JPS61158881A - Method of correcting aluminum nitride ceramic - Google Patents
Method of correcting aluminum nitride ceramicInfo
- Publication number
- JPS61158881A JPS61158881A JP59277702A JP27770284A JPS61158881A JP S61158881 A JPS61158881 A JP S61158881A JP 59277702 A JP59277702 A JP 59277702A JP 27770284 A JP27770284 A JP 27770284A JP S61158881 A JPS61158881 A JP S61158881A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- powder
- nitride ceramic
- sintered bodies
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ceramic Products (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
［発明の技術分野〕
本発明は基板用窒化アルミニウムセラミックス焼結体の
矯正方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method for straightening a sintered aluminum nitride ceramic body for a substrate.
［発明の技術的背景とその問題点］
窒化アルミニウムセラミックスは、高強度性および良熱
伝導性を備えた非酸化物セラミックスであり、パワート
ランジスタモジュール基板等各種の部品用材料として、
近年注目されているものである。[Technical background of the invention and its problems] Aluminum nitride ceramics are non-oxide ceramics with high strength and good thermal conductivity, and are used as materials for various parts such as power transistor module substrates.
This is something that has been attracting attention in recent years.
この窒化アルミニウムセラミックスの焼成は、ホットプ
レス法あるいは常圧焼結法によって行われているが、特
に基板のような薄肉の成形の場合には焼成中に反りやう
ねりが生じ易く、このため通常は得られた焼結体を複数
枚積み重ね、高温で自重によりまたは荷重を加えること
によって焼結体の変形を直すということが行われていた
。Firing of aluminum nitride ceramics is carried out by the hot press method or pressureless sintering method, but warping and waviness are likely to occur during firing, especially when forming thin walls such as substrates, so normally The deformation of the sintered bodies was corrected by stacking a plurality of the obtained sintered bodies and using their own weight at high temperatures or by applying a load.
しかし、この場合焼結体どうしが高温によって固着し易
くなり、焼結体に亀裂が入ったり割れたりすることが頻
繁に発生していた。このため場合によっては焼結体の多
段積み重ねが困難となり、１枚ずつ矯正しなければなら
ないこともあった。However, in this case, the sintered bodies tend to stick together due to the high temperature, and the sintered bodies often crack or break. For this reason, in some cases, it has become difficult to stack the sintered bodies in multiple stages, and it has sometimes been necessary to straighten the sintered bodies one by one.
［発明の目的］
本発明はかかる従来の事情に対処してなされたもので、
基板用窒化アルミニウムセラミックス焼粘体を多段積み
重ねて効率よく矯正を行なうことのできる方法を提供す
ることを目的とする。[Object of the invention] The present invention has been made in response to such conventional circumstances,
It is an object of the present invention to provide a method that can efficiently perform straightening by stacking aluminum nitride ceramic fired viscous bodies for substrates in multiple stages.
［発明の概要］
すなわち本発明の窒化アルミニウムセラミックスの矯正
方法は、基板用窒化アルミニウムセラミックス焼結体を
支持台と窒化アルミニウムセラミックス焼結体間および
窒化アルミニウムセラミックス焼結体間にセラミックス
粉末を介在させて複数段積み重ね、非酸化性雰囲気中で
１５００〜１８００℃で、かつ４００ｋｇ ／ ｄ以下
の荷重下で矯正することを特徴としている。[Summary of the Invention] That is, the method for straightening aluminum nitride ceramics of the present invention includes interposing ceramic powder between a supporting stand and the aluminum nitride ceramic sintered body and between the aluminum nitride ceramic sintered bodies. It is characterized in that it is stacked in multiple stages and straightened in a non-oxidizing atmosphere at 1500 to 1800°C and under a load of 400 kg/d or less.
本発明の方法に用いる窒化アルミニウムセラミックス焼
結体は、窒化アルミニウムを９５％以上含むものいう。The aluminum nitride ceramic sintered body used in the method of the present invention is one containing 95% or more of aluminum nitride.
また、セラミックス粉末としては、窒化ホウ素粉末、窒
化アルミニウム粉末、アルミナ粉末があげられ、その粒
度は２００メツシユ以下であることが好ましい。これら
のセラミックス粉末は適当な溶媒、例えばアセトンのよ
うな有機溶媒に懸濁したものをスプレィ、刷毛、ロール
等を使用して、あるいはデツピングまたは乾式で支持台
表面および焼結体表面に塗布する。塗布は焼結体の両面
でもあるいは片面のみでもよい。これらの方法により形
成されたセラミックス粉末層の厚さは５μｍ以上が適当
である。Further, examples of the ceramic powder include boron nitride powder, aluminum nitride powder, and alumina powder, and the particle size thereof is preferably 200 mesh or less. These ceramic powders are suspended in a suitable solvent, for example, an organic solvent such as acetone, and applied to the surface of the support and the sintered body using a spray, brush, roll, etc., or by dipping or drying. The coating may be applied to both sides of the sintered body or only to one side. The thickness of the ceramic powder layer formed by these methods is suitably 5 μm or more.
