JPH0446194B2 - - Google Patents
Info
- Publication number
- JPH0446194B2 JPH0446194B2 JP60223726A JP22372685A JPH0446194B2 JP H0446194 B2 JPH0446194 B2 JP H0446194B2 JP 60223726 A JP60223726 A JP 60223726A JP 22372685 A JP22372685 A JP 22372685A JP H0446194 B2 JPH0446194 B2 JP H0446194B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- disk member
- disk
- chuck
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 claims description 123
- 230000005540 biological transmission Effects 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 239000011538 cleaning material Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 11
- 238000001035 drying Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000005406 washing Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 239000003599 detergent Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000008237 rinsing water Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- -1 other foreign matter Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Cleaning In General (AREA)
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は磁気デイスク、光デイスク等のように
表面に記録層が形成されるデイスク部材を洗浄す
るデイスク部材の洗浄装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a disk member cleaning apparatus for cleaning a disk member on which a recording layer is formed, such as a magnetic disk or an optical disk.
［従来の技術］
デイスク部材として、例えば、磁気デイスク
は、アルミニウム等の円環状板体からなるデイス
ク部材をラツピング加工等の研削加工を施こすこ
とにより平滑化し、然る後にこのデイスク部材の
表面に磁性体を塗布することによつて、磁気記録
層が形成される。ここで、前述の記録層の膜厚を
均一なものにするために、予めデイスク部材の表
面に塵埃その他の異物や油汚れ等を除去した上で
磁性体の塗布を行う必要がある。このために、記
録層の形成前、また必要に応じて記録層形成後に
もデイスク部材の洗浄が行なわれる。[Prior Art] As a disk member, for example, a magnetic disk, a disk member made of an annular plate made of aluminum or the like is smoothed by grinding such as lapping, and then the surface of this disk member is smoothed. A magnetic recording layer is formed by applying a magnetic material. Here, in order to make the thickness of the recording layer uniform, it is necessary to remove dust, other foreign matter, oil stains, etc. from the surface of the disk member before applying the magnetic material. For this purpose, the disk member is cleaned before the recording layer is formed and, if necessary, after the recording layer is formed.
従来、このデイスク部材の洗浄は、多数のデイ
スク部材をラツクに装着した状態で洗浄液に浸漬
させ、この洗浄液を高周波振動させたり、または
洗浄液中でスポンジ等の洗浄具を用いて手作業で
表面を拭うようにしていた。 Conventionally, this cleaning of disk members has been carried out by immersing a large number of disk members easily attached in a cleaning liquid, and then vibrating the cleaning liquid at a high frequency, or by manually cleaning the surface using a cleaning tool such as a sponge in the cleaning liquid. I was trying to wipe it.
［発明が解決しようとする問題点］
前述のように、高周波振動により洗浄を行うよ
うにすると、洗浄装置の全体構造が複雑となり、
装置構成が大型になる等の不都合があるだけでな
く、デイスク部材の汚れのうち油汚れのようなも
のを完全に除去できない等の欠点があつた。一
方、手作業による洗浄は手間がかかると共に、洗
浄が完全に行なわれない場合が生じる欠点もあつ
た。[Problems to be Solved by the Invention] As mentioned above, when cleaning is performed using high-frequency vibration, the overall structure of the cleaning device becomes complicated.
This method not only has disadvantages such as an increase in the size of the device structure, but also has drawbacks such as the inability to completely remove dirt such as oil stains from the disk members. On the other hand, manual cleaning is time-consuming and has the disadvantage that cleaning may not be completed completely.
本発明は前述した従来技術の欠点を解消するた
めになされたもので、簡単で、コンパクトな構成
によりデイスク部材の表面全体を円滑かつ確実に
自動洗浄することができるようにしたデイスク部
材の洗浄装置を提供することを目的とするもので
ある。 The present invention has been made in order to eliminate the drawbacks of the prior art described above, and is a disk member cleaning device that has a simple and compact configuration and is capable of automatically cleaning the entire surface of a disk member smoothly and reliably. The purpose is to provide the following.
［問題点を解決するための手段］
前述の目的を達成するために本発明に係る洗浄
装置は、回転駆動手段により回転駆動される回転
伝達軸を中心として旋回可能な一対のアームの先
端に、この回転伝達軸に追従回転する回転軸をそ
れぞれ装着し、これら各回転軸にスポンジ等から
なる洗浄具を相対向させて装着し、これら両アー
ムを旋回駆動手段によりデイスク部材の表面に沿
う方向に旋回させて、両洗浄具を、チヤツク手段
により外周縁または内周縁を回転自在に支承させ
たデイスク部材から離間させた退避位置と、デイ
スク部材を表裏両面から挟み込んで回転させなが
ら洗浄する洗浄作動位置との間に変位可能な構成
としたことをその特徴とするものである。[Means for Solving the Problems] In order to achieve the above-mentioned object, the cleaning device according to the present invention includes a pair of arms at the tips of a pair of arms that are rotatable around a rotation transmission shaft that is rotationally driven by a rotation drive means. Rotary shafts that follow and rotate are attached to this rotation transmission shaft, cleaning tools made of sponges, etc. are attached to each of these rotation shafts facing each other, and both arms are moved in a direction along the surface of the disk member by a rotation drive means. A retracted position in which both cleaning tools are rotated and separated from a disk member whose outer or inner peripheral edge is rotatably supported by a chuck means, and a cleaning operation position in which the disk member is held between the front and back sides and cleaned while being rotated. Its feature is that it is configured to be able to be displaced between.
