JPH04334986A - Magnetostrictive type actuator - Google Patents
Magnetostrictive type actuatorInfo
- Publication number
- JPH04334986A JPH04334986A JP3106069A JP10606991A JPH04334986A JP H04334986 A JPH04334986 A JP H04334986A JP 3106069 A JP3106069 A JP 3106069A JP 10606991 A JP10606991 A JP 10606991A JP H04334986 A JPH04334986 A JP H04334986A
- Authority
- JP
- Japan
- Prior art keywords
- generating means
- displacement
- magnetic
- magnetic field
- magnetostrictive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 132
- 239000000696 magnetic material Substances 0.000 claims description 13
- 230000005611 electricity Effects 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract 4
- 239000000463 material Substances 0.000 description 21
- 229910045601 alloy Inorganic materials 0.000 description 12
- 239000000956 alloy Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 229910052761 rare earth metal Inorganic materials 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910001279 Dy alloy Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、外部磁界の印加により
磁歪を生じる磁性体を備えた磁歪式アクチュエータの改
良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a magnetostrictive actuator equipped with a magnetic material that produces magnetostriction upon application of an external magnetic field.
【０００２】0002
【従来の技術】振動や変位発生用のアクチュエータとし
ては、従来からＰＺＴなどの圧電材料を変位発生素子と
なし、この変位発生素子に制御電圧を印加するようにし
た圧電式アクチュエータが知られている。また、スピー
カーの原理を用いた電磁式アクチュエータや磁歪現象を
用いた磁歪式アクチュエータも一般に知られている。[Prior Art] As an actuator for generating vibration or displacement, piezoelectric actuators have been known in which a piezoelectric material such as PZT is used as a displacement generating element, and a control voltage is applied to this displacement generating element. . Furthermore, electromagnetic actuators using the principle of a speaker and magnetostrictive actuators using magnetostrictive phenomena are also generally known.
【０００３】ここに、前記振動や変位発生用のアクチュ
エータにおいては、小型で高出力、即ちより大きい変位
量および力が発生できるアクチュエータの開発が望まれ
ている。かかる要求を満たす変位発生素子としては、前
記圧電材料よりも一般に剛性および歪み量が大きい磁歪
を有する磁性体、つまり磁性材料を用いた磁歪式アクチ
ュエータが注目されている。[0003] As for the actuators for generating vibration and displacement, there is a desire to develop an actuator that is small and can generate high output, that is, a larger amount of displacement and force. As a displacement generating element that satisfies such a requirement, a magnetostrictive actuator using a magnetic material having magnetostriction, which generally has greater rigidity and strain than the piezoelectric material, is attracting attention.
【０００４】前記磁歪式アクチュエータに用いられる磁
歪材料としては、従来よりＮｉ系合金、Ｆｅ−Ａｌ系合
金、フェライト系合金が主に用いられている。また、最
近では、前記磁歪材料に比べて１桁以上大きな変位が発
生可能な希土類金属−遷移金属系超磁歪合金も報告され
ている。前記磁歪式アクチュエータは、一般に前記磁歪
材料に制御磁界を印加する手段を備えた構成になってい
る。前記磁界印加手段としては、制御電流の供給で容易
に磁界を制御することが可能な電磁石などの磁気回路が
主に用いられている。As magnetostrictive materials used in the magnetostrictive actuator, Ni-based alloys, Fe-Al-based alloys, and ferrite-based alloys have conventionally been mainly used. Furthermore, recently, rare earth metal-transition metal super magnetostrictive alloys have been reported that can generate displacements that are one order of magnitude larger than those of the magnetostrictive materials. The magnetostrictive actuator generally includes means for applying a control magnetic field to the magnetostrictive material. As the magnetic field applying means, a magnetic circuit such as an electromagnet that can easily control the magnetic field by supplying a control current is mainly used.
【０００５】そこで出願人は、特願平２−８３２２０号
、特願平２−４０９２８号、特願平２−４０９２９号及
び特願平２−４０９３０の４件の出願に基づく優先権主
張を伴う出願（出願日、平成３年２月１９日、整理番号
Ａ００９１０１２７６）として、図１４及び図１５に示
す磁歪式アクチュエータを提案した、。[0005] Therefore, the applicant claimed priority based on four applications: Japanese Patent Application No. 2-83220, Japanese Patent Application No. 2-40928, Japanese Patent Application No. 2-40929, and Japanese Patent Application No. 2-40930. The magnetostrictive actuator shown in FIGS. 14 and 15 was proposed as an application (filing date: February 19, 1991, reference number A009101276).
【０００６】即ち、図１４に示す磁歪式アクチュエータ
は、片側のみに変位を発生させるタイプのもので、超磁
歪合金からなる棒状の磁性体１の周囲に制御磁界を印加
する空心コイル２を配置するとともに、前記磁性体１の
両端は結合部材３を介して可動ヨーク４及び固定板５に
夫々連結されている。更に、可動ヨーク４を弾性体６を
介して固定板７に連結してこれが不用意に動かないよう
にするとともに、可動ヨーク４に固定板７に設けた貫通
孔７ａを貫通して外部に露出する出力棒８を連結し、こ
の出力棒８により磁性体１の変形（歪み）をアクチュエ
ータ変位として取り出すようにしたものである。ここに
、固定板５には環状溝５ａが設けられているとともに、
ここに永久磁石９が取り付けられ、この永久磁石９によ
って磁性体１に予め磁気バイアスが与えられて初期変位
が付けられている。また、前記磁性体１及び空心コイル
２は円筒状ケース１０及び両固定板５，７内に収納され
、これらと可動ヨーク４によって閉磁気回路が構成され
ている。That is, the magnetostrictive actuator shown in FIG. 14 is of a type that generates displacement only on one side, and an air-core coil 2 for applying a control magnetic field is arranged around a rod-shaped magnetic body 1 made of a giant magnetostrictive alloy. At the same time, both ends of the magnetic body 1 are connected to a movable yoke 4 and a fixed plate 5 via a coupling member 3, respectively. Furthermore, the movable yoke 4 is connected to the fixed plate 7 via the elastic body 6 to prevent it from moving inadvertently, and the movable yoke 4 is exposed to the outside by passing through a through hole 7a provided in the fixed plate 7. The output rod 8 is connected to the output rod 8, and the deformation (distortion) of the magnetic body 1 is extracted as an actuator displacement by the output rod 8. Here, the fixed plate 5 is provided with an annular groove 5a, and
A permanent magnet 9 is attached here, and a magnetic bias is previously applied to the magnetic body 1 by the permanent magnet 9 to give an initial displacement. Further, the magnetic body 1 and the air-core coil 2 are housed in a cylindrical case 10 and both fixed plates 5 and 7, and a closed magnetic circuit is constituted by these and the movable yoke 4.
