JPH04361526A - Superconducting magnet device for crystal pullingup device - Google Patents
Superconducting magnet device for crystal pullingup deviceInfo
- Publication number
- JPH04361526A JPH04361526A JP13690591A JP13690591A JPH04361526A JP H04361526 A JPH04361526 A JP H04361526A JP 13690591 A JP13690591 A JP 13690591A JP 13690591 A JP13690591 A JP 13690591A JP H04361526 A JPH04361526 A JP H04361526A
- Authority
- JP
- Japan
- Prior art keywords
- superconducting
- liquid helium
- superconducting magnet
- single crystal
- magnets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 20
- 239000001307 helium Substances 0.000 claims abstract description 89
- 229910052734 helium Inorganic materials 0.000 claims abstract description 89
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 89
- 239000007788 liquid Substances 0.000 claims abstract description 87
- 239000002994 raw material Substances 0.000 claims abstract description 10
- 238000004891 communication Methods 0.000 claims description 39
- 230000002085 persistent effect Effects 0.000 claims description 26
- 230000007704 transition Effects 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 230000003068 static effect Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 238000007670 refining Methods 0.000 claims 1
- 239000002887 superconductor Substances 0.000 claims 1
- 239000004020 conductor Substances 0.000 abstract description 13
- 230000005284 excitation Effects 0.000 description 26
- 230000005347 demagnetization Effects 0.000 description 20
- 239000007789 gas Substances 0.000 description 19
- 230000008020 evaporation Effects 0.000 description 8
- 238000001704 evaporation Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- NMFHJNAPXOMSRX-PUPDPRJKSA-N [(1r)-3-(3,4-dimethoxyphenyl)-1-[3-(2-morpholin-4-ylethoxy)phenyl]propyl] (2s)-1-[(2s)-2-(3,4,5-trimethoxyphenyl)butanoyl]piperidine-2-carboxylate Chemical compound C([C@@H](OC(=O)[C@@H]1CCCCN1C(=O)[C@@H](CC)C=1C=C(OC)C(OC)=C(OC)C=1)C=1C=C(OCCN2CCOCC2)C=CC=1)CC1=CC=C(OC)C(OC)=C1 NMFHJNAPXOMSRX-PUPDPRJKSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Abstract
Description
【０００１】0001
【産業上の利用分野】この発明は、例えば半導体用シリ
コンウエハーの材料となる単結晶シリコンロッド引上げ
に用いる結晶引上げ装置用超電導マグネット装置に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a superconducting magnet device for use in a crystal pulling device used for pulling up single crystal silicon rods, which are used as materials for semiconductor silicon wafers, for example.
【０００２】0002
【従来の技術】高温で溶融させたシリコンの原料からシ
リコン単結晶を成長させて引上げ、単結晶シリコンロッ
ドを製造する際に、溶融させたシリコン原料に均一な強
い静磁界を印加すると、溶融容器からの不純物溶出拡散
の原因となる対流が抑制され、良質の単結晶シリコンロ
ッドが得られる。これは本出願人が先に出願した「結晶
成長法」（特願昭５５−８５７８）で示されており、Ｎ
ＣＺ法と呼ばれ広く使用されている。[Prior Art] When a silicon single crystal is grown and pulled from a silicon raw material melted at high temperature to produce a single crystal silicon rod, when a uniform strong static magnetic field is applied to the melted silicon raw material, the melting vessel Convection, which causes impurities to be eluted and diffused, is suppressed, and a high-quality single crystal silicon rod can be obtained. This was shown in the "Crystal Growth Method" (Japanese Patent Application No. 55-8578) filed earlier by the present applicant, and N
It is called the CZ method and is widely used.
【０００３】この発明は上記溶融させたシリコン原料に
均一な強い静磁界を印加するための超電導マグネット装
置に関するものであり、図７〜図１０は従来の単結晶引
上げ装置用超電導マグネット装置を示す。図７において
１は互いに対向する１対の超電導マグネット、２は超電
導マグネット１の励消磁を行うための電流リード口出し
や液体ヘリウムの供給、さらには蒸発気化したヘリウム
ガスの排気を行う配管を通すサービスポート、３は液体
ヘリウムの蒸発消費を抑えるためのシールド冷凍機、４
は超電導マグネット１の架台、６は超電導マグネット開
口内に設けられた磁性体の磁極、７は磁極６間をつなぎ
磁束を還流する磁性体ヨークを示す。８は２つの超電導
マグネット１間で溶融容器の配置される空間であり、均
一な一方向の強い静磁界の必要な空間を示す。９は空間
８での静磁界の方向を示すものである。１０は超電導マ
グネット１と磁性体ヨーク７を位置決めして固定する固
定金具である。The present invention relates to a superconducting magnet device for applying a uniform strong static magnetic field to the molten silicon raw material, and FIGS. 7 to 10 show a conventional superconducting magnet device for a single crystal pulling device. In Fig. 7, 1 is a pair of superconducting magnets facing each other, and 2 is a service that connects current leads for excitation and demagnetization of the superconducting magnet 1, supplying liquid helium, and piping for exhausting evaporated helium gas. Port 3 is a shield refrigerator to suppress evaporative consumption of liquid helium, 4
Reference numeral 6 indicates a frame of the superconducting magnet 1, 6 indicates a magnetic pole of a magnetic material provided in the opening of the superconducting magnet, and 7 indicates a magnetic yoke that connects the magnetic poles 6 and circulates magnetic flux. 8 is a space in which a melting container is placed between two superconducting magnets 1, and indicates a space that requires a uniform, unidirectional, strong static magnetic field. 9 indicates the direction of the static magnetic field in the space 8. Reference numeral 10 denotes a fixture for positioning and fixing the superconducting magnet 1 and the magnetic yoke 7.
【０００４】図８はサービスポート２を含む垂直断面を
示した図であり、図において符号１，２，６，７，８，
９は図７と同一部分を示す。符号１１〜１５は超電導マ
グネット１の構成を示したものであり、１１は真空槽、
１２は第１熱シールド、１３は第２熱シールド、１４は
液体ヘリウム槽、１５は液体ヘリウムにより極低温に保
たれたソレノイド状の超電導コイル、１６は液体ヘリウ
ムを示す。FIG. 8 is a diagram showing a vertical cross section including the service port 2, and in the figure, reference numerals 1, 2, 6, 7, 8,
9 shows the same part as FIG. Reference numerals 11 to 15 indicate the configuration of the superconducting magnet 1, and 11 is a vacuum chamber;
12 is a first heat shield, 13 is a second heat shield, 14 is a liquid helium tank, 15 is a solenoid-shaped superconducting coil kept at an extremely low temperature by liquid helium, and 16 is liquid helium.
【０００５】図９はシールド冷凍機３を含む斜め方向の
断面を示した図であり、図において符号１，１１，１２
，１３，１４，１５，１６，３，６，７，８，９は図７
および図８と同一部分を示す。５１，５２はシールド冷
凍機３の温度の異なる冷却部分（コールドヘッド）を示
し、５２の冷却部分は５１の冷却部分より低温となる。
コールドヘッド５１，５２は各々熱シールド１２，１３
に熱的に結合された構成となる。FIG. 9 is a diagram showing a diagonal cross section including the shield refrigerator 3, and in the figure, reference numerals 1, 11, 12
, 13, 14, 15, 16, 3, 6, 7, 8, 9 are shown in Figure 7
and shows the same parts as FIG. Reference numerals 51 and 52 indicate cooling parts (cold heads) of the shield refrigerator 3 having different temperatures, and the cooling part 52 has a lower temperature than the cooling part 51. Cold heads 51 and 52 are heat shields 12 and 13, respectively.
The structure is thermally coupled to the
【０００６】図１０は超電導マグネットの電気回路図を
示したものであり、図において１５はソレノイド状の超
電導コイル、２１は超電導コイル１５を励消磁する際外
部電源と超電導コイル１５をつなぐ常電導導体の励磁リ
ード、２３は超電導コイル１５の両端を超電導状態で短
絡若しくは解放する永久電流スイッチ、２４は永久電流
スイッチ２３をオン・オフするための常電導導体の制御
リード、２５は万一超電導コイル１５が常電導転移故障
した際に発生電圧の抑制のために設けられた低抵抗短絡
保護素子、２６は万一鉄体などの吸着事故により超電導
マグネット１を緊急に消磁する必要が生じた場合、超電
導コイル１５を加熱し常電導転移させ電流減衰させるた
めのヒータ、１４は上記回路が収納させる液体ヘリウム
槽を示す。FIG. 10 shows an electric circuit diagram of a superconducting magnet. In the figure, 15 is a solenoid-shaped superconducting coil, and 21 is a normal conductor that connects an external power source and the superconducting coil 15 when excitation and demagnetization of the superconducting coil 15 is performed. 23 is a persistent current switch that short-circuits or releases both ends of the superconducting coil 15 in a superconducting state, 24 is a control lead of a normal conductor for turning on and off the persistent current switch 23, and 25 is a control lead of a normal conductor in case the superconducting coil 15 A low-resistance short-circuit protection element 26 is provided to suppress the voltage generated when the normal conduction transition occurs. A heater is used to heat the coil 15 to bring it into normal conduction state and attenuate the current. Reference numeral 14 indicates a liquid helium bath in which the circuit is housed.
