JPH04316Y2 - - Google Patents

Description

【考案の詳細な説明】 ［産業上の利用分野］ 本考案は固定側部材に対し移動側部材を粗動及
び微動させる装置に係り、特に、例えば三次元測
定機に使用される粗微動装置に関し、短いストロ
ークを高速度で微動させるために利用できる。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a device for coarsely and finely moving a movable member relative to a fixed member, and particularly relates to a coarse and fine movement device used in, for example, a coordinate measuring machine. , can be used to make small strokes at high speeds.

［背景技術とその問題点］ 第３図は従来の粗微動装置が使用されている三
次元測定機を示す。被測定物が載置される載置盤
５１の両側には案内レール５２が設けられ、これ
らの案内レール５２には左右の支柱５３，５４と
レール部材５５とからなる門型の測定子支持体５
６の左右の脚部５６Ａ，５６Ｂが移動自在に係合
している。レール部材５５にはスライダ５７が摺
動自在に取付けられ、スライダ５７に設けられた
スピンドル支持部材５８にスピンドル５９が上下
移動自在に支持され、スピンドル５９の下端に測
定子６０が保持されている。[Background Art and its Problems] FIG. 3 shows a three-dimensional measuring machine using a conventional coarse and fine movement device. Guide rails 52 are provided on both sides of the mounting board 51 on which the object to be measured is placed, and these guide rails 52 are provided with a gate-shaped probe support consisting of left and right columns 53, 54 and a rail member 55. 5
The left and right legs 56A, 56B of 6 are movably engaged. A slider 57 is slidably attached to the rail member 55, a spindle 59 is supported by a spindle support member 58 provided on the slider 57 so as to be movable up and down, and a probe 60 is held at the lower end of the spindle 59.

測定子支持体５６が案内レール５２に沿つて移
動することにより測定子６０はＹ軸方向に変位
し、測定子６０のＸ軸方向変位はスライダ５７が
レール部材５５に沿つて移動することにより、ま
たＺ軸方向変位はスピンドル５９がスピンドル支
持部材５８に対し垂直方向に移動することにより
それぞれ生ずる。以上のＸ軸、Ｙ軸、Ｚ軸のそれ
ぞれの方向における移動は検出器で検出され、載
置盤５１に載置された被測定物に測定子６０が接
触せしめられて移動することにより被測定物の形
状等が三次元計測される。 As the measuring element support 56 moves along the guide rail 52, the measuring element 60 is displaced in the Y-axis direction, and as the slider 57 moves along the rail member 55, the measuring element 60 is displaced in the X-axis direction. Further, the displacement in the Z-axis direction is caused by the movement of the spindle 59 in a direction perpendicular to the spindle support member 58, respectively. The above-mentioned movements in the directions of the X-axis, Y-axis, and Z-axis are detected by a detector, and the measurement head 60 is brought into contact with the object to be measured placed on the mounting plate 51 and moves. The shape of an object is measured in three dimensions.

粗微動装置は載置盤５１に対し測定子支持体５
６をＹ軸方向に移動させるために使用され、操作
者が測定子支持体５６を手押し操作して測定子６
０を被測定物の被測定箇所に近い所まで粗動させ
た後、微動操作に切換えられる。 The coarse and fine movement device has a measuring head support 5 on a mounting plate 51.
6 in the Y-axis direction, and the operator manually pushes the measuring stylus support 56 to move the measuring stylus 6 in the Y-axis direction.
After coarsely moving the 0 to a place close to the measured part of the object to be measured, the operation is switched to fine movement.

