JPH043497B2 - - Google Patents
Info
- Publication number
- JPH043497B2 JPH043497B2 JP56167027A JP16702781A JPH043497B2 JP H043497 B2 JPH043497 B2 JP H043497B2 JP 56167027 A JP56167027 A JP 56167027A JP 16702781 A JP16702781 A JP 16702781A JP H043497 B2 JPH043497 B2 JP H043497B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- lens
- receiving lens
- subject
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 description 7
- 238000005286 illumination Methods 0.000 description 3
- 230000007257 malfunction Effects 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16702781A JPS5868717A (ja) | 1981-10-21 | 1981-10-21 | 表面検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16702781A JPS5868717A (ja) | 1981-10-21 | 1981-10-21 | 表面検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5868717A JPS5868717A (ja) | 1983-04-23 |
| JPH043497B2 true JPH043497B2 (fi) | 1992-01-23 |
Family
ID=15842027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16702781A Granted JPS5868717A (ja) | 1981-10-21 | 1981-10-21 | 表面検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5868717A (fi) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6463845A (en) * | 1987-09-02 | 1989-03-09 | Asahi Optical Co Ltd | Method for inspecting surface to be inspected having linear defect |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5114039A (en) * | 1974-07-25 | 1976-02-04 | Sanyo Electric Co | Hyojipaneruno ekishofunyuhoho |
-
1981
- 1981-10-21 JP JP16702781A patent/JPS5868717A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5114039A (en) * | 1974-07-25 | 1976-02-04 | Sanyo Electric Co | Hyojipaneruno ekishofunyuhoho |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5868717A (ja) | 1983-04-23 |
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