［作用］
まず、旋回駆動手段により洗浄具を退避位置に
保持した状態に保持しておく。これによつて、チ
ヤツク手段へのデイスク部材の装着を適宜のハン
ドリング手段を用いて容易に行える。洗浄すべき
デイスク部材がチヤツク手段に装架されると、旋
回駆動手段が作動して、一対からなるアームが回
転伝達軸を中心として旋回して、これら両アーム
に装着した洗浄具がデイスクの表裏両面に沿つて
摺動しながら洗浄作動位置に変位する。ここで、
デイスク部材の表面に沿う方向に変位させること
によつて、洗浄具間にデイスク部材を挟み込ませ
るが、洗浄具はスポンジ等の柔軟性を有する部材
で形成されているから、この動作中にデイスク部
材を傷付けたりすることがなく、しかも変位を迅
速に行うことができる。[Operation] First, the cleaning tool is held at the retracted position by the swing drive means. Thereby, the disk member can be easily attached to the chuck means using an appropriate handling means. When the disk member to be cleaned is mounted on the chuck means, the rotation drive means is activated, and the pair of arms rotates around the rotation transmission shaft, so that the cleaning tools attached to both arms move the front and back of the disk. It is displaced to the cleaning operation position while sliding along both sides. here,
By displacing the disk member in the direction along the surface of the disk member, the disk member is sandwiched between the cleaning tools. However, since the cleaning tool is made of a flexible member such as a sponge, the disk member is displaced during this operation. Moreover, the displacement can be carried out quickly without causing any damage.
回転伝達軸の回転により、洗浄具を取り付けた
回転軸が追従回転して洗浄具が回転して、デイス
ク部材の表面が擦られて、その表面に付着した異
物や油汚れ等を除去する。また、これと共に洗浄
具の回転によりデイスク部材に回転力が付与さ
れ、デイスク部材はチヤツク部材に支承されたま
ま自転することになり、このデイスク部材の自転
によつて、該デイスク部材全体がむらなく、円滑
かつ確実に自動洗浄される。 As the rotation transmission shaft rotates, the rotating shaft to which the cleaning tool is attached follows and rotates, and the cleaning tool is rotated, and the surface of the disk member is rubbed to remove foreign matter, oil stains, etc. attached to the surface. At the same time, rotation of the cleaning tool applies rotational force to the disc member, and the disc member rotates while being supported by the chuck member. This rotation of the disc member allows the entire disc member to be evenly distributed. , automatically cleans smoothly and reliably.
デイスク部材の洗浄が完了すると、旋回駆動手
段を作動させて、洗浄具を洗浄作動位置から退避
位置に変位させ、然る後に新たなデイスク部材を
チヤツク手段に装架して、再び前述と同様の動作
を繰り返すことによつて、デイスク部材の洗浄が
順次連続的に行われる。 When the cleaning of the disk member is completed, the rotation driving means is operated to displace the cleaning tool from the cleaning operation position to the retracted position, after which a new disk member is mounted on the chuck means and the same procedure as described above is carried out again. By repeating the operation, the disk members are sequentially and continuously cleaned.
［実施例］
以下、本発明の実施例を図面に基づいて詳細に
説明する。[Example] Hereinafter, an example of the present invention will be described in detail based on the drawings.
まず、第１図において、１は洗浄装置本体を構
成するハウジングで、該ハウジング１内には搬入
用ラツク２を搬送する搬入部３、搬出用ラツク４
を搬送する搬出部５が形成されると共に、作業室
６が形成されている。 First, in FIG. 1, reference numeral 1 denotes a housing constituting the main body of the cleaning device, and inside the housing 1 are a loading section 3 for transporting a loading rack 2, and a loading rack 4.
An unloading section 5 for transporting the materials is formed, and a work chamber 6 is also formed.
作業室６内は洗浄部７と乾燥部８とに分れ、か
つ該作業室６には搬入用ラツク２においてラツピ
ング処理されたデイスク部材９が立設状態で搬送
され、またこの搬送途中でシヤワー１０により予
備洗浄されたデイスク部材を１枚ずつ取出す搬入
ハンドラ１１が設けられると共に、洗浄、乾燥後
のデイスク部材９を搬出用ラツク２に移送する搬
出ハンドラ１２が設けられ、該各ハンドラ１１，
１２はそれぞれ回動アーム１１ａ，１２ａの先端
にデイスク部材９をチヤツクするチヤツク部材１
１ｂ，１２ｂを装着することにより構成される。
さらに、搬入ハンドラ１１から洗浄部７、該洗浄
部７から乾燥部８、該乾燥部８から搬出ハンドラ
１２へデイスク部材９を移載する移載ハンドラ１
３が作業室６内に配設され、該移載ハンドラ１３
は所定角度往復回動し得ると共にその回動軸線に
沿つて前後に往復動し得るようになつている。 The inside of the work room 6 is divided into a washing section 7 and a drying section 8, and a disk member 9 that has been wrapped in the carrying rack 2 is transported in an upright state to the work room 6, and a shower is installed during the transport. A carry-in handler 11 is provided to take out the disk members 9 pre-cleaned by 10 one by one, and a carry-out handler 12 is provided to transfer the disk members 9 after washing and drying to the carry-out rack 2, and each handler 11,
Reference numeral 12 denotes a chuck member 1 that chucks the disk member 9 at the tip of the rotating arms 11a and 12a, respectively.
1b and 12b.