【０００７】次に動作について説明する。第１に超電導
マグネット１の通常の励消磁について説明する。液体ヘ
リウム槽１４内に収納された超電導コイル１５および永
久電流スイッチ２３は、サービスポート２より液体ヘリ
ウム槽１４内に注液された液体ヘリウム１６により４．
２Ｋの極低温状態に保持され超電導状態となっている。
いま、永久電流スイッチ２３のオン・オフ制御リード２
４に必要な電流を流し永久電流スイッチ２３を開き、超
電導コイル１５の励磁リード２１より所定の電流を超電
導コイル１５に供給する。然る後、制御リード２４の電
流を切り、永久電流スイッチ２３を閉じ、超電導コイル
１５の両端を超電導短絡する。その後、励磁リード２１
の電流をゼロとすると、超電導コイル１５の電流は減ず
ることなく永久電流スイッチ２３を介して流れる永久電
流ループを形成し、電源からの電流供給を受けることな
く磁界発生を継続することとなる。これを永久電流モー
ド運転という。この従来装置では、２つの超電導マグネ
ット１で励磁率が異なる場合、２つの超電導マグネット
１の磁界出力が異なり空間８の磁界均一度が悪くなるた
め、同一電流の励磁となるように励磁電源の出力を調整
し、励磁する必要がある。なお、超電導マグネットの通
常の消磁作業について上記手順を逆に行うこととなる。Next, the operation will be explained. First, normal excitation and demagnetization of the superconducting magnet 1 will be explained. The superconducting coil 15 and persistent current switch 23 housed in the liquid helium tank 14 are energized by the liquid helium 16 injected into the liquid helium tank 14 from the service port 2.
It is maintained at an extremely low temperature of 2K and is in a superconducting state. Now, the on/off control lead 2 of the persistent current switch 23
4, the persistent current switch 23 is opened, and a predetermined current is supplied to the superconducting coil 15 from the excitation lead 21 of the superconducting coil 15. After that, the current in the control lead 24 is cut off, the persistent current switch 23 is closed, and both ends of the superconducting coil 15 are short-circuited. After that, the excitation lead 21
When the current in the superconducting coil 15 is set to zero, a persistent current loop is formed in which the current in the superconducting coil 15 flows through the persistent current switch 23 without decreasing, and the magnetic field continues to be generated without being supplied with current from the power source. This is called persistent current mode operation. In this conventional device, if the excitation rates of the two superconducting magnets 1 are different, the magnetic field output of the two superconducting magnets 1 will be different and the magnetic field uniformity in the space 8 will be poor, so the output of the excitation power source is adjusted so that the same current is excited. It is necessary to adjust and excite. Note that the above procedure is performed in reverse for normal demagnetization work for superconducting magnets.
【０００８】第２に超電導マグネット１の緊急消磁につ
いて説明する。鉄体等の吸着事故により超電導マグネッ
ト１を緊急に消磁する必要が生じた場合、超電導コイル
１５に近接して設けられたヒータ２６に通電し、超電導
コイル１５を加熱して常電導転移せしめ、発生した抵抗
により永久電流ループ内に封じ込められた電流を減衰さ
せる。この従来装置では、２つの超電導マグネット１の
緊急消磁を行うためのヒータ通電に時間的な差異が生じ
た場合、先に消磁された超電導マグネット１の電流減衰
によりもう一方の超電導マグネット１に誘導電流が誘起
し、超電導コイルの通電電流が増加し、磁性体ヨークと
の間の常規運転時以上の磁気吸引力の発生や、コイルの
径方向電磁力が増大しコイル自体破損する可能性がある
ため、これを防止するよう同時にヒータ電流を通電して
緊急消磁を行う。Second, emergency demagnetization of the superconducting magnet 1 will be explained. When it is necessary to urgently demagnetize the superconducting magnet 1 due to an accident of adsorption of iron objects, etc., the heater 26 installed close to the superconducting coil 15 is energized to heat the superconducting coil 15 and cause it to transition to normal conductivity. The resistor attenuates the current confined within the persistent current loop. In this conventional device, when there is a time difference in the heater energization for emergency demagnetization of two superconducting magnets 1, the current attenuation of the superconducting magnet 1 that was demagnetized first causes an induced current in the other superconducting magnet 1. is induced, the current passing through the superconducting coil increases, and a magnetic attraction force greater than that during normal operation is generated between the superconducting yoke and the radial electromagnetic force of the coil increases, which may damage the coil itself. To prevent this, emergency demagnetization is performed by simultaneously applying heater current.
【０００９】第３に超電導コイル１５の常電導転移故障
時の保護について説明する。超電導コイル１５が何等か
の理由、例えば、微小ストップしたときの発熱等により
常電導転移故障した場合、常電導転移した部分の抵抗の
発生および常電導部の拡大により永久電流ループを流れ
る電流は急速な電流減衰を起こす。この急速な電流減衰
により超電導コイル１５に、例えば数百Ｖの誘導電圧Ｌ
・ｄｉ／ｄｔが発生する（ただし、Ｌは超電導コイルの
インダクタンス、ｄｉ／ｄｔは電流の減衰度）。このよ
うな電圧の発生に対し任意の２点間を低抵抗の保護素子
２５で短絡し、高電圧の発生を抑制することにより絶縁
破壊を防止する。図１０の保護素子２５はターンオン電
圧が液体ヘリウム液中温度４．２Ｋで数１０Ｖあり、通
常の励消磁の電流増減速度で発生するインダクタンス電
圧ではターンオンすることなく励消磁がなされるが、常
電導転移故障時にはターンオンして上記保護動作を行う
。Thirdly, protection of the superconducting coil 15 in the event of a normal conduction transition failure will be explained. If the superconducting coil 15 fails due to a normal conduction transition due to some reason, such as heat generation when it stops slightly, the current flowing through the persistent current loop will rapidly increase due to the generation of resistance in the part where the normal conduction transition has occurred and the expansion of the normal conduction part. This causes significant current attenuation. This rapid current attenuation causes an induced voltage L of several hundreds of volts in the superconducting coil 15, for example.
・di/dt is generated (L is the inductance of the superconducting coil, and di/dt is the degree of current attenuation). In response to the generation of such voltage, any two points are short-circuited using a low resistance protection element 25 to suppress the generation of high voltage, thereby preventing dielectric breakdown. The turn-on voltage of the protection element 25 in FIG. 10 is several tens of V at a temperature of 4.2 K in liquid helium, and excitation and demagnetization are performed without turning on with the inductance voltage generated at the current increase/decrease rate of normal excitation and demagnetization. When a transfer failure occurs, it is turned on and performs the above protective operation.
【００１０】第４に液体ヘリウムの供給および蒸発ガス
の排気について説明する。液体ヘリウムの供給および蒸
発ガスの排気は、サービスポート２に設けられた外部と
液体ヘリウム槽１４をつなぐ配管により行う。従来装置
の図示においては詳細構成を示さなかったが、外気が液
体ヘリウム槽１４内に侵入すると、空気中の酸素および
窒素が氷結し、上記配管を詰めせる恐れがあるため、通
常、液体ヘリウムの供給用配管と蒸発ガスの排気配管は
別配管とされ、供給用配管は液体ヘリウム供給時以外は
封止される。また、蒸発ガスの排気配管には通常の蒸発
ガス排気経路中に逆止弁が設けられ、大気の侵入がない
ようにされる一方、万一の常電導転移故障時に短時間に
発生する大量の蒸発ガスを液体ヘリウム槽１４の内圧が
液体ヘリウム槽を破壊する圧力に上昇することのないよ
う、排気するための放圧装置を有する排気経路が上記逆
止弁を有する通常の排気経路と並列に取付けられ、故障
時発生ガスを排気する。Fourth, the supply of liquid helium and the exhaust of evaporated gas will be explained. The supply of liquid helium and the exhaust of evaporated gas are performed by piping that connects the outside and the liquid helium tank 14 provided at the service port 2 . Although the detailed structure was not shown in the illustration of the conventional device, if outside air enters the liquid helium tank 14, the oxygen and nitrogen in the air may freeze and clog the pipes, so liquid helium is usually The supply pipe and the evaporative gas exhaust pipe are separate pipes, and the supply pipe is sealed except when liquid helium is being supplied. In addition, a check valve is installed in the evaporative gas exhaust piping in the normal evaporative gas exhaust path to prevent atmospheric air from entering. In order to prevent the internal pressure of the liquid helium tank 14 from rising to a pressure that would destroy the liquid helium tank, an exhaust path having a pressure relief device for exhausting evaporated gas is arranged in parallel with the normal exhaust path having the above-mentioned check valve. It is installed to exhaust gas generated in the event of a failure.