本発明による窒化アルミニウムセラミックス焼結体の矯
正は、セラミックス粉末を間に介在させた被矯正物を支
持台上に５〜１０枚積み重ね、その最上部、あるいはこ
の支持台上に被矯正物を載せたものを複数組さらに積み
重ねた最上部に支持台を載せ、非酸化性雰囲気中、例え
ばＮ２ 、Ａｒ等から選ばれる一種のガスまたは二種以
上の混合ガスあるいは真空雰囲気中で１０分〜３時間、
４００ｋｇ／ ｃｄｄ以下荷重下で加熱することによっ
て行なわれる。加熱温度は焼結体どうしの接合を防ぎ、
かつグレインの成長を押えるため、焼成温度条件よりも
５０〜１００℃程度低い温度、例えば１５００〜１８０
０℃が好ましい。In the straightening of aluminum nitride ceramic sintered bodies according to the present invention, 5 to 10 objects to be straightened with ceramic powder interposed therebetween are stacked on a support stand, and the object to be straightened is placed on the top of the stack or on this support stand. A supporting stand is placed on top of a stack of multiple sets, and the mixture is placed in a non-oxidizing atmosphere, for example, a gas or a mixture of two or more gases selected from N2, Ar, etc., or a vacuum atmosphere for 10 minutes to 3 hours. ,
This is done by heating under a load of 400 kg/cdd or less. The heating temperature prevents the sintered bodies from joining together,
In addition, in order to suppress the growth of grains, the temperature is about 50 to 100°C lower than the firing temperature conditions, for example, 1500 to 180°C.
0°C is preferred.
［発明の実施例］ 次に本発明の実施例について説明する。[Embodiments of the invention] Next, examples of the present invention will be described.
実施例
酸化イツトリウムを５重量％含む窒化アルミニウム粉末
に、バインダとしてパラフィン７重量％を加え成形、脱
脂した。Example 7% by weight of paraffin was added as a binder to aluminum nitride powder containing 5% by weight of yttrium oxide, and the mixture was molded and degreased.
次いで窒素雰囲気中１８００℃×２時間の条件で常圧焼
結法により焼成して２５，４ｎ Ｘ ５０．８ｎ Ｘ
１．Ｏｎの基板用窒化アルミニウムセラミックス焼結体
を得た。この焼結体はその長手方向に約２ｎ反りが認め
られた。Then, it was sintered by pressureless sintering in a nitrogen atmosphere at 1800°C for 2 hours to form a 25.4n x 50.8n x
1. An aluminum nitride ceramic sintered body for substrates was obtained. This sintered body was found to have about 2N warp in its longitudinal direction.
一方、４００メツシユの窒化ホウ素粉末１０ｇをアセト
ン１００ＣＣに懸濁し、この懸濁液を窒化アルミニウム
類の支持台表面および前記の窒化アルミニウムセラミッ
クス焼結体表面に刷毛を用いて塗布することにより、窒
化ホウ素粉末層を約１０μｍ形成させた。On the other hand, 10 g of 400 mesh boron nitride powder was suspended in 100 cc of acetone, and this suspension was applied to the surface of the aluminum nitride support and the surface of the aluminum nitride ceramic sintered body using a brush. A powder layer of approximately 10 μm was formed.
次いでこの窒化ホウ素粉末を塗布した支持台に窒化アル
ミニウムセラミックス焼結体を、窒化ホウ素粉末が間に
挾まれるように１０枚積み重ねたものを５組積み重ね、
その上部に支持台を載せ、これらをアルミナ製容器に入
れて窒素ガス中で約１１００℃、１時間の変形矯正を行
なった。得られた焼結体は、反りやうねりが矯正された
反りが８０μｍ以下の平坦なものであり、かつ支持台と
も別の焼結体とも固着しておらず、焼結体からの窒化ホ
ウ素粉末の除去も容易であった。Next, 5 sets of 10 aluminum nitride ceramic sintered bodies were stacked on the support base coated with the boron nitride powder, with the boron nitride powder sandwiched between them.
