JPH0437174A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPH0437174A JPH0437174A JP14479490A JP14479490A JPH0437174A JP H0437174 A JPH0437174 A JP H0437174A JP 14479490 A JP14479490 A JP 14479490A JP 14479490 A JP14479490 A JP 14479490A JP H0437174 A JPH0437174 A JP H0437174A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- inner diameter
- anode
- cathode
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 abstract description 3
- 230000003746 surface roughness Effects 0.000 description 7
- 238000003754 machining Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は切断、溶接、熱処理などを行うためにレーザ光
を発生させるレーザ発振器に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a laser oscillator that generates laser light for cutting, welding, heat treatment, and the like.
従来の技術
従来のこの種のレーザ発振器の構成について第4図を用
いて説明する。1または複数の放電管からなる放電管群
1には、各放電管ごとに陽1i 21L 。2. Description of the Related Art The structure of a conventional laser oscillator of this type will be described with reference to FIG. In the discharge tube group 1 consisting of one or more discharge tubes, a positive 1i 21L is provided for each discharge tube.
2bと陰極s a + 3 bからなる1組の放電電極
が具備されており、第4図の例では2組の放電管が形成
され2組の放電管は対称に配置されて放電管群1が形成
され、それぞれの放電管に高電圧電源4から電力が供給
される。また、放電管群1の両端には出力ミラー6、終
端ミラー6が配設されて光共振器を形成している。さら
に、放電管群1の両端部分の陰極電極3m、3b近傍と
中央部の陽極電極2a、2b間はほぼE字形の循環管体
7により接続されてガス循環路が形成され、この循環管
体7にはガスを循環させる送風機8や、ガスを冷却する
複数の熱交換器9が配設されている。また、放電管の外
周には放電開始補助管10a。In the example shown in FIG. 4, two sets of discharge tubes are formed, and the two sets of discharge tubes are arranged symmetrically to form discharge tube group 1. are formed, and power is supplied from the high voltage power supply 4 to each discharge tube. Further, an output mirror 6 and an end mirror 6 are arranged at both ends of the discharge tube group 1 to form an optical resonator. Further, the vicinity of the cathode electrodes 3m and 3b at both ends of the discharge tube group 1 and the anode electrodes 2a and 2b at the center are connected by a substantially E-shaped circulation tube body 7 to form a gas circulation path. 7 is provided with a blower 8 for circulating gas and a plurality of heat exchangers 9 for cooling the gas. Further, a discharge starting auxiliary tube 10a is provided on the outer periphery of the discharge tube.
1obが具備されており、陽極21L + 2 bまた
は陰極3m、3bと電気的に接続されている。1ob is provided, and is electrically connected to the anode 21L + 2b or the cathode 3m, 3b.
次に第6図に右側の放電管部の拡大図を示す。Next, FIG. 6 shows an enlarged view of the discharge tube section on the right side.
第5図より明らかなように放電管には陽極21Lと陰極
3mからなる1組の放電電極が具備されており、放電管
管体121Lでつながれて放電部を形成している。また
、放電管の外周には陽極2&または陰極3aへの接続側
端部の内径と切り放し側端部の内径が等しい放電開始補
助管1o&が陽i2aまたは陰極3&と電気的に接続さ
れて配置されている。左側の放電管部は、右側の放電管
部と左右対称に構成されている。As is clear from FIG. 5, the discharge tube is equipped with a set of discharge electrodes consisting of an anode 21L and a cathode 3m, which are connected by a discharge tube body 121L to form a discharge section. Further, on the outer periphery of the discharge tube, a discharge starting auxiliary tube 1o&, in which the inner diameter of the end connected to the anode 2& or the cathode 3a and the inner diameter of the cut-off side end are equal, is arranged so as to be electrically connected to the anode i2a or the cathode 3&. ing. The discharge tube section on the left side is configured symmetrically with the discharge tube section on the right side.