【００１１】第５にシールド冷凍機３の液体ヘリウム蒸
発消費の低減について説明する。２つの超電導マグネッ
ト１にそれぞれ取付けられたシールド冷凍機３は、例え
ばヘリウムガスを用いた断熱膨張による吸熱サイクル（
ギフォード・マクマホンサイクル等）により超電導マグ
ネット１の熱シールド１２，１３を吸熱冷却する。この
結果、外部から液体ヘリウム槽１４への熱侵入が低減さ
れ、液体ヘリウム１６の蒸発消費が抑制されることとな
る。Fifth, the reduction in liquid helium evaporation consumption of the shield refrigerator 3 will be explained. The shield refrigerator 3 attached to each of the two superconducting magnets 1 performs an endothermic cycle (
The heat shields 12 and 13 of the superconducting magnet 1 are endothermically cooled using a Gifford-McMahon cycle, etc.). As a result, heat intrusion from the outside into the liquid helium tank 14 is reduced, and evaporative consumption of the liquid helium 16 is suppressed.
【００１２】0012
【発明が解決しようとする課題】従来の結晶引上げ装置
用超電導マグネット装置は以上のように構成されている
ので、第１に励磁において、２つの超電導マグネットを
正確に同一電流で励磁しなければならず、２台の励磁電
源で励消磁する際には２台の励磁電源の出力調整を行う
必要があり、また、１台の励磁電源で並列あるいは直列
に励磁し電流を一同に設定する際には２つの超電導マグ
ネット間に外部結線を行う必要が生じるという繁雑さが
あった。[Problems to be Solved by the Invention] Since the conventional superconducting magnet device for a crystal pulling device is constructed as described above, firstly, in excitation, two superconducting magnets must be excited with exactly the same current. First, when excitation/demagnetization is performed using two excitation power supplies, it is necessary to adjust the output of the two excitation power supplies, and when excitation is performed in parallel or in series with one excitation power supply and the current is set at the same time, it is necessary to adjust the output of the two excitation power supplies. However, this method is complicated in that it is necessary to make an external connection between the two superconducting magnets.
【００１３】第２には、緊急消磁の際に緊急消磁用ヒー
タを２つの超電導マグネット間で同時に通電する必要が
あり、２台のヒータ電源を用いる場合、２台のヒータ電
源間の協調が、また、１台のヒータ電源で直列若しくは
並列に通電する場合は超電導マグネット間に外部結線を
行う必要が生じるという繁雑さがあった。Second, during emergency degaussing, it is necessary to energize the emergency degaussing heater between two superconducting magnets at the same time, and when two heater power supplies are used, the coordination between the two heater power supplies is difficult. Furthermore, when power is supplied in series or in parallel using one heater power source, it is necessary to make external connections between the superconducting magnets, which is complicated.
【００１４】第３には、２つの超電導マグネットのうち
、一方の超電導マグネットの超電導コイルに常電導転移
故障が発生した場合、常電導転移故障した超電導コイル
は抵抗の発生に伴い保護素子を短絡として速やかに電流
が減衰する。もう一方の超電導マグネットの超電導コイ
ルには上記常電導転移故障の電流減衰による誘導電流が
誘起されコイル電流が増加し、これに伴う磁界の上昇に
よりこの超電導コイルと隣接する磁性体ヨークとの間の
磁気吸引力が増大する。このためコイル支持構造を強化
する必要があるという問題があった。またコイルの径方
向電磁力も増大するので、コイルが破損しないようにバ
インド線等でコイルを巻回補強することも必要となる問
題があった。Thirdly, when a normal conduction transition failure occurs in the superconducting coil of one of the two superconducting magnets, the superconducting coil that has the normal conduction transition failure short-circuits the protective element due to the generation of resistance. The current attenuates quickly. An induced current is induced in the superconducting coil of the other superconducting magnet due to the current attenuation due to the above-mentioned normal conduction transition fault, and the coil current increases, and the accompanying rise in the magnetic field causes a gap between this superconducting coil and the adjacent magnetic yoke. Magnetic attraction increases. Therefore, there was a problem in that the coil support structure needed to be strengthened. Furthermore, since the radial electromagnetic force of the coil also increases, there is a problem in that it is necessary to wind and reinforce the coil with binding wire or the like to prevent the coil from being damaged.
【００１５】第４に、２つの超電導マグネットがそれぞ
れヘリウム槽を有することから、注液作業についてもそ
れぞれ独立に行うという繁雑さがあった。Fourthly, since each of the two superconducting magnets has a helium tank, it is complicated to perform the liquid injection work independently.
【００１６】第５に、２つの超電導マグネット静磁界の
必要な空間８の中心を通る鉛直方向の面に対して全く対
称なマグネットとして設計された場合でも、マグネット
製作に用いた材料の特性、例えば表面状態の差による熱
幅射率の差や、製作上の寸法のバラッキによる熱伝達経
路の長さの若干の差、および真空槽の真空度の差により
断熱特性に差が生じる。このため、２つの超電導マグネ
ットに同時に液体ヘリウム槽上限まで液体ヘリウムを供
給しても各々のマグネットで単位時間当りの蒸発消費量
が異なるため、以後の供給周期が２つのマグネットで異
なり、各々のマグネットに対して別々の日に液体ヘリウ
ム供給を行うという繁雑さがあった。Fifth, even if the magnet is designed to be completely symmetrical with respect to the vertical plane passing through the center of the space 8 where the static magnetic field of the two superconducting magnets is required, the characteristics of the material used to manufacture the magnet, e.g. Differences in thermal insulation properties occur due to differences in thermal emissivity due to differences in surface conditions, slight differences in the length of heat transfer paths due to variations in manufacturing dimensions, and differences in the degree of vacuum of the vacuum chamber. Therefore, even if liquid helium is supplied to two superconducting magnets at the same time up to the upper limit of the liquid helium tank, the evaporation consumption per unit time is different for each magnet, so the subsequent supply cycle is different for the two magnets, and each magnet There was the complexity of supplying liquid helium on different days.
【００１７】この発明は上記のような問題点を解消する
ためになされたもので、第１に、２つの超電導コイルを
超電導マグネット外部の直並列結線をすることなく、１
台の電源で同一電流に励磁することを可能とする。第２
に、緊急消磁用ヒータの通電に際しても、上記励消磁同
様、２つのヒータを超電導マグネット外部の直並列結果
線をすること無く、１台の電源による同時通電を可能と
する。第３に、２つの超電導コイルのいずれか一方に常
電導転移故障が発生した場合でも、他方の超電導コイル
のコイル電流の増加がなく、磁気吸引力やコイルの電磁
力の増大を生起しないものとする。第４に、２つの超電
導マグネットが、それぞれ互いに異なる液体ヘリウムの
蒸発消費特性を有していても、１つの供給周期で液体ヘ
リウムの供給が行えるようにする等の機能を有する結晶
引上げ装置用超電導マグネット装置を得ることを目的と
する。The present invention was made to solve the above-mentioned problems. First, two superconducting coils can be connected in parallel without connecting them in series and parallel outside the superconducting magnet.
It is possible to excite the same current using the same power supply. Second
Furthermore, when energizing the emergency degaussing heater, it is possible to simultaneously energize the two heaters using one power source, without having to connect serial and parallel result lines outside the superconducting magnet, as in the excitation and demagnetization described above. Third, even if a normal conduction transition failure occurs in either one of the two superconducting coils, the coil current in the other superconducting coil will not increase, and the magnetic attraction force and electromagnetic force of the coil will not increase. do. Fourth, even if two superconducting magnets have different evaporation and consumption characteristics of liquid helium, a superconducting material for crystal pulling equipment that has a function of supplying liquid helium in one supply cycle, etc. The purpose is to obtain a magnet device.