【０００７】図１５に示す磁歪式アクチュエータは、両
側に変位を発生させるタイプのもので、上記と異なる点
は、磁性体１の両端に結合部材３を介して可動ヨーク４
を連結するとともに、この各可動ヨーク４に夫々貫通孔
５ａ，７ａを貫通して外部に突出する出力棒８を連結し
、更に可動ヨーク４に設けた環状溝４ａ内に磁気バイア
スを予め与える永久磁石９を取り付けた点にある。The magnetostrictive actuator shown in FIG. 15 is of a type that generates displacement on both sides. The difference from the above is that a movable yoke 4 is connected to both ends of the magnetic body 1 via coupling members 3.
At the same time, each movable yoke 4 is connected to an output rod 8 that penetrates through the through holes 5a and 7a and protrudes to the outside, and furthermore, a permanent magnetic bias is applied in advance to the annular groove 4a provided in the movable yoke 4. It is located at the point where the magnet 9 is attached.
【０００８】[0008]
【発明が解決しようとする課題】前記磁歪式アクチュエ
ータにおいて、大きな変位を発生させようとすると、前
記磁歪材料（磁性体）を大きく変位させる必要があり、
このためには、制御電流を増大させて印加磁界を増大さ
せる必要があるが、磁歪材料における磁界強さに対する
変位量には一定の限界があり、超磁歪合金であってもそ
の最大歪み量はせいぜい１／１０００程度である。この
ため、更に大きな変位量を有するようにした磁歪式アク
チュエータの開発が望まれていた。[Problems to be Solved by the Invention] In order to generate a large displacement in the magnetostrictive actuator, it is necessary to largely displace the magnetostrictive material (magnetic material).
To achieve this, it is necessary to increase the applied magnetic field by increasing the control current, but there is a certain limit to the amount of displacement in magnetostrictive materials relative to the magnetic field strength, and even for super magnetostrictive alloys, the maximum amount of strain is It is about 1/1000 at most. For this reason, it has been desired to develop a magnetostrictive actuator that has a larger displacement amount.
【０００９】即ち、図１６（ａ）及び（ｂ）は、夫々異
る磁歪材料の印加磁界に対する変位量の関係を示したも
のである。同図より判るように、磁界強さを大きくして
も、それに比例した変位が発生しなくなり、ある一定変
位量以上では頭打ちになるため、大きな変位量になれば
なる程、制御電流の効率が落ちる関係にある。また、こ
のような状態でアクチュエータとして使用して大きな変
位を出そうとすると、非常に大きな制御電流が必要とな
り、消費電力が大きくなるばかりでなく、大きな電源回
路が必要となるため、コスト的にも増大してしまうとい
う問題がある。That is, FIGS. 16(a) and 16(b) show the relationship between the amount of displacement of different magnetostrictive materials with respect to the applied magnetic field. As can be seen from the figure, even if the magnetic field strength is increased, a displacement proportional to it no longer occurs and reaches a plateau above a certain amount of displacement, so the larger the amount of displacement, the more efficient the control current becomes. They are in a falling relationship. In addition, if you try to use it as an actuator in this condition to produce a large displacement, it will require a very large control current, which not only increases power consumption but also requires a large power supply circuit, which is costly. There is a problem that the amount of water increases.
【００１０】更に、図１６に示す通り、磁歪材料は印加
される制御磁界の向きにかかわらず、その材料の性質に
より一方向にしか変形しないという特性を有する。この
ため、このままでは、正または負方向のどちらか一方の
みの駆動変位しか得られないという問題を生ずる。一般
に、振動制御に用いるアクチュエータには、駆動変位と
してある初期変位に対して、正および負方向の両方向変
位が必要であるため、このままでは振動制御用アクチュ
エータとして使用が不可能となるばかりでなく、他の用
途に用いる場合においても、制御方法が大きく制限され
る問題がある。Furthermore, as shown in FIG. 16, the magnetostrictive material has the characteristic that it deforms only in one direction due to the properties of the material, regardless of the direction of the applied control magnetic field. Therefore, if left as is, a problem arises in that drive displacement can only be obtained in either the positive or negative direction. In general, an actuator used for vibration control requires displacement in both positive and negative directions relative to a certain initial displacement as the drive displacement, so if it remains as it is, it is not only impossible to use it as an actuator for vibration control. Even when used for other purposes, there is a problem in that the control method is severely limited.
【００１１】このため、前記図１４及び図１５に示すも
のにおいては、磁歪材料に永久磁石などで磁界バイアス
をかけておき、バイアス磁界量に応じた磁歪材料歪み量
を初期変位として、制御電解により正及び負方向の駆動
変位を発生させるようになされている。For this reason, in the devices shown in FIGS. 14 and 15, a magnetic field bias is applied to the magnetostrictive material using a permanent magnet, etc., and the amount of strain of the magnetostrictive material corresponding to the amount of the bias magnetic field is set as an initial displacement, and then the magnetostrictive material is subjected to controlled electrolysis. It is adapted to generate driving displacements in positive and negative directions.
【００１２】しかし、この場合における各方向の変位量
、即ち変位振幅は、磁歪材料の可能な絶対歪み量より必
然的に小さくなるため、駆動変位の発生効率が確実に悪
くなってしまうばかりでなく、印加する磁界バイアスの
ための永久磁石などの設置が必要となるため、装置全体
として構造が複雑となり、かつ重量が重くなってしまう
という問題がある。However, in this case, the displacement amount in each direction, that is, the displacement amplitude, is inevitably smaller than the possible absolute strain amount of the magnetostrictive material. Since it is necessary to install a permanent magnet or the like for applying a magnetic field bias, there is a problem that the structure of the entire device becomes complicated and the weight becomes heavy.
【００１３】本発明は上記に鑑み、絶対駆動変位量を増
加させ、しかも正及び負方向の駆動変位発生を容易にす
ることにより、制御性が良くかつ投入パワーの高効率化
を図ったものを提供することを目的とする。[0013] In view of the above, the present invention increases the amount of absolute drive displacement and facilitates the generation of drive displacement in the positive and negative directions, thereby achieving good controllability and high efficiency of input power. The purpose is to provide.