Furthermore, a transfer handler 1 transfers the disk members 9 from the carry-in handler 11 to the cleaning section 7, from the cleaning section 7 to the drying section 8, and from the drying section 8 to the carrying-out handler 12.
3 is arranged in the work room 6, and the transfer handler 13
can reciprocate by a predetermined angle and can also reciprocate back and forth along its rotation axis.
洗浄部７は第２図乃至第４図に示したように、
回動軸１４ａによつて所定角度ずつ回動せしめら
れるロータリテーブル１４を有し、該ロータリテ
ーブル１４上は十字状の仕切壁１５によつて４つ
の作業部に区画形成されている。第２図におい
て、図中上方の作業区画部Ａは、移載ハンドラ１
３との間でデイスク部材９の着脱を行う着脱部と
なり、図中右方の作業区画部Ｂは洗浄部材１６に
よりデイスク部材の表裏の各面を洗浄する洗浄
部、下方の作業区画部Ｃはすすぎ部材１７によつ
て洗浄後のすすぎを行うすすぎ部、さらに図中右
方の作業区画部Ｄはエツジ洗い部材１８によりデ
イスク部材９の内外の各周縁部の洗浄を行うエツ
ジ洗い部である。 As shown in FIGS. 2 to 4, the cleaning section 7 has a
It has a rotary table 14 that can be rotated by a predetermined angle by a rotation shaft 14a, and the rotary table 14 is divided into four working sections by cross-shaped partition walls 15. In FIG. 2, the work section A in the upper part of the figure is the transfer handler 1.
The work section B on the right side of the figure is a cleaning section that cleans the front and back surfaces of the disk member 16 with the cleaning member 16, and the work section C on the lower side is a removal section for attaching and detaching the disk member 9 between A rinsing section in which rinsing is performed after cleaning using a rinsing member 17, and a working section D on the right side of the figure is an edge washing section in which the inner and outer peripheral edges of the disk member 9 are cleaned by an edge washing member 18.
各作業区画部Ａ，Ｂ，Ｃ，Ｄにはデイスク部材
９の外周縁部を回転可能に挟持するためにチヤツ
ク部材１９が取付けられている。該チヤツク部材
１９はデイスク部材９の３位置においてそれと係
合するチヤツキングローラ１９ａと、該チヤツキ
ングローラ１９ａを回転可能に支持する支持軸１
９ｂと、チヤツキングローラ１９ａを第２図にお
ける作業区画部Ａに実線で示したチヤツク位置と
一点鎖線で示したチヤツク解除位置との間に変位
させる作動片１９ｃの各部材を３組設置すること
により構成される。 A chuck member 19 is attached to each of the work compartments A, B, C, and D for rotatably holding the outer peripheral edge of the disk member 9. The chuck member 19 includes a chuck roller 19a that engages with the disk member 9 at three positions, and a support shaft 1 that rotatably supports the chuck roller 19a.
9b, and an actuating piece 19c for displacing the chuck roller 19a between the chuck position shown by the solid line in the working section A in FIG. 2 and the chuck release position shown by the dashed line. It consists of:
チヤツク位置とチヤツク解除位置との間の変位
を可能ならしめるために、同図の作業区画部Ｄに
おいて示した如く、チヤツク部材１９における各
作動片１９ｃを変位させる歯車駆動部２０が設け
られている。この歯車駆動部２０の駆動歯車２０
ａは第３図及び第４図に示した如くロータリテー
ブル１４の裏面側においてレバー２１と連結され
ており、該レバー２１は常時には一点鎖線で示し
たようにばね２２よりストツパ２３に当接した位
置にあり、このときチヤツク部材１９はチヤツク
位置となり、作業区画部Ａに対応する位置に設け
た回動駆動部２４に連結した作動片２５を一点鎖
線位置から実線位置に回動させれば、レバー２１
を実線位置に移行させて、チヤツク部材１９のチ
ヤツクを解除するチヤツク解除位置に変位させる
ことができる。 In order to enable displacement between the chuck position and the chuck release position, a gear drive 20 is provided for displacing each actuating piece 19c of the chuck member 19, as shown in the working section D of the figure. . Drive gear 20 of this gear drive unit 20
As shown in FIGS. 3 and 4, the lever 21 is connected to the lever 21 on the back side of the rotary table 14, and the lever 21 is normally brought into contact with the stopper 23 by the spring 22 as shown by the dashed line. At this time, the chuck member 19 is in the chuck position, and if the actuating piece 25 connected to the rotary drive section 24 provided at the position corresponding to the work section A is rotated from the dashed-dotted line position to the solid line position, Lever 21
can be moved to the solid line position to displace the chuck member 19 to the chuck release position where the chuck is released.