第４図、第５図は粗微動装置の構造を示す。前
記測定子支持体５６の脚部５６Ｂの内部にはフレ
ーム部材６１が配置され、このフレーム部材６１
には微動摘み６２のねじ杆部６２Ａが螺合してお
り、微動摘み６２は脚部５６Ｂに定位置で回転自
在に取付けられている。フレーム部６１は２個の
アーム部６１Ａ，６２Ｂを有する略Ｃの字形状
で、アーム部６１Ａには軸６３Ａを中心に揺動自
在な駒部材６３が設けられている。この駒部材６
３にはクランプ摘み６４のねじ杆部６４Ａが螺合
している。 4 and 5 show the structure of the coarse and fine movement device. A frame member 61 is disposed inside the leg portion 56B of the probe support 56, and this frame member 61
A threaded rod portion 62A of the fine movement knob 62 is screwed into the holder, and the fine movement knob 62 is rotatably attached to the leg portion 56B at a fixed position. The frame portion 61 has a substantially C-shape having two arm portions 61A and 62B, and the arm portion 61A is provided with a bridge member 63 that is swingable about a shaft 63A. This piece member 6
3 is screwed with a threaded rod portion 64A of a clamp knob 64.

測定作業を行う場合には前述の通り手押し操作
で測定子支持体５６を粗動させて測定子６０を被
測定物の被測定箇所に近づけ、この後クランプ摘
み６４を回転操作する。これによりクランプ摘み
６４のねじ杆部６４Ａは前進し、フレーム部材６
１が前記ねじ杆部６２Ａを中心に揺動することに
よりねじ杆部６４Ａの先端とフレーム部６１のア
ーム部６１Ｂの先端とで案内レール５２がクラン
プされ、フレーム部材６１は案内レール５２と結
合一体化される。ついで微動摘み６２を回転操作
すると、微動摘み６２は脚部５６Ｂに対し軸方向
に移動不能になつているため、ねじ杆部６２Ａの
ねじ送り作用により測定子支持体５６は微動摘み
６２と一体に移動し、測定子６０が被測定物の被
測定箇所まで微動送りされる。 When performing measurement work, as described above, the measuring element support 56 is roughly moved by manual operation to bring the measuring element 60 close to the measuring point of the object to be measured, and then the clamp knob 64 is rotated. As a result, the threaded rod portion 64A of the clamp knob 64 moves forward, and the frame member 6
1 swings around the screw rod portion 62A, the guide rail 52 is clamped by the tip of the screw rod portion 64A and the tip of the arm portion 61B of the frame portion 61, and the frame member 61 is integrally connected to the guide rail 52. be converted into Next, when the fine adjustment knob 62 is rotated, since the fine adjustment knob 62 cannot be moved in the axial direction with respect to the leg portion 56B, the probe support 56 is integrated with the fine adjustment knob 62 due to the screw feeding action of the threaded rod portion 62A. The probe 60 is moved slightly and sent to the measuring point of the object to be measured.

以上の従来技術においては、装置が複雑で製造
が面倒であるとともに、測定子支持体５６の微動
が微動摘み６２の回転操作により行うため、測定
子支持体５６にはこの回転操作によりねじりモー
メントが作用する。このねじりモーメントは測定
子支持体５６にとつて極めて小さなものでこのモ
ーメントにより測定子支持体５６に生ずる姿勢変
化量は微小量であるが、三次元測定機は高精度で
被測定物を測定するため測定子支持体５６の微小
姿勢変化による測定子６０の位置ずれにより測定
結果に誤差が生ずる虞れがある。 In the above conventional technology, the device is complicated and manufacturing is troublesome, and since the fine movement of the probe support 56 is performed by rotating the fine adjustment knob 62, a torsional moment is generated in the probe support 56 due to this rotation operation. act. This torsional moment is extremely small for the probe support 56, and the amount of attitude change caused in the probe support 56 due to this moment is minute, but the coordinate measuring machine measures the object with high precision. Therefore, there is a possibility that an error may occur in the measurement result due to a positional shift of the measuring element 60 due to a minute change in the posture of the measuring element support 56.

以上の問題点に加えて従来技術では微動摘み６
２のねじピツチによるねじ送り作用で微動を行な
わせるため、この微動速度が低速であるという問
題点があつた。本来、微動とは短いストロークを
移動させるのに移動ストロークが無制限になると
オーバーランが生じ、例えば三次元測定機におい
ては測定子の破損事故等が生ずるため、ストロー
クを所定以内に短く抑えることを意味すると解さ
れる。しかし、概して微動はねじピツチによるね
じ送りで行われている場合が多いため、一般的に
は微動とは移動速度を低速化するということをも
含むと解されている。 In addition to the above problems, the conventional technology
Since the fine movement is performed by the screw feeding action of the second screw pitch, there is a problem that the speed of this fine movement is low. Normally, fine movement means to keep the stroke short within a predetermined range, because if the movement stroke becomes unlimited even though it moves a short stroke, overrun will occur, and for example, in a coordinate measuring machine, damage to the probe may occur. Then it will be understood. However, since fine movement is generally performed by screw feeding using a screw pitch, it is generally understood that fine movement also includes slowing down the moving speed.

