JPH0450606A - Flatness gage - Google Patents
Flatness gageInfo
- Publication number
- JPH0450606A JPH0450606A JP15333690A JP15333690A JPH0450606A JP H0450606 A JPH0450606 A JP H0450606A JP 15333690 A JP15333690 A JP 15333690A JP 15333690 A JP15333690 A JP 15333690A JP H0450606 A JPH0450606 A JP H0450606A
- Authority
- JP
- Japan
- Prior art keywords
- flatness
- point
- plate
- plate material
- cameras
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims abstract description 18
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 238000005259 measurement Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 18
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、熱間、冷間鋼板等、種種の板材平面の平坦度
を測定するための平坦度計に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a flatness meter for measuring the flatness of various types of plate materials such as hot and cold steel plates.
［従来技術］
光学的手段を用いて板材平面の平坦度を測定する従来例
として、以下のような方式がある。[Prior Art] As a conventional example of measuring the flatness of a plane of a plate using optical means, there is the following method.
（１）モアレ・ホトグラフィ技術を用い、測定対象物の
等廃線をモアレ縞として観測する方式（特開昭６３−２
９２０８号公報参照）。(1) A method that uses moiré photography technology to observe uniform lines of the measurement object as moiré fringes (Japanese Unexamined Patent Publication No. 63-2
(See Publication No. 9208).
（２）レーザ距離計を用いて、２周波同時に変調したＨ
ｅ −Ｎ ｅレーザ光を対象物に照射し、その乱反射
光を集光し、自動焦点機構を介して高速ホトマルチプレ
クサで電気信号に変換し、受信信号を周波数変換してか
つ平均化し、位相差を測定して対象物までの距離を測定
し、それにより平坦度を測定する方式（特開昭６３−２
３２４号公報参照）。(2) H modulated at two frequencies simultaneously using a laser rangefinder
The e-N e laser beam is irradiated onto the target object, the diffusely reflected light is focused, converted into an electrical signal by a high-speed photomultiplexer via an automatic focusing mechanism, and the received signal is frequency-converted and averaged, and the phase difference is A method of measuring the distance to the object by measuring the flatness of the object (Japanese Patent Laid-Open No. 63-2
(See Publication No. 324).
（３）複数のレーザ距離計センサとして用い、対象物の
所定長さ毎に対象物との距離を測定し、それに基づき平
坦度を測定する方式（特開昭６０−１０５６３号公報参
照）。(3) A method in which a plurality of laser rangefinder sensors are used to measure the distance to the object for each predetermined length of the object, and measure flatness based on the distance (see Japanese Patent Laid-Open No. 10563/1983).
（４）対象物の幅方向に配置した複数のレーザ変位計を
用いて、板波高値を計測し、一定走行区間における板波
の弧長を幅方向に同時に測定する方式（特開昭５４−２
７７０号公報参照）。(4) A method in which the plate wave height is measured using multiple laser displacement meters arranged in the width direction of the object, and the arc length of the plate wave in a certain traveling section is simultaneously measured in the width direction 2
(See Publication No. 770).
（５）レーザ変位計を２台用い、視差を与えてレーザ反
射光をそれぞれ検出し、それに基づき平坦度の測定を行
う方式（特開昭５８−１１１７０８号公報参照）。(5) A method in which two laser displacement meters are used, each detects the laser reflected light with a parallax, and the flatness is measured based on this (see Japanese Patent Laid-Open No. 111708/1983).
（６）２つの異なる波長のレーザ光を照射し、その反射
光を検出して平坦度を測定する方式（特開昭５８−１１
５３１４号公報参照）。(6) Method of measuring flatness by irradiating laser beams with two different wavelengths and detecting the reflected light (Japanese Patent Laid-Open No. 58-11
(See Publication No. 5314).
［発明が解決すべき課題１
従来例の平坦度の測定技術は、上記のような方法がある
が、それぞれ以下に説明するような問題点がある。[Problem to be Solved by the Invention 1] Conventional techniques for measuring flatness include the methods described above, but each has problems as described below.