【００１８】[0018]
【課題を解決するための手段】この発明に係る単結晶引
上げ装置用超電導マグネット装置は、溶融した原料を挟
む２つの超電導マグネットの液体ヘリウム槽を２本の断
熱構造を有する連通管で連通し、この連通管の断熱構造
の各々は超電導マグネットの対応する各々の断熱構造と
熱的に接続され、上記連通管内は液体ヘリウムおよび液
体ヘリウムの蒸発ガスが流通できるものとする。[Means for Solving the Problems] A superconducting magnet device for a single crystal pulling device according to the present invention connects liquid helium tanks of two superconducting magnets sandwiching a molten raw material through two communicating pipes having a heat-insulating structure. Each of the heat insulating structures of the communicating tube is thermally connected to the corresponding heat insulating structure of the superconducting magnet, and liquid helium and evaporated gas of the liquid helium can flow through the communicating tube.
【００１９】また、上記連通管内を通る超電導導体若し
くは常電導導体で２つの超電導マグネットが電気的に結
線されるようにしたものである。Further, the two superconducting magnets are electrically connected by a superconducting conductor or a normal conducting conductor passing through the communication pipe.
【００２０】[0020]
【作用】この発明においては、２つの超電導マグネット
間を連通する連通管は２つの超電導マグネット間で液体
ヘリウムおよび液体ヘリウム蒸発ガスの流通を可能とし
たので、液体ヘリウムの供給を２つの超電導マグネット
に対して一括して行うこともでき、２つの超電導マグネ
ット間に液体ヘリウムの蒸発消費特性に差があっても１
つの注液周期で液体ヘリウムの供給を行うことができる
。[Operation] In this invention, the communication pipe that communicates between the two superconducting magnets allows liquid helium and liquid helium evaporated gas to flow between the two superconducting magnets. It can also be performed all at once, even if there is a difference in the evaporation consumption characteristics of liquid helium between two superconducting magnets.
Liquid helium can be supplied in one injection period.
【００２１】また、２つの超電導マグネットの液体ヘリ
ウム槽を結ぶ連通管を設け、この連通管により２つの超
電導マグネットが電気的に結線され、この結線により各
々のマグネットの超電導コイルが１つの励磁電源により
同一電流に励磁される。また、緊急消磁の際は２つの超
電導マグネットが一方のマグネットを消磁すると、他方
のマグネットも同時に消磁される。[0021] Furthermore, a communication pipe is provided that connects the liquid helium baths of the two superconducting magnets, and the two superconducting magnets are electrically connected through this communication pipe, so that the superconducting coils of each magnet are powered by one excitation power source. Excited by the same current. Further, in the case of emergency demagnetization, when one of the two superconducting magnets is demagnetized, the other magnet is also demagnetized at the same time.
【００２２】さらに、常電導転移故障に対する保護素子
による短絡回路が上記連通管を通して２つの超電導マグ
ネットの各々の超電導コイルの対称点間を結んで形成さ
れる。このため常電導転移故障時、導電導転移故障発生
マグネットからもう一方のマグネットへの誘導による電
流集中がなく、磁性体ヨーク間に働く磁気吸引力および
コイル径方向電磁力の増大はない。Furthermore, a short circuit by a protection element against a normal conduction transition fault is formed by connecting the symmetrical points of the superconducting coils of each of the two superconducting magnets through the communication tube. Therefore, when a normal conduction transition fault occurs, there is no concentration of current due to induction from the magnet where the conduction transition fault has occurred to the other magnet, and there is no increase in the magnetic attraction force and coil radial electromagnetic force acting between the magnetic yokes.
【００２３】[0023]
【実施例】実施例１．以下、この発明の一実施例を図１
〜図４について説明する。図１において、符号１，２，
３，６，７，８，９は図７と同一部分を示す。３０は２
つの超電導マグネット１の液体ヘリウム槽を連通する上
下２本の連通管である。３１は連通管３０に設けられた
可撓部である。なお、本図では２つの超電導マグネット
１が連通管３０で電気的，熱的に接続されているので、
一方の超電導マグネット１のサービスポートおよびシー
ルド冷凍機は他方の超電導マグネットに集約されている
。[Example] Example 1. An embodiment of this invention is shown below in Figure 1.
~ Figure 4 will be explained. In FIG. 1, symbols 1, 2,
3, 6, 7, 8, and 9 indicate the same parts as in FIG. 30 is 2
These are two upper and lower communication pipes that communicate the liquid helium tanks of the two superconducting magnets 1. 31 is a flexible portion provided in the communication pipe 30. In addition, in this figure, two superconducting magnets 1 are electrically and thermally connected by a communication tube 30, so
The service port and shield refrigerator of one superconducting magnet 1 are integrated in the other superconducting magnet.
【００２４】図２はサービスポート２と連通管３０を仮
に同一平面上にあるものとして、この平面での断面図を
示したものであり、符号１，２，６，７，８，９，１１
，１２，１３，１４，１５は図８と同一部分を示す。
３１は連通管３０に設けられた可撓部を示す。連通管３
０の３２は真空槽、３３は第１熱シールド、３４は第２
熱シールド、３５は液体ヘリウム槽で、これらはそれぞ
れ超電導マグネット１の真空槽１１、第１熱シールド１
２、第２熱シールド１３、液体ヘリウム槽１４に接続さ
れている。液体ヘリウム槽３５内は液体ヘリウム１６お
よび液体ヘリウムの蒸発ガスが流通し、本図には図示さ
れていないが、２つの超電導マグネットを電気的に接続
するリードが通っている。FIG. 2 shows a cross-sectional view of the service port 2 and the communication pipe 30 on the same plane, with reference numerals 1, 2, 6, 7, 8, 9, and 11.
, 12, 13, 14, and 15 indicate the same parts as in FIG. Reference numeral 31 indicates a flexible portion provided in the communication pipe 30. Communication pipe 3
0, 32 is a vacuum chamber, 33 is the first heat shield, 34 is the second
The heat shield 35 is a liquid helium tank, which are the vacuum tank 11 of the superconducting magnet 1 and the first heat shield 1, respectively.
2. It is connected to the second heat shield 13 and the liquid helium tank 14. Inside the liquid helium tank 35, liquid helium 16 and evaporated gas of liquid helium flow, and although not shown in this figure, a lead electrically connects the two superconducting magnets.
【００２５】図３はシールド冷凍機３と連通管３０を仮
に同一平面上にあるものとして、この平面での断面図を
示したものであり、符号１，３，６，７，８，９，１１
，１２，１３，１４，１５，１６，５１，５２は図９と
同一部分を示す。また、符号３０，３１，３２，３３，
３４，３５は図２に示した同一部分を示す。図において
コールドヘッド５１，５２は一方の超電導マグネット１
の熱シールド１２，１３に熱的に接合されており、この
熱シールドは連通管３０の熱シールド３３，３４を介し
て他方の超電導マグネット１の熱シールドにつながった
構成となっている。FIG. 3 shows a cross-sectional view of the shield refrigerator 3 and the communication pipe 30 on the same plane, and the symbols 1, 3, 6, 7, 8, 9, 11
, 12, 13, 14, 15, 16, 51, and 52 indicate the same parts as in FIG. Also, codes 30, 31, 32, 33,
34 and 35 indicate the same parts as shown in FIG. In the figure, cold heads 51 and 52 are one of the superconducting magnets 1
This heat shield is connected to the heat shield of the other superconducting magnet 1 via the heat shields 33 and 34 of the communication tube 30.
【００２６】図４は超電導マグネットの電気回路図を示
したものであり、図において、符号１４，１５，２１，
２３，２４，２５，２６は図１０と同一部分を示す。ま
た、３５は２つの超電導マグネットを連通する連通管３
０の液体ヘリウム槽を、４１は２つの超電導マグネット
１の超電導コイル１５を直列に結線する超電導リード、
４２は２つの超電導マグネット１を永久電流スイッチ２
３で短絡するための超電導リード、４３は超電導リード
の接続点を示し、超電導リード４３は液体ヘリウム槽１
４の液体ヘリウムレベルの下限高さより低い位置に設け
られた連通管を通っている。常電導転移故障に対する保
護素子２５は、２つの超電導マグネットの超電導コイル
１５の対称点を常電導リード４４を用いて接続し、接続
リード４４は液体ヘリウム槽１４の液体ヘリウムレベル
の上限付近以上の位置に設けられた連通管を通っている
。緊急消磁用のヒータ２６は保護素子２５により超電導
コイル１５を含み形成された各閉ループに１個ずつ設け
られている。FIG. 4 shows an electric circuit diagram of a superconducting magnet, and in the figure, reference numerals 14, 15, 21,
23, 24, 25, and 26 indicate the same parts as in FIG. In addition, 35 is a communication pipe 3 that communicates the two superconducting magnets.
