JPH04308482A - Exciting method of oscillator - Google Patents
Exciting method of oscillatorInfo
- Publication number
- JPH04308482A JPH04308482A JP3070882A JP7088291A JPH04308482A JP H04308482 A JPH04308482 A JP H04308482A JP 3070882 A JP3070882 A JP 3070882A JP 7088291 A JP7088291 A JP 7088291A JP H04308482 A JPH04308482 A JP H04308482A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- phase
- common electrode
- vibrator
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 17
- 230000010355 oscillation Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 230000003534 oscillatory effect Effects 0.000 abstract 4
- 238000010586 diagram Methods 0.000 description 12
- 230000010287 polarization Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明の振動体の励振方法は振動
を利用した超音波モータ等の振動子の駆動方法に関する
。FIELD OF INDUSTRIAL APPLICATION The present invention relates to a method for exciting a vibrating body, and relates to a method for driving a vibrator such as an ultrasonic motor using vibration.
【０００２】0002
【従来の技術】従来の振動体の励振方法は例えば特開昭
５８−１４８６８２、特開昭５９−１２２３８５等の如
く圧電素子等の振動子に交流電圧を印加していた。また
本出願人提出の特願平１−２７３０８２の如く一様に分
極した圧電素子の駆動部分を順次切り換え、定在波のノ
ード位置を移動させる方法もあった。さらに本出願人提
出の特願平２−１８１２１９の如く部分的に正負に分極
した振動子の駆動電圧の切り換えまたは組み合わせによ
り定在波のノード位置を移動させる方法もあった。2. Description of the Related Art A conventional method for exciting a vibrating body involves applying an alternating current voltage to a vibrator such as a piezoelectric element, as disclosed in, for example, Japanese Patent Application Laid-open No. 58-148682 and Japanese Patent Laid-open No. 59-122385. There is also a method, as disclosed in Japanese Patent Application No. 1-273082 filed by the present applicant, in which the driving portion of a uniformly polarized piezoelectric element is sequentially switched to move the node position of the standing wave. Furthermore, there is a method of moving the node position of a standing wave by switching or combining drive voltages of a vibrator which is partially polarized into positive and negative polarities, as disclosed in Japanese Patent Application No. 2-181219 filed by the present applicant.
【０００３】0003
【発明が解決しようとする課題】しかし従来の励振方法
は、交流電圧を印加する場合、例えば蓄電池の様な直流
電源を利用すると素子には最大でもその電圧しか印加す
る事ができなく、低電圧駆動化の妨げになっていた。ま
た圧電素子に正負の分極をした上で部分的に駆動し印加
する電圧の組み合わせる場合には、電圧を印加する部分
の面積や実際に印加される電圧が場合によって異なり、
消費電流や振動変位が異なったり、分極の反転が必要な
事から工程が複雑でコスト高となり、さらにはＨｉ、Ｌ
ｏ、ハイインピーダンスの電圧状態が必要な事から駆動
回路も複雑になるといった課題があった。一方、直流電
源で駆動する場合は圧電素子を半周期毎に逆方向にチャ
ージする必要がある為、その度に電流を余計に供給する
必要があり低消費電流化の妨げになっていた。[Problem to be solved by the invention] However, in the conventional excitation method, when applying an AC voltage, for example, if a DC power source such as a storage battery is used, only that voltage can be applied to the element at the maximum, and the voltage is low. This was a hindrance to driving. In addition, when combining voltages that are partially driven and applied after polarizing the piezoelectric element in positive and negative directions, the area of the part to which the voltage is applied and the voltage actually applied may vary depending on the case.
The process is complicated and costly due to the difference in current consumption and vibration displacement, and the need for polarization reversal.
o. Since a high impedance voltage state is required, there is a problem in that the drive circuit becomes complicated. On the other hand, when driving with a DC power supply, it is necessary to charge the piezoelectric element in the opposite direction every half cycle, so it is necessary to supply an extra current each time, which hinders lower current consumption.