上記（１）のモアレホトグラフィ方式は、多くの切断光
により行うが、ＩＴＶ連素により分解能が悪くかつ長手
方向の平坦度の検出が計算処理上困難であり、またパス
ライン変動が大きい場合にパスライン変動と平坦不良と
が加算されるため、板の厚み方向の変位を正確に測定す
ることができな力）つた。The moiré photography method (1) above is performed using many cutting lights, but the resolution is poor due to the ITV series, it is difficult to detect the flatness in the longitudinal direction due to calculation processing, and it is difficult to detect when the pass line fluctuation is large. Because the pass line fluctuations and flatness defects are added together, the displacement in the thickness direction of the plate cannot be accurately measured.
上記（２）の方式においては、レーザ光の変調を用いＩ
；点に特徴を有するが、変調時の平坦不良による変動が
大きく、視野として大きい部分が測定できない。また、
測定装置の構造が複雑であるため、調整誤差要因が測定
値に含まれてしまい誤差が大きい。更に変調光としてＨ
ｅ −Ｎ ｅレーザを用いているため、レーザ光源の寿
命が１０’Ｈ。In the method (2) above, modulation of laser light is used to
; Although it has a characteristic point, there are large fluctuations due to flatness defects during modulation, and a large part of the field of view cannot be measured. Also,
Since the structure of the measuring device is complex, adjustment error factors are included in the measured values, resulting in large errors. Furthermore, H as modulated light
Since an e-N e laser is used, the lifespan of the laser light source is 10'H.
程度と短い。degree and short.
上記（３）の方式においては、レーザ距離計を用いてい
るため、パスライン変動による誤差要因が測定値に含ま
れてしまいＳ／Ｎ比が悪くなる。In the method (3) above, since a laser distance meter is used, error factors due to path line fluctuations are included in the measured value, resulting in a poor S/N ratio.
また距離計そのものは距離検出感度が長さにより異なる
ため、実質的な測定精度がどの程度か不明瞭である。Furthermore, since the distance detection sensitivity of the distance meter itself varies depending on the length, it is unclear how accurate the measurement actually is.
上記（４）の方式においては、レーザ変位計を用いてい
るため、パスライン変動要因による誤差が大きくなり、
平坦度精度は±４ 程度と大きくなってしまい、特に薄
物での相対的検出精度が低くなってしまう。また、対象
物の板振動を考慮してツインビーム方式を採用している
が、変位差が小さいため精度管理が実質的に困難である
。更に、ビーム方式は全体が見えないため、平坦度の幅
方向分布の検出が困難である。また、センサと測定対象
物との距離を大きく取れないので、センサの設置箇所が
制限される。In method (4) above, since a laser displacement meter is used, errors due to path line fluctuation factors become large.
The flatness accuracy becomes as large as about ±4, and the relative detection accuracy becomes particularly low for thin objects. In addition, a twin beam method is adopted in consideration of the plate vibration of the object, but accuracy control is practically difficult because the displacement difference is small. Furthermore, since the beam method does not allow the entire surface to be seen, it is difficult to detect the distribution of flatness in the width direction. Furthermore, since it is not possible to maintain a large distance between the sensor and the object to be measured, the locations where the sensor can be installed are limited.
上記（５）の方式においては、１つの検出器に２つのレ
ーザ光が集光するｔ；め、平坦度の角度により検出器に
補足限界が生じてしまう。また変位計を用いているため
、パスライン変動による影響が誤差として含まれてしま
う。In the method (5) above, since two laser beams are focused on one detector, a supplementary limit occurs in the detector due to the flatness angle. Furthermore, since a displacement meter is used, the influence of path line fluctuations is included as an error.
上記（６）の方法においては、２つの異なる波長のレー
ザ光を用いているｌ：め数値補正を行う必要があると同
時に、波長の識別手段が必要となる。In the method (6) above, it is necessary to perform numerical correction using laser beams of two different wavelengths, and at the same time, a means for identifying wavelengths is required.
以上のように、従来例の方式はパスライン変動の問題、
平坦度の幅方向分布の検出の困難性、Ｓ／Ｎ比の大きい
センサを用いなければならないため測定誤差が大きい等
の問題、波長識別及び数値補正の必要性の問題点等があ
った。As mentioned above, the conventional method has problems with pass line fluctuations,
There are problems such as difficulty in detecting the widthwise distribution of flatness, large measurement errors due to the need to use a sensor with a large S/N ratio, and the necessity of wavelength identification and numerical correction.