作業区画部Ｂに対応する位置に設けた洗浄部材
１６は、第５図に示したように、上下１対のアー
ム２６ａ，２６ｂを有し、該各アーム２６ａ，２
６ｂには回転軸２７ａ，２７ｂが挿嵌されてお
り、該各回転軸２７ａ，２７ｂの一端部には洗浄
具２８ａ，２８ｂが取付けられ、該洗浄具２８
ａ，２８ｂはデイスク部材９の内縁と外縁との間
の幅より大きな外径の円環状のスポンジ等の柔軟
材で形成されている。そして、回転軸２７ａ，２
７ｂの他端部にはプーリ２９ａ，２９ｂが取付け
られている。また、アーム２６ａ，２６ｂは回転
伝達軸３０に回転自在に支承されており、この回
転伝達軸３０にはプーリ３１ａ，３１ｂが取り付
けられており、これらプーリ３１ａ，３１ｂと、
回転軸２７ａ，２７ｂに設けたプーリ２９ａ，２
９ｂとの間にはそれぞれ回転伝達用のベルト３２
ａ，３２ｂが巻回して設けられている。そして、
この回転伝達軸３０がアーム２６ａ，２６ｂの旋
回中心となり、後述する如く、アーム２６ａ，２
６ｂをデイスク部材９の表面に沿う方向に旋回さ
せて、デイスク部材９をチヤツク部材１９にチヤ
ツクさせることができる退避位置（第２図の実線
位置）と、両洗浄具２８ａ，２８ｂによつてデイ
スク部材９を挟み込んで、その洗浄を行う洗浄作
動位置（第２図の一点鎖線位置）との間に変位さ
せることができる。 The cleaning member 16 provided at a position corresponding to the work compartment B has a pair of upper and lower arms 26a, 26b, as shown in FIG.
Rotating shafts 27a, 27b are inserted into the shaft 6b, and cleaning tools 28a, 28b are attached to one end of each of the rotating shafts 27a, 27b.
a and 28b are formed of a flexible material such as an annular sponge having an outer diameter larger than the width between the inner and outer edges of the disk member 9. And the rotating shafts 27a, 2
Pulleys 29a and 29b are attached to the other end of 7b. Further, the arms 26a, 26b are rotatably supported by a rotation transmission shaft 30, and pulleys 31a, 31b are attached to this rotation transmission shaft 30, and these pulleys 31a, 31b,
Pulleys 29a, 2 provided on rotating shafts 27a, 27b
A belt 32 for rotation transmission is provided between the belt 9b and the belt 9b.
a and 32b are provided in a wound manner. and,
This rotation transmission shaft 30 becomes the turning center of the arms 26a, 26b, and as described later, the arms 26a, 26b
6b in the direction along the surface of the disk member 9 to chuck the disk member 9 to the chuck member 19 (solid line position in FIG. 2), and the disk by both cleaning tools 28a and 28b. The member 9 can be sandwiched and displaced between the cleaning operation position (dotted chain line position in FIG. 2) where the member 9 is cleaned.
この回転軸３０は作業室６を画成するパネルＰ
を介して外部に突出させて、該回転軸３０にモー
タ等の回転駆動手段（図示せず）を接続してそれ
回転させることによりい洗浄具２８ａ，２８ｂを
回転させることができる。これらプーリ２９ａ，
２９ｂ、回転軸３０、プーリ３１ａ，３１ｂ及び
ベルト３２ａ，３２ｂによつて回転駆動機構が構
成されて、この回転駆動機構によつて洗浄具２８
ａ，２８ｂが回転せしめられ、第６図に示したよ
うにこの洗浄具２８ａ，２８ｂの矢示イ方向の回
転によつてデイスク部材９はチヤツク部材１９に
保持された状態で矢示ロ方向に回転駆動せしめら
れる。 This rotating shaft 30 is connected to a panel P that defines the working room 6.
The cleaning tools 28a and 28b can be rotated by connecting a rotation driving means (not shown) such as a motor to the rotating shaft 30 and rotating it. These pulleys 29a,
29b, the rotating shaft 30, the pulleys 31a, 31b, and the belts 32a, 32b constitute a rotational drive mechanism, and this rotational drive mechanism operates the cleaning tool 28.
a, 28b are rotated, and as shown in FIG. Rotationally driven.
ここで、洗浄具２８ａ，２８ｂは前述したよう
に円環状となつており、この洗浄具２８ａ，２８
ｂの内部に中性洗剤、純水等からなる洗浄液が供
給するために、第７図に示したようにアーム２６
ａ，２６ｂに取付けた回転軸支持ブロツク３３
ａ，３３ｂに形成した円環状の液室３４ａ，３４
ｂに洗浄液を供給するホース３５ａ，３５ｂが接
続されており、該各ホース３５ａ，３５ｂからの
洗浄液を洗浄具２８ａ，２８ｂ内部に供給するた
めに回転軸２７ａ，２７ｂには洗浄具２８ａ，２
８ｂの内部に開口する通路３６ａ，３６ｂが穿設
されている。 Here, the cleaning tools 28a, 28b are annular as described above, and the cleaning tools 28a, 28b are circular.
In order to supply cleaning liquid consisting of neutral detergent, pure water, etc. into the inside of the arm 26 as shown in FIG.
Rotating shaft support block 33 attached to a, 26b
Annular liquid chambers 34a, 34 formed in a, 33b
Hoses 35a and 35b for supplying cleaning liquid are connected to rotating shafts 27a and 27b, respectively, and cleaning tools 28a and 28b are connected to rotary shafts 27a and 27b in order to supply the cleaning liquid from the respective hoses 35a and 35b into the cleaning tools 28a and 28b.
Passages 36a and 36b opening into the inside of 8b are bored.
また、作業区画部Ｃに対応する位置に設置した
すすぎ部材１７は、洗浄部材１６と同様の構造を
有し、回転軸３７により回転せしめられるすすぎ
洗浄具３８ａ，３８ｂにホース３９ａ，３９ｂを
介してすすぎ水を供給することによつて、洗浄後
のデイスク部材９のすすぎが行なわれる。 Further, a rinsing member 17 installed at a position corresponding to the work compartment C has the same structure as the cleaning member 16, and is connected to rinsing cleaning tools 38a and 38b rotated by a rotating shaft 37 via hoses 39a and 39b. By supplying rinsing water, the disk member 9 after cleaning is rinsed.