【００１４】[0014]
【課題を解決するための手段】上記目的を達成するため
、本発明に係る請求項１記載の磁歪式アクチュエータは
、磁歪を有する磁性体からなる変位発生手段と、前記変
位発生手段に固定され該変位発生手段の変位方向に移動
可能な可動部材と、前記変位発生手段の周囲に配設され
該変位発生手段に磁界を印加する磁界発生手段と、前記
変位発生手段及び磁界発生手段を収納し閉磁気回路を構
成する磁気回路構成部材とを具備する磁歪式アクチュエ
ータであって、同一の磁歪特性を有する少なくとも２本
以上の棒状の磁性体を連結部材を介して変位方向に直列
に連結して前記変位発生手段を構成するとともに、前記
磁界発生手段で前記各磁性体に独立して磁界を印加する
ようにしたものである。[Means for Solving the Problem] In order to achieve the above object, a magnetostrictive actuator according to claim 1 of the present invention includes a displacement generating means made of a magnetic material having magnetostriction, and a displacement generating means fixed to the displacement generating means. A movable member movable in the displacement direction of the displacement generating means, a magnetic field generating means disposed around the displacement generating means and applying a magnetic field to the displacement generating means, and a housing for housing and closing the displacement generating means and the magnetic field generating means. A magnetostrictive actuator comprising a magnetic circuit component forming a magnetic circuit, wherein at least two rod-shaped magnetic bodies having the same magnetostrictive characteristics are connected in series in the displacement direction via a connecting member. The magnetic field generating means constitutes a displacement generating means, and the magnetic field is applied independently to each of the magnetic bodies.
【００１５】また、請求項２記載の磁歪式アクチュエー
タは、異なる磁歪特性を有する少なくとも２本以上の棒
状の磁性体を連結部材を介して変位方向に直列に連結し
て前記変位発生手段を構成するとともに、前記磁界発生
手段で前記各磁性体に独立して磁界を印加するようにし
ものである。Further, in the magnetostrictive actuator according to the second aspect of the present invention, the displacement generating means is constructed by connecting at least two or more rod-shaped magnetic bodies having different magnetostrictive characteristics in series in the displacement direction via a connecting member. In addition, the magnetic field generating means applies a magnetic field independently to each of the magnetic bodies.
【００１６】更に、請求項３記載の磁歪式アクチュエー
タは、前記磁界発生手段を、前記変位発生手段の周囲に
配置したそれぞれ独立した空心コイルとこの空心コイル
を流れる電流を制御する制御回路とによって構成し、前
記空心コイルに常に一定の電流を流しておくことによっ
て前記変位発生手段に磁気バイアスを印加するようにし
たものである。Furthermore, in the magnetostrictive actuator according to claim 3, the magnetic field generating means is constituted by independent air-core coils arranged around the displacement generating means, and a control circuit for controlling the current flowing through the air-core coils. A magnetic bias is applied to the displacement generating means by constantly passing a constant current through the air-core coil.
【００１７】[0017]
【作用】上記のように構成した請求項１記載の本発明に
よれば、棒状の磁性体単体のみの変位量に比べて、直列
に設置した磁性体の本数倍の駆動変位を得ることができ
るとともに、各磁性体の変位量を各磁界発生手段を介し
て自由に調整することができるので、駆動変位の絶対量
を大きく採って振動制御アクチュエータとしての制御能
力を大幅に向上させることができる。従って、変位発生
能力に余裕が生まれるので、磁性体を最大歪み限界付近
まで使用する必要をなくして、大きな制御磁界を与えな
くても済み消費電力量が少なくて済むので、効率的な使
用が可能となるとともに、駆動電源部も駆動変位能力向
上の割合に比べ小型化を図ることができる。更に、磁歪
材料の大きな歪み部付近での磁界に対する非線形変位特
性の部分を無理に使う必要がないため、電流量を調整す
る制御手段の簡素化が図れ、かつ制御能力を向上させる
ことができる。[Function] According to the present invention as set forth in claim 1 configured as described above, it is possible to obtain a drive displacement that is twice the number of magnetic bodies installed in series as compared to the displacement amount of only a single rod-shaped magnetic body. In addition, the amount of displacement of each magnetic body can be freely adjusted via each magnetic field generation means, so the absolute amount of drive displacement can be increased and the control ability as a vibration control actuator can be greatly improved. . Therefore, there is a margin in the displacement generation ability, eliminating the need to use the magnetic material close to its maximum distortion limit, eliminating the need to apply a large control magnetic field, and reducing power consumption, allowing for efficient use. At the same time, the drive power supply unit can also be made smaller in comparison with the improvement in drive displacement capability. Furthermore, since it is not necessary to forcefully use the portion of the magnetostrictive material that exhibits nonlinear displacement characteristics in response to a magnetic field near a highly strained portion, the control means for adjusting the amount of current can be simplified and the control ability can be improved.
【００１８】また、請求項２記載の本発明によれば、正
の方向に変位する磁性体に磁界を印加すれば正の方向に
、負の方向に変位する磁性体に磁界を印加すれば負の方
向に夫々駆動変位するので、両振幅振動制御が可能とな
り、構造物に対する振動制御用アクチュエータとしての
能力を大幅に向上させることができる。しかも、変位発
生手段に永久磁石などの磁界バイアスをかけて初期変位
を与える必要がないため、変位発生手段の変位能力を有
効に利用できるばかりでなく、アクチュエータの軽量化
を図ることができる。According to the second aspect of the present invention, applying a magnetic field to a magnetic body displacing in the positive direction causes the magnetic field to move in the positive direction, and applying a magnetic field to the magnetic body displacing in the negative direction causes the magnetic body to move in the negative direction. Since the actuator is driven and displaced in the respective directions, it is possible to control vibrations in both amplitudes, and the ability of the actuator to control vibrations for structures can be greatly improved. Furthermore, since it is not necessary to apply a magnetic field bias such as a permanent magnet to the displacement generating means to give an initial displacement, not only can the displacement ability of the displacement generating means be effectively utilized, but also the weight of the actuator can be reduced.
【００１９】更に、請求項３記載の本発明によれば、変
位発生手段に永久磁石などの磁界バイアスをかけて初期
変位を与えることなく、両振幅振動を達成することがで
き、このため、変位発生手段の変位能力を有効に利用で
きるばかりでなく、アクチュエータの軽量化を図ること
ができる。Furthermore, according to the present invention as set forth in claim 3, it is possible to achieve double amplitude vibration without applying an initial displacement by applying a magnetic field bias such as a permanent magnet to the displacement generating means. Not only can the displacement ability of the generating means be effectively utilized, but also the weight of the actuator can be reduced.
【００２０】[0020]
【実施例】以下、本発明の実施例を図面を参照して説明
する。Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings.