0 is a liquid helium tank, 41 is a superconducting lead connecting the superconducting coils 15 of two superconducting magnets 1 in series,
42 connects two superconducting magnets 1 to a persistent current switch 2
3 indicates a superconducting lead for short-circuiting, 43 indicates a connection point of the superconducting lead, and the superconducting lead 43 is connected to the liquid helium tank 1.
It passes through a communication pipe installed at a position lower than the lower limit height of the liquid helium level in No. 4. The protection element 25 against a normal conduction transition fault connects the symmetrical points of the superconducting coils 15 of two superconducting magnets using a normal conductive lead 44, and the connecting lead 44 is located at a position near or above the upper limit of the liquid helium level in the liquid helium tank 14. It passes through a communication pipe installed in the One heater 26 for emergency demagnetization is provided in each closed loop formed by the protection element 25 and including the superconducting coil 15 .
【００２７】次に動作について説明する。第１に超電導
マグネットの通常の励消磁について説明する。２つの超
電導マグネット１の液体ヘリウム槽１４内に収納された
２つの超電導コイル１５が超電導リード４１で直列に結
線され、また２つの超電導コイル１５の両端が永久電流
スイッチ２３と超電導リード４３で超電導ループとして
短絡、開放できるようになっている。従って、まず永久
電流スイッチ２３のオンオフ制御リード２４に必要な電
流を流し、永久電流スイッチ２３を開く。次に超電導コ
イル１５の励磁リード２１より所定の電流を２つの超電
導コイル１５に供給する。このとき、２つの超電導コイ
ル１５は超電導リード４１により直列に接続されている
ので、１つの励磁電源で２つの超電導マグネット１間に
外部結線を行うことなく、２つの超電導コイル１５は同
一電流で励磁される。次に制御リード２４の電流を切り
、永久電流スイッチ２３を閉じ、２つの超電導コイル１
５の両端を超電導リード４２を介して超電導短絡する。
その後、励磁リード２１の電流をゼロとすると、超電導
コイル１５の電流は減ずることなく、永久電流スイッチ
２３および超電導リード４１，４２を介して２つの超電
導コイル１５を直列に流れる永久電流ループを形成し、
電源からの電流供給を受けることなく磁界発生を継続す
ることとなる。また、消磁手順については上記励磁手順
を逆に行う。Next, the operation will be explained. First, normal excitation and demagnetization of a superconducting magnet will be explained. Two superconducting coils 15 housed in liquid helium baths 14 of two superconducting magnets 1 are connected in series with superconducting leads 41, and both ends of the two superconducting coils 15 are connected to a persistent current switch 23 and a superconducting lead 43 to form a superconducting loop. It is designed to be short-circuited and open-circuited. Therefore, first, a necessary current is applied to the on/off control lead 24 of the persistent current switch 23, and the persistent current switch 23 is opened. Next, a predetermined current is supplied to the two superconducting coils 15 from the excitation leads 21 of the superconducting coils 15 . At this time, since the two superconducting coils 15 are connected in series by the superconducting leads 41, the two superconducting coils 15 are excited with the same current without making an external connection between the two superconducting magnets 1 with one excitation power source. be done. Next, the current in the control lead 24 is cut off, the persistent current switch 23 is closed, and the two superconducting coils 1
5 are superconducting short-circuited via superconducting leads 42. Thereafter, when the current in the excitation lead 21 is set to zero, the current in the superconducting coil 15 does not decrease, forming a persistent current loop that flows in series through the two superconducting coils 15 via the persistent current switch 23 and the superconducting leads 41 and 42. ,
The magnetic field continues to be generated without receiving current from the power source. Further, for the demagnetization procedure, the above excitation procedure is performed in reverse.
【００２８】なお、２つの超電導マグネット１の超電導
リード４１，４２による接続については、超電導導体同
志を圧着やスポット溶接などを用い、接続点４３で超電
導特性が失われることのないよう接続する。しかしなが
ら接続点４３では環境磁界の強い条件において超電導リ
ードの超電導導体より低い通電電流で常電導転移すると
いう特性の劣化が生じる。従って磁界の強い超電導コイ
ル１５の付近を避け比較的磁界の低い連通管内に接続点
４３を配置し、常電導転移することのないようにする。Regarding the connection of the two superconducting magnets 1 using the superconducting leads 41 and 42, the superconducting conductors are connected to each other by crimping, spot welding, or the like so that the superconducting properties are not lost at the connection point 43. However, at the connection point 43, under conditions of a strong environmental magnetic field, the superconducting lead undergoes deterioration in its characteristics such that it undergoes a normal conduction transition at a lower current than the superconducting conductor of the superconducting lead. Therefore, the connection point 43 is placed in the communicating tube where the magnetic field is relatively low, avoiding the vicinity of the superconducting coil 15 where the magnetic field is strong, to prevent normal conduction transition.
【００２９】また、超電導導体のリード４１，４２は、
通常運転時、液体ヘリウムの液面上に出て温度上昇して
常電導転移することのないよう、液体ヘリウムレベル下
限以下に設けられた連通管内を通している。その上、接
続点４３を連通管３５内に配置することにより、マグネ
ット装置の製作時点において、それぞれの断熱容器を単
独に製作でき、２つの超電導マグネット１の組立、相対
位置の調整等を容易に行うことができる。[0029] Furthermore, the leads 41 and 42 of the superconducting conductor are
During normal operation, the liquid helium is passed through a communication pipe installed below the lower limit of the liquid helium level to prevent it from rising above the surface of the liquid helium and causing a rise in temperature and normal conduction transition. Furthermore, by arranging the connection point 43 within the communication pipe 35, each heat-insulating container can be manufactured independently at the time of manufacturing the magnet device, making it easy to assemble the two superconducting magnets 1, adjust their relative positions, etc. It can be carried out.
【００３０】第２に超電導マグネットの緊急消磁につい
て説明する。緊急時に際しての超電導マグネット１の消
磁方法については、超電導コイル１５に近接して設けら
れたヒータ２６に通電し超電導コイル１５を加熱し常電
導転移させるという基本的方法は従来例と同一である。
ただし、従来では緊急消磁の際、２つの超電導マグネッ
ト１の緊急消磁の時間的差異により、過度の磁気的吸引
力や電磁力によるコイル損傷防止のため、２つの超電導
マグネットの各々のヒータ２６を同時通電できるように
配慮していた。しかし、この実施例では２つの超電導マ
グネット１は図４に示す如く連通管３０のヘリウム槽３
５内を通るリード４１，４２，４４により、２つの超電
導コイル１５の対称部分を含む閉回路群で構成されてい
る。このため、一方の超電導マグネット１の各閉回路を
構成する超電導コイル１５各部分に各１個のヒータ２６
を近接配置し、これらを直列若しくは並列に接続し通電
することにより、１つの電源で２つの超電導マグネット
間に外部結線をすることなく、同時に２つの超電導マグ
ネット１を流れる電流を緊急に減衰させることができる
。Second, emergency demagnetization of a superconducting magnet will be explained. The basic method of demagnetizing the superconducting magnet 1 in an emergency is the same as in the conventional example, in which the heater 26 provided close to the superconducting coil 15 is energized to heat the superconducting coil 15 and make it transition to normal conductivity. However, in the past, during emergency demagnetization, due to the time difference between the emergency demagnetization of the two superconducting magnets 1, the heaters 26 of each of the two superconducting magnets were simultaneously turned off to prevent damage to the coils due to excessive magnetic attraction force or electromagnetic force. Care was taken to ensure that electricity could be supplied. However, in this embodiment, the two superconducting magnets 1 are connected to the helium tank 3 of the communication pipe 30 as shown in FIG.
The leads 41, 42, and 44 passing through the superconducting coil 5 constitute a closed circuit group including symmetrical parts of the two superconducting coils 15. For this reason, one heater 26 is provided for each part of the superconducting coil 15 constituting each closed circuit of one superconducting magnet 1.