A support was placed on top of it, and these were placed in an alumina container and deformed in nitrogen gas at about 1100° C. for 1 hour. The obtained sintered body is flat with a warp of 80 μm or less, with warpage and waviness corrected, and is not stuck to the support or another sintered body, and the boron nitride powder from the sintered body is It was also easy to remove.
［発明の効果］
以上説明したように本発明による窒化アルミニウムセラ
ミックスの矯正方法によれば、窒化アルミニウムセラミ
ックス焼結体を積み重ねて矯正しても互いに固着するこ
とがないので、作業効率のよい変形矯正が可能である。[Effects of the Invention] As explained above, according to the method for straightening aluminum nitride ceramics according to the present invention, even if aluminum nitride ceramic sintered bodies are stacked and straightened, they do not stick to each other, so deformation straightening can be performed with good work efficiency. is possible.
Claims (2)
持台と窒化アルミニウムセラミックス焼結体間および窒
化アルミニウムセラミックス焼結体間にセラミックス粉
末を介在させて複数段積み重ね、非酸化性雰囲気中で１
５００〜１８００℃で、かつ４００Ｋｇ／ｃｍ＾２以下
の荷重下で矯正することを特徴とする窒化アルミニウム
セラミックスの矯正方法。(1) Aluminum nitride ceramic sintered bodies for substrates are stacked in multiple stages with ceramic powder interposed between the support stand and the aluminum nitride ceramic sintered bodies, and between the aluminum nitride ceramic sintered bodies in a non-oxidizing atmosphere.
A method for straightening aluminum nitride ceramics, which comprises straightening at a temperature of 500 to 1800°C and under a load of 400 kg/cm^2 or less.
ニウム粉末またはアルミナ粉末である特許請求の範囲第
１項記載の窒化アルミニウムセラミックスの矯正方法。(2) The method for straightening aluminum nitride ceramics according to claim 1, wherein the ceramic powder is boron nitride powder, aluminum nitride powder, or alumina powder.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59277702A JPS61158881A (en) | 1984-12-28 | 1984-12-28 | Method of correcting aluminum nitride ceramic |
| DE19853534886 DE3534886A1 (en) | 1984-09-30 | 1985-09-30 | METHOD FOR PRODUCING ALUMINUM NITRIDE CERAMIC PLATES |
| US07/212,130 US4863658A (en) | 1984-09-30 | 1988-06-28 | Aluminum nitride ceramic substrate for copper and method for production thereof |
| US07/646,495 US5165983A (en) | 1984-09-30 | 1991-01-28 | Method for production of aluminum nitride ceramic plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59277702A JPS61158881A (en) | 1984-12-28 | 1984-12-28 | Method of correcting aluminum nitride ceramic |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61158881A true JPS61158881A (en) | 1986-07-18 |
Family
ID=17587119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59277702A Pending JPS61158881A (en) | 1984-09-30 | 1984-12-28 | Method of correcting aluminum nitride ceramic |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61158881A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02212381A (en) * | 1989-02-13 | 1990-08-23 | Suzuki Motor Co Ltd | Superplastic working method of ceramic |
| JP2008074643A (en) * | 2006-09-19 | 2008-04-03 | Tokuyama Corp | Method for burning aluminum nitride |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5654275A (en) * | 1979-10-09 | 1981-05-14 | Matsushita Electric Ind Co Ltd | Manufacture of ceramic sheet |
| JPS5950079A (en) * | 1982-09-10 | 1984-03-22 | 株式会社村田製作所 | Manufacture of ceramic thin sheet |
| JPS59136402A (en) * | 1983-01-26 | 1984-08-06 | Sumitomo Electric Ind Ltd | Sintering method of hard alloy to be sintered |
-
1984
- 1984-12-28 JP JP59277702A patent/JPS61158881A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5654275A (en) * | 1979-10-09 | 1981-05-14 | Matsushita Electric Ind Co Ltd | Manufacture of ceramic sheet |
| JPS5950079A (en) * | 1982-09-10 | 1984-03-22 | 株式会社村田製作所 | Manufacture of ceramic thin sheet |
| JPS59136402A (en) * | 1983-01-26 | 1984-08-06 | Sumitomo Electric Ind Ltd | Sintering method of hard alloy to be sintered |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02212381A (en) * | 1989-02-13 | 1990-08-23 | Suzuki Motor Co Ltd | Superplastic working method of ceramic |
| JP2008074643A (en) * | 2006-09-19 | 2008-04-03 | Tokuyama Corp | Method for burning aluminum nitride |
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