造方法
JPH02233534A (ja)	1990-09-17	熱線反射ガラス板
JP2841757B2 (ja)	1998-12-24	熱線反射物品
JPH01314163A (ja)	1989-12-19	熱線遮断ガラス