しかしながら、微動といえども作業効率の向上
を図るために高速化することが望ましく、第４
図、第５図の従来技術では移動速度の高速化によ
る作業能率の向上を図ることができなかつた。 However, even with slight movements, it is desirable to increase the speed in order to improve work efficiency.
In the conventional techniques shown in FIGS. 5 and 5, it was not possible to improve work efficiency by increasing the moving speed.

［考案の目的］ 本考案は以上の如き従来の問題点に鑑みこれを
解決するためになされたもので、本考案の目的
は、構造が簡単で製造が容易であつたり、また移
動側部材にはねじりモーメント等の悪影響を生じ
させる力が作用せず移動に必要な力のみが作用
し、従つて例えば測定誤差の如き問題を解決で
き、更に、移動側部材を短いストローク移動させ
る微動であつても移動速度を速くでき、作業効率
の向上を図り得る粗微動装置を提供するところに
ある。[Purpose of the invention] The present invention was devised to solve the above-mentioned conventional problems. In this case, only the force necessary for movement is applied without applying a force that causes an adverse effect such as a torsional moment, so problems such as measurement errors can be solved, and furthermore, it is a fine movement that moves the moving member in a short stroke. Another object of the present invention is to provide a coarse and fine movement device that can increase the moving speed and improve work efficiency.

［問題点を解決するための手段および作用］ このため本考案の構成は、固定側部材と、この
固定側部材の長手方向に沿つて移動自在な移動側
部材と、前記固定側部材の長手方向に架設され、
一端部が傾斜面とされた駆動棒と、この駆動棒の
他端部に係合するとともにこの駆動棒を他端部側
から一端部側に付勢する付勢手段と、前記固定側
部材に設けられ一端部が前記駆動棒の傾斜面と係
合可能な傾斜面に形成されこれらの傾斜面の係合
により前記付勢手段に抗して前記駆動棒を強制直
線移動させる押し部材を備えた移動手段と、前記
移動側部材と前記駆動棒とを解除可能に結合一体
化するクランプ手段とからなり、手操作で移動側
部材を粗動させた後、前記クランプ手段で移動側
部材と駆動棒とを結合一体化し、前記移動手段の
操作によつて駆動棒を移動させることにより移動
側部材を微動させるところに特徴を有する。[Means and effects for solving the problem] Therefore, the configuration of the present invention includes a fixed side member, a movable side member that is movable along the longitudinal direction of the fixed side member, and a movable side member that is movable along the longitudinal direction of the fixed side member. It was constructed in
a drive rod having an inclined surface at one end; a biasing means that engages with the other end of the drive rod and biases the drive rod from the other end toward the one end; A pushing member is provided, one end of which is formed into an inclined surface that can be engaged with the inclined surface of the driving rod, and which forces the driving rod to move linearly against the urging means by engagement of these inclined surfaces. It consists of a moving means, and a clamping means for releasably coupling and integrating the moving member and the driving rod, and after the moving member is coarsely moved manually, the moving member and the driving rod are clamped together by the clamping means. It is characterized in that the movable side member is moved slightly by moving the drive rod by operating the moving means.

［実施例］ 第１図は本実施例にかかわる粗微動装置が適用
された三次元測定機を示す。この三次元測定機は
被測定物が載置される載置盤１の上面に移動可能
に載せられている。[Example] Fig. 1 shows a three-dimensional measuring machine to which a coarse and fine movement device according to this example is applied. This three-dimensional measuring machine is movably mounted on the upper surface of a mounting plate 1 on which an object to be measured is mounted.