To urgently attenuate the current flowing through two superconducting magnets 1 at the same time without making an external connection between the two superconducting magnets using one power source by arranging them in close proximity, connecting them in series or in parallel, and energizing them. Can be done.
【００３１】第３に超電導コイルの常電導転移故障時の
保護について説明する。上記緊急消磁の説明にも記載の
とおり、２つの超電導マグネット１は、図４に示す如く
連通管３０のヘリウム槽３５内を通る通常永久電流モー
ド運転時通電される超電導導体のリード４１，４２と保
護素子２５とこのリード４４により２つの超電導コイル
１５の対称部分を含む閉回路群で構成されている。リー
ド４４は常電導導体であり、永久電流ループを形成しな
いものであるため液体ヘリウムレベル上限付近以上に設
けられた連通管に配置されることを許容するものである
。前述の如く、閉回路群構成となっていることから２つ
の超電導マグネット１の超電導コイル１５と永久電流ス
イッチ２３、超電導導体のリード４１，４２で構成され
る超電導の永久電流モード運転閉回路内のいずれかの部
分で常電導転移故障が発生し、保護素子２５のどれが動
作短絡しても、２つの超電導コイル１５の対称部分の電
流が等しく減衰する。従って一方の超電導マグネット１
の常電導転移故障により他方の超電導マグネット１の誘
導電流が誘起し、その超電導コイルの電流が過大となり
、この超電導コイルと隣接する磁性体ヨークとの間の磁
気吸引力が増大することはない。Thirdly, protection of superconducting coils in case of normal conduction transition failure will be explained. As described in the above explanation of emergency demagnetization, the two superconducting magnets 1 are connected to the superconducting conductor leads 41 and 42 that are energized during normal persistent current mode operation and pass through the helium bath 35 of the communication tube 30, as shown in FIG. The protection element 25 and the lead 44 constitute a closed circuit group including symmetrical parts of the two superconducting coils 15. Since the lead 44 is a normal conductor and does not form a persistent current loop, it can be placed in a communication pipe provided near the upper limit of the liquid helium level or higher. As mentioned above, since it has a closed circuit group configuration, the superconducting persistent current mode operation in the closed circuit consisting of the superconducting coils 15 of the two superconducting magnets 1, the persistent current switch 23, and the leads 41 and 42 of the superconducting conductors. Even if a normal conduction transition fault occurs in any part and any of the protective elements 25 is short-circuited, the currents in the symmetrical parts of the two superconducting coils 15 are equally attenuated. Therefore, one superconducting magnet 1
The normal conduction transition fault induces an induced current in the other superconducting magnet 1, and the current in that superconducting coil becomes excessive, and the magnetic attraction between this superconducting coil and the adjacent magnetic yoke does not increase.
【００３２】第４に液体ヘリウムの供給および蒸発ガス
の排気について説明する。液体ヘリウムの供給及び蒸発
ガスの排気は一方の超電導マグネット１に設けられたサ
ービスポート２内の供給用配管と蒸発ガスの排気管によ
り行われる。供給用配管と蒸発ガスの排気管の構成は基
本的に従来と同等である。ここで２つの超電導マグネッ
ト１が連通管３０の液体ヘリウム槽３５で連通している
ため、一方の超電導マグネット１に設けられたサービス
ポート２から注液された液体ヘリウムは他方の超電導マ
グネット１へも流入し、２つの超電導マグネットの液体
ヘリウムの液面高さは等しいものとなる。また、液体ヘ
リウムの蒸発消費特性が２つの超電導マグネットで異な
る場合でも、連通管３０により液体ヘリウムが行き来す
るので、２つの超電導マグネット１の液体ヘリウムの液
面高さは詳しく維持される。なお、この際、２本の連通
管３０が１本は液体ヘリウム槽の液体ヘリウムレベルの
下限高さより低い位置に、もう１本が液体ヘリウムレベ
ルの上限付近以上にあるため、サービスポート２を持た
ない超電導マグネット１の液体ヘリウム蒸発消費に伴う
発生ガスは、この超電導マグネット１内に蓄積停留して
液面を押し下げることなく、液体ヘリウムレベルの上限
付近以上にある連通管３０よりもう一方の超電導マグネ
ット１へ移り、サービスポートを介して排気される。Fourth, the supply of liquid helium and the exhaust of evaporated gas will be explained. The supply of liquid helium and the exhaust of evaporated gas are performed by a supply pipe in a service port 2 provided in one superconducting magnet 1 and an exhaust pipe for evaporated gas. The configuration of the supply piping and evaporative gas exhaust pipe is basically the same as the conventional one. Here, since the two superconducting magnets 1 communicate with each other through the liquid helium tank 35 of the communication pipe 30, the liquid helium injected from the service port 2 provided in one superconducting magnet 1 also flows into the other superconducting magnet 1. The liquid helium flows into the two superconducting magnets, and the liquid helium levels become equal. Furthermore, even if the evaporation and consumption characteristics of liquid helium are different between the two superconducting magnets, the liquid helium flows back and forth through the communication pipe 30, so the liquid level height of the liquid helium in the two superconducting magnets 1 is maintained in detail. At this time, one of the two communication pipes 30 is located at a position lower than the lower limit height of the liquid helium level in the liquid helium tank, and the other one is located above the upper limit of the liquid helium level, so it is necessary to have the service port 2. The gas generated due to liquid helium evaporation and consumption of the superconducting magnet 1 that does not accumulate in the superconducting magnet 1 does not push down the liquid level, and the gas generated from the communication pipe 30 that is near the upper limit of the liquid helium level is transferred to the other superconducting magnet. 1 and is exhausted through the service port.
【００３３】液体ヘリウムレベルの下限以下にある連通
管３０は超電導マグネット１の通常運転時、液体ヘリウ
ムが常に満されていることとなり、２つの超電導マグネ
ット１の液体ヘリウム蒸発消費特性に差のある場合でも
、消費の少ない方から消費の多い方へ消費量の差分だけ
液体ヘリウムを供給する配管の役目を果たす。The communication pipe 30 whose liquid helium level is below the lower limit is always filled with liquid helium during normal operation of the superconducting magnet 1, and if there is a difference in the liquid helium evaporation consumption characteristics of the two superconducting magnets 1. However, it serves as a pipe that supplies liquid helium from the side with the lowest consumption to the side with the highest consumption by the difference in consumption.
【００３４】第５にシールド冷凍機の液体ヘリウム蒸発
量の低減について説明する。２つの超電導マグネット１
の一方に取付けられたシールド冷凍機３は、この超電導
マグネット１の熱シールド１２，１３を吸熱冷却する。
２つの超電導マグネット１は連通管３０で結ばれ、この
連通管３０の熱シールド３３，３４は２つの超電導マグ
ネット１の熱シールド１２，１３と各々熱的に接続され
ている。このため、一方の超電導マグネット１に取付け
られたシールド冷凍機３は他方の超電導マグネット１の
熱シールドをも吸熱冷却できるものとなり、シールド冷
凍機の台数を減じることができる。Fifth, the reduction of the amount of liquid helium evaporation in the shield refrigerator will be explained. Two superconducting magnets 1
A shield refrigerator 3 attached to one side of the superconducting magnet 1 endothermically cools the heat shields 12 and 13 of the superconducting magnet 1. The two superconducting magnets 1 are connected by a communication tube 30, and the heat shields 33 and 34 of the communication tube 30 are thermally connected to the heat shields 12 and 13 of the two superconducting magnets 1, respectively. Therefore, the shield refrigerator 3 attached to one superconducting magnet 1 can also absorb heat and cool the heat shield of the other superconducting magnet 1, and the number of shield refrigerators can be reduced.
【００３５】その他、２つの超電導マグネット１をそれ
ぞれ独立に位置調整可能な位置調整具を有する１つの架
台４０に取付け、２つの超電導マグネット１を連通管３
０を取付け組み立てた状態で輸送できる構造となってい
る。また、連通管３０は可撓部３１を有するが、この部
分は超電導マグネット１の初期冷却に伴う熱収縮の吸収
や２つの超電導マグネット１の連通管３０でつなぐ際の
工作上の誤差吸収として有効に働く。In addition, the two superconducting magnets 1 are attached to one pedestal 40 having a position adjustment tool that can be independently adjusted, and the two superconducting magnets 1 are connected to the communication pipe 3.