さらに、エツジ洗い部材１８はスポンジ等から
なる外縁、内縁の各洗浄具４０ａ，４０ｂを有
し、該洗浄具４０ａ，４０ｂは回転可能に支持ア
ーム４１に取付けられて、該支持アーム４１は揺
動可能となつている。 Furthermore, the edge cleaning member 18 has outer and inner edge cleaning tools 40a and 40b made of sponges, etc., and the cleaning tools 40a and 40b are rotatably attached to a support arm 41, and the support arm 41 swings. It's becoming possible.
前述した洗浄部材１６における洗浄具２８ａ，
２８ｂが装着されているアーム２６ａ，２６ｂ
は、すすぎ洗浄具３８ａ，３８ｂを装着したすす
ぎ部材１７、及び洗浄具４０ａ，４０ｂを装着し
たエツジ洗い部材１８の支持アーム４１と連動し
て退避位置と作動位置との間に変位させるように
構成している。 The cleaning tool 28a in the cleaning member 16 described above,
Arms 26a and 26b to which 28b is attached
is configured to be displaced between the retracted position and the operating position in conjunction with the support arm 41 of the rinsing member 17 equipped with the rinse cleaning tools 38a, 38b and the edge cleaning member 18 equipped with the cleaning tools 40a, 40b. are doing.
このために、モータ等の旋回駆動手段４２が設
けられている。この旋回駆動手段４２はＶ字レバ
ー４３を第２図の矢印方向に往復回動させるもの
であつて、このＶ字レバー４３には伝達杆４４及
び４５が枢着されており、伝達杆４４の他端はエ
ツジ洗い部材１８の支持アーム４１に枢着され、
また伝達杆４５の他端はすすぎ部材１７に枢着さ
れている。さらに、すすぎ部材１７の伝達杆４５
の枢着位置に近接して中継用伝達杆４６が枢着さ
れ、この中継用伝達杆４６は方向転換用レバー４
７に枢着され、さらにこの方向転換用レバー４７
にアーム２６ａ，２６ｂからなる洗浄部材１６に
枢着した伝達杆４５が枢着されている。 For this purpose, a swing driving means 42 such as a motor is provided. This turning drive means 42 reciprocates a V-shaped lever 43 in the direction of the arrow in FIG. The other end is pivotally connected to the support arm 41 of the edge cleaning member 18,
The other end of the transmission rod 45 is pivotally connected to the rinsing member 17. Furthermore, the transmission rod 45 of the rinsing member 17
A relay transmission rod 46 is pivotally mounted adjacent to the pivot position of the direction change lever 4.
7, and this direction change lever 47
A transmission rod 45 is pivotally connected to the cleaning member 16 consisting of arms 26a and 26b.
従つて、旋回駆動手段４２を作動させると、洗
浄部材１６、すすぎ部材１７及びエツジ洗い部材
１８は実線で示した退避位置と、一点鎖線で示し
た作動位置との間に同時に変位せしめられる。 Therefore, when the swing drive means 42 is operated, the cleaning member 16, the rinsing member 17 and the edge cleaning member 18 are simultaneously displaced between the retracted position shown by the solid line and the operating position shown by the dashed line.
本実施例は前述のように構成されるもので、次
にその作動につて説明する。 This embodiment is constructed as described above, and its operation will be explained next.
洗浄すべきデイスク部材９は搬入ラツク２に立
設状態に設置され、この状態で搬入ラツク２を搬
入部３に装着させる。そして、該搬入ラツク２が
搬入部３を搬送させる途中でシヤワー９で洗浄す
ることによつて大部分の研摩粉を洗い流す。そし
て、搬入ラツク２が搬入部３の所定の位置に到達
したときに、搬入ハンドラ１１を搬入ラツク２側
に回動させて、チヤツク部材１１ｂによりデイス
ク部材９をチヤツクする。然る後、搬入ハンドラ
１１をを回動させて、該デイスク部材９を移載ハ
ンドラ１３に移載させる。 The disk member 9 to be cleaned is installed in an upright state on the carry-in rack 2, and the carry-in rack 2 is attached to the carry-in section 3 in this state. While the carry-in rack 2 is transporting the carry-in section 3, the carry-in section 3 is washed with a shower 9 to wash away most of the abrasive powder. Then, when the carry-in rack 2 reaches a predetermined position in the carry-in section 3, the carry-in handler 11 is rotated toward the carry-in rack 2 side, and the disk member 9 is chucked by the chuck member 11b. Thereafter, the carry-in handler 11 is rotated to transfer the disk member 9 to the transfer handler 13.
デイスク部材９が移載ハンドラ１３に移載され
た後、該移載ハンドラ１３をロータリテーブル１
４から離間する方向に突出変位させると共に90度
回動させて、ロータリテーブル１４の作業区画部
Ａと対面させて、該ロータリテーブル１４に近接
する方向に縮小変位させ、デイスク部材９をチヤ
ツク部材１９に移載する。そして、ロータリテー
ブル１４に移載されたデイスク部材９は回動軸１
４ａによりロータリテーブル１４を90度回動させ
ることによつて洗浄を行う作業区画部Ｂに移行さ
せる。このとき洗浄部材１６、すすぎ部材１７及
びエツジ洗い部材１８は、ロータリテーブル１４
におけるチヤツク部材１９や仕切壁１５と接触し
ないようにするために、旋回駆動手段４２を作動
させて、それぞれの回転軸を中心として回動させ
て、第２図に実線で示した退避位置に変位させて
ロータリテーブル１４か離間させておく。これに
よつて、移載ハンドラ１３から円滑にチヤツク部
材１９にデイスク部材９を装架できる。 After the disk member 9 is transferred to the transfer handler 13, the transfer handler 13 is transferred to the rotary table 1.