その長手方向がＸ軸方向である梁部材２の両端
には支柱２Ｃ，２Ｄが取付けられ、梁部材２は支
柱２Ｃ，２Ｄで水平に支持されている。梁部材２
にはスライダ３が摺動自在に被冠され、Ｘ軸方向
に移動自在なこのスライダ３は下段部４と上段部
５とからなる。上段部５には梁部材２が挿通する
下段部４のガイド孔６と直角をなすガイド孔７が
形成され、このガイド孔７にスピンドル保持部材
８が摺動自在に挿通され、スピンドル保持部材８
はＹ軸方向に移動自在になつている。スピンドル
保持部材８の一方の端部にはスピンドルケース９
が取付けられ、このスピンドルケース９にスピン
ドル１０が垂直方向であるＺ軸方向に移動自在に
配置され、スピンドル１０の下端に測定子１１が
設けられている。 Supports 2C and 2D are attached to both ends of the beam member 2 whose longitudinal direction is the X-axis direction, and the beam member 2 is supported horizontally by the supports 2C and 2D. Beam member 2
A slider 3 is slidably mounted on the slider 3, and the slider 3, which is movable in the X-axis direction, is composed of a lower part 4 and an upper part 5. A guide hole 7 is formed in the upper part 5 and is perpendicular to the guide hole 6 of the lower part 4 through which the beam member 2 is inserted, and a spindle holding member 8 is slidably inserted into this guide hole 7.
is movable in the Y-axis direction. A spindle case 9 is attached to one end of the spindle holding member 8.
is attached to the spindle case 9, and a spindle 10 is disposed to be movable in the vertical Z-axis direction, and a measuring element 11 is provided at the lower end of the spindle 10.

測定子１１のＸ軸方向移動はスライダ３が梁部
材２に対し移動することにより、またＹ軸方向移
動はスピンドル保持部材８がスライダ３に対し移
動することにより、更にＺ軸方向移動はスピンド
ル１０がスピンドルケース９に対し移動すること
によりそれぞれ行われ、この三次元移動による変
位量が図示しない検出器で検出することにより被
測定物の形状等が計測される。 Movement of the probe 11 in the X-axis direction is caused by the slider 3 moving relative to the beam member 2, movement in the Y-axis direction is caused by the movement of the spindle holding member 8 relative to the slider 3, and further movement in the Z-axis direction is caused by the movement of the spindle 10. is performed by moving relative to the spindle case 9, and the shape of the object to be measured is measured by detecting the amount of displacement due to this three-dimensional movement with a detector (not shown).

本実施例の粗微動装置１２はスライダ３を梁部
材２に沿つてＸ軸方向に移動させるために使用さ
れる。従つて本実施例では梁部材２が固定側部材
で、スライダ３が移動側部材である。 The coarse and fine movement device 12 of this embodiment is used to move the slider 3 along the beam member 2 in the X-axis direction. Therefore, in this embodiment, the beam member 2 is the fixed member, and the slider 3 is the movable member.

梁部材２の長手方向両側の上面には突部２Ａ，
２Ｂが一体に形成され、これらの突部２Ａ，２Ｂ
に駆動棒１３が架け渡される。このように梁部材
２の長手方向に架設された駆動棒１３の一方の端
部は第２図の通り突部２Ａに形成された係合穴１
４に摺動自在に挿入され、係合穴１４の内部に配
置された付勢手段であるばね１５により駆動棒１
３は常に第２図中右方向へ付勢されている。駆動
棒１３の他方の端部は突部２Ｂに形成された孔１
６に挿入され、また突部２Ｂには凹部１７が形成
され、この凹部１７にケース１８が収納配置され
る。ケース１８には窓孔１８Ａが設けられ、この
窓孔１８Ａから駆動棒１３の上記他方の端部がケ
ース１８の内部に臨んでいる。 Projections 2A are provided on the upper surface of both sides in the longitudinal direction of the beam member 2,
2B are integrally formed, and these protrusions 2A, 2B
A drive rod 13 is spanned between. One end of the drive rod 13 installed in the longitudinal direction of the beam member 2 is connected to an engagement hole 1 formed in the projection 2A as shown in FIG.
4 and is slidably inserted into the drive rod 1 by a spring 15 serving as a biasing means disposed inside the engagement hole 14.
3 is always biased toward the right in FIG. The other end of the drive rod 13 is connected to the hole 1 formed in the protrusion 2B.
A recess 17 is formed in the protrusion 2B, and a case 18 is housed in the recess 17. The case 18 is provided with a window hole 18A, through which the other end of the drive rod 13 faces the inside of the case 18.