【０００４】0004
【課題を解決する為の手段】本発明の振動体の励振方法
は、振動体に添付した振動子の一部または全部を電気的
に励振し定在波の振動を励起すると共にそのノードの位
置を逐次移動させる振動体の励振方法において、振動子
の共通電極と、振動子の１つまたは複数の駆動電極に印
加する電圧の位相が逆相である事を特徴とする。[Means for Solving the Problems] The method for exciting a vibrating body of the present invention electrically excites a part or all of a vibrator attached to the vibrating body to excite the vibration of a standing wave and to position the node of the vibrating body. The method for exciting a vibrator in which a vibrator is moved sequentially is characterized in that the phases of voltages applied to a common electrode of the vibrator and one or more drive electrodes of the vibrator are opposite in phase.
【０００５】また共通電極及び駆動電極を相互に導通さ
せる導通回路を有し振動子の内部で電荷の移動を行なう
事を特徴とする。[0005] The vibrator is also characterized in that it has a conduction circuit that connects the common electrode and the drive electrode to each other, thereby moving charges within the vibrator.
【０００６】[0006]
【実施例】図１は本発明の振動体の励振方法の一実施例
を示すブロック図であり、振動子３として圧電素子を用
い、撓み振動の定在波を励振し、そのノード位置を順次
移動させる超音波モータの例である。２は振動体である
ステータであり、摩擦接触をしているロータ（図示せず
）を振動変位により移動させている。３は独立した駆動
電極を有する複数の振動要素３０からなる圧電素子であ
り、ステータ２に添付した上で電圧を印加する事により
撓み振動を励起する。その際振動要素３０を部分的に駆
動し、駆動周波数を選択する事により定在波の振動モー
ドを励振する事ができる。さらに振動要素３０の組み合
わせを変える事により、振動のノード位置を移動させる
事ができる。１０１は振動のノード位置を移動させるタ
イミングを司る制御回路、１０３は圧電素子３を添付し
たステータ２の共振周波数近傍の周波数を発振させる発
振回路、１０２は複数の振動要素３０のいずれかを駆動
する為に発振回路１０３からの信号を振り分ける切換回
路、１０４は信号を増幅するドライバである。一方圧電
素子３０の駆動電極に対する共通電極には、反転ドライ
バ１０５を介して駆動電極とは逆位相の電圧を印加して
いる。[Embodiment] FIG. 1 is a block diagram showing an embodiment of the method for exciting a vibrating body according to the present invention, in which a piezoelectric element is used as the vibrator 3, a standing wave of bending vibration is excited, and its node positions are sequentially changed. This is an example of an ultrasonic motor for movement. 2 is a stator which is a vibrating body, and moves a rotor (not shown) with which it is in frictional contact by vibrating displacement. A piezoelectric element 3 is composed of a plurality of vibrating elements 30 having independent drive electrodes, and is attached to the stator 2 and excited by applying a voltage to bending vibration. At this time, the vibration mode of the standing wave can be excited by partially driving the vibration element 30 and selecting the driving frequency. Furthermore, by changing the combination of the vibration elements 30, the vibration node position can be moved. 101 is a control circuit that controls the timing of moving the vibration node position; 103 is an oscillation circuit that oscillates a frequency near the resonance frequency of the stator 2 to which the piezoelectric element 3 is attached; and 102 is a circuit that drives one of the plurality of vibration elements 30. 104 is a driver that amplifies the signal. On the other hand, a voltage having a phase opposite to that of the drive electrode is applied to a common electrode of the piezoelectric element 30 through an inversion driver 105.