【００２１】図１乃至図３は、片側にのみ変位を取り出
すようにした本発明の第１の実施例を示すもので、同一
の磁歪特性、即ち正の磁歪特性または負の磁歪特性の一
方の磁歪特性を有する（図示では正の磁歪特性を有する
ものを使用した例を示している）２本の棒状の磁性体１
ａ，１ｂを連結部材１１を介してその長手方向（変位方
向）に直列に連結することによって変位発生手段として
の変位発生体１２ａが構成されている。FIGS. 1 to 3 show a first embodiment of the present invention in which displacement is taken out only on one side. Two rod-shaped magnetic bodies 1 having magnetostrictive properties (the illustration shows an example using one having positive magnetostrictive properties)
A and 1b are connected in series in the longitudinal direction (displacement direction) via a connecting member 11 to constitute a displacement generating body 12a as a displacement generating means.
【００２２】このように、同一磁歪特性を有する２本の
磁性体１ａ，１ｂを連結部材１１を介して連結して変位
発生体１２ａを構成したのは、超磁歪材料等にあっては
、その材料の構成上および製造性の問題から、磁性体単
体としてあまり長いものを製造することが一般に困難で
あるからである。The reason why the displacement generating body 12a is constructed by connecting the two magnetic bodies 1a and 1b having the same magnetostrictive characteristics via the connecting member 11 is because of the giant magnetostrictive material. This is because it is generally difficult to manufacture a long magnetic material alone due to material composition and manufacturability issues.
【００２３】ここに、正の磁歪特性を有するとは、磁界
をかけると正の歪み（磁界方向の伸び）を生じることを
いい、負の磁歪特性を有するとは、磁界をかけると負の
歪み（磁界方向の縮み）を生じることをいう。Here, having positive magnetostrictive characteristics means that when a magnetic field is applied, positive strain (elongation in the direction of the magnetic field) occurs, and having negative magnetostrictive characteristics means that when a magnetic field is applied, negative strain is generated. (contraction in the direction of the magnetic field).
【００２４】磁性体材料としては、例えば従来からよく
知られたＮｉ系合金、Ｆｅ−Ａｌ系合金、フェライト系
材料等があるが、振動子等の小型化、高出力化を達成す
る観点から、希土類金属−遷移金属系のラーベス型金属
間化合物からなる超磁歪合金を用いることが望ましい。
かかる超磁歪合金としては、原子比で、Ｒ（Ｆｅ１−ｘ
−ｙ Ｃｏｘ Ｍｙ ）ｚ （但し、式中のＲはイット
ニウムを含む希土類元素から選ばれる少なくとも１種の
元素、ＭはＮｉ、Ｍｎ、Ｍｇ、Ａｌ、Ｇａ、Ｚｎ、Ｖ、
Ｚｒ、Ｈｆ、Ｔｉ、Ｎｂ、Ｃｕ、Ａｇ、Ｓｎ、Ｍｏ、Ｓ
ｉ及びＢから選ばれる少なくとも１種の元素を示し、ｘ
、ｙ、ｚは０≦ｘ≦０．９５、０≦ｙ≦０．６、１．５
≦ｚ≦４．０を示す）を満足する組成を有する合金が挙
げられる。具体的には、正の磁歪特性を有する磁歪材料
として、Ｔｂ−Ｄｙ・Ｆｅ系合金、Ｔｂ−Ｄｙ・Ｆｅ−
Ｍｎ系合金等が例示され、また、負の磁歪特性を有する
磁歪材料として、ＳｍＦｅ２やＥｒＦｅ２ 系合金等が
例示される。Examples of magnetic materials include well-known Ni-based alloys, Fe-Al-based alloys, ferrite-based materials, etc., but from the viewpoint of achieving miniaturization and high output of vibrators, etc. It is desirable to use a giant magnetostrictive alloy made of a rare earth metal-transition metal-based Laves type intermetallic compound. Such a giant magnetostrictive alloy has an atomic ratio of R(Fe1-x
-y Cox My )z (However, R in the formula is at least one element selected from rare earth elements including yttium, M is Ni, Mn, Mg, Al, Ga, Zn, V,
Zr, Hf, Ti, Nb, Cu, Ag, Sn, Mo, S
represents at least one element selected from i and B, x
, y, z are 0≦x≦0.95, 0≦y≦0.6, 1.5
z≦4.0). Specifically, as magnetostrictive materials having positive magnetostrictive characteristics, Tb-Dy/Fe alloy, Tb-Dy/Fe-
Examples include Mn-based alloys, and examples of magnetostrictive materials having negative magnetostrictive characteristics include SmFe2 and ErFe2-based alloys.
【００２５】前記一方の磁性体１ｂの自由端は、固定板
５と結合されて固定されている。また他方の磁性体１ａ
の自由端は、可動部材としての可動ヨーク４と結合され
、この可動ヨーク４には出力棒８が連結されている。
この出力棒８は、アクチュエータの変位として取出され
る部分であり、固定板７の中央に穿設した貫通穴７ａを
貫通して外部に突出している。更に、前記可動ヨーク４
の外周面と円筒状ケース１０の内周面との間には、不用
意な動きを抑えるとともに可動ヨーク４を初期の位置に
戻す役割を果たす弾性体６が介在されている。The free end of the one magnetic body 1b is fixed by being connected to a fixing plate 5. Also, the other magnetic body 1a
The free end of is connected to a movable yoke 4 as a movable member, and an output rod 8 is connected to this movable yoke 4. This output rod 8 is a part that is taken out as the actuator is displaced, and projects to the outside through a through hole 7a formed in the center of the fixed plate 7. Furthermore, the movable yoke 4
An elastic body 6 is interposed between the outer circumferential surface of the movable yoke 4 and the inner circumferential surface of the cylindrical case 10, which serves to suppress inadvertent movement and return the movable yoke 4 to its initial position.
【００２６】前記磁性体１ａ，１ｂの周囲には、この各
磁性体１ａ，１ｂにそれぞれ独立した磁界を印加する空
心コイル２ａ，２ｂが配設されているとともに、この各
空心コイル２ａ，２ｂは、夫々独立した駆動電源１３ａ
，１３ｂに接続されて該駆動電源１３ａ，１３ｂにより
独立した電流が供給されるようなされている。更に、空
心コイル２ａ，２ｂに流れる電気量を調節する制御回路
１４が備えられ、これによって磁界発生手段１５ａが構
成されている。Air-core coils 2a, 2b are disposed around the magnetic bodies 1a, 1b, and each air-core coil 2a, 2b applies an independent magnetic field to each of the magnetic bodies 1a, 1b. , each independent drive power source 13a
, 13b, and independent currents are supplied by the drive power supplies 13a, 13b. Furthermore, a control circuit 14 for adjusting the amount of electricity flowing through the air-core coils 2a and 2b is provided, thereby forming a magnetic field generating means 15a.