ケース１８の内部には押し部材１９の膨大部１
９Ａがばね２０で常時上方へ弾発付勢されながら
上下摺動自在に収納され、この膨大部１９Ａには
傾斜面１９Ｂが形成され、駆動棒１３の端部はこ
の傾斜面１９Ｂと対応した傾斜面１３Ａとなつて
いる。 Inside the case 18, there is a large part 1 of the pushing member 19.
9A is housed so as to be able to slide up and down while being always elastically biased upward by a spring 20, and an inclined surface 19B is formed in this enlarged portion 19A, and the end of the drive rod 13 has an inclined surface corresponding to this inclined surface 19B. The surface is 13A.

以上の押し部材１９、ばね２０等により駆動棒
１３を前記ばね１５に抗して強制的に直線移動さ
せる移動手段２１が構成される。 The pushing member 19, spring 20, etc. described above constitute a moving means 21 for forcibly moving the drive rod 13 in a straight line against the spring 15.

前記スライダ３にはクランプ摘み２２が設けら
れ、このクランプ摘み２２はスライダ３と駆動棒
１３とを解除可能に結合一体化するクランプ手段
を構成する。また梁部材２の前記突部２Ｂには固
定摘み２３が設けられ、この固定摘み２３は駆動
棒１３を使用しないときに駆動棒１３ががたつく
のを防止するためのものである。 The slider 3 is provided with a clamp knob 22, and the clamp knob 22 constitutes a clamping means for releasably coupling and integrating the slider 3 and the drive rod 13. Further, a fixing knob 23 is provided on the protrusion 2B of the beam member 2, and this fixing knob 23 is for preventing the drive rod 13 from shaking when the drive rod 13 is not in use.

前記スライダ３を梁部材２に対し粗動させる場
合にはクランプ摘み２２をゆるめ、手押し操作で
スライダ３を移動させて前記測定子１１を被測定
物の被測定箇所の近くまで近づける。この後、ク
ランプ摘み２２を回転操作してスライダ３と駆動
棒１３とを結合一体化し、また固定摘み２３をゆ
るめ、ついで押し部材１９を押し操作する。これ
により押し部材１９の傾斜面１９Ｂが駆動棒１３
の傾斜面１３Ａに当接してこれらの傾斜面１９
Ｂ，１３Ａのカム作用により、駆動棒１３は第２
図中左方向へ強制的に移動せしめられる。この結
果、スライダ３は駆動棒１３と一体に移動し、測
定子１１は被測定物の被測定箇所に達する。押し
部材１９に加えている押し力を解除しクランプ摘
み２２をゆるめると、駆動棒１３はばね１５の付
勢力で旧位に戻る。 When the slider 3 is to be coarsely moved relative to the beam member 2, the clamp knob 22 is loosened, and the slider 3 is moved by manual operation to bring the measuring stylus 11 close to the measuring point of the object. Thereafter, the clamp knob 22 is rotated to couple and integrate the slider 3 and the drive rod 13, the fixed knob 23 is loosened, and the push member 19 is then pushed. As a result, the inclined surface 19B of the pushing member 19
These inclined surfaces 19 come into contact with the inclined surfaces 13A of
Due to the cam action of B and 13A, the drive rod 13 moves to the second position.
It is forced to move to the left in the figure. As a result, the slider 3 moves together with the drive rod 13, and the probe 11 reaches the measuring point of the object. When the pushing force applied to the pushing member 19 is released and the clamp knob 22 is loosened, the driving rod 13 returns to its original position by the biasing force of the spring 15.