［課題を解決するだめの手段］
上巳従来技術の問題点を解決するために、本発明におい
ては、測定対象物にレーザ光を照射して、その反射光を
複数の２次元検出器により視野を設けて検出し、その検
出信号を演算するすることにより平坦度を測定できるよ
うにすることを特徴としている。[Means for Solving the Problems] Uami: In order to solve the problems of the conventional technology, the present invention irradiates the object to be measured with laser light and uses a plurality of two-dimensional detectors to detect the reflected light in a field of view. The feature is that the flatness can be measured by providing and detecting the flatness and calculating the detected signal.
［実施例］
第１図には、本発明の実施例が示されており、図におい
て、１は測定対象物である鋼板等の板材、２は板材の幅
方向を照射するレーザ光源、３Ａ、３１１はレーザ光源
２からの光が板材１で反射された光を検出する２次元Ｃ
ＣＤカメラ、４はＥ１０装置、５はＣＰＵ、６はプロセ
スコンピュータ、７はデスク、８はレコーダ、９はＣＲ
Ｔデイスプレー １０は板材１を移送させるためのロー
ルの回転を検出してパルスを出力するＰＬＧ、１１は該
ＰＬＧ１０からのパルスをカウントして板材１の走行速
度を検出するためのカウンタである。[Example] Fig. 1 shows an example of the present invention, in which 1 is a plate material such as a steel plate that is the object to be measured, 2 is a laser light source that irradiates the width direction of the plate material, 3A, 311 is a two-dimensional C that detects the light from the laser light source 2 reflected by the plate 1.
CD camera, 4 is E10 device, 5 is CPU, 6 is process computer, 7 is desk, 8 is recorder, 9 is CR
T-display 10 is a PLG that detects the rotation of a roll for transporting the plate 1 and outputs a pulse, and 11 is a counter that counts the pulses from the PLG 10 to detect the traveling speed of the plate 1.
本発明の原理について第２〜４図を参照して説明する。The principle of the present invention will be explained with reference to FIGS. 2 to 4.
第２図に示されるように、レーザ光源２は板材１の幅方
向に全長で、かつ長手方向（走行方向）にある所定の輻
Ｗでレーザ光を平行に照射するよう構成されており、そ
の中心線は板材１の測定点０と交わるように配置されて
いる。カメラ３Ａ％３Ｂはそれぞれ板材１の表面に対し
て所定の高さＨに配置され、かつ平行レーザ光の最端部
（長手方向外側部）が、理想的平坦状態（仮想平面）で
の板材１と交わる点Ｐ１及び点Ｐ２からの反射光を、所
定の角度θで検知できるように配置されている。As shown in FIG. 2, the laser light source 2 is configured to emit laser light parallel to the entire length of the plate 1 in the width direction and at a predetermined radius W in the longitudinal direction (running direction). The center line is arranged so as to intersect measurement point 0 of the plate material 1. The cameras 3A and 3B are each arranged at a predetermined height H with respect to the surface of the plate material 1, and the extreme end (external part in the longitudinal direction) of the parallel laser beam is placed on the plate material 1 in an ideal flat state (virtual plane). It is arranged so that the reflected light from the points P1 and P2 intersecting with can be detected at a predetermined angle θ.
そしてカメラ３Ａと点Ｐ、を結んだ線、及びカメラ３Ｂ
と点Ｐ２を結んだ線は、平行レーザ光の中心線上の点Ｒ
で交わるように配置されており、点０と点Ｒとの距離は
ｈｏである。また、点Ｒからカメラ３Ａ、３Ｂまでの長
手方向の距離はそれぞれしてある。And a line connecting camera 3A and point P, and camera 3B
The line connecting point P2 is point R on the center line of the parallel laser beam.
The distance between point 0 and point R is ho. Further, the distances in the longitudinal direction from the point R to the cameras 3A and 3B are respectively determined.
