JPH0437651A - Production of aluminum nitride substrate - Google Patents
Production of aluminum nitride substrateInfo
- Publication number
- JPH0437651A JPH0437651A JP2144635A JP14463590A JPH0437651A JP H0437651 A JPH0437651 A JP H0437651A JP 2144635 A JP2144635 A JP 2144635A JP 14463590 A JP14463590 A JP 14463590A JP H0437651 A JPH0437651 A JP H0437651A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- alumina powder
- powder
- substrate
- sheets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims abstract description 32
- 239000000758 substrate Substances 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 239000000843 powder Substances 0.000 claims abstract description 47
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 23
- 239000011248 coating agent Substances 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 9
- 239000002904 solvent Substances 0.000 claims abstract description 6
- 239000012299 nitrogen atmosphere Substances 0.000 claims abstract description 5
- 239000002245 particle Substances 0.000 claims description 11
- 238000010304 firing Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 239000002002 slurry Substances 0.000 abstract description 5
- 230000002950 deficient Effects 0.000 abstract description 2
- 239000011230 binding agent Substances 0.000 abstract 1
- 238000001354 calcination Methods 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 229920000609 methyl cellulose Polymers 0.000 abstract 1
- 239000001923 methylcellulose Substances 0.000 abstract 1
- 235000010981 methylcellulose Nutrition 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- -1 aluminum nitrides Chemical class 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、窒化アルミニウム基板の製造方法に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a method for manufacturing an aluminum nitride substrate.
具体的にいうと、本発明は、窒化アルミニウムのグリー
ンシートを多段積みにして一度に焼成し、窒化アルミニ
ウムのプレーン基板を製造するための方法に関する。Specifically, the present invention relates to a method for manufacturing aluminum nitride plain substrates by stacking aluminum nitride green sheets in multiple stages and firing them all at once.
［背景技術］
従来は、窒化アルミニウムのパウダーもしくは窒化アル
ミニウムの焼結基板を粉砕した焼結パウダーを敷粉とし
、これらの敷粉を多段積みされた窒化アルミニウムのグ
リーンシートの一枚一枚の間に撒いて分散させておき、
多段積みされた複数枚のグリーンシートを窒素雰囲気中
において１８００〜１９００℃で焼成し、窒化アルミニ
ウムのプレーン基板を製造していた。[Background technology] Conventionally, aluminum nitride powder or sintered powder obtained by crushing a sintered aluminum nitride substrate has been used as a bedding powder, and these bedding powders have been spread between each stacked aluminum nitride green sheet. Sprinkle it on and disperse it,
A plurality of stacked green sheets were fired at 1800 to 1900° C. in a nitrogen atmosphere to produce an aluminum nitride plain substrate.
［発明が解決しようとする課題］
従来は、上記のように基板材料と同じ窒化アルミニウム
の敷粉を用いていたので、敷粉とグリーンシートとの間
で窒化アルミニウム同士の反応が生じ、このため焼成さ
れたプレーン基板に反応によるくっつきが発生していた
。また、パウダー（敷粉）の粒径の不揃いやパウダーの
形状のいびつさのため、焼成されたプレーン基板に反り
等が発生していた。従って、良好な窒化アルミニウムの
プレーン基板を得ることが困難で、良品率は５０％以下
となっていた。また、敷粉として用いられている窒化ア
ルミニウム自身も高価で、製造コストが高くつく原因と
なっていた。[Problem to be solved by the invention] Conventionally, as mentioned above, aluminum nitride bedding powder, which is the same as the substrate material, was used, so a reaction between the aluminum nitrides occurred between the bedding powder and the green sheet, and as a result, Reaction caused sticking to the fired plain substrate. In addition, due to the uneven particle size of the powder (bedding powder) and the irregular shape of the powder, warping and the like occurred in the fired plain substrate. Therefore, it is difficult to obtain a good aluminum nitride plain substrate, and the yield rate is less than 50%. Furthermore, the aluminum nitride used as the bedding powder itself is expensive, leading to high manufacturing costs.
本発明は、叙上の従来例の欠点に鑑みてなされたもので
あり、その目的とするところは、窒化アルミニウムのグ
リーンシートを多段積みにして焼成しても、基板同士の
くっつきや反り等が発生しに＜＜、平滑で安価な窒化ア
ルミニウムのブレーン基板を製造することができる方法
を提供することにある。The present invention was made in view of the drawbacks of the conventional examples described above, and its purpose is to prevent the substrates from sticking together or warping even if aluminum nitride green sheets are stacked in multiple layers and fired. The object of the present invention is to provide a method for manufacturing a smooth and inexpensive aluminum nitride blank substrate.