【００２７】このように、各空心コイル２ａ，２ｂに独
立した駆動電源１３ａ，１３ｂで電流を供給するように
したのは、単一の駆動電源では空心コイルが長くなると
磁界が均一にかかりにくくなり、短いのを重ねた方が均
一な磁界をかけるのに有利であることと、それぞれの磁
界量を別々に制御することができ、各磁性体に異る変位
（動き）を与えることができるからである。The reason why the air-core coils 2a, 2b are supplied with current by the independent drive power supplies 13a, 13b is because with a single drive power supply, the longer the air-core coil becomes, the harder it is to apply a uniform magnetic field. , It is advantageous to stack short pieces to apply a uniform magnetic field, and the amount of each magnetic field can be controlled separately, allowing different displacements (movements) to be given to each magnetic body. It is.
【００２８】更に、円筒状ケース１０の内周面の前記連
結部材１１に対応する位置には、仕切板１６が内方に向
けて形成され、これによって、固定板５、円筒状ケース
１０、仕切板１６及び結合部材１１により磁性体１ｂ及
び空心コイル２ｂを収納する閉磁気回路が、また固定板
７、円筒状ケース１０、仕切板１６及び結合部材１１に
より磁性体１ａ及び空心コイル２ａを収納する閉磁気回
路が夫々構成されており、他の部分に磁気が漏れないよ
うなされている。Further, a partition plate 16 is formed facing inward on the inner circumferential surface of the cylindrical case 10 at a position corresponding to the connecting member 11. A closed magnetic circuit houses the magnetic body 1b and the air-core coil 2b by the plate 16 and the coupling member 11, and also houses the magnetic body 1a and the air-core coil 2a by the fixed plate 7, the cylindrical case 10, the partition plate 16, and the coupling member 11. A closed magnetic circuit is constructed in each case to prevent magnetism from leaking to other parts.
【００２９】図３は、本実施例における磁界強さに対す
るアクチュエータ全体の駆動変位量の関係を示すグラフ
である。ここに、磁界強さは、それぞれの磁性体１ａ，
１ｂに印加する磁界強さであり、磁歪体単体のものに比
べて２倍の変位量が得られることが判る。また空心コイ
ル２ａ，２ｂによりそれぞれ磁界Ｅ０をかけた場合には
、線形特性範囲として±ａ０ の両振幅振動変位を得る
ことができる。この範囲の変位量は、線形範囲なので電
流量に対して最も効率が良い。FIG. 3 is a graph showing the relationship between the drive displacement amount of the entire actuator and the magnetic field strength in this embodiment. Here, the magnetic field strength is for each magnetic body 1a,
It can be seen that the magnetic field strength applied to 1b can obtain twice the amount of displacement compared to a single magnetostrictive body. Further, when a magnetic field E0 is applied by the air-core coils 2a and 2b, a double amplitude vibration displacement of ±a0 can be obtained as a linear characteristic range. Since the amount of displacement in this range is a linear range, it is most efficient with respect to the amount of current.
【００３０】即ち、空心コイル２ａ，２ｂに常に磁界が
Ｅ０ となるように電流を流しておくことによって磁性
体１ａ，１ｂに予め磁気バイアスを印加しておき、この
電流を増減させ、±ｅ０ の磁気変動をさせることによ
り、例えば±ａ０ の両振幅制御制御を行うことができ
、これによって、変位発生手段に永久磁石などの磁界バ
イアスをかけて初期変位を与える必要をなくして、変位
発生手段の変位能力を有効に利用できるばかりでなく、
アクチュエータの軽量化を図ることができる。That is, a magnetic bias is applied in advance to the magnetic bodies 1a and 1b by applying a current to the air-core coils 2a and 2b so that the magnetic field is always E0, and this current is increased and decreased to obtain a value of ±e0. By making magnetic fluctuations, it is possible to perform, for example, double amplitude control of ±a0, which eliminates the need to apply a magnetic field bias such as a permanent magnet to the displacement generating means to give an initial displacement. Not only can displacement capacity be effectively utilized, but
The weight of the actuator can be reduced.
【００３１】なお、磁性体を独立に変位駆動させる必要
のない場合は同一の電源よりそれぞれの空心コイルに電
流を供給しても良い。[0031] If it is not necessary to drive the magnetic bodies to be displaced independently, current may be supplied to each air-core coil from the same power source.
【００３２】このことは、図４に示すように、単一の磁
性体１と空心コイル２を利用した場合も同様である。即
ち、同図において、制御回路１４を介して空心コイル２
に常に一定の電流を駆動電源１３より供給しておくこと
により磁性体１に予め磁気バイアスを印加しておき、制
御回路１４を介して空心コイル２を流れる電流を制御す
ることによって両振幅制御制御を行うことができ、これ
により永久磁石を不要となすことができる。This also applies to the case where a single magnetic body 1 and air-core coil 2 are used, as shown in FIG. That is, in the figure, the air-core coil 2 is connected via the control circuit 14.
By always supplying a constant current from the drive power supply 13 to the magnetic body 1, a magnetic bias is applied in advance to the magnetic body 1, and by controlling the current flowing through the air-core coil 2 via the control circuit 14, double amplitude control is performed. This can eliminate the need for permanent magnets.
【００３３】図５乃至図７は、第２の実施例を示すもの
で、上記第１の実施例と異なる点は、同一の磁歪特性を
有する３本の棒状の磁性体１ａ，１ｂ，１ｃを連結部材
１１を介してその長手方向（変位方向）に直列に連結す
ることによって変位発生手段としての変位発生体１２ｂ
を、前記各磁性体１ａ，１ｂ，１ｃの周囲に夫々配置し
た空心コイル２ａ，２ｂ，２ｃと、この各空心コイル２
ａ，２ｂ，２ｃに独立した電流を供給する駆動電源１３
ａ，１３ｂ，１３ｃと制御回路１４により磁界発生手段
１５ｂを夫々構成した点にある。FIGS. 5 to 7 show a second embodiment, and the difference from the first embodiment is that three rod-shaped magnetic bodies 1a, 1b, 1c having the same magnetostrictive characteristics are used. The displacement generating body 12b serves as a displacement generating means by being connected in series in the longitudinal direction (displacement direction) via the connecting member 11.
, air-core coils 2a, 2b, 2c arranged around each of the magnetic bodies 1a, 1b, 1c, and each air-core coil 2.
A drive power supply 13 that supplies independent currents to a, 2b, and 2c.
A, 13b, 13c and the control circuit 14 constitute magnetic field generating means 15b, respectively.
【００３４】この実施例の場合、図７に示すように、磁
性体単体のものに比べて３倍の変位量が得られることが
判る。In the case of this embodiment, as shown in FIG. 7, it can be seen that a displacement amount three times greater than that obtained using only the magnetic material can be obtained.