以上の関係を数式で表すと、
ｔａｎ＆＝２ｈｏ／Ｗ
＝ （Ｈ＋ｈ ｏ）／Ｌ （１）平行レーザ光
が照射された板材１の部分に凹凸がなく、平坦であると
すれば、カメラ３Ａ、３．は共に、点Ｐ１％点Ｐ２が平
行レーザ光が照射された最端点であると検出するので、
第２図の下方に示されるように、板材１上の線ＡＢにお
いてそれぞれのカメラから見た点Ｐｉ、点Ｐ２からのず
れａｌ、ａ２及びｂ＋、ｂｚが総て０であることが検出
され、従って検出点０でのずれ
ａｏ＝ （ａ、＋ａｘ）／２＝Ｏ
ｂｏ−（ｂ＋＋ｂ２）／２＝。Expressing the above relationship mathematically, tan&=2ho/W = (H+ho)/L (1) If the part of the plate material 1 irradiated with the parallel laser beam is flat and has no unevenness, then the camera 3A, 3. Both detect that point P1% and point P2 are the extreme points irradiated with the parallel laser beam, so
As shown in the lower part of FIG. 2, it is detected that the deviations al, a2, b+, and bz from the point Pi, point P2 as seen from each camera on the line AB on the plate 1 are all 0, Therefore, the deviation at detection point 0 is ao=(a,+ax)/2=O bo-(b++b2)/2=.
が求められ、点０には仮想平面から見て凹凸か存在しな
い事が検出される。is obtained, and it is detected that there is no unevenness at point 0 when viewed from the virtual plane.
一方、第３図に示されるように板材ｌの点Ｏの付近に凸
部が存在すると、レーザ光の最端部か点Ｐ１″、Ｐ２′
において板材ｌと交わるので、カメラ３居よレーザ光の
最端部が点ＰＩＡ％点Ｐ２Ａの方向にあることを検出し
、またカメラ３Ｂは最端部が点Ｐ４、点Ｐ、の方向にあ
ることを検出する。On the other hand, if a convex portion exists near the point O of the plate l as shown in FIG.
Since it intersects with plate l at , camera 3 detects that the end of the laser beam is in the direction of point PIA%, point P2A, and camera 3B detects that the end of the laser beam is in the direction of point P4, point P. Detect that.
従って第３図の下方に示されるように、点Ｐ１からａい
ｂｌのずれ、及び点Ｐ２からａ２、ｂ２のずれが検出さ
れる。Therefore, as shown in the lower part of FIG. 3, the deviations from point P1 to abl and from point P2 to a2 and b2 are detected.
そして、これらのずれを平均して、点０における変位ａ
０、ｂ、が、
ａｏ＝（ａ＋”ａｚ）／２
１）０＝ （ｂｉ＋ｂｉ）／２
の演算により求められる。Then, by averaging these deviations, the displacement a at point 0 is
0 and b are obtained by the following calculation: ao=(a+”az)/2 1)0=(bi+bi)/2.
このようにして求められたａｏ及びｂｏに基づいて、点
Ｏにおける高さ方向の変位の求め方について、第４図を
参照して説明する。How to determine the displacement in the height direction at point O based on ao and bo determined in this way will be explained with reference to FIG.
第４図は、第３図の点Ｒを中心とした部分を取り出して
拡大したものであり、変位ａ０及びｂｏは上記のように
求められたものである。FIG. 4 is an enlarged view of a portion centered on point R in FIG. 3, and the displacements a0 and bo were determined as described above.