【０００７】図２は図１を具体化した第１の実施例を示
す回路図であり図３はその各部におけるタイミングチャ
ートである。本実施例においては圧電素子３を添付した
ステータ２に、２λ（λは波長数）の振動モードを励振
し、２本のノード位置を３０°ずつ１周１２分周して移
動させる場合の例である。圧電素子３は独立して変形し
うる１２の振動要素を有し、それぞれ３１〜４２の駆動
電極を有している。この場合分極方向は一様で良く共通
電極は裏面全体に配置してある。３つの隣り合う振動要
素とその対角位置の振動要素を同位相で駆動する事によ
り２λの振動モードが励振でき、組み合わせを１つずら
す事により振動のノードの位置も１つ分移動する。その
タイミングの信号φｃから、切換回路１０２で１／６分
周回路１０８、シフトレジスタ１０７によりそれぞれ位
相がずれたａ，ｂ，ｃの信号を形成している。そして発
振回路からの信号φｒからイクスクルーシブオアを介し
、駆動信号ｄ，ｅ，ｆとインバータ１１１，１１２，１
１３を介した反転信号を形成する。さらにバッファ１２
１〜１２６からなるドライバ１０４を介し、振動要素の
駆動パターン３１〜４２に電圧を印加する。一方、イン
バータ１１４等から成る反転ドライバ１０５を介し、φ
ｒと逆位相の電圧相の電圧を圧電素子３の共通電極ｃに
印加している。信号ｄ，ｅ，ｆはそれぞれａ，ｂ，ｃの
タイミングで位相が反転し、φｒの位相と同相になった
り逆相になったりする。この時、逆相の時は、駆動電極
側と共通電極側に交互に電圧が印加される為、振動要素
には駆動電圧の倍の電圧が印加されたと同等の効果が得
られる。また、同相の場合は同電位であるので振動要素
には実質的な電位差が与えられず、駆動されない。図２
の構成においては図３のｔ１ の区間は振動要素３１，
３２，３３，３７，３８，３９が駆動され、ｔ２ の区
間は３２，３３，３４，３８，３９，４０が駆動され、
以降、順次駆動される振動要素の位置をずらしていく。
それにより、ノードの位置が振動要素１ヶ分ずつ移動し
、それに伴なって、ロータが間欠的に駆動される。尚駆
動電極側と共通電極側に同相の電圧が加えられる場合に
は、振動によって振動要素に蓄積された電荷を逃がす事
ができる為、その電荷による不必要な変形による悪影響
を防ぐ事ができる。FIG. 2 is a circuit diagram showing a first embodiment of FIG. 1, and FIG. 3 is a timing chart of each part thereof. In this embodiment, a vibration mode of 2λ (λ is the number of wavelengths) is excited in the stator 2 to which the piezoelectric element 3 is attached, and the two node positions are moved by dividing the frequency into 12 by 30°. It is. The piezoelectric element 3 has 12 independently deformable vibrating elements, each having 31 to 42 drive electrodes. In this case, the polarization direction may be uniform and the common electrode is arranged on the entire back surface. A 2λ vibration mode can be excited by driving three adjacent vibration elements and the vibration elements at diagonal positions in the same phase, and by shifting the combination by one, the position of the vibration node also moves by one. From the signal φc at that timing, a switching circuit 102 generates signals a, b, and c whose phases are shifted by a 1/6 frequency dividing circuit 108 and a shift register 107, respectively. Then, from the signal φr from the oscillation circuit, the drive signals d, e, f and the inverters 111, 112, 1
13 to form an inverted signal. Furthermore, buffer 12
A voltage is applied to the drive patterns 31 to 42 of the vibrating elements through a driver 104 consisting of drivers 1 to 126. On the other hand, φ
A voltage with a voltage phase opposite to r is applied to the common electrode c of the piezoelectric element 3. The phases of the signals d, e, and f are inverted at timings a, b, and c, respectively, and are in phase with or in phase with the phase of φr. At this time, when the phase is reversed, voltages are applied alternately to the drive electrode side and the common electrode side, so that an effect equivalent to applying a voltage twice the drive voltage to the vibrating element can be obtained. Furthermore, if they are in phase, they have the same potential, so no substantial potential difference is applied to the vibrating element and it is not driven. Figure 2
In the configuration shown in FIG. 3, the section t1 in FIG.
32, 33, 37, 38, 39 are driven, and in the period t2, 32, 33, 34, 38, 39, 40 are driven,
Thereafter, the positions of the vibrating elements that are driven are sequentially shifted. As a result, the position of the node moves one vibrating element at a time, and the rotor is driven intermittently accordingly. Note that when voltages of the same phase are applied to the drive electrode side and the common electrode side, the electric charge accumulated in the vibrating element due to vibration can be released, so that the adverse effects caused by unnecessary deformation due to the electric charge can be prevented.