このように構成されているレーザ発振器は、ガス流方向
と放電方向とレーザ光の発振軸が同軸であるため光軸方
向から見たときに、その放電およびその放電によって形
成されるゲイン分布が同心で対称性がよい。従って、出
力されるレーザ光を用いて加工を行う場合加工性能が良
いとされている。In a laser oscillator configured in this way, the gas flow direction, the discharge direction, and the laser beam oscillation axis are coaxial, so when viewed from the optical axis direction, the discharge and the gain distribution formed by the discharge are concentric. It has good symmetry. Therefore, it is said that the machining performance is good when machining is performed using the output laser light.
発明が解決しようとする課題
しかしながら、放電管に高電圧を印加すると、放電開始
補助管の切り放し側光端部が作る電界の影響で、放電開
始補助管の切り放し側光端部において放電領域中央部に
連続的な大きなスl−IJ−マが形成され、放電電流リ
プルが増大し、レーザ出力変動が犬きくなって、加工面
粗度が上り加工品質が悪化するという課題があった。Problem to be Solved by the Invention However, when a high voltage is applied to the discharge tube, due to the influence of the electric field created by the cut-off side light end of the discharge starting auxiliary tube, the central part of the discharge area at the cut-off side light end of the discharge starting auxiliary tube is There were problems in that continuous large slimmers were formed, discharge current ripple increased, laser output fluctuation became sharper, machined surface roughness increased, and machining quality deteriorated.
課題を解決するだめの手段
本発明は上記課題を解決するために、陽極と陰極の間に
ある放電管管体の外側に取り付けられ、陽極または陰極
と電気的に接続された放電開始補助管の切り放し側端部
の内径を、陽極または陰極に接続された取シ付は側端部
の内径より犬きくしたものである。Means for Solving the Problems In order to solve the above problems, the present invention provides a discharge starting auxiliary tube which is attached to the outside of the discharge tube body between the anode and the cathode and is electrically connected to the anode or the cathode. The inner diameter of the free-cut side end is made larger than the inner diameter of the side end with the attachment connected to the anode or cathode.
作用
放電開始補助管を上記の構造とすることにより、放電開
始補助管の切り放し側光端部が作る電界の影響が低減し
、放電領域中央部の連続的なヌトリーマの形成が抑制さ
れ、レーザ出力が安定化し、放電電流リプル率が低減し
て、加工面粗度が下り加工面品質が向上する。By having the working discharge starting auxiliary tube with the above structure, the influence of the electric field created by the cut-off side optical end of the discharge starting auxiliary tube is reduced, the formation of continuous nutrimers in the center of the discharge area is suppressed, and the laser output is reduced. is stabilized, the discharge current ripple rate is reduced, the machined surface roughness is reduced, and the machined surface quality is improved.
実施例
以下、本発明の実施例について第1図を用い、従来例の
第5図と同一部品については同一番号を付して詳しい説
明は省略し、相違点について説明する。第1図は本発明
の一実施例で、レーザ発振器の右側の放電管部の縦断面
を示している。従来例の同一部分を示す第5図との比較
で明らかなように、本発明においては放電開始補助管2
01Lを、その切り放し側端部の内径aが、陽極2IL
への接続端部の内径すより大きくなるような構造にして
いる。第1図において放電開始補助管20&は陽極2m
に接続されているが、陰極3!L側に接続しても、本発
明の効果は同等である。また、第1図は右側の放電管部
だけを示しているが、左側の放電管部は右側と左右対称
に構成されており、本発明の効果は右側と同等である。Embodiment Hereinafter, an embodiment of the present invention will be described using FIG. 1, parts that are the same as those in FIG. 5 of the conventional example will be given the same numbers, detailed explanations will be omitted, and differences will be explained. FIG. 1 shows an embodiment of the present invention, showing a longitudinal cross section of a discharge tube section on the right side of a laser oscillator. As is clear from a comparison with FIG. 5, which shows the same parts of the conventional example, in the present invention, the discharge starting auxiliary tube 2
01L, the inner diameter a of the cut-off side end is the anode 2IL.