角度θ′は該図から明らかなように
θ′ −π／２−θ
であるから、
ｈＡ＝ａｏ／ｌａｎθ′
＝ａ、／ｃｏｔθ （２）ｈ Ｂ ＝
ｂ ｏ／ ｔ ａ ｎθ′＝ｂ０／ｃｏｔθ
（３）となり、また点Ｏにおける高さ方向の変位
は、点Ｒから点Ｒ′までの距離ｈｘとすると、ｈ ｘ＝
ｈＢ＋ （ｂｅ （ｈＡ ｈａ）ｌ ／ （ａｏ＋ｂ
ｏ）＝ （ａ＋１ｂＢ＋ｂｏｈＡ）／ （ａｏ＋ｂｏ）
となる。そして（２）及び（３）式に基づいて上記式を
変形すれば、
ｈＸ＝２ａｏｂｏ／ （ｃｏ ｔθ （ａｏ＋ｂｏ）１
となり、更に（１）式に基づいて
ｈＸ＝２ａｏｂｏ／（ａｏ＋ｂｏ）ＸＨ／（２Ｌ ｗ
）が得られ、（４）式または（５）式を用いて変位量ｈ
ｘが求められる。As is clear from the figure, the angle θ' is θ' - π/2-θ, so hA=ao/lanθ' = a,/cotθ (2) h B =
b o/t a nθ'=b0/cotθ
(3), and if the displacement in the height direction at point O is the distance hx from point R to point R', then h x =
hB+ (be (hA ha)l / (ao+b
o)= (a+1bB+bohA)/(ao+bo)
becomes. Then, if we transform the above equation based on equations (2) and (3), we get hX=2aobo/ (co tθ (ao+bo)1
Based on equation (1), hX=2aobo/(ao+bo)XH/(2L w
) is obtained, and using equation (4) or (5), the displacement h
x is required.
以上のようにして、点０における高さ方向の変位ｈｘが
求められるが、カメラ３Ａ及び３Ｂは、板材１の長さ方
向に所定幅（平行レーザ光の幅Ｗ以上）スキャンニング
して、それによる検出反射光に基づいてその中心点であ
る点Ｏの変位が検出され、それを板幅方向に繰り返すこ
とにより点Ｏを含んだ板幅方向の各点の変位が検出され
る。また板材１は所定の速度で走行しているので、上記
を繰り返すことにより板材１の長手方向もスキャンニン
グされ、実質的に板材１の表面全域に渡って平坦度が検
出できることになる。As described above, the displacement hx in the height direction at point 0 is obtained, but the cameras 3A and 3B scan a predetermined width (more than the width W of the parallel laser beam) in the length direction of the plate material 1, and The displacement of the point O, which is the center point, is detected based on the detected reflected light, and by repeating this in the sheet width direction, the displacement of each point in the sheet width direction including point O is detected. Further, since the plate material 1 is traveling at a predetermined speed, by repeating the above steps, the longitudinal direction of the plate material 1 is also scanned, and the flatness can be detected over substantially the entire surface of the plate material 1.
第２図に戻り、本発明の動作の概要を説明すると、２次
元ＣＣＤカメラ３Ａ、３Ａで検出した反射光信号がカメ
ラのスキャンニング動作に応じて、順次Ｅ１０装置４を
介してＣＰＵ５に供給され、上記第２〜４図に関して説
明したような演算か実行される。求められた値ｈｘは、
スキャンニング動作及びカウンタ１１からの板材１の走
行速度信号に基づき、測定点の座標が定められ、その座
標に対応付けられて検出値ｈｘはＣＰＵ内のメモリ部に
記憶される。記憶された検出値は、レコーダ８において
把録されると共に、必要に応じてＣＲＴデイスプレィ９
に供給されて平坦度を可視表示される。なお、プロセス
コンピュータ６はプログラムを内蔵して、装置全体の動
作を制御するためのものである。Returning to FIG. 2, to explain the outline of the operation of the present invention, the reflected light signals detected by the two-dimensional CCD cameras 3A, 3A are sequentially supplied to the CPU 5 via the E10 device 4 in accordance with the scanning operation of the cameras. , operations such as those described with respect to FIGS. 2-4 above are performed. The obtained value hx is
Based on the scanning operation and the traveling speed signal of the plate material 1 from the counter 11, the coordinates of the measurement point are determined, and the detected value hx is stored in the memory section in the CPU in association with the coordinates. The stored detection values are recorded in the recorder 8 and displayed on the CRT display 9 as necessary.
The flatness is visually displayed. Note that the process computer 6 has a built-in program and is used to control the operation of the entire apparatus.
［効果コ
本発明は以上のように構成されているので、以下のよう
な作用効果を奏することかできる。[Effects] Since the present invention is configured as described above, the following effects can be achieved.