【００３５】なお、磁性体を独立に変位駆動させる必要
がなく、同一の磁界を印加するだけの場合は同一の電源
よりそれぞれの空心コイルに電流を供給しても良い。[0035] If it is not necessary to drive the magnetic bodies to be displaced independently, and only the same magnetic field is applied, current may be supplied to each air-core coil from the same power source.
【００３６】図８乃至図１０は、両側から変位を取り出
すようにした第３の実施例を示すものである。FIGS. 8 to 10 show a third embodiment in which displacement is taken out from both sides.
【００３７】即ち、正及び負の異なる磁歪特性を有する
２本の棒状磁性体１ｄ，１ｅ（例えば、一方の磁性体１
ｄは正の磁歪特性を有し、他方の磁性体１ｅは負の磁歪
特性を有する）を、円筒状ケース１０の長さ方向ほぼ中
央に設けた仕切板１７を連結部材１１として、その長手
方向（変位方向）に直列に連結することによって変位発
生手段としての変位発生体１２ｃが構成されている。こ
の各磁性体１ｄ，１ｅの自由端には、可動部材としての
可動ヨーク４が結合され、この各可動ヨーク４には、各
固定板７の中央に穿設した貫通穴７ａを貫通して外部に
突出する出力棒８が夫々連結されているとともに、前記
可動ヨーク４の外周面と円筒状ケース１０の内周面との
間には、弾性体６が介在されている。That is, two rod-shaped magnetic bodies 1d and 1e having different positive and negative magnetostriction characteristics (for example, one magnetic body 1
d has a positive magnetostrictive property, and the other magnetic body 1e has a negative magnetostrictive property), the partition plate 17 provided approximately in the center in the longitudinal direction of the cylindrical case 10 is used as the connecting member 11, and the other magnetic body 1e has a negative magnetostrictive property. By connecting them in series (in the displacement direction), a displacement generating body 12c as a displacement generating means is configured. A movable yoke 4 as a movable member is coupled to the free end of each of the magnetic bodies 1d and 1e. Output rods 8 protruding from each other are connected to each other, and an elastic body 6 is interposed between the outer peripheral surface of the movable yoke 4 and the inner peripheral surface of the cylindrical case 10.
【００３８】一方、前記磁性体１ｄ，１ｅの周囲には、
この各磁性体１ｄ，１ｅにそれぞれ独立した磁界を印加
する空心コイル２ｄ，２ｅが夫々配設され、この各空心
コイル２ｄ，２ｅは、夫々独立した駆動電源１３ｄ，１
３ｅに接続され，更に空心コイル２ａ，２ｂに流れる電
気量を調節する制御回路１４が備えら、これによって磁
界発生手段１５ｃが構成されている。On the other hand, around the magnetic bodies 1d and 1e,
Air-core coils 2d and 2e are provided to apply independent magnetic fields to the magnetic bodies 1d and 1e, respectively.
3e, and further includes a control circuit 14 that adjusts the amount of electricity flowing to the air-core coils 2a and 2b, and constitutes a magnetic field generating means 15c.
【００３９】この実施例の場合、振動制御のように正お
よび負方向に変位させたい場合に使用して最適なもので
、磁界強さに対するアクチュエータ全体の駆動変位量の
関係を示すグラフは、図１０に示すようになる。In the case of this embodiment, it is most suitable for use when displacement in the positive and negative directions is desired, such as in vibration control, and the graph showing the relationship between the drive displacement amount of the entire actuator and the magnetic field strength is 10.
【００４０】この場合、正方向に変位させる場合には、
空心コイル２ｄに電流を流すことにより正方向に変位す
る磁性体（例えば磁性体１ｄ）に磁界を発生させ、負方
向に変位する磁性体（同じく磁性体１ｅ）は、空心コイ
ル２ｅの電流量を０として変位を発生させないようにす
る。また、負方向に変位させる場合には、それぞれの空
心コイル２ｄ，２ｅの電流を逆にすることによりこの目
的を達成することができる。In this case, when displacing in the positive direction,
By passing a current through the air-core coil 2d, a magnetic body (for example, the magnetic body 1d) that is displaced in the positive direction generates a magnetic field, and the magnetic body (also the magnetic body 1e) that is displaced in the negative direction increases the amount of current in the air-core coil 2e. Set it to 0 so that no displacement occurs. Moreover, when displacing in the negative direction, this purpose can be achieved by reversing the currents of the respective air-core coils 2d and 2e.
【００４１】この実施例により、片振幅振動範囲を単体
のみの場合に比べて大きくとることができ、また空心コ
イルや永久磁石によって磁界バイアスを与えることを不
必要となすことができる。[0041] According to this embodiment, the single amplitude vibration range can be made larger than that in the case of only a single element, and it is also possible to make it unnecessary to apply a magnetic field bias using an air-core coil or a permanent magnet.
【００４２】ここに、図１１及び図１２に示すように、
異なる磁歪特性を有する２本づつ計４本の棒状の磁性体
１ｄ，１ｅ，１ｆ，１ｇ（例えば、磁性体１ｄ，１ｆは
正の磁歪特性を有し、磁性体１ｅ，１ｇは負の磁歪特性
を有する）を使用し、同一磁歪特性を有するものが仕切
板１７を中心に左右に位置するように連結して変位発生
手段としての変位発生体１２ｄを、前記各磁性体１ｄ，
１ｅ，１ｆ，１ｇの周囲に夫々配置した空心コイル２ｄ
，２ｅ，２ｆ，２ｇと、この各空心コイル２ｄ，２ｅ，
２ｆ，２ｇに独立した電流を供給する駆動電源１３ｄ，
１３ｅ，１３ｆ，１３ｇと制御回路１４により磁界発生
手段１５ｄを夫々構成することによって、前記第３の実
施例の２倍の変位を得るようにすることができる。Here, as shown in FIGS. 11 and 12,
A total of four rod-shaped magnetic bodies 1d, 1e, 1f, and 1g, two each having different magnetostrictive properties (for example, the magnetic bodies 1d and 1f have positive magnetostrictive properties, and the magnetic bodies 1e and 1g have negative magnetostrictive properties) ), and the displacement generating bodies 12d as displacement generating means are connected so that those having the same magnetostrictive characteristics are located on the left and right sides of the partition plate 17, and each of the magnetic bodies 1d,
Air-core coils 2d placed around 1e, 1f, and 1g, respectively.
, 2e, 2f, 2g, and each air core coil 2d, 2e,
A drive power source 13d that supplies independent currents to 2f and 2g,
13e, 13f, 13g and the control circuit 14 constitute the magnetic field generating means 15d, thereby making it possible to obtain twice the displacement as in the third embodiment.