The structure is such that the inner diameter of the connecting end is larger than the inner diameter of the connecting end. In Figure 1, the discharge starting auxiliary tube 20 & is anode 2m.
is connected to the cathode 3! Even if it is connected to the L side, the effects of the present invention are the same. Although FIG. 1 only shows the discharge tube section on the right side, the discharge tube section on the left side is configured symmetrically with the right side, and the effects of the present invention are the same as those on the right side.
なお、第1図において11は、放電開始補助管20&の
切り放し側端部が放電管管体12aと同心となるように
、放電開始補助管20aの切り放し側端部を機械的に保
持するだめのスペーサである。In FIG. 1, reference numeral 11 denotes a stopper that mechanically holds the open end of the discharge starting auxiliary tube 20a so that the open end of the discharge starting auxiliary tube 20& is concentric with the discharge tube body 12a. It is a spacer.
第2図に放電開始補助管20aの切り放し側端部の内径
aと陽% 2 aまたは陰極3aへの接続側端部の内径
すとの比a/bと放電電流リプル率の関係を示す。第2
図から明らかなように、a/bの値が1.05を超える
と放電電流リプル率が急激に低下する。一方、第3図は
放電電流リプル率と加工面粗度の関係を示しており、放
電電流リプル率が上ると加工面粗度が上り加工品質が悪
化することを示している。したがって、第2図および第
3図から、放電開始補助管の切り放し側端部の内径aを
、放電開始補助管の陽極または陰極への接続側端部の内
径すより大きくし、a / bの値を1.05より犬き
くすることにより、放電電流リプル率が低下し、加工面
粗度が下って加工面品質が向上することが明らかである
。FIG. 2 shows the relationship between the ratio a/b of the inner diameter a of the open end of the discharge starting auxiliary tube 20a to the inner diameter of the positive % 2 a or the inner diameter of the connected end to the cathode 3a and the discharge current ripple rate. Second
As is clear from the figure, when the value of a/b exceeds 1.05, the discharge current ripple rate decreases rapidly. On the other hand, FIG. 3 shows the relationship between the discharge current ripple rate and the machined surface roughness, and shows that as the discharge current ripple rate increases, the machined surface roughness increases and the machining quality deteriorates. Therefore, from FIGS. 2 and 3, the inner diameter a of the cut-off side end of the discharge starting auxiliary tube is made larger than the inner diameter of the end of the discharge starting auxiliary tube connected to the anode or cathode, and a / b. It is clear that by increasing the value more than 1.05, the discharge current ripple rate decreases, the machined surface roughness decreases, and the machined surface quality improves.
なお、放電電流リプル率は、 で表される。In addition, the discharge current ripple rate is It is expressed as
発明の効果
以上の説明から明らかなように、放電開始補助管の切υ
放し側端部内径と、放電補助管の陽極または陰極への接
続側端部の内径の比を1.05より大きくすることによ
り、放電領域中央部の連続的なストリーマの形成を抑制
し、レーザ出力を安定化させ、放電電流リプル率を低下
させ、加工面粗度を低下させて加工面品質を向上させる
ことができる。Effects of the invention As is clear from the above explanation, the cutting of the discharge starting auxiliary tube υ
By making the ratio of the inner diameter of the free side end and the inner diameter of the connected end of the discharge auxiliary tube to the anode or cathode larger than 1.05, formation of a continuous streamer in the center of the discharge area is suppressed, and the laser It is possible to stabilize the output, reduce the discharge current ripple rate, reduce the roughness of the machined surface, and improve the quality of the machined surface.