ａ、カメラの設置高Ｈをある程度大きくすれば、パスラ
イン変動による影響が無視できる大きさにすることが可
能である。a. By increasing the installation height H of the camera to a certain extent, it is possible to make the influence of path line fluctuations negligible.
ｂ、上記Ｈ及び測定点Ｏかものカメラまでの長手方向の
距離りを適宜調節することにより、ずれａ ｏｌ ｂ
ｏの値を十分な精度にまで変更できると共に、実物の平
坦度よりも値を犬さく変動を捕らえることができ、従っ
て微細な変位でも検出可能である。b. By appropriately adjusting the distance in the longitudinal direction from the above H and the measuring point O to the camera, the deviation a ol b
The value of o can be changed with sufficient precision, and variations in the value can be detected more closely than the actual flatness, so even minute displacements can be detected.
Ｃ，ビーム幅Ｗを調節することにより、更に精度の向上
を図ることができる。By adjusting C and beam width W, accuracy can be further improved.
第１図は本発明の一実施例を示すための概瞥ブロック図
、第２〜４図は本発明の詳細な説明するための説明図で
ある。
１・・・板材
２・・・レーザ光源
３Ａ、３Ｂ・・・２次元ＣＣＤカメラ
第 ２ 図
夕
％方向
第
回
頂’Ｎ１１７FIG. 1 is a schematic block diagram showing one embodiment of the present invention, and FIGS. 2 to 4 are explanatory diagrams for explaining the present invention in detail. 1... Plate material 2... Laser light sources 3A, 3B... 2-dimensional CCD camera No. 2 Fig. evening % direction No. 117
Claims (1)
長手方向に所定の幅を有する平行ビームを板材の幅方向
全域に渡って照射する光源、該光源から照射され、板材
で反射された反射光を検出する２つの２次元カメラであ
つて、該カメラは光源に対して対称的に配置され、幅方
向について同一方向及び同一ピッチで反射光をスキャン
ニング検出する２次元カメラ、 該それぞれのカメラからの検出信号に基づき、平行ビー
ムの長手方向最端部と板材とが交差する方向を求め、そ
れにより平行ビーム中心線が板材と交わる点の高さ方向
変位を演算する演算装置、 とを具備している事を特徴とする板材の平坦度を測定す
る平坦度計。[Claims] 1. A light source that is disposed above a plate running in the longitudinal direction and irradiates a parallel beam having a predetermined width in the longitudinal direction of the plate across the entire width of the plate; , two two-dimensional cameras that detect the reflected light reflected by the plate material, the cameras are arranged symmetrically with respect to the light source, and scan and detect the reflected light in the same direction and at the same pitch in the width direction. Dimensional camera. Based on the detection signals from each camera, determine the direction in which the longitudinal end of the parallel beam intersects with the plate material, and then calculate the displacement in the height direction at the point where the parallel beam center line intersects with the plate material. A flatness meter for measuring the flatness of a plate material, characterized in that it is equipped with:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2153336A JPH0737898B2 (en) | 1990-06-12 | 1990-06-12 | Flatness meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2153336A JPH0737898B2 (en) | 1990-06-12 | 1990-06-12 | Flatness meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0450606A true JPH0450606A (en) | 1992-02-19 |
| JPH0737898B2 JPH0737898B2 (en) | 1995-04-26 |
Family
ID=15560250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2153336A Expired - Lifetime JPH0737898B2 (en) | 1990-06-12 | 1990-06-12 | Flatness meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737898B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100564327B1 (en) * | 2001-12-24 | 2006-03-27 | 주식회사 포스코 | Equipment method for measuring flatness of cold strip |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61159102A (en) * | 1984-12-29 | 1986-07-18 | Hitachi Zosen Corp | Two-dimensional measuring method |
-
1990
- 1990-06-12 JP JP2153336A patent/JPH0737898B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61159102A (en) * | 1984-12-29 | 1986-07-18 | Hitachi Zosen Corp | Two-dimensional measuring method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100564327B1 (en) * | 2001-12-24 | 2006-03-27 | 주식회사 포스코 | Equipment method for measuring flatness of cold strip |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0737898B2 (en) | 1995-04-26 |
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