以上の押し部材１９の押し操作によるスライダ
３の微動は傾斜面１９Ｂ，１３Ａの長さに対応し
た短いストローク分だけ行われるとともに、スラ
イダ３の移動速度は押し部材１９の押し速度と対
応した速い速度となり、測定作業が迅速に行われ
る。また、押し部材１９を押し操作したときに駆
動棒１３には直線移動力のみが作用し回転力等が
作用しないため、スライダ３には移動に必要な力
のみが加わり例えばねじりモーメントは加わら
ず、従つてスライダ３が姿勢変化することはな
く、測定子１１の位置ずれによる測定誤差が発生
する虞れはない。 The slight movement of the slider 3 due to the above pushing operation of the pushing member 19 is performed by a short stroke corresponding to the length of the inclined surfaces 19B and 13A, and the moving speed of the slider 3 is a fast speed corresponding to the pushing speed of the pushing member 19. Therefore, measurement work can be carried out quickly. Furthermore, when the push member 19 is pushed, only a linear force is applied to the drive rod 13 and no rotational force is applied to the drive rod 13. Therefore, only the force necessary for movement is applied to the slider 3, and no torsion moment is applied to the slider 3. Therefore, the slider 3 does not change its posture, and there is no possibility that measurement errors due to positional deviation of the measuring element 11 will occur.

以上説明した粗微動装置１２は第１図の通り梁
部材２に２個設けられる。即ち、駆動棒１３は平
行に２本存在し、これらの駆動棒１３毎に前記ば
ね１５による付勢手段と押し部材１９等による移
動手段２１等が設けられる。第１図の通りこれら
の移動手段２１等は互いに梁部材２の長手方向反
対側に配置され、従つて２本の駆動棒１３につい
て付勢手段の付勢方向及び移動手段２１の強制直
線移動方向は互いに反対方向になつている。この
ためスライダ３を梁部材２の長手方向のいずれの
方向にも微動させることができる。 Two of the coarse and fine movement devices 12 described above are provided on the beam member 2 as shown in FIG. That is, there are two drive rods 13 in parallel, and each of these drive rods 13 is provided with a biasing means using the spring 15, a moving means 21 using the pushing member 19, and the like. As shown in FIG. 1, these moving means 21 and the like are arranged on opposite sides of the beam member 2 in the longitudinal direction, and therefore, the two drive rods 13 are biased in the biasing direction of the biasing means and in the forced linear movement direction of the moving means 21. are in opposite directions. Therefore, the slider 3 can be slightly moved in any longitudinal direction of the beam member 2.

以上のように粗微動装置の移動手段は任意な構
成とすることができ、要すれば駆動棒を付勢手段
に抗して強制直線移動させることができるもので
あればよい。 As described above, the moving means of the coarse and fine movement device can have any configuration, as long as it can forcibly move the drive rod in a straight line against the urging means, if necessary.

前記実施例は粗微動装置を三次元測定機のスラ
イダをＸ軸方向に移動させるために使用したが、
本考案にかかわる粗微動装置は例えばＹ軸方向へ
の移動のためにも使用できる。また前記三次元測
定機は載置盤の上面に全体が移動可能に載置され
るタイプであつたが、本考案にかかわる粗微動装
置はこれ以外の三次元測定機、例えば第４図の従
来技術で示されたように載置盤の両側に案内レー
ルを設けてこの案内レールに沿つて測定子支持体
を移動させるタイプの三次元測定機にも適用でき
る。更に本考案にかかわる粗微動装置は三次元測
定機以外の装置、機械等にも適用でき、要すれば
移動側部材に粗動と微動とを行わせることが必要
な任意な装置、機械等に適用できる。 In the above embodiment, the coarse and fine movement device was used to move the slider of the coordinate measuring machine in the X-axis direction, but
The coarse and fine movement device according to the present invention can also be used for movement in the Y-axis direction, for example. Furthermore, although the above-mentioned three-dimensional measuring machine was of a type in which the entire body was movably mounted on the upper surface of the mounting plate, the coarse and fine movement device according to the present invention was used for other three-dimensional measuring machines, such as the conventional one shown in Fig. 4. The present invention can also be applied to a three-dimensional measuring machine of the type in which guide rails are provided on both sides of a mounting plate and the probe support is moved along the guide rails, as disclosed in the prior art. Furthermore, the coarse and fine movement device according to the present invention can be applied to devices, machines, etc. other than coordinate measuring machines, and if necessary, can be applied to any device, machine, etc. that requires a moving member to make coarse and fine movements. Applicable.