The disk member 9 is displaced protrudingly in the direction away from the chuck member 19 and rotated 90 degrees to face the work section A of the rotary table 14, and then reduced and displaced in the direction approaching the rotary table 14. Transferred to. Then, the disk member 9 transferred to the rotary table 14 is moved to the rotation shaft 1.
4a, the rotary table 14 is rotated 90 degrees to move to the work section B where cleaning is performed. At this time, the cleaning member 16, the rinsing member 17, and the edge cleaning member 18 are removed from the rotary table 14.
In order to avoid contact with the chuck member 19 and the partition wall 15, the swing driving means 42 is activated to rotate the chuck member 19 and the partition wall 15 about their respective rotation axes, and to move the chuck member 19 to the retracted position shown by the solid line in FIG. and keep the rotary table 14 apart. Thereby, the disk member 9 can be smoothly mounted on the chuck member 19 from the transfer handler 13.
チヤツク部材１９にデイスク部材９が装架され
ると、洗浄部材１６、すすぎ部材１７及びエツジ
洗い部材１８を旋回させることによつて、一点鎖
線で示した作動位置に変位させる。これによつ
て、アーム２８ａ，２８ｂは回転伝達軸３０を中
心としてデイスク部材９の表面と平行に移動し
て、洗浄具２８ａ，２８ｂ間にデイスク部材９を
挟み込ませる。ここで、洗浄具２８ａ，２８ｂは
スポンジ等の柔軟な部材で形成されていることか
ら、デイスク部材９に当接すると容易に圧縮変形
することになり、デイスク部材９の表面に対して
近接・離間する方向等に動作させなくとも、洗浄
具２８ａ，２８ｂを確実に洗浄作動位置に変位さ
せることができる。また、この洗浄作動位置に変
位する間に、洗浄具２８ａ，２８ｂはデイスク部
材９の表面に沿つて摺動するが、デイスク部材９
を損傷させる等といつた支障がなく円滑に変位す
る。 When the disk member 9 is mounted on the chuck member 19, the cleaning member 16, the rinsing member 17, and the edge cleaning member 18 are rotated to move to the operating position shown by the dashed line. As a result, the arms 28a and 28b move parallel to the surface of the disk member 9 about the rotation transmission shaft 30, thereby sandwiching the disk member 9 between the cleaning tools 28a and 28b. Here, since the cleaning tools 28a and 28b are made of a flexible member such as a sponge, they are easily compressed and deformed when they come into contact with the disk member 9. The cleaning tools 28a and 28b can be reliably moved to the cleaning operation position without being moved in the direction of cleaning. Further, while being displaced to this cleaning operation position, the cleaning tools 28a and 28b slide along the surface of the disk member 9.
It can be displaced smoothly without any problems such as damage to the parts.
この状態で、ホース３４ａ，３４ｂから中性洗
剤等からなる洗浄液を洗浄具２８ａ，２８ｂの内
部に供給すると共に、該洗浄具２８ａ，２８ｂを
回転させる。これによつて、洗浄具２８ａ，２８
ｂによりデイスク部材９の表面が擦られて該デイ
スク部材９の洗浄が行われ、しかもこの洗浄具２
８ａ，２８ｂの回転によつて、チヤツク部材１９
に回転自在に支承されているデイスク部材９に回
転力が作用して、このデイスク部材９が自転する
から、デイスク部材９の表裏各面全体に対する洗
浄が行なわれる。 In this state, a cleaning liquid made of neutral detergent or the like is supplied from the hoses 34a, 34b into the cleaning tools 28a, 28b, and the cleaning tools 28a, 28b are rotated. With this, the cleaning tools 28a, 28
b scrubs the surface of the disk member 9 to clean the disk member 9, and this cleaning tool 2
By the rotation of 8a and 28b, the chuck member 19
Since a rotational force acts on the disk member 9 rotatably supported by the disk member 9 and the disk member 9 rotates, the entire front and back surfaces of the disk member 9 are cleaned.
ここで、洗浄具２８ａ，２８ｂとデイスク部材
９との間に介在する摩耗粉等の異物は、洗浄中に
洗浄具２８ａ，２８ｂが回転せしめられるので、
該洗浄具２８ａ，２８ｂの回転によつて円滑にそ
の外周面側に移動して外部に排出され、洗い残し
がなく、完全な洗浄が可能となる。しかも、洗浄
具２８ａ，２８ｂとデイスク部材９との間に適度
な洗浄液の液膜が形成されるから、洗浄中に洗浄
具２８ａ，２８ｂや異物の摩擦によりデイスク部
材９の表面が損傷する等の不都合を生じることは
ない。 Here, since the cleaning tools 28a, 28b are rotated during cleaning, foreign matter such as abrasion powder interposed between the cleaning tools 28a, 28b and the disk member 9 can be removed.
As the cleaning tools 28a and 28b rotate, they smoothly move toward their outer peripheral surfaces and are discharged to the outside, making it possible to clean completely without leaving any residue. Moreover, since an appropriate liquid film of cleaning liquid is formed between the cleaning tools 28a, 28b and the disk member 9, the surface of the disk member 9 is prevented from being damaged due to friction of the cleaning tools 28a, 28b or foreign objects during cleaning. There will be no inconvenience.