【０００８】図４は図１を具体化した第２の実施例を示
す回路図であり、図５は各部におけるタイミングチャー
トである。圧電素子３は例えば３つの振動要素及び駆動
電極３１，３２，３３を有し、等分割して配置してある
ので相互の位置は１２０°ずれている。この様な構成に
おいてはそれぞれの振動要素を２λの共振周波数近傍の
周波数で順次励振するとノードの位置は１２０°ずる移
動する。この時２本のノードの相対角度は９０°である
ので、ノードの移動した角度は３０°と同等である。タ
イミング信号φｃは切換回路１０２で１／６分周回路１
０９、シフトレジスタ１０７により、それぞれ位相がず
れたａ，ｂ，ｃの信号を形成し、イクスクルーシブオア
１３１，１３２、イクスクルーシブノア１３３でｄ，ｅ
，ｆに変換して、スイッチ１１５，１１６，１１７で発
振回路からの信号φｒからバッファ１２１，１２２，１
２３から成る、ドライバ１０４を介しｇ，ｈ，ｉを形成
し駆動電極３１，３２，３３に印加する。一方インバー
タ１１４等から成る反転ドライバ１０５を介し、圧電素
子の共通電極ｃに、φｒと逆相の電圧を印加している。
したがって振動要素には交番電圧が印加される。FIG. 4 is a circuit diagram showing a second embodiment of FIG. 1, and FIG. 5 is a timing chart of each part. The piezoelectric element 3 has, for example, three vibrating elements and drive electrodes 31, 32, and 33, which are equally divided and arranged, so that their mutual positions are shifted by 120 degrees. In such a configuration, when each vibrating element is sequentially excited at a frequency near the resonance frequency of 2λ, the position of the node shifts by 120°. At this time, since the relative angle between the two nodes is 90°, the angle through which the nodes have moved is equivalent to 30°. The timing signal φc is passed through the switching circuit 102 to the 1/6 frequency dividing circuit 1.
09, the shift register 107 forms signals a, b, and c whose phases are shifted from each other, and the exclusive ORs 131 and 132 and the exclusive NOR 133 form signals d and e.
, f from the signal φr from the oscillation circuit using switches 115, 116, 117,
23, g, h, and i are formed through a driver 104 and applied to drive electrodes 31, 32, and 33. On the other hand, a voltage having a phase opposite to φr is applied to the common electrode c of the piezoelectric element via an inverting driver 105 consisting of an inverter 114 and the like. Therefore, an alternating voltage is applied to the vibrating element.
【０００９】図６は図４における振動要素及び駆動電極
の配置の他の実施例を示す説明図であり、それぞれの分
極方向を＋、−で示している。駆動電極３１，３４，３
７，４０を図５におけるｇで駆動し、駆動電極３２，３
５，３８，４１をｈ、駆動電極３３，３６，３９，４２
をｉで駆動する事により前述の例と同様に２λの振動モ
ードを３０°ずつずらす事ができる。この場合、常に振
動の腹に相等する部分のみを駆動する事ができる為、振
動振幅が大きくとれる。FIG. 6 is an explanatory diagram showing another example of the arrangement of the vibrating elements and drive electrodes in FIG. 4, and the respective polarization directions are indicated by + and -. Drive electrodes 31, 34, 3
7, 40 are driven by g in FIG.
5, 38, 41 as h, drive electrodes 33, 36, 39, 42
By driving with i, the 2λ vibration mode can be shifted by 30° as in the previous example. In this case, since it is possible to always drive only the portion corresponding to the antinode of vibration, a large vibration amplitude can be obtained.
【００１０】図７は本発明の振動体の励振方法の他の実
施例を示すブロック図である。振動体であるステータ２
に添付した複数の振動要素３０からなる振動子３の共振
点近傍の周波数を発振する発振回路１０３の信号φｒを
制御回路１０１のタイミングで切換回路１０２で切り換
えドライバ１０４で増幅し駆動信号ｇ，ｈ，ｉを送出し
ている。反転ドライバ１０５はφｒを反転増幅し、微分
回路１１０はφｒから微分波形ｊを形成している。導通
回路１１０は微分波形ｊのタイミングで、ｇ，ｈ，ｉを
遮断すると共に共通電極Ｃと駆動電極３０をショートさ
せている。FIG. 7 is a block diagram showing another embodiment of the method for exciting a vibrating body according to the present invention. Stator 2 which is a vibrating body
A signal φr from an oscillation circuit 103 that oscillates a frequency near the resonance point of a vibrator 3 made up of a plurality of vibrating elements 30 attached to the oscillator 3 is switched by a switching circuit 102 at the timing of a control circuit 101 and amplified by a switching driver 104 to generate drive signals g, h. , i. The inverting driver 105 inverts and amplifies φr, and the differentiating circuit 110 forms a differential waveform j from φr. The conduction circuit 110 cuts off g, h, and i at the timing of the differential waveform j, and short-circuits the common electrode C and the drive electrode 30.