【００４３】また、この図１１及び図１２に示す実施例
のうち、最側方に位置する１つの磁性体１ｆまたは１ｇ
及びこれに伴う空心コイル１３ｆまたは１３ｇ等の付属
品を取り除くことにより、または空心コイル１３ｆまた
は１３ｇへの供給電流を０にすることにより、図１３（
ａ）または（ｂ）に示すような磁界強さに対するアクチ
ュエータ全体の駆動変位量の関係を得ることができる。Furthermore, among the embodiments shown in FIGS. 11 and 12, one magnetic body 1f or 1g located at the sidemost side
13(
The relationship between the drive displacement amount of the entire actuator and the magnetic field strength as shown in a) or (b) can be obtained.
【００４４】即ち同図（ａ）に示すものは、磁性体１ｇ
（磁性体１ｇは、負の磁歪特性を有する）及びその付属
品を取り除いた場合、または空心コイル１３ｇへの供給
電流を０にした場合であり、同図（ｂ）に示すものは、
磁性体１ｆ（磁性体１ｆは、正の磁歪特性を有する）及
びその付属品を取り除いた場合、または空心コイル１３
ｆへの供給電流を０にした場合のものである。That is, what is shown in the same figure (a) is 1g of magnetic material
(The magnetic material 1g has a negative magnetostrictive characteristic) and its accessories are removed, or the current supplied to the air-core coil 13g is reduced to 0, and what is shown in FIG.
When the magnetic body 1f (the magnetic body 1f has positive magnetostrictive characteristics) and its accessories are removed, or when the air-core coil 13
This is the case when the current supplied to f is set to 0.
【００４５】[0045]
【発明の効果】以上詳述したように、請求項１に係る本
発明によれば、棒状の磁性体単体のみを設置したアクチ
ュエータの駆動変位量に比べて、直列に設置した棒状の
磁性体の本数倍の駆動変位を得ることができるので、駆
動変位の絶対量を大きくとることができ、これによって
振動制御アクチュエータとしての制御能力を大幅に向上
させることができる。従って、変位量に余裕が生まれる
ので、磁歪材料の最大歪み限界付近の能力を使わなくて
も済むようになり、大きな制御電流を不必要とすことが
でき、このため空心コイルに電力を供給する駆動電源部
の小型化を図ることができる。[Effects of the Invention] As described in detail above, according to the present invention according to claim 1, the drive displacement amount of the rod-shaped magnetic bodies installed in series is smaller than that of the actuator in which only the rod-shaped magnetic bodies are installed alone. Since it is possible to obtain a drive displacement that is twice as large as the number of actuators, the absolute amount of drive displacement can be increased, thereby greatly improving the control ability of the vibration control actuator. Therefore, since there is a margin in the amount of displacement, it is no longer necessary to use the capacity near the maximum strain limit of the magnetostrictive material, and a large control current can be unnecessary, which supplies power to the air-core coil. The drive power supply section can be downsized.
【００４６】また、請求項２に係る本発明によれば、ア
クチュエータとしての駆動変位を簡単に正方向および負
方向に発生させることができるので、両振幅振動制御が
可能となり、振動制御用アクチュエータとしての能力を
大幅に向上させることできる。しかも、両振幅振動に関
して、変位発生手段に永久磁石などや空心コイルに初期
バイアス電流をかけることによって磁界バイアスをかけ
て初期変位を与える必要がないため、使用電力量を抑制
でき変位発生手段の変位能力を有効に利用できアクチュ
エータとしての小型軽量化を図ることができる。Further, according to the present invention according to claim 2, since the drive displacement as an actuator can be easily generated in the positive direction and the negative direction, double amplitude vibration control is possible, and the actuator can be used as an actuator for vibration control. ability can be significantly improved. Furthermore, regarding double-amplitude vibration, there is no need to apply an initial bias current to a permanent magnet or an air-core coil for the displacement generating means to apply a magnetic field bias to give the initial displacement, so power consumption can be suppressed and the displacement of the displacement generating means can be reduced. The capacity can be used effectively and the actuator can be made smaller and lighter.
【００４７】更に、請求項３に係る本発明によれば、変
位発生手段に永久磁石などの磁界バイアスをかけて初期
変位を与えことなく、両振幅振動を達成することができ
、これによって、変位発生手段の変位能力を有効に利用
できるとともに、アクチュエータとしての小型軽量化を
図ることができる。Furthermore, according to the present invention according to claim 3, it is possible to achieve double amplitude vibration without applying an initial displacement by applying a magnetic field bias such as a permanent magnet to the displacement generating means, and thereby, the displacement The displacement capability of the generating means can be effectively utilized, and the actuator can be made smaller and lighter.
【図１】本発明の第１の実施例を示す断面図。FIG. 1 is a sectional view showing a first embodiment of the present invention.
【図２】同じく、基本原理の説明に付する原理図。FIG. 2 is a principle diagram for explaining the basic principle.
【図３】同じく、制御磁界強さと変位量との関係を示す
グラフ。FIG. 3 is a graph showing the relationship between control magnetic field strength and displacement amount.
【図４】空心コイルによる制御の原理図。FIG. 4 is a diagram showing the principle of control using an air-core coil.
【図５】第２の実施例を示す断面図[Fig. 5] Cross-sectional view showing the second embodiment
【図６】同じく、基本原理の説明に付する原理図。FIG. 6 is a principle diagram for explaining the basic principle.
【図７】同じく、制御磁界強さと変位量との関係を示す
グラフ。FIG. 7 is a graph showing the relationship between control magnetic field strength and displacement amount.
【図８】第３の実施例を示す断面図。FIG. 8 is a sectional view showing a third embodiment.
【図９】同じく、基本原理の説明に付する原理図。FIG. 9 is a principle diagram for explaining the basic principle.
【図１０】同じく、制御磁界強さと変位量との関係を示
すグラフ。FIG. 10 is a graph showing the relationship between control magnetic field strength and displacement amount.
【図１１】第４の実施例を示す断面図。FIG. 11 is a sectional view showing a fourth embodiment.
【図１２】同じく、基本原理の説明に付する原理図。FIG. 12 is a principle diagram for explaining the basic principle.
【図１３】異なる制御磁界強さと変位量との関係を示す
グラフ。FIG. 13 is a graph showing the relationship between different control magnetic field strengths and displacement amounts.
【図１４】従来例を示す断面図。FIG. 14 is a sectional view showing a conventional example.
【図１５】他の従来例を示す断面図。FIG. 15 is a sectional view showing another conventional example.