The structure is such that it can be transported with the 0 installed and assembled. In addition, the communication tube 30 has a flexible portion 31, which is effective for absorbing thermal contraction caused by the initial cooling of the superconducting magnet 1 and for absorbing errors in machining when connecting two superconducting magnets 1 with the communication tube 30. to work.
【００３６】実施例２．なお、実施例１では、サービス
ポート２とシールド冷凍機３を同一の超電導マグネット
１に取付けたが、図５のように異なる超電導マグネット
１にそれぞれ取付けても良い。Example 2. In the first embodiment, the service port 2 and the shield refrigerator 3 are attached to the same superconducting magnet 1, but they may be attached to different superconducting magnets 1 as shown in FIG.
【００３７】実施例３．また、永久電流スイッチを持た
ず、永久電流モード運転ではない励磁電源をつないだま
まで使用する図６に示す如くの超電導マグネットであっ
てもよい。Example 3. Alternatively, a superconducting magnet as shown in FIG. 6 may be used, which does not have a persistent current switch and is used while connected to an excitation power source that is not operated in persistent current mode.
【００３８】[0038]
【発明の効果】以上のように、この発明によれば、第１
に、通電管で液体ヘリウムおよび液体ヘリウム蒸発ガス
が２つの超電導マグネット間で行き来を自由としたので
、液体ヘリウムの供給、蒸発ガスの排気に用いるサービ
スポートは一方の超電導マグネットに設けるだけでよい
。また、２つの超電導マグネットは連通管の熱シールド
を介して互いに熱的に接続されているのでシールド冷凍
機は一方の超電導マグネットに取付けるだけでよい。[Effects of the Invention] As described above, according to the present invention, the first
In addition, since liquid helium and liquid helium evaporated gas can freely flow back and forth between the two superconducting magnets using the current-carrying tube, a service port used for supplying liquid helium and exhausting evaporated gas only needs to be provided on one superconducting magnet. Furthermore, since the two superconducting magnets are thermally connected to each other via the heat shield of the communication tube, the shield refrigerator only needs to be attached to one of the superconducting magnets.
【００３９】第２に、１台の励磁電源で２つの超電導マ
グネット間に外部結線をすることなく２つの超電導マグ
ネットが同一電流に励磁され均一度の良い磁界が得られ
る。Second, two superconducting magnets are excited by the same current using one excitation power source without making any external connection between the two superconducting magnets, and a highly uniform magnetic field can be obtained.
【００４０】第３に、緊急消磁の際にそれぞれの超電導
マグネットに対して同時に緊急消磁ヒータの通電を行う
配慮をすることなく、一方の超電導マグネットに設けた
ヒータ通電により２つの超電導マグネットを同時に消磁
できる。Third, during emergency demagnetization, two superconducting magnets can be simultaneously demagnetized by energizing the heater provided in one of the superconducting magnets, without considering energizing the emergency degaussing heater for each superconducting magnet at the same time. can.
【００４１】第４に、一方の超電導マグネットの常電導
転移故障発生時、２つの超電導コイルの対称線間を結ぶ
保護回路が形成されているので、他方の超電導マグネッ
トへ誘導電流の増加を発生せず、磁性体ヨークとの間の
磁気吸引力の増大を発生しない。以上により磁界均一特
性の良い構造が簡単で信頼性の高い安価な装置を得るこ
とができる。Fourth, when a normal conduction transition failure occurs in one superconducting magnet, a protection circuit is formed that connects the lines of symmetry of the two superconducting coils, so an increase in induced current is not generated in the other superconducting magnet. First, an increase in the magnetic attraction force between the magnetic yoke and the magnetic yoke does not occur. As described above, it is possible to obtain a highly reliable and inexpensive device with a simple structure and good magnetic field uniformity characteristics.
【図１】この発明の実施例１の斜視図である。FIG. 1 is a perspective view of Embodiment 1 of the present invention.
【図２】図１のもののサービスポートおよび連通管に沿
う平面での断面図である。FIG. 2 is a sectional view of the one in FIG. 1 in a plane along the service port and the communication pipe;
【図３】図１のもののシールド冷凍機および連通管に沿
う平面での断面図である。FIG. 3 is a cross-sectional view of the shield refrigerator of FIG. 1 and a plane along a communicating pipe.
【図４】図１のものの電気回路図である。FIG. 4 is an electrical circuit diagram of that of FIG. 1;
【図５】この発明の実施例２の斜視図である。FIG. 5 is a perspective view of a second embodiment of the invention.
【図６】この発明の実施例３の電気回路図である。FIG. 6 is an electrical circuit diagram of a third embodiment of the present invention.
【図７】従来の結晶引上げ装置用超電導マグネット装置
の斜視図である。FIG. 7 is a perspective view of a conventional superconducting magnet device for a crystal pulling device.
【図８】図７のもののサービスポートに沿う平面での断
面図である。8 is a sectional view of the one in FIG. 7 in a plane along the service port; FIG.
【図９】図７のもののシールド冷凍機に沿う平面での断
面図である。FIG. 9 is a cross-sectional view of the one in FIG. 7 taken along a plane along the shield refrigerator.
【図１０】図７のものの電気回路図である。FIG. 10 is an electrical circuit diagram of that of FIG. 7;
１ 超電導マグネット
２ サービスポート
３ シールド冷凍機
８ 溶融容器の配置される空間
１１ 真空槽
１２，１３ 第１，第２の熱シールド１４
液体ヘリウム槽
１５ 超電導コイル
１６ 液体ヘリウム
２１ 励磁リード
２３ 永久電流スイッチ
２４ 制御リード
２５ 保護素子
２６ ヒータ
３０ 連通管
３１ 可撓部
３２ 真空槽
３３，３４ 第１，第２の熱シールド３５
液体ヘリウム槽
４０ 架台
４１，４２ 超電導リード
４３ 超電導リードの接続点
４４ 常電導リード1 Superconducting magnet 2 Service port 3 Shield refrigerator 8 Space 11 where the melting container is placed Vacuum chambers 12, 13 First and second heat shields 14
Liquid helium tank 15 Superconducting coil 16 Liquid helium 21 Excitation lead 23 Persistent current switch 24 Control lead 25 Protective element 26 Heater 30 Communication tube 31 Flexible part 32 Vacuum chambers 33, 34 First and second heat shields 35
Liquid helium tank 40 Frame 41, 42 Superconducting lead 43 Superconducting lead connection point 44 Normal conducting lead
Claims (9)
めに溶融した原料から結晶化した材料を引上げ精製する
際に少なくとも２個の超電導マグネットにより溶融した
原料を挟んで前記原料に静磁界を印加する単結晶引上げ
装置用超電導マグネット装置において、前記少なくとも
２つの超電導マグネットの液体ヘリウム槽を互いに連通
する少なくとも１本の連通管を備え、しかも、前記連通
管は真空槽および熱シールドを有する断熱構造でなり、
かつ、連通される超電導マグネット本体及び熱シールド
にそれぞれつながっていることを特徴とする単結晶引上
げ装置用超電導マグネット装置。Claim 1: When pulling and refining a crystallized material from a molten raw material in order to produce a single crystal material such as silicon, a static magnetic field is applied to the raw material by sandwiching the molten raw material between at least two superconducting magnets. A superconducting magnet device for a single crystal pulling device, comprising at least one communication pipe that communicates the liquid helium tanks of the at least two superconducting magnets with each other, and the communication pipe has a heat insulating structure having a vacuum tank and a heat shield. Become,
A superconducting magnet device for a single crystal pulling device, characterized in that the superconducting magnet body and the heat shield are connected to each other.
超電導マグネットが連通管を通るリードにより電気的に
結線されていることを特徴とする請求項１記載の単結晶
引上げ装置用超電導マグネット装置。2. The superconducting magnet device for a single crystal pulling apparatus according to claim 1, wherein at least two superconducting magnets sandwiching the molten raw material are electrically connected by a lead passing through a communicating tube.
超電導マグネットの磁界発生用超電導コイルが連通管を
通る超電導リードで直列に接続されていることを特徴と
する請求項２記載の単結晶引上げ装置用超電導マグネッ
ト装置。3. The single crystal pulling apparatus according to claim 2, wherein the magnetic field generating superconducting coils of at least two superconducting magnets sandwiching the molten raw material are connected in series by superconducting leads passing through a communicating tube. Superconducting magnet device.
を連通管を通る超電導リードにより永久電流スイッチで
超電導状態で短絡できるようにしたことを特徴とする請
求項３記載の単結晶引上げ装置用超電導マグネット装置
。4. The superconductor for a single crystal pulling apparatus according to claim 3, wherein both ends of the superconducting coils connected in series can be short-circuited in a superconducting state by a persistent current switch using superconducting leads passing through a communication tube. magnet device.