［考案の効果］ 本考案によれば、構造が簡単で製造が容易な粗
微動装置が得られ、また移動側部材には移動に必
要な力のみが作用してねじりモーメント等の悪影
響を生じさせる力が作用せず、更に、移動側部材
を短いストローク移動させかつその移動速度を速
くでき、作業効率の向上を達成できる。[Effects of the invention] According to the invention, a coarse and fine movement device with a simple structure and easy manufacture can be obtained, and only the force necessary for movement acts on the moving member, causing adverse effects such as torsional moment. No force is applied, and furthermore, the moving member can be moved in a short stroke and its moving speed can be increased, and work efficiency can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は粗微動装置が適用された三次元測定機
の斜視図、第２図は粗微動装置の断面図、第３図
は従来の粗微動装置が適用された三次元測定機の
斜視図、第４図はその粗微動装置の斜視図、第５
図は第３図の一部拡大断面図である。 ２……固定側部材である梁部材、３……移動側
部材であるスライダ、１２……粗微動装置、１３
……駆動棒、１５……付勢手段であるばね、１９
……押し部材、２１……移動手段、２２……クラ
ンプ手段であるクランプ摘み。 Figure 1 is a perspective view of a coordinate measuring machine to which a coarse and fine movement device is applied, Figure 2 is a sectional view of the coarse and fine movement device, and Figure 3 is a perspective view of a coordinate measuring machine to which a conventional coarse and fine movement device is applied. , Figure 4 is a perspective view of the coarse and fine movement device, and Figure 5 is a perspective view of the coarse and fine movement device.
The figure is a partially enlarged sectional view of FIG. 3. 2... Beam member which is a fixed side member, 3... Slider which is a moving side member, 12... Coarse and fine movement device, 13
... Drive rod, 15 ... Spring serving as biasing means, 19
... Pushing member, 21 ... Moving means, 22 ... Clamp knob which is clamping means.

Claims (1)

【実用新案登録請求の範囲】 (1) 固定側部材と、この固定側部材の長手方向に
沿つて移動自在な移動側部材と、前記固定側部
材の長手方向に架設され、一端部が傾斜面とさ
れた駆動棒と、この駆動棒の他端部に係合する
とともにこの駆動棒を他端部側から一端部側に
付勢する付勢手段と、前記固定側部材に設けら
れ一端部が前記駆動棒の傾斜面と係合可能な傾
斜面に形成されこれらの傾斜面の係合により前
記付勢手段に抗して前記駆動棒を強制直線移動
させる押し部材を備えた移動手段と、前記移動
側部材と前記駆動棒とを解除可能に結合一体化
するクランプ手段とからなることを特徴とする
粗微動装置。 (2) 実用新案登録請求の範囲第１項において、前
記駆動棒は平行に２本あり、それぞれの駆動棒
に前記付勢手段と前記移動手段とが設けられて
いるとともに、これらの付勢手段による前記付
勢方向及び移動手段による前記強制直線移動方
向は互いに反対方向であることを特徴とする粗
微動装置。[Claims for Utility Model Registration] (1) A stationary side member, a movable side member that is movable along the longitudinal direction of the stationary side member, and a movable side member that is constructed in the longitudinal direction of the stationary side member and has an inclined surface at one end. a driving rod, a biasing means that engages with the other end of the drive rod and biases the drive rod from the other end toward the one end; a moving means comprising a pushing member formed on an inclined surface that can be engaged with an inclined surface of the driving rod and forcibly moving the driving rod in a straight line against the urging means by engagement of these inclined surfaces; A coarse/fine movement device comprising a clamp means for releasably coupling and integrating a movable member and the drive rod. (2) Scope of Utility Model Registration Claim Paragraph 1 provides that there are two driving rods in parallel, each driving rod is provided with the urging means and the moving means, and these urging means are provided with the urging means and the moving means. The coarse and fine movement device is characterized in that the urging direction by the moving means and the forced linear movement direction by the moving means are opposite to each other.