【図１６】従来例の制御磁界強さと変位量との関係を示
すグラフ。FIG. 16 is a graph showing the relationship between control magnetic field strength and displacement amount in a conventional example.
１，１ａ，１ｂ，１ｃ，１ｄ，１ｅ，１ｆ，１ｇ 磁
性体
２，２ａ，２ｂ，２ｃ，２ｄ，２ｅ，２ｆ，２ｇ 空
心コイル
４ 可動ヨーク（可動部材）
１０ 円筒状ケース
１１ 連結部材
１２ａ，１２ｂ，１２ｃ，１２ｄ 変位発生体（変位
発生手段）
１３，１３ａ，１３ｂ，１３ｃ，１３ｄ，１３ｅ，１３
ｆ，１３ｇ 駆動電源
１４ 制御回路1, 1a, 1b, 1c, 1d, 1e, 1f, 1g Magnetic body 2, 2a, 2b, 2c, 2d, 2e, 2f, 2g Air-core coil 4 Movable yoke (movable member) 10 Cylindrical case 11 Connecting member 12a, 12b, 12c, 12d Displacement generating body (displacement generating means) 13, 13a, 13b, 13c, 13d, 13e, 13
f, 13g Drive power supply 14 Control circuit
Claims (3)
と、前記変位発生手段に固定され該変位発生手段の変位
方向に移動可能な可動部材と、前記変位発生手段の周囲
に配設され該変位発生手段に磁界を印加する磁界発生手
段と、前記変位発生手段及び磁界発生手段を収納し閉磁
気回路を構成する磁気回路構成部材とを具備する磁歪式
アクチュエータであって、同一の磁歪特性を有する少な
くとも２本以上の棒状の磁性体を連結部材を介して変位
方向に直列に連結して前記変位発生手段を構成するとと
もに、前記磁界発生手段で前記各磁性体に独立して磁界
を印加するようにしたことを特徴とする磁歪式アクチュ
エータ。1. Displacement generating means made of a magnetic material having magnetostriction; a movable member fixed to the displacement generating means and movable in the displacement direction of the displacement generating means; A magnetostrictive actuator comprising a magnetic field generating means for applying a magnetic field to the displacement generating means, and a magnetic circuit component accommodating the displacement generating means and the magnetic field generating means and forming a closed magnetic circuit, the actuator having the same magnetostrictive characteristics. The displacement generating means is configured by connecting at least two or more rod-shaped magnetic bodies in series in the displacement direction via a connecting member, and the magnetic field generating means applies a magnetic field independently to each of the magnetic bodies. A magnetostrictive actuator characterized by:
と、前記変位発生手段に固定され該変位発生手段の変位
方向に移動可能な可動部材と、前記変位発生手段の周囲
に配設され該変位発生手段に磁界を印加する磁界発生手
段と、前記変位発生手段及び磁界発生手段を収納し閉磁
気回路を構成する磁気回路構成部材とを具備する磁歪式
アクチュエータであって、異なる磁歪特性を有する少な
くとも２本以上の棒状の磁性体を連結部材を介して変位
方向に直列に連結して前記変位発生手段を構成するとと
もに、前記磁界発生手段で前記各磁性体に独立して磁界
を印加するようにしたことを特徴とする磁歪式アクチュ
エータ。2. Displacement generating means made of a magnetic material having magnetostriction; a movable member fixed to the displacement generating means and movable in the displacement direction of the displacement generating means; A magnetostrictive actuator comprising a magnetic field generating means for applying a magnetic field to the displacement generating means, and a magnetic circuit component accommodating the displacement generating means and the magnetic field generating means and forming a closed magnetic circuit, the magnetostrictive actuator having different magnetostrictive characteristics. The displacement generating means is configured by connecting at least two or more rod-shaped magnetic bodies in series in the displacement direction via a connecting member, and the magnetic field generating means applies a magnetic field independently to each of the magnetic bodies. A magnetostrictive actuator characterized by:
と、前記変位発生手段に固定され該変位発生手段の変位
方向に移動可能な可動部材と、前記変位発生手段の周囲
に配設され該変位発生手段に磁界を印加する磁界発生手
段と、前記変位発生手段及び磁界発生手段を収納し閉磁
気回路を構成する磁気回路構成部材とを具備する磁歪式
アクチュエータであって、前記磁界発生手段を、前記変
位発生手段の周囲に配置したそれぞれ独立した空心コイ
ルとこの空心コイルを流れる電流を制御する制御回路と
によって構成し、前記空心コイルに常に一定の電流を流
しておくことによって前記変位発生手段に磁気バイアス
を印加するようにしたことを特徴とする磁歪式アクチュ
エータ。3. Displacement generating means made of a magnetic material having magnetostriction; a movable member fixed to the displacement generating means and movable in the displacement direction of the displacement generating means; A magnetostrictive actuator comprising a magnetic field generating means for applying a magnetic field to the displacement generating means, and a magnetic circuit component accommodating the displacement generating means and the magnetic field generating means and forming a closed magnetic circuit, the magnetostrictive actuator comprising: , constituted by independent air-core coils arranged around the displacement generating means and a control circuit for controlling the current flowing through the air-core coils, and by constantly flowing a constant current through the air-core coil, the displacement generating means A magnetostrictive actuator characterized in that a magnetic bias is applied to the magnetostrictive actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3106069A JPH04334986A (en) | 1991-05-10 | 1991-05-10 | Magnetostrictive type actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3106069A JPH04334986A (en) | 1991-05-10 | 1991-05-10 | Magnetostrictive type actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04334986A true JPH04334986A (en) | 1992-11-24 |
Family
ID=14424315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3106069A Pending JPH04334986A (en) | 1991-05-10 | 1991-05-10 | Magnetostrictive type actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04334986A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994020992A1 (en) * | 1993-03-04 | 1994-09-15 | American Superconductor Corporation | Magnetostrictive superconducting actuator |
| WO2010029699A1 (en) * | 2008-09-10 | 2010-03-18 | パナソニック株式会社 | Magnetorestrictive actuator and speaker and device using said magnetorestrictive actuator |
| JP2010067734A (en) * | 2008-09-10 | 2010-03-25 | Panasonic Corp | Magnetostriction actuator |
-
1991
- 1991-05-10 JP JP3106069A patent/JPH04334986A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994020992A1 (en) * | 1993-03-04 | 1994-09-15 | American Superconductor Corporation | Magnetostrictive superconducting actuator |
| WO2010029699A1 (en) * | 2008-09-10 | 2010-03-18 | パナソニック株式会社 | Magnetorestrictive actuator and speaker and device using said magnetorestrictive actuator |
| JP2010067734A (en) * | 2008-09-10 | 2010-03-25 | Panasonic Corp | Magnetostriction actuator |
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