置されていることを特徴とする請求項３または４記載の
単結晶引上げ装置用超電導マグネット装置。5. The superconducting magnet device for a single crystal pulling device according to claim 3, wherein the connection point of the superconducting lead is arranged in a communicating pipe.
れぞれの超電導コイルの対称となる点が抵抗および逆並
列接続したダイオードいずれかの保護素子で接続される
際、この接続リードが連通管を通るリードであることを
特徴とする請求項３記載の単結晶引上げ装置用超電導マ
グネット装置。[Claim 6] When symmetrical points of the superconducting coils of at least two superconducting magnets are connected by a protection element such as a resistor or a diode connected in anti-parallel, the connecting lead is a lead passing through a communication pipe. The superconducting magnet device for a single crystal pulling device according to claim 3, characterized in that:
めに超電導コイルの近傍にこの超電導コイルを常電導転
移させるためのヒータを設ける際、保護素子で接続形成
された前記超電導コイルを含む各閉ループに対して少な
くとも１つの前記ヒータが設けられていることを特徴と
する請求項６記載の単結晶引上げ装置用超電導マグネッ
ト装置。7. In order to urgently demagnetize a superconducting magnet, when a heater is provided near a superconducting coil to cause the superconducting coil to transition to normal conductivity, a 7. The superconducting magnet device for a single crystal pulling device according to claim 6, wherein at least one of the heaters is provided.
ちの少なくとも１本が、超電導マグネットの液体ヘリウ
ム槽の液体ヘリウムレベルの下限高さより低い位置にあ
り、別の１本が前記液体ヘリウム槽の液体ヘリウムレベ
ルの上限付近以上の位置にあることを特徴とする請求項
１記載の単結晶引上げ装置用超電導マグネット装置。8. There are at least two communication pipes, at least one of which is located at a position lower than the lower limit height of the liquid helium level in the liquid helium tank of the superconducting magnet, and the other one is located at a position lower than the lower limit height of the liquid helium level in the liquid helium tank of the superconducting magnet. The superconducting magnet device for a single crystal pulling device according to claim 1, wherein the superconducting magnet device is located at a position near or above the upper limit of helium level.
の下限より低い位置の連通管内に超電導リードを配置し
、上限付近以上の位置の連通管内に常電導リードを配置
したことを特徴とする請求項２または８記載の単結晶引
上げ装置用超電導マグネット装置。9. Claim 2, characterized in that the superconducting lead is arranged in the communicating pipe at a position below the lower limit of the liquid helium level of the liquid helium tank, and the normal conducting lead is arranged in the communicating pipe at a position near the upper limit or higher. Or a superconducting magnet device for a single crystal pulling device according to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13690591A JP2790549B2 (en) | 1991-06-10 | 1991-06-10 | Superconducting magnet device for crystal pulling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13690591A JP2790549B2 (en) | 1991-06-10 | 1991-06-10 | Superconducting magnet device for crystal pulling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04361526A true JPH04361526A (en) | 1992-12-15 |
| JP2790549B2 JP2790549B2 (en) | 1998-08-27 |
Family
ID=15186314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13690591A Expired - Lifetime JP2790549B2 (en) | 1991-06-10 | 1991-06-10 | Superconducting magnet device for crystal pulling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2790549B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999020956A1 (en) * | 1997-10-20 | 1999-04-29 | Kabushiki Kaisha Toshiba | Cold-accumulating material and cold-accumulating refrigerator |
| US6334909B1 (en) | 1998-10-20 | 2002-01-01 | Kabushiki Kaisha Toshiba | Cold-accumulating material and cold-accumulating refrigerator using the same |
| JP2007081344A (en) * | 2005-09-16 | 2007-03-29 | Central Res Inst Of Electric Power Ind | Cryostat for magnetic field generator |
| JP2009216424A (en) * | 2008-03-07 | 2009-09-24 | Kobe Steel Ltd | Magnet position measuring method and magnetic field measuring instrument |
| JP4950363B1 (en) * | 2011-03-22 | 2012-06-13 | 三菱電機株式会社 | Superconducting magnet |
| US9019054B2 (en) | 2012-10-04 | 2015-04-28 | Tesla Engineering Limited | Magnet apparatus |
| JP2015128098A (en) * | 2013-12-27 | 2015-07-09 | 株式会社日立メディコ | Superconductivity magnet apparatus and superconduction-applied apparatus |
| JP2016018902A (en) * | 2014-07-09 | 2016-02-01 | 株式会社日立メディコ | Superconducting electromagnet device |
-
1991
- 1991-06-10 JP JP13690591A patent/JP2790549B2/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999020956A1 (en) * | 1997-10-20 | 1999-04-29 | Kabushiki Kaisha Toshiba | Cold-accumulating material and cold-accumulating refrigerator |
| US6334909B1 (en) | 1998-10-20 | 2002-01-01 | Kabushiki Kaisha Toshiba | Cold-accumulating material and cold-accumulating refrigerator using the same |
| JP2007081344A (en) * | 2005-09-16 | 2007-03-29 | Central Res Inst Of Electric Power Ind | Cryostat for magnetic field generator |
| JP4677313B2 (en) * | 2005-09-16 | 2011-04-27 | 財団法人電力中央研究所 | Cryostat for magnetic field generator |
| JP2009216424A (en) * | 2008-03-07 | 2009-09-24 | Kobe Steel Ltd | Magnet position measuring method and magnetic field measuring instrument |
| JP4950363B1 (en) * | 2011-03-22 | 2012-06-13 | 三菱電機株式会社 | Superconducting magnet |
| WO2012127604A1 (en) * | 2011-03-22 | 2012-09-27 | 三菱電機株式会社 | Superconducting magnet |
| US8989827B2 (en) | 2011-03-22 | 2015-03-24 | Mitsubishi Electric Corporation | Superconducting magnet |
| US9019054B2 (en) | 2012-10-04 | 2015-04-28 | Tesla Engineering Limited | Magnet apparatus |
| US9396856B2 (en) | 2012-10-04 | 2016-07-19 | Tesla Engineering Limited | Magnet apparatus |
| JP2015128098A (en) * | 2013-12-27 | 2015-07-09 | 株式会社日立メディコ | Superconductivity magnet apparatus and superconduction-applied apparatus |
| JP2016018902A (en) * | 2014-07-09 | 2016-02-01 | 株式会社日立メディコ | Superconducting electromagnet device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2790549B2 (en) | 1998-08-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8384504B2 (en) | Superconducting quick switch | |
| US8134434B2 (en) | Superconducting quick switch | |
| US9508477B2 (en) | Superconducting magnet system | |
| CN108878053B (en) | Superconducting lead assembly, cryogenic system, and method of mounting superconducting lead assembly in cryogenic system | |
| JPH07142237A (en) | Superconducting magnet device | |
| US5394129A (en) | Superconducting switch thermal interface for a cryogenless superconducting magnet | |
| JPH04361526A (en) | Superconducting magnet device for crystal pullingup device | |
| JPH0236504A (en) | Superconducting magnet device | |
| US8035379B2 (en) | Coil energization apparatus and method of energizing a superconductive coil | |
| JPH10189328A (en) | Superconducting magnet | |
| JP4699293B2 (en) | Superconducting magnet | |
| JP3020140B2 (en) | Permanent current switch device for refrigerator cooled superconducting magnet | |
| JP3117173B2 (en) | Superconducting magnet device with refrigerator | |
| JP2515813B2 (en) | Current lead for superconducting equipment | |
| JP2020035842A (en) | Superconducting magnet device | |
| JP3068898B2 (en) | Current lead | |
| JP7370307B2 (en) | Superconducting magnet device | |
| WO2024048179A1 (en) | Superconducting magnet device and nuclear magnetic resonance diagnosis device | |
| JP2883697B2 (en) | Current lead for superconducting coil | |
| KR20240018625A (en) | Superconducting switch for superconducting magnets | |
| JPS62244110A (en) | Superconducting coil device | |
| JP3310074B2 (en) | Superconducting magnet device | |
| JP4562947B2 (en) | Superconducting magnet | |
| JP4081911B2 (en) | Current limiter | |
| JPH05160447A (en) | Permanent current switch |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080612 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080612 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090612 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100612 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100612 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110612 Year of fee payment: 13 |
|
| EXPY | Cancellation because of completion of term |