このデイスク部材９の洗浄が完了すると、ロー
タリテーブル１４を90度回動させて、すすぎを行
う作業区画部Ｃに移行させる。そして、この作業
区画部Ｃにおいては、前述の作業区画部Ｂにおけ
ると同様の手法ですすぎ部材１７を使用して、す
すぎ洗浄具３８ａ，３８ｂの内部にホース３９
ａ，３９ｂを介してすすぎ水を供給することによ
り洗浄液を洗い流すすすぎ洗浄を行う。この後、
ロータリテーブル１４をさらに90度回転させるこ
とによつてエツジ洗いを行う作業区画部Ｄに移送
し、エツジ洗い部材１８を作動させることによつ
てこのデイスク部材９の内外の各周縁部の洗浄が
行なわれ、デイスク部材９から異物、油汚れ等を
完全に除去した後、さらにロータリテーブル１４
を90度回動させることによつて、洗浄完了後のデ
イスク部材は再び作業区画部Ａに帰還せしめられ
る。 When the cleaning of the disk member 9 is completed, the rotary table 14 is rotated 90 degrees and transferred to the work compartment C where rinsing is performed. In this working section C, the rinsing member 17 is used in the same manner as in the above-mentioned working section B, and the hose 39 is inserted into the inside of the rinsing cleaning tools 38a and 38b.
Rinse cleaning is performed in which the cleaning liquid is washed away by supplying rinsing water through ports a and 39b. After this,
By further rotating the rotary table 14 by 90 degrees, the rotary table 14 is transferred to the work section D where edge cleaning is performed, and by operating the edge cleaning member 18, the inner and outer peripheral edges of the disk member 9 are cleaned. After completely removing foreign matter, oil stains, etc. from the disk member 9, the rotary table 14 is further removed.
By rotating the disk member by 90 degrees, the disk member after cleaning is returned to the working section A again.
前述のようにして、洗浄が完了したデイスク部
材９が作業区画部Ａに帰還し、移載ハンドラ１３
がロータリテーブル１４側に変位したときに、該
移載ハンドラ１３によつてこのデイスク部材９を
チヤツクし、搬入ハンドラ１１に移載されて、洗
浄後のデイスク部材９は乾燥部８に移行して該乾
燥部８において高速スピン乾燥等により乾燥せし
められる。このように乾燥したデイスク部材９は
移載ハンドラ１３の作動により、該移載ハンドラ
１３に移載し、該移載ハンドラ１３の回動によつ
て搬出ハンドラ３に移載され、該搬出ハンドラ３
の回動により搬出ラツク４内に載置される。この
動作を順次繰返すことによつてデイスク部材９の
洗浄が行なわれ、搬出ラツク４を搬出部５から外
部に搬送することによつて洗浄の完了したデイス
ク部材９が取出される。 As described above, the disk member 9 that has been cleaned returns to the work section A and is transferred to the transfer handler 13.
When the disc member 9 is displaced to the rotary table 14 side, the transfer handler 13 chucks the disc member 9 and transfers it to the carry-in handler 11, and the cleaned disc member 9 is transferred to the drying section 8. In the drying section 8, the material is dried by high-speed spin drying or the like. The disk member 9 dried in this way is transferred to the transfer handler 13 by the operation of the transfer handler 13, and transferred to the carry-out handler 3 by the rotation of the transfer handler 13.
is placed in the carry-out rack 4 by the rotation of the frame. By sequentially repeating this operation, the disk member 9 is cleaned, and by transporting the carry-out rack 4 to the outside from the carry-out section 5, the disk member 9 that has been completely cleaned is taken out.
而して、洗浄部材１６、すすぎ部材１７及びエ
ツジ洗い部材１８は旋回駆動手段４２でそれぞれ
回転伝達用の軸を中心として旋回させるだけで、
同時に退避位置と作動位置との間に変位させるこ
とができるので、この変位機構の構成が簡単にな
ると共に、動作の迅速性も図られる。従つて、デ
イスク部材の洗浄装置全体の構成が簡略化される
と共に、作業の高速化が達成できる。 Thus, the cleaning member 16, the rinsing member 17, and the edge cleaning member 18 are simply rotated around their respective rotation transmission shafts by the rotation drive means 42.
Since the displacement mechanism can be simultaneously displaced between the retracted position and the operating position, the configuration of this displacement mechanism is simplified and the operation is quick. Therefore, the overall structure of the disk member cleaning apparatus is simplified, and the speed of operation can be increased.
なお、前述の実施例ではデイスク部材を洗浄し
た後に、すすぎ及びエツジ洗いを行う構成とした
が、単一の洗浄工程において洗浄する場合には、
ロータリテーブルは必要でなく、チヤツク部材を
固定的に設置するようにしても良い。 In addition, in the above-mentioned embodiment, the configuration was such that rinsing and edge cleaning were performed after cleaning the disk member, but in the case of cleaning in a single cleaning process,
A rotary table is not necessary, and the chuck member may be fixedly installed.