【００１１】図８は図７における微分回路１１０、導通
回路１０６の一実施例を示す回路図、図９は各部の動作
を示すタイミングチャートである。微分回路１１０はφ
ｒの波形の立ち上り及び立ち下りで短い幅のパルスｊを
発生する。スイッチ１４５，１４６，１４７はｊのタイ
ミングでＯＮし、駆動電極３１、３２、３３と共通電極
Ｃを導通させ蓄積された電荷を解放する。同時にインバ
ータ１４４を介しスイッチ１４８，１４９，１５０をＯ
ＦＦし、ｇ，ｈ，ｉを遮断する。したがって、振動要素
に加わる電圧は最大で２倍のＶＤＤの電圧が印加される
。
そして、ショートしている期間は圧電素子内部で電荷の
やりとりが行なわれ、直流電源からは供給されない為、
省電流化ができる。波形ｋ，ｌ，ｍはｊによりショート
された状態を中間的な電位として概念的に示した。FIG. 8 is a circuit diagram showing an embodiment of the differentiating circuit 110 and the conduction circuit 106 in FIG. 7, and FIG. 9 is a timing chart showing the operation of each part. The differentiating circuit 110 is φ
A short width pulse j is generated at the rising and falling edges of the r waveform. The switches 145, 146, and 147 are turned on at timing j, making the drive electrodes 31, 32, and 33 conductive to the common electrode C, and releasing the accumulated charges. At the same time, switches 148, 149, 150 are turned on via inverter 144.
FF and cut off g, h, and i. Therefore, the voltage applied to the vibrating element is at most twice the voltage VDD. During the short-circuited period, charges are exchanged inside the piezoelectric element, and it is not supplied from the DC power supply.
Can save current. The waveforms k, l, and m conceptually represent a state shorted by j as an intermediate potential.
【００１２】尚、本発明においては、振動子の電荷を内
部で導通させる事である為、本実施例の様に、駆動電極
と共通電極をショートする例に限定せず、駆動電極相互
に導通させたり、また、同時にショートするのではなく
個別に導通させても何らかまわない。その際電極の形状
やショートさせる電極の組み合わせ等も何ら限定するも
のではない。[0012] In the present invention, since the electric charge of the vibrator is made conductive internally, it is not limited to the case where the drive electrode and the common electrode are short-circuited as in this embodiment. There is no problem even if they are made conductive individually instead of being short-circuited at the same time. At this time, the shape of the electrodes, the combination of electrodes to be shorted, etc. are not limited at all.
【００１３】さらに本発明の振動体の励振方法は駆動電
極と共通電極に逆相の電圧を印加する事を特徴とする為
、前述した様な振動モードや、電極パターンや、駆動回
路などに何ら限定するものではない。また圧電素子を用
いた超音波モータの例について詳述したが、振動体の励
振に係るものであれば本実施例に限定するものではない
。Furthermore, since the method for exciting a vibrating body of the present invention is characterized by applying voltages of opposite phases to the drive electrode and the common electrode, there is no problem with the vibration mode, electrode pattern, drive circuit, etc. as described above. It is not limited. Furthermore, although an example of an ultrasonic motor using a piezoelectric element has been described in detail, the invention is not limited to this embodiment as long as it is related to the excitation of a vibrating body.
【００１４】[0014]
【発明の効果】以上詳述した様に本発明によれば、駆動
電極と共通電極に逆位相の電圧を印加した事により、電
源電圧の倍の電圧を振動子に印加する事ができた為、よ
り低い電源電圧で駆動する事ができた。また、圧電素子
の分極の方向を一方向のみにした事により製造コストが
低減できた。一方振動モードの腹の位置の振動要素を励
振する事により大きな振動振幅が得られた。さらに、圧
電素子の電荷をショートさせた事により、電源から供給
する電流を半減させる事ができた。[Effects of the Invention] As detailed above, according to the present invention, by applying voltages with opposite phases to the drive electrode and the common electrode, a voltage twice the power supply voltage can be applied to the vibrator. , it was possible to drive with a lower power supply voltage. Furthermore, manufacturing costs can be reduced by polarizing the piezoelectric element in only one direction. On the other hand, a large vibration amplitude was obtained by exciting the vibration element at the antinode position of the vibration mode. Furthermore, by short-circuiting the charge in the piezoelectric element, it was possible to halve the current supplied from the power supply.