第1図は本発明の一実施例を示すレーザ発振器の要部縦
断面図、第2図は放電開始補助管の切り放し側端部の内
径と陽極または陰極への接続側端部の内径の比と放電電
流リプル率の関係を示すグラフ、第3図は放電電流リプ
ル率と加工面粗度との関係を示すグラフ、第4図は従来
のレーザ発振器の全体構成図、第6図は従来のレーザ発
振器の要部の縦断面図である。
1・・・・・・放電管群、2a、2b・・・・・・陽極
、31L。
3b・・・・・・陰極、4・・・・・・高電圧電源、5
・・・・・・出力ミラー、6・・・・・終端ミラー、7
・・・・・・循環管体、8・・・・・送風機、9・・・
・・・熱交換器、10a、10b。
201L・・・・・・放電開始補助管、11・・・・・
・スペーサ、12al12b・・・・・放電管管体。
代理人の氏名 弁理士 粟 野 重 孝 はが1基筒
1 図
肩
ス 公
放電管
放iIl關
す
V 悴
葺合 補 n力 管
第2図
(1> 1.05b
第
図
a二
放電電流リプル牽C%)
放電管群
P1%
陛 極
息電圧電誘
出υミフー
終 實i ミ フ
ti預W停
送FfA憔Fig. 1 is a vertical cross-sectional view of a main part of a laser oscillator showing an embodiment of the present invention, and Fig. 2 is a ratio of the inner diameter of the cut-off side end of the discharge starting auxiliary tube to the inner diameter of the connected end to the anode or cathode. Figure 3 is a graph showing the relationship between discharge current ripple rate and machined surface roughness, Figure 4 is an overall configuration diagram of a conventional laser oscillator, and Figure 6 is a graph showing the relationship between discharge current ripple rate and machined surface roughness. FIG. 3 is a vertical cross-sectional view of the main parts of the laser oscillator. 1... Discharge tube group, 2a, 2b... Anode, 31L. 3b...Cathode, 4...High voltage power supply, 5
...Output mirror, 6...Terminal mirror, 7
...Circulation tube, 8...Blower, 9...
...Heat exchanger, 10a, 10b. 201L...Discharge starting auxiliary tube, 11...
・Spacer, 12al12b...discharge tube tube body. Name of agent: Patent attorney Shigetaka Awano 1 barrel
1 Figure Shoulder Public Discharge Tube Emission IIl Related V 悴葺合 Supplementary Force Tube Figure 2 (1> 1.05b Figure a 2 Discharge Current Ripple C%) Discharge Tube Group P1% Majestic Polar Breath Voltage Electric Induction FfA
Claims (2)
を有する1または複数の放電管からなる放電管群と、こ
の放電管群の両端に配備されるレーザ共振用のミラーと
、前記放電電極の近傍で前記放電管群に接続されこの放
電管群とともにガス循環路を構成する循環管体と、前記
ガス循環路にレーザ媒質としてのガスを循環させる送風
機からなり、前記陽極または陰極に電気的に接続された
放電開始補助管であって、切り放し側端部の内径が陽極
または陰極への接続側端部の内径より大きい放電開始補
助管を、陽極と陰極の間にある放電管の外周に有するレ
ーザ発振器。(1) A discharge tube group consisting of one or more discharge tubes having at least one pair of discharge electrodes consisting of an anode and a cathode, a mirror for laser resonance disposed at both ends of this discharge tube group, and a It consists of a circulation tube connected to the discharge tube group in the vicinity and forming a gas circulation path together with the discharge tube group, and a blower that circulates gas as a laser medium in the gas circulation path, and electrically connected to the anode or cathode. A connected discharge starting auxiliary tube, which has an inner diameter at the open end that is larger than the inner diameter at the end connected to the anode or cathode, on the outer periphery of the discharge tube between the anode and the cathode. laser oscillator.
または陰極への放電開始補助管の接続側端部の内径の比
が1.05より大きい請求項(1)に記載のレーザ発振
器。(2) The laser oscillator according to claim (1), wherein the ratio of the inner diameter of the cut-off side end of the discharge starting auxiliary tube to the inner diameter of the connecting side end of the discharge starting auxiliary tube to the anode or cathode is greater than 1.05. .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14479490A JPH0437174A (en) | 1990-06-01 | 1990-06-01 | Laser oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14479490A JPH0437174A (en) | 1990-06-01 | 1990-06-01 | Laser oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0437174A true JPH0437174A (en) | 1992-02-07 |
Family
ID=15370611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14479490A Pending JPH0437174A (en) | 1990-06-01 | 1990-06-01 | Laser oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0437174A (en) |
-
1990
- 1990-06-01 JP JP14479490A patent/JPH0437174A/en active Pending
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