［発明の効果］
以上詳述した如く本発明は、一対の洗浄具によ
つてデイスク部材を挟み込んで、この洗浄具を回
転させることによつて、洗浄具でデイスク部材を
擦るようになし、しかもデイスク部材に回転力を
加えるようにしているので、デイスク部材を自転
させるための駆動手段を設ける必要がなくなり、
またはこれら両洗浄具をアームに取り付け、この
アームを洗浄具に回転を伝達するための回転伝達
軸を中心として旋回させることによつて、両洗浄
具を、チヤツク手段により外周縁または内周縁を
回転自在に支承させたデイスク部材から離間させ
た退避位置と、デイスク部材を表裏両面から挟み
込んで回転させながら洗浄する洗浄作業位置との
間に変位させるように構成しているもので、この
洗浄具の変位機構の構成が簡単になり、かつ退避
位置から洗浄作動位置に、また洗浄作動位置から
退避位置に変位する動作も迅速に行わせることが
できる等の諸効果を奏する。[Effects of the Invention] As detailed above, the present invention is capable of rubbing the disk member with the cleaning tools by sandwiching the disk member between a pair of cleaning tools and rotating the cleaning tools. Since rotational force is applied to the disk member, there is no need to provide a drive means to rotate the disk member.
Alternatively, by attaching both of these cleaning tools to an arm and rotating this arm around a rotation transmission shaft for transmitting rotation to the cleaning tools, both cleaning tools can be rotated at the outer peripheral edge or the inner peripheral edge by chuck means. This cleaning tool is configured to be displaced between a retracted position where it is separated from the freely supported disk member and a cleaning position where the disk member is sandwiched from both the front and back sides and cleaned while rotating. The structure of the displacement mechanism is simplified, and the displacement mechanism can be quickly moved from the retracted position to the cleaning position and from the cleaning position to the retracted position.
第１図は本発明の一実施例を示す洗浄装置の全
体構成図、第２図は洗浄部の拡大正面図、第３図
は第２図のＸ−Ｘ矢視図、第４図はロータリテー
ブルのチヤツク部材の作動機構を示す構成説明
図、第５図は洗浄部材の部分断面正面図、第６図
は洗浄操作の作動説明図、第７図は第５図のＹ−
Ｙ断面図である。
１……ハウジング、７……洗浄部、９……デイ
スク部材、１４……ロータリーテーブル、１６…
…洗浄部材、１９……チヤツク部材、３０……回
転軸、２８ａ，２８ｂ……洗浄具、４２……旋回
駆動手段。
Fig. 1 is an overall configuration diagram of a cleaning device showing an embodiment of the present invention, Fig. 2 is an enlarged front view of the washing section, Fig. 3 is a view taken along the line X-X in Fig. 2, and Fig. 4 is a rotary A configuration explanatory diagram showing the operating mechanism of the chuck member of the table, FIG. 5 is a partially sectional front view of the cleaning member, FIG. 6 is an explanatory diagram of the operation of the cleaning operation, and FIG. 7 is the Y--
It is a Y cross-sectional view. DESCRIPTION OF SYMBOLS 1...Housing, 7...Cleaning part, 9...Disk member, 14...Rotary table, 16...
...Cleaning member, 19...Chuck member, 30...Rotating shaft, 28a, 28b...Cleaning tool, 42...Swivel drive means.
Claims (1)
軸を中心として旋回可能な一対のアームの先端
に、この回転伝達軸に追従回転する回転軸をそれ
ぞれ装着し、これら各回転軸にスポンジ等からな
る洗浄具を相対向させて装着し、これら両アーム
を旋回駆動手段によりデイスク部材の表面に沿う
方向に旋回させて、両洗浄具を、チヤツク手段に
より外周縁または内周縁を回転自在に支承させた
デイスク部材から離間させた退避位置と、デイス
ク部材を表裏両面から挟み込んで回転させながら
洗浄する洗浄作動位置との間に変位可能な構成と
したことを特徴とするデイスク部材の洗浄装置。1. Rotating shafts that follow the rotational transmission shaft are attached to the tips of a pair of arms that can pivot around a rotational transmission shaft that is rotationally driven by a rotational drive means, and each of these rotational shafts is equipped with a cleaning material such as a sponge. A disk in which the cleaning tools are mounted facing each other, both arms are rotated in a direction along the surface of the disk member by a rotation driving means, and both cleaning tools are rotatably supported at the outer peripheral edge or the inner peripheral edge by a chuck means. A cleaning device for a disk member, characterized in that it is configured to be movable between a retracted position where the disk member is separated from the member and a cleaning operation position where the disk member is held between the front and back sides and cleaned while being rotated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60223726A JPS6284970A (en) | 1985-10-09 | 1985-10-09 | Washing device for disc member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60223726A JPS6284970A (en) | 1985-10-09 | 1985-10-09 | Washing device for disc member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6284970A JPS6284970A (en) | 1987-04-18 |
| JPH0446194B2 true JPH0446194B2 (en) | 1992-07-29 |
Family
ID=16802719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60223726A Granted JPS6284970A (en) | 1985-10-09 | 1985-10-09 | Washing device for disc member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6284970A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1011749A (en) * | 1996-06-27 | 1998-01-16 | Speedfam Co Ltd | Cleaning and drying device for disk |
| CN104624539A (en) * | 2015-02-14 | 2015-05-20 | 济南大学 | Three-jaw chuck type steel wire rope descaling device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS608188A (en) * | 1983-06-28 | 1985-01-17 | Nissan Motor Co Ltd | Sail supporting structure for yacht |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59107722U (en) * | 1982-12-29 | 1984-07-20 | 富士通株式会社 | Magnetic recording media manufacturing equipment |
-
1985
- 1985-10-09 JP JP60223726A patent/JPS6284970A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS608188A (en) * | 1983-06-28 | 1985-01-17 | Nissan Motor Co Ltd | Sail supporting structure for yacht |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6284970A (en) | 1987-04-18 |
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