【図１】振動体の励振方法の一実施例を示すブロック図
。FIG. 1 is a block diagram showing an example of a method for exciting a vibrating body.
【図２】第１の実施例を示す回路図。FIG. 2 is a circuit diagram showing a first embodiment.
【図３】図２におけるタイミングチャート。FIG. 3 is a timing chart in FIG. 2;
【図４】第２の実施例を示す回路図。FIG. 4 is a circuit diagram showing a second embodiment.
【図５】図４におけるタイミングチャート。FIG. 5 is a timing chart in FIG. 4.
【図６】振動要素及び駆動電極の配置の他の実施例を示
す説明図。FIG. 6 is an explanatory diagram showing another example of the arrangement of vibration elements and drive electrodes.
【図７】振動体の励振方法の他の実施例を示すブロック
図。FIG. 7 is a block diagram showing another embodiment of a method for exciting a vibrating body.
【図８】微分回路、導通回路の一実施例を示す回路図。FIG. 8 is a circuit diagram showing an embodiment of a differentiation circuit and a conduction circuit.
【図９】図８におけるタイミングチャート。FIG. 9 is a timing chart in FIG. 8.
２ 振動体（ステータ） ３ 振動子（圧電素子） ３０ 振動要素（駆動電極） １０１ 制御回路 １０２ 切換回路 １０３ 発振回路 １０４ ドライバ １０５ 反転ドライバ １０６ 導通回路 １０７ シフトレジスタ １０８ １／６分周回路 １０９ １／６分周回路 １１０ 微分回路 Ｃ 共通電極 2 Vibrating body (stator) 3 Vibrator (piezoelectric element) 30 Vibration element (drive electrode) 101 Control circuit 102 Switching circuit 103 Oscillation circuit 104 Driver 105 Reversing driver 106 Continuity circuit 107 Shift register 108 1/6 frequency divider circuit 109 1/6 frequency divider circuit 110 Differential circuit C Common electrode
Claims (2)
を電気的に励振し定在波の振動を励起すると共にそのノ
ードの位置を逐次移動させる振動体の励振方法において
、前記振動子の共通電極と、前記振動子の１つまたは複
数の駆動電極に印加する電圧の位相が逆相である事を特
徴とする振動体の励振方法。1. A method for exciting a vibrating body, in which a part or all of a vibrator attached to the vibrator is electrically excited to excite standing wave vibration, and the positions of nodes of the vibrator are sequentially moved. A method for exciting a vibrating body, characterized in that the phases of the voltages applied to the common electrode of the vibrator and the one or more drive electrodes of the vibrator are opposite in phase.
互に導通させる導通回路を有し、前記振動子の内部の電
荷の移動を行なう事を特徴とする振動体の励振方法。2. A method for exciting a vibrating body, comprising a conduction circuit that connects the common electrode and the drive electrode according to claim 1 to each other, and moves charges inside the vibrator.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3070882A JP3000702B2 (en) | 1991-04-03 | 1991-04-03 | Exciting method of vibrating body |
| DE69228888T DE69228888T2 (en) | 1991-01-17 | 1992-01-16 | Ultrasonic stepper motor |
| EP92300396A EP0495665B1 (en) | 1991-01-17 | 1992-01-16 | Ultrasonic stepping motor |
| KR1019920000613A KR920015691A (en) | 1991-01-17 | 1992-01-17 | Ultrasonic Stepping Motor and Oscillator Driving Method |
| US07/822,485 US5343108A (en) | 1991-01-17 | 1992-01-17 | Ultrasonic step motor |
| US08/012,486 US5610468A (en) | 1990-10-22 | 1993-02-01 | Ultrasonic step motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3070882A JP3000702B2 (en) | 1991-04-03 | 1991-04-03 | Exciting method of vibrating body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04308482A true JPH04308482A (en) | 1992-10-30 |
| JP3000702B2 JP3000702B2 (en) | 2000-01-17 |
Family
ID=13444356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3070882A Expired - Fee Related JP3000702B2 (en) | 1990-10-22 | 1991-04-03 | Exciting method of vibrating body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3000702B2 (en) |
-
1991
- 1991-04-03 JP JP3070882A patent/JP3000702B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP3000702B2 (en) | 2000-01-17 |
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