［課題を解決するための手段］
本発明の窒化アルミニウム基板の製造方法は、溶媒に分
散させられた粒径５〜１００μｍの球状アルミナパウダ
ーを、塗布密度が１０〜３００個／ｃｍ２となるように
窒化アルミニウムのグリーンシートの各積層面に塗布し
、このグリーンシートを複数枚積み重ね、窒素雰囲気中
において１８００〜１９００°Ｃで焼成することを特徴
としている。[Means for Solving the Problems] The method for manufacturing an aluminum nitride substrate of the present invention is to apply spherical alumina powder with a particle size of 5 to 100 μm dispersed in a solvent at a coating density of 10 to 300 particles/cm2. It is characterized by coating each laminated surface of aluminum nitride green sheets, stacking a plurality of these green sheets, and firing them at 1800 to 1900°C in a nitrogen atmosphere.
［作用］
本発明にあっては、敷粉としてアルミナパウダーを用い
ているので、窒化アルミニウムのグリーンシートと敷粉
とが反応して窒化アルミニウムの基板同士がくっつくこ
とを防止できる。また、アルミナパウダーを用いている
ので、製造コストを安価にできる。さらに、粒径が５〜
１ＯｏｔＥ′ｒｌの球状アルミナパウダーを溶媒に分散
させたものをグリーンシートに塗布しているので、粒径
及び形状がほぼ均一なパウダーを均一に塗布することが
でき、しかも、塗布密度が１０〜３００個／ ｃｍ ２
であれば敷粉のパウダー粒子間も光分離れていて、パウ
ダー粒子の固まりも生じにくいので、窒化アルミニウム
の基板に反り等が発生するのを防止できる。この結果、
窒化アルミニウム基板の良品率を大幅に向上させること
ができる。[Function] In the present invention, since alumina powder is used as the bedding powder, it is possible to prevent the aluminum nitride green sheets and the bedding powder from reacting and causing the aluminum nitride substrates to stick to each other. Furthermore, since alumina powder is used, manufacturing costs can be reduced. Furthermore, the particle size is 5~
Since 100E'rl of spherical alumina powder is dispersed in a solvent and applied to the green sheet, it is possible to uniformly apply the powder with almost uniform particle size and shape, and the coating density is 10 to 300. pieces/cm2
In this case, there is optical separation between the powder particles of the bed powder, and the powder particles are less likely to clump together, so it is possible to prevent the aluminum nitride substrate from warping. As a result,
The yield rate of aluminum nitride substrates can be significantly improved.
［実施例］ 以下、本発明の一実施例を添付図に従って詳述する。[Example] Hereinafter, one embodiment of the present invention will be described in detail with reference to the accompanying drawings.
まず、粒径が５〜１００μｍの球状アルミナパウダーを
用い、第１表のような配合比で水分散アルミナパウダー
スラリー１を準備した。First, a water-dispersed alumina powder slurry 1 was prepared using spherical alumina powder having a particle size of 5 to 100 μm and having a compounding ratio as shown in Table 1.
第１表
また、ドクターブレード法等により、厚さ０゜６〜１
、５ ｍｍ、幅３００ ｍｍ、長さ１０００ ｍｍの窒
化アルミニウムグリーンシート２を成形し、これを所望
の形状〔例えば、０５０ｍ＋ｎ〜０２００ｍｍ）に打ち
抜いた。この打ち抜かれた各グリーンシート２の表面に
、第１図（ａ）に示すように、前記水分散アルミナパウ
ダースラリー１を塗布密度（パウダー個数密度）が１０
〜３００個／ ｃｍ ２となるようにスプレーガン３で
吹き付け、約１００℃の乾燥語中で約５時間乾燥させた
。乾燥後、第１図（ｂ）に示すように、表面に球状アル
ミナパウダー４を付着させられたグリーンシート２を１
０〜２０枚多段積し、窒化アルミニウム類もしくは窒化
・ホウ素製の匣５の中に納め、窒素ガス雰囲気中におい
て約２４時間脱脂を行ない、残存カーボン量が１０００
〜３０００ ｐｐｍとなるようンこ調整した。Table 1 Also, by the doctor blade method etc., the thickness is 0°6~1
, 5 mm in width, 300 mm in width, and 1000 mm in length, and punched out into a desired shape (for example, 050 m+n to 0200 mm). As shown in FIG. 1(a), the water-dispersed alumina powder slurry 1 is applied to the surface of each punched green sheet 2 at a coating density (powder number density) of 10.
It was sprayed with a spray gun 3 at a density of ~300 pieces/cm 2 and dried in a dry oven at about 100° C. for about 5 hours. After drying, as shown in FIG. 1(b), the green sheet 2 with the spherical alumina powder 4 attached to the surface is
0 to 20 sheets were stacked in multiple stacks, placed in a box 5 made of aluminum nitride or nitride/boron, and degreased for about 24 hours in a nitrogen gas atmosphere until the amount of residual carbon reached 1000.
The concentration was adjusted to ~3000 ppm.
この後、これらのグリーンシート２を窒素ガス雰囲気中
において１８００〜１９００℃で５時間焼成し、窒化ア
ルミニウムのプレーン基板を得た。Thereafter, these green sheets 2 were fired at 1800 to 1900° C. for 5 hours in a nitrogen gas atmosphere to obtain an aluminum nitride plain substrate.
こうして、製造された窒化アルミニウムのプレーン基板
は、球状アルミナパウダーの敷粉によってブレーン基板
同士が焼成時にくっつくのを防止され、しかも、敷粉と
プレーン基板とが反応するコトもないので、敷粉を介し
てブレーン基板同士かくフつくこともない。さらに、球
状アルミナパウダーの形状や粒度等も均一であるので、
焼成時にグリーンシートが変形したり、反ったりするこ
とも防止できる。この結果良品率が９５％以上となり、
極めて高い良品率を示した。また、プレーン基板の熱伝
導率は、２００Ｗ／ｍ−”Ｋであった。In this way, the produced aluminum nitride plain substrate is prevented from sticking to each other during firing by the spherical alumina powder, and there is no reaction between the bedding powder and the plain substrate, so it is possible to use the spherical alumina powder. There is no chance that the brain boards will touch each other. Furthermore, since the shape and particle size of spherical alumina powder are uniform,
It is also possible to prevent the green sheet from deforming or warping during firing. As a result, the non-defective product rate is over 95%,
It showed an extremely high yield rate. Further, the thermal conductivity of the plain substrate was 200 W/m-''K.
さらに、敷粉のコストは、窒化アルミニウムの敷粉と比
べて１１５となった。Furthermore, the cost of the bedding powder was 115% compared to the aluminum nitride bedding powder.
［発明の効果］
本発明によれば、窒化アルミニウム基板を製造する際に
用いられる敷粉として球状アルミナパウダーを用いたの
で、敷粉と窒化アルミニウム基板とが反応せず、プレー
ン基板同士がくっつかなくなった。また、球状アルミナ
パウダーの粒径や形状が均一であるので、窒化アルミニ
ウム基板の変形や反り等も起こりにくい。この結果、良
好な窒化アルミニウム基板を製造することができ、極め
て高い良品率を達成することができた。さらに、敷粉と
してアルミナを用いたので、窒化アルミニウムの敷粉と
比較して、コストも大幅に安価となった。[Effects of the Invention] According to the present invention, since spherical alumina powder is used as the bedding powder used when manufacturing aluminum nitride substrates, the bedding powder and the aluminum nitride substrate do not react, and the plain substrates do not stick together. Ta. Furthermore, since the particle size and shape of the spherical alumina powder are uniform, deformation and warping of the aluminum nitride substrate are less likely to occur. As a result, a good aluminum nitride substrate could be manufactured and an extremely high yield rate could be achieved. Furthermore, since alumina was used as the bedding powder, the cost was significantly lower than that of aluminum nitride bedding powder.
第１図（ａ） （ｂ）は本発明の一実施例を説明する概
略図である。
１・・・水分散アルミナパウダースラリー２・・・グリ
ーンシート
４・・・球状アルミナパウダー
特許出願人 株式会社 村田製作所
代理人 弁理士 中 野 雅 房
１・・・水分散アルミナパウダースラリー２・・・グリ
ーンシート
とａノ
４・・・球状アルミナパウダー
（ｂ）FIGS. 1(a) and 1(b) are schematic diagrams illustrating an embodiment of the present invention. 1... Water-dispersed alumina powder slurry 2... Green sheet 4... Spherical alumina powder Patent applicant Murata Manufacturing Co., Ltd. Representative Patent attorney Masafusa Nakano 1... Water-dispersed alumina powder slurry 2... Green sheet and ano 4... spherical alumina powder (b)
Claims (1)
アルミナパウダーを、塗布密度が１０〜３００個／ｃｍ
＾２となるように窒化アルミニウムのグリーンシートの
各積層面に塗布し、このグリーンシートを複数枚積み重
ね、窒素雰囲気中において１８００〜１９００℃で焼成
することを特徴とする窒化アルミニウム基板の製造方法
。(1) Spherical alumina powder with a particle size of 5 to 100 μm dispersed in a solvent at a coating density of 10 to 300 pieces/cm
A method for manufacturing an aluminum nitride substrate, which comprises coating each laminated surface of aluminum nitride green sheets so that the temperature is ^2, stacking a plurality of the green sheets, and firing the green sheets at 1800 to 1900°C in a nitrogen atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2144635A JPH0437651A (en) | 1990-06-01 | 1990-06-01 | Production of aluminum nitride substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2144635A JPH0437651A (en) | 1990-06-01 | 1990-06-01 | Production of aluminum nitride substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0437651A true JPH0437651A (en) | 1992-02-07 |
Family
ID=15366644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2144635A Pending JPH0437651A (en) | 1990-06-01 | 1990-06-01 | Production of aluminum nitride substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437651A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013012591A (en) * | 2011-06-29 | 2013-01-17 | Kyocera Corp | Circuit board |
-
1990
- 1990-06-01 JP JP2144635A patent/JPH0437651A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013012591A (en) * | 2011-06-29 | 2013-01-17 | Kyocera Corp